公开(公告)号：US06391672B2

公开(公告)日：2002-05-21

申请号：US09765031

申请日：2001-01-18

Applicant: Masahiko Namerikawa ,  Kazuyoshi Shibata ,  Yukihisa Takeuchi

Inventor： Masahiko Namerikawa ,  Kazuyoshi Shibata ,  Yukihisa Takeuchi

IPC: H01L2100

CPC classification number: G01C19/5677

Abstract: Disclosed is a vibration gyro sensor comprising an annular frame having an approximately square planar contour with a central opening having an approximately circular planar configuration, an annular section arranged in the opening of the annular frame and having an approximately circular planar contour for constructing a vibrator, and a plurality of resilient sections which span the inner circumference of the annular frame and the outer circumference of the annular section, wherein the annular frame, the annular section, and the plurality of resilient sections are constructed by an integrated fired product made of ceramics. The vibration gyro sensor further comprises piezoelectric/electrostrictive elements (driving piezoelectric/electrostrictive elements and detecting piezoelectric/electrostrictive elements) formed on upper surfaces of the respective resilient sections. Each of the resilient sections has a thickness in its direction of height designed to be smaller than a thickness of the annular section, which is thus thin-walled so that the rigidity in the direction of vibration of the piezoelectric/electrostrictive elements is lowered to give a large amplitude of vibration caused on the annular section (vibrator).

Abstract translation: 公开了一种振动陀螺传感器，其包括具有大致正方形平面轮廓的环形框架，中心开口具有近似圆形的平面构造，环形部分布置在环形框架的开口中并且具有用于构造振动器的近似圆形的平面轮廓， 以及跨越环形框架的内圆周和环形部分的外圆周的多个弹性部分，其中环形框架，环形部分和多个弹性部分由陶瓷制成的一体式烧制产品构成。 振动陀螺传感器还包括形成在各个弹性部分的上表面上的压电/电致伸缩元件（驱动压电/电致伸缩元件和检测压电/电致伸缩元件）。 每个弹性部分的高度方向的厚度被设计为小于环形部分的厚度，因此薄壁，使得压电/电致伸缩元件的振动方向的刚度降低， 在环形部分（振动器）上产生大的振动振幅。

公开(公告)号：US06247371B1

公开(公告)日：2001-06-19

申请号：US09054008

申请日：1998-04-02

Applicant: Masahiko Namerikawa ,  Yukihisa Takeuchi ,  Kazuyoshi Shibata

Inventor： Masahiko Namerikawa ,  Yukihisa Takeuchi ,  Kazuyoshi Shibata

IPC: G01L500

CPC classification number: G01P15/0802 ,  G01P15/0922 ,  G01P15/18 ,  G01P2015/084

Abstract: The invention provides a small-sized and high-sensitivity three-axis sensor capable of three-dimensionally detecting a physical quantity using a single sensor unit. The three-axis sensor comprises an operating member; a supporting base having a hollow and disposed around the operating member located at the center of the hollow; and a flexible plate having a piece of piezoelectric material in contact with at least one pair of electrodes and extending across the hollow at an end of the supporting base, the operating member being suspended at the center of the hollow by the flexible plate; wherein the flexible plate is deformed in response to the behavior of the operating member corresponding to a physical quantity applied from the outside, and the piece of piezoelectric material generates a charge corresponding to the deformation of the flexible plate thereby three-dimensionally detecting the magnitude and the direction of the physical quantity. In the three-axis sensor, the flexible plate has a portion relatively weak in mechanical strength compared to the other portion, and a piezoelectric sensor element is disposed on the relatively weak portion so that the deformation of the flexible plate is concentrated in the portion where the piezoelectric sensor element is disposed.

Abstract translation: 本发明提供一种能够使用单个传感器单元三维地检测物理量的小型和高灵敏度的三轴传感器。 三轴传感器包括操作构件; 具有中空部的支撑基部，设置在位于中空部的中心的操作部件周围; 以及柔性板，其具有与至少一对电极接触并且在所述支撑基座的端部处延伸穿过所述中空部分的压电材料片，所述操作构件通过所述柔性板悬挂在所述中空部分的中心; 其中所述柔性板响应于与外部施加的物理量相对应的操作构件的行为而变形，并且所述压电材料片产生对应于所述柔性板的变形的电荷，从而三维地检测所述大小和 物理量的方向。 在三轴传感器中，柔性板具有与其他部分相比较弱的机械强度的部分，并且压电传感器元件设置在相对较弱的部分上，使得柔性板的变形集中在 设置压电传感器元件。

公开(公告)号：US06240781B1

公开(公告)日：2001-06-05

申请号：US09471993

申请日：1999-12-23

Applicant: Masahiko Namerikawa ,  Kazuyoshi Shibata ,  Yukihisa Takeuchi

Inventor： Masahiko Namerikawa ,  Kazuyoshi Shibata ,  Yukihisa Takeuchi

IPC: G01P904

CPC classification number: G01C19/5677

Abstract: Disclosed is a vibration gyro sensor comprising an annular frame having an approximately square planar contour with a central opening having an approximately circular planar configuration, an annular section arranged in the opening of the annular frame and having an approximately circular planar contour for constructing a vibrator, and a plurality of resilient sections which span the inner circumference of the annular frame and the outer circumference of the annular section, wherein the annular frame, the annular section, and the plurality of resilient sections are constructed by an integrated fired product made of ceramics. The vibration gyro sensor further comprises piezoelectric/electrostrictive elements (driving piezoelectric/electrostrictive elements and detecting piezoelectric/electrostrictive elements) formed on upper surfaces of the respective resilient sections. Each of the resilient sections has a thickness in its direction of height designed to be smaller than a thickness of the annular section, which is thus thin-walled so that the rigidity in the direction of vibration of the piezoelectric/electrostrictive elements is lowered to give a large amplitude of vibration caused on the annular section (vibrator).

