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公开(公告)号：US06649064B2
公开(公告)日：2003-11-18
申请号：US10058441
申请日：2002-01-28
IPC分类号： B01D6114
CPC分类号： B01D67/0093 , B01D61/00 , B01D61/145 , B01D61/147 , B01D2323/30 , C01B7/197 , C02F2101/20 , C02F2103/40
摘要： The invention pertains to a method for removing metallic ions and/or particulate material from an aqueous acid solution using particle removing membranes (e.g., ultra high molecular weight polyethylene) having immobilized ligand groups (e.g., macrocycle or other similar chelating ligands) that possess high equilibrium binding constants for ion and particulate removal. The method is particularly useful for simultaneously filtering/purifying aqueous hydrofluoric or hydrochloric acid.
摘要翻译： 本发明涉及一种使用具有固定化配体基团（例如，大环或其它类似的螯合配体）的除尘膜（例如，超高分子量聚乙烯）从酸性水溶液中除去金属离子和/或颗粒材料的方法， 离子和颗粒去除的平衡结合常数。 该方法特别适用于同时过滤/纯化氢氟酸或盐酸水溶液。
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公开(公告)号：US07789940B2
公开(公告)日：2010-09-07
申请号：US10565486
申请日：2004-07-21
摘要： A lithographic projection apparatus (1) includes a support configured to support a patterning device (MA), the patterning device configured to pattern the projection beam according to a desired pattern. The apparatus has a substrate (W) table configure to hold a substrate, a projection system configured to project the patterned beam onto a target portion of the substrate. The apparatus also has a purge gas supply system (100) configured to provide a purge gas near a surface of a component of the lithographic projection apparatus. The purge gas supply system (100) includes a purge gas mixture generator (120) configured to generate a purge gas mixture which includes at least one purging gas and moisture. The purge gas mixture generator has a moisturizer (150) configured to add the moisture to the purge gas and a purge gas mixture outlet (130) connected to the purge gas mixture generator (120) configured to supply the purge gas mixture near the surface.
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公开(公告)号：US20090316119A1
公开(公告)日：2009-12-24
申请号：US12309202
申请日：2007-07-18
申请人： Bipin S. Parekh , Annie Xia , Michael Clarke , Joseph E. Smith
发明人： Bipin S. Parekh , Annie Xia , Michael Clarke , Joseph E. Smith
CPC分类号： G03F7/70341 , C02F1/32 , C02F1/42 , C02F1/444 , C02F9/00 , C02F2001/427 , C02F2101/30 , C02F2103/04 , C02F2103/346 , F28D2021/0077
摘要： The present invention includes apparatus and methods for producing a conditioned immersion fluid for use in an immersion lithography process. The conditioned immersion fluid protects the immersion system lens and reduces or eliminates deposition of contaminants onto the lens that can adversely affect the lens transmission and durability of an immersion lithography system.
摘要翻译： 本发明包括用于生产用于浸没式光刻工艺的调理浸渍液的设备和方法。 调理浸渍液保护浸没系统透镜，并减少或消除污染物沉积到透镜上，这可能不利地影响透镜透射和浸没式光刻系统的耐用性。
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公开(公告)号：US20080156191A1
公开(公告)日：2008-07-03
申请号：US12050247
申请日：2008-03-18
CPC分类号： C01B13/10 , B01D19/0031 , B01D53/22 , B01D61/00 , B01D63/02 , B01D63/021 , B01D63/023 , B01D67/0018 , B01D67/003 , B01D69/08 , B01D71/32 , B01D71/36 , B01D71/76 , B01D2313/14 , B01D2323/08 , B01D2325/022 , B01D2325/20 , B01F3/04269 , B01F3/0446 , B01F5/0453 , B01F5/0456 , B01F5/0465 , B01F2003/0439 , B01F2003/04404 , B01F2003/04886 , C01B13/0255 , C10J1/08
摘要： Disclosed is a shell side contactor which is highly efficient for forming relatively high concentration of ozonated water comprising a shell containing perfluoroalkoxy resin thermoplastic hollow fibers used as a porous barrier. The perfluoroalkoxy resin comprises a copolymer of tetrafluoroethylene and perfluoroalkyl vinyl ether or a tetrafluoroethyl-co-hexafluoropropylene (FEP) copolymer. The perfluoroalkoxy resin hollow fibers can be unskinned, skinned on their inner surface or skinned on their outer surfaces. The device is provided with spacer means for separating unpotted hollow fibers adjacent an inlet to the shell, thereby permitting liquid flow through the shell at desirably high flow rates with acceptable pressure drop through the shell.
摘要翻译： 公开了一种外壳侧接触器，其对于形成相对高浓度的臭氧水是高效的，其包含含有用作多孔屏障的全氟烷氧基树脂热塑性中空纤维的壳。 全氟烷氧基树脂包括四氟乙烯和全氟烷基乙烯基醚或四氟乙基 - 共 - 六氟丙烯（FEP）共聚物的共聚物。 全氟烷氧基树脂中空纤维可以是不光滑的，在其内表面上剥皮或在其外表面上剥皮。 该装置设置有间隔装置，用于将未连接的中空纤维与入口连接到壳体，从而允许液体以理想的高流速以可接受的压降通过壳体流过壳体。
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公开(公告)号：US06221476B1
公开(公告)日：2001-04-24
申请号：US09330543
申请日：1999-06-11
IPC分类号： B32B326
CPC分类号： B01D67/0093 , B01D2323/30 , B01J45/00 , Y10T428/249954 , Y10T428/31544 , Y10T428/31551 , Y10T428/31855 , Y10T428/31938 , Y10T428/8305
摘要： Compositions and methods for selectively binding metal ions from a source solution comprise using a polyhydroxypyridinone-containing ligand covalently bonded to a membrane support having the formula M—A—L(HOPO)n. M is a membrane having a hydrophilic surface, A is a covalent linkage mechanism, L is a ligand carrier, HOPO is a hydroxypyridinone appropriately spaced on the ligand carrier to provide a minimum of six functional coordination metal binding sites, and n is an integer of 3 to 6. The separation is accomplished by passing a source solution containing the ions to be separated through a cartridge containing the membrane-ligand composition, causing the selected ions to be complexed to the HOPO ligands and subsequently removing the selected ions from the cartridge by passing an aqueous receiving solution through the cartridge and quantitatively stripping the selected ions from the HOPO ligand.
摘要翻译： 用于选择性地结合源溶液的金属离子的组合物和方法包括使用共价键合到具有式M-A-L（HOPO）n的膜载体的含聚羟基吡啶酮的配体。 M是具有亲水性表面的膜，A是共价连接机理，L是配体载体，HOPO是在配体载体上适当间隔的羟基吡啶酮，以提供至少六个功能性配位金属结合位点，并且n是 通过将含有待分离的离子的源溶液通过含有膜 - 配体组合物的筒，使所选择的离子与HOPO配体络合并随后通过以下步骤从盒中除去选定的离子，从而实现分离： 使含水接收溶液通过滤筒并定量地从HOPO配体中剥离选定的离子。
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6.发明授权Lithographic projection apparatus, purge gas supply system and gas purging method 失效平版印刷设备，吹扫气体供应系统和气体清洗方法公开(公告)号：US07879137B2
公开(公告)日：2011-02-01
申请号：US10565486
申请日：2004-07-21
CPC分类号： G02B27/0006 , G03F7/70933
摘要： A lithographic projection apparatus (1) includes a support configured to support a patterning device (MA), the patterning device configured to pattern the projection beam according to a desired pattern. The apparatus has a substrate (W) table configure to hold a substrate, a projection system configured to project the patterned beam onto a target portion of the substrate. The apparatus also has a purge gas supply system (100) configured to provide a purge gas near a surface of a component of the lithographic projection apparatus. The purge gas supply system (100) includes a purge gas mixture generator (120) configured to generate a purge gas mixture which includes at least one purging gas and moisture. The purge gas mixture generator has a moisturizer (150) configured to add the moisture to the purge gas and a purge gas mixture outlet (130) connected to the purge gas mixture generator (120) configured to supply the purge gas mixture near the surface.
摘要翻译： 光刻投影设备（1）包括被配置为支撑图案形成装置（MA）的支撑件，所述图案形成装置被配置成根据期望的图案对投影光束进行图案化。 该装置具有构造成保持基板的基板（W）台，配置成将图案化的光束投影到基板的目标部分上的投影系统。 该设备还具有净化气体供应系统（100），其构造成在光刻投影设备的部件的表面附近提供净化气体。 净化气体供应系统（100）包括净化气体混合物发生器（120），其被配置为产生包括至少一个净化气体和湿气的净化气体混合物。 净化气体混合物发生器具有配置成将湿气添加到净化气体中的保湿剂（150）和连接到净化气体混合物发生器（120）的净化气体混合物出口（130），其构造成在表面附近提供净化气体混合物。
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公开(公告)号：US07717405B2
公开(公告)日：2010-05-18
申请号：US12050247
申请日：2008-03-18
IPC分类号： B01F3/04
CPC分类号： C01B13/10 , B01D19/0031 , B01D53/22 , B01D61/00 , B01D63/02 , B01D63/021 , B01D63/023 , B01D67/0018 , B01D67/003 , B01D69/08 , B01D71/32 , B01D71/36 , B01D71/76 , B01D2313/14 , B01D2323/08 , B01D2325/022 , B01D2325/20 , B01F3/04269 , B01F3/0446 , B01F5/0453 , B01F5/0456 , B01F5/0465 , B01F2003/0439 , B01F2003/04404 , B01F2003/04886 , C01B13/0255 , C10J1/08
摘要： Disclosed is a shell side contactor which can be used to form ozonated water. The contactor includes a shell and a plurality of porous perfluoroalkoxy resin thermoplastic hollow fibers that are potted at each end of the shell. The perfluoroalkoxy resin hollow fibers can be unskinned, skinned on their inner surface, or skinned on their outer surfaces. The contactor is provided with a spacer that spreads the hollow fibers adjacent an inlet to the shell, thereby permitting liquid flow at desirably high flow rates with acceptable pressure drop through the shell. The mass transfer efficiency of the contactor can be enhanced by jetting water into the fiber bundle and introducing gaps into the bundle.
摘要翻译： 公开了可用于形成臭氧水的壳侧接触器。 接触器包括壳体和多个全氟烷氧基树脂热塑性中空纤维，其在壳的每个端部处被封装。 全氟烷氧基树脂中空纤维可以是不光滑的，在其内表面上剥皮，或在其外表面上剥皮。 接触器设置有间隔件，其将中空纤维与入口连接到壳体，从而允许液体以期望的高流速以可接受的压降通过壳体流动。 可以通过将水喷入纤维束并将间隙引入束中来提高接触器的传质效率。
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公开(公告)号：US06447684B2
公开(公告)日：2002-09-10
申请号：US09855311
申请日：2001-05-14
IPC分类号： B01D6114
CPC分类号： B01D67/0093 , B01D61/00 , B01D61/14 , B01D2323/30 , B01J45/00 , C02F1/44 , C02F1/683 , C02F2101/20 , Y10S210/90
摘要： The invention pertains to a method for simultaneously removing metallic ions and particulate material from a pH neutral solution using particle-removing membranes (e.g., ultra high molecular weight polyethylene) having immobilized ligands that possess the capacity and high equilibrium binding constants for ion removal. The method is particularly useful for simultaneously filtering/purifying deionized water.
摘要翻译： 本发明涉及一种使用具有固定化配体的除去微粒的膜（例如超高分子量聚乙烯）从pH中性溶液中除去金属离子和颗粒材料的方法，所述固定化配体具有用于离子去除的能力和高平衡结合常数。 该方法对于同时过滤/净化去离子水特别有用。
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