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    Electron holography microscope
    3.
    发明授权
    Electron holography microscope 失效
    电子全息显微镜

    公开(公告)号：US06617580B2

    公开(公告)日：2003-09-09

    申请号：US10036189

    申请日：2001-12-27

    申请人： Edgar Voelkl

    发明人： Edgar Voelkl

    IPC分类号： G21K700

    CPC分类号： H01J37/26 ,  H01J2237/1514 ,  H01J2237/2614

    摘要： Systems and methods are described for an electron holography microscopy. Changing a size of an electron object image includes maintaining rotation of the electron object image with respect to a final image plane and/or maintaining an aspect ratio defined by an astigmatic object illumination with respect to the final image plane constant by adjusting a condenser electron lens set

    摘要翻译： 描述了用于电子全息显微镜的系统和方法。 改变电子对象图像的尺寸包括通过调节聚光电子透镜来维持电子对象图像相对于最终图像平面的旋转和/或保持通过像散对象照明定义的纵横比相对于最终图像平面常数 组

    Off-axis illumination direct-to-digital holography
    4.
    发明授权
    Off-axis illumination direct-to-digital holography 有权

    公开(公告)号：US06747771B2

    公开(公告)日：2004-06-08

    申请号：US10234044

    申请日：2002-09-03

    申请人： Clarence E. Thomas ,  Jeffery R. Price ,  Edgar Voelkl ,  Gregory R. Hanson

    发明人： Clarence E. Thomas ,  Jeffery R. Price ,  Edgar Voelkl ,  Gregory R. Hanson

    IPC分类号： G03H122

    CPC分类号： G03H1/0866 ,  G01B9/021 ,  G03H2001/0456

    摘要： Systems and methods are described for off-axis illumination direct-to-digital holography. A method of recording an off-axis illuminated spatially heterodyne hologram including spatially heterodyne fringes for Fourier analysis, includes: reflecting a reference beam from a reference mirror at a non-normal angle; reflecting an object beam from an object at an angle with respect to an optical axis defined by a focusing lens; focusing the reference beam and the object beam at a focal plane of a digital recorder to form the off-axis illuminated spatially heterodyne hologram including spatially heterodyne fringes for Fourier analysis; digitally recording the off-axis illuminated spatially heterodyne hologram including spatially heterodyne fringes for Fourier analysis; Fourier analyzing the recorded off-axis illuminated spatially heterodyne hologram including spatially heterodyne fringes by transforming axes of the recorded off-axis illuminated spatially heterodyne hologram including spatially heterodyne fringes in Fourier space to sit on top of a heterodyne carrier frequency defined as an angle between the reference beam and the object beam; applying a digital filter to cut off signals around an original origin; and then performing an inverse Fourier transform.

    Direct-to-digital holography reduction of reference hologram noise and fourier space smearing
    5.
    发明授权
    Direct-to-digital holography reduction of reference hologram noise and fourier space smearing 失效
    参考全息图噪声的直接数字全息减少和四维空间拖尾

    公开(公告)号：US07068375B2

    公开(公告)日：2006-06-27

    申请号：US10349579

    申请日：2003-01-23

    申请人： Edgar Voelkl

    发明人： Edgar Voelkl

    IPC分类号： G01B9/02

    CPC分类号： G03H1/0866 ,  G01B9/021 ,  G03H2001/0456

    摘要： Systems and methods are described for reduction of reference hologram noise and reduction of Fourier space smearing, especially in the context of direct-to-digital holography (off-axis interferometry). A method of reducing reference hologram noise includes: recording a plurality of reference holograms; processing the plurality of reference holograms into a corresponding plurality of reference image waves; and transforming the corresponding plurality of reference image waves into a reduced noise reference image wave. A method of reducing smearing in Fourier space includes: recording a plurality of reference holograms; processing the plurality of reference holograms into a corresponding plurality of reference complex image waves; transforming the corresponding plurality of reference image waves into a reduced noise reference complex image wave; recording a hologram of an object; processing the hologram of the object into an object complex image wave; and dividing the complex image wave of the object by the reduced noise reference complex image wave to obtain a reduced smearing object complex image wave.

    摘要翻译： 描述了用于减少参考全息图噪声和降低傅里叶空间拖尾的系统和方法，特别是在直接数字全息术（离轴干涉测量）的上下文中。 减少参考全息图噪声的方法包括：记录多个参考全息图; 将所述多个参考全息图处理成相应的多个参考图像波; 以及将相应的多个参考图像波变换为降噪噪声参考图像波。 减少傅立叶空间中的拖尾的方法包括：记录多个参考全息图; 将所述多个参考全息图处理成相应的多个参考复合图像波; 将对应的多个参考图像波变换为降噪噪声参考复数图像波; 记录物体的全息图; 将物体的全息图处理成物体复杂图像波; 并且通过减小的噪声参考复数图像波分割对象的复杂图像波，以获得减少的拖尾对象复数图像波。

    Virtual mask digital electron beam lithography
    6.
    发明授权
    Virtual mask digital electron beam lithography 失效
    虚拟掩模数字电子束光刻

    公开(公告)号：US5892231A

    公开(公告)日：1999-04-06

    申请号：US795003

    申请日：1997-02-05

    申请人： Larry R. Baylor ,  Clarence E. Thomas ,  Edgar Voelkl ,  James A. Moore ,  Michael L. Simpson ,  Michael J. Paulus

    发明人： Larry R. Baylor ,  Clarence E. Thomas ,  Edgar Voelkl ,  James A. Moore ,  Michael L. Simpson ,  Michael J. Paulus

    IPC分类号： G03F7/20 ,  H01J37/305 ,  H01J37/317 ,  H01L21/027 ,  H01J37/30

    CPC分类号： B82Y10/00 ,  B82Y40/00 ,  H01J37/3175 ,  H01J2237/31786

    摘要： Systems and methods for direct-to-digital holography are described. An apparatus includes a laser; a beamsplitter optically coupled to the laser; a reference beam mirror optically coupled to the beamsplitter; an object optically coupled to the beamsplitter, a focusing lens optically coupled to both the reference beam mirror and the object; and a digital recorder optically coupled to the focusing lens. A reference beam is incident upon the reference beam mirror at a non-normal angle, and the reference beam and an object beam are focused by the focusing lens at a focal plane of the digital recorder to form an image. The systems and methods provide advantages in that computer assisted holographic measurements can be made.

    摘要翻译： 描述了用于直接数字全息术的系统和方法。 一种装置包括一激光器; 与激光光学耦合的分束器; 光束耦合到分束器的参考光束镜; 光学耦合到分束器的物体，光学耦合到参考光束镜和物体的聚焦透镜; 以及光学耦合到聚焦透镜的数字记录器。 参考光束以非正常角度入射到参考光束镜上，并且参考光束和物体光束被聚焦透镜聚焦在数字记录器的焦平面处以形成图像。 该系统和方法提供了可以进行计算机辅助全息测量的优点。