Abstract translation: 公开了一种振动陀螺传感器，其包括具有大致正方形平面轮廓的环形框架，中心开口具有近似圆形的平面构造，环形部分布置在环形框架的开口中并且具有用于构造振动器的近似圆形的平面轮廓， 以及跨越环形框架的内圆周和环形部分的外圆周的多个弹性部分，其中环形框架，环形部分和多个弹性部分由陶瓷制成的一体式烧制产品构成。 振动陀螺传感器还包括形成在各个弹性部分的上表面上的压电/电致伸缩元件（驱动压电/电致伸缩元件和检测压电/电致伸缩元件）。 每个弹性部分的高度方向的厚度被设计为小于环形部分的厚度，因此薄壁，使得压电/电致伸缩元件的振动方向的刚度降低， 在环形部分（振动器）上产生大的振动振幅。

公开(公告)号：US6089090A

公开(公告)日：2000-07-18

申请号：US944899

申请日：1997-10-06

Applicant: Masahiko Namerikawa ,  Kazuyoshi Shibata ,  Yukihisa Takeuchi

Inventor： Masahiko Namerikawa ,  Kazuyoshi Shibata ,  Yukihisa Takeuchi

IPC: G01C19/56 ,  G01C19/5677 ,  G01P9/04

CPC classification number: G01C19/5677

Abstract: A vibration gyro sensor including a support having an approximately square planar contour with a central opening having an approximately circular planar configuration, an annular section arranged in the opening of the support and having an approximately circular planar contour for constructing a vibrator, and a plurality of resilient sections which span the inner circumference of the support and the outer circumfererence of the annular section. The support, the annular section, and the plurality of resilient sections constitute an integrated fired ceramic product. The vibration gyro sensor further includes piezoelectric/electrostrictive elements (driving piezoelectric/electrostrictive elements and detecting piezoelectric/electrostrictive elements) formed on upper surfaces of the respective resilient sections and/or thin-walled portions of the annular section. Each of the resilient sections has a thickness in its direction of height designed to be smaller than a thickness of thick-walled portions of the annular section. Both the thin-walled portions of the annular section and the resilient sections are thin-walled so that the rigidity in the direction of vibration of the piezoelectric/electrostrictive elements is lowered to give a large amplitude of vibration caused on the annular section (vibrator).

Abstract translation: 一种振动陀螺传感器，包括具有大致正方形平面轮廓的支撑件，中心开口具有近似圆形的平面构造，环形部分布置在支撑件的开口中并且具有用于构造振动器的近似圆形的平面轮廓，以及多个 跨越支撑件的内圆周的弹性部分和环形部分的外围。 支撑件，环形部分和多个弹性部分构成一体的烧制陶瓷产品。 振动陀螺仪传感器还包括形成在环形部分的相应弹性部分和/或薄壁部分的上表面上的压电/电致伸缩元件（驱动压电/电致伸缩元件和检测压电/电致伸缩元件）。 每个弹性部分的高度方向的厚度被设计为小于环形部分的厚壁部分的厚度。 环形部分的薄壁部分和弹性部分都是薄壁的，使得压电/电致伸缩元件的振动方向的刚度降低，从而在环形部分（振动器）上产生大的振动振幅， 。

公开(公告)号：US6047590A

公开(公告)日：2000-04-11

申请号：US205274

申请日：1998-12-04

Applicant: Masahiko Namerikawa ,  Kazuyoshi Shibata ,  Yukihisa Takeuchi

Inventor： Masahiko Namerikawa ,  Kazuyoshi Shibata ,  Yukihisa Takeuchi

IPC: G01L1/10 ,  G01L9/00 ,  G01N9/00 ,  G01N11/16 ,  G01N29/036 ,  G01N29/22 ,  H01L41/08 ,  G01L1/16 ,  G01N11/10

CPC classification number: G01L9/008 ,  G01N29/036 ,  G01N29/222 ,  G01N2291/014 ,  G01N2291/015

Abstract: A sensor device includes a base body 12 having a vibrating portion 14, a piezoelectric element 20 fixed onto one surface of the vibrating portion 14 and having a piezoelectric film 22 and a pair of electrodes 24a, 24b which are in contact with the piezoelectric film 22, a space 16 that allows a fluid to lead to the other surface of the vibrating portion 14, and introduction holes 18 that communicate with the space 16, and the sensor device 10 is in a longitudinal shape. A recess 15 which contains at least an opening end of the introduction hole 18 on the surface side of the sensor device 10 in its region and extends up to the rear end portion 10' of the sensor device is formed on the surface of the sensor device 10 by a protrusion 13 disposed on the surface of said sensor device so as to extend substantially continuously from the periphery of the introduction holes 18 to the rear end portion 10' of said sensor device.

公开(公告)号：US5969236A

公开(公告)日：1999-10-19

申请号：US911704

申请日：1997-08-15

Applicant: Toshikazