Composition and method for polishing nickel-phosphorous-coated aluminum hard disks
    4.
    发明授权
    Composition and method for polishing nickel-phosphorous-coated aluminum hard disks 有权
    用于抛光镍 - 磷涂层铝硬盘的组合物和方法

    公开(公告)号:US07922926B2

    公开(公告)日:2011-04-12

    申请号:US11970978

    申请日:2008-01-08

    CPC classification number: C23F3/06 C09G1/02 C09K3/1463 C09K13/00

    Abstract: The invention provides a chemical-mechanical polishing composition consisting essentially of flumed alumina, alpha alumina, silica, a nonionic surfactant, an additive compound selected from the group consisting of glycine, alanine, iminodiacetic acid, and maleic acid, hydrogen peroxide, and water. The invention further provides a method of chemically-mechanically polishing a substrate comprising contacting a substrate with a polishing pad and the chemical-mechanical polishing composition, moving the polishing pad and the polishing composition relative to the substrate, and abrading at least a portion of the substrate to polish the substrate.

    Abstract translation: 本发明提供了一种化学机械抛光组合物,其基本上由熔融氧化铝,α氧化铝,二氧化硅,非离子表面活性剂,选自甘氨酸,丙氨酸,亚氨基二乙酸和马来酸,过氧化氢和水组成的组的组合物组成。 本发明还提供了一种化学机械抛光衬底的方法,包括使衬底与抛光垫和化学机械抛光组合物接触,使抛光垫和抛光组合物相对于衬底移动,并研磨至少一部分 底物抛光底物。

    Air pressure control system
    6.
    发明授权
    Air pressure control system 有权
    气压控制系统

    公开(公告)号:US09481215B2

    公开(公告)日:2016-11-01

    申请号:US15054799

    申请日:2016-02-26

    Applicant: Brian Reiss

    Inventor: Brian Reiss

    CPC classification number: B60C23/004 B60C23/002 B60C23/0408

    Abstract: A system for controlling bicycle tire air pressure on the go is provided. The system has a wheel mounted portion and a control unit in communication with one another. The wheel mounted portion attached to each wheel has a gas source, manifold, regulator to control air flow into and out of the tire, and a communication device. The control unit monitors air pressure in each tire, and has a user interface allowing input of a higher or lower tire pressure. Based on user input, the control unit instructs operation of the wheel mounted portion, controlling pressure within the tire.

    Abstract translation: 提供了一种用于在旅途中控制自行车轮胎气压的系统。 该系统具有彼此通信的车轮安装部分和控制单元。 连接到每个车轮的车轮安装部分具有气体源,歧管,调节器以控制进入和离开轮胎的气流,以及通信装置。 控制单元监视每个轮胎中的空气压力,并且具有允许输入更高或更低轮胎压力的用户界面。 基于用户输入,控制单元指示车轮安装部的操作,控制轮胎内的压力。

    Silicon polishing compositions with improved PSD performance
    7.
    发明授权
    Silicon polishing compositions with improved PSD performance 有权
    具有改善的PSD性能的硅抛光组合物

    公开(公告)号:US09425037B2

    公开(公告)日:2016-08-23

    申请号:US13351339

    申请日:2012-01-17

    CPC classification number: H01L21/02024 C09G1/02

    Abstract: The invention relates to a chemical-mechanical polishing composition comprising silica, one or more tetraalkylammonium salts, one or more bicarbonate salts, one or more alkali metal hydroxides, one or more aminophosphonic acids, one or more rate accelerator compounds, one or more polysaccharides, and water. The polishing composition reduces surface roughness and PSD of polished substrates. The invention further relates to a method of chemically-mechanically polishing a substrate, especially a silicon substrate, using the polishing composition described herein.

    Abstract translation: 本发明涉及一种化学机械抛光组合物,其包括二氧化硅,一种或多种四烷基铵盐,一种或多种碳酸氢盐,一种或多种碱金属氢氧化物,一种或多种氨基膦酸,一种或多种速率促进剂化合物,一种或多种多糖, 和水。 抛光组合物降低抛光基材的表面粗糙度和PSD。 本发明还涉及使用本文所述的抛光组合物对衬底,特别是硅衬底进行化学机械抛光的方法。

    Silicon polishing compositions with high rate and low defectivity
    9.
    发明授权
    Silicon polishing compositions with high rate and low defectivity 有权
    具有高速率和低缺陷性的硅抛光组合物

    公开(公告)号:US08273142B2

    公开(公告)日:2012-09-25

    申请号:US12807324

    申请日:2010-09-02

    CPC classification number: H01L21/02024 C09G1/02

    Abstract: The invention relates to a chemical-mechanical polishing composition comprising silica, one or more organic carboxylic acids or salts thereof, one or more polysaccharides, one or more bases, optionally one or more surfactants and/or polymers, optionally one or more reducing agents, optionally one or more biocides, and water, wherein the polishing composition has an alkaline pH. The polishing composition exhibits a high removal rate and low particle defects and low haze. The invention further relates to a method of chemically-mechanically polishing a substrate using the polishing composition described herein.

    Abstract translation: 本发明涉及包含二氧化硅,一种或多种有机羧酸或其盐,一种或多种多糖,一种或多种碱,任选的一种或多种表面活性剂和/或聚合物,任选的一种或多种还原剂的化学机械抛光组合物, 任选地一种或多种杀生物剂和水,其中抛光组合物具有碱性pH。 抛光组合物表现出高的去除率和低的颗粒缺陷和低雾度。 本发明还涉及使用本文所述的抛光组合物对衬底进行化学机械抛光的方法。

    SILICON POLISHING COMPOSITIONS WITH IMPROVED PSD PERFORMANCE
    10.
    发明申请
    SILICON POLISHING COMPOSITIONS WITH IMPROVED PSD PERFORMANCE 有权
    具有改进PSD性能的硅酮抛光组合物

    公开(公告)号:US20120190199A1

    公开(公告)日:2012-07-26

    申请号:US13351339

    申请日:2012-01-17

    CPC classification number: H01L21/02024 C09G1/02

    Abstract: The invention relates to a chemical-mechanical polishing composition comprising silica, one or more tetraalkylammonium salts, one or more bicarbonate salts, one or more alkali metal hydroxides, one or more aminophosphonic acids, one or more rate accelerator compounds, one or more polysaccharides, and water. The polishing composition reduces surface roughness and PSD of polished substrates. The invention further relates to a method of chemically-mechanically polishing a substrate, especially a silicon substrate, using the polishing composition described herein.

    Abstract translation: 本发明涉及一种化学机械抛光组合物,其包括二氧化硅,一种或多种四烷基铵盐,一种或多种碳酸氢盐,一种或多种碱金属氢氧化物,一种或多种氨基膦酸,一种或多种速率促进剂化合物,一种或多种多糖, 和水。 抛光组合物降低抛光基材的表面粗糙度和PSD。 本发明还涉及使用本文所述的抛光组合物对衬底,特别是硅衬底进行化学机械抛光的方法。

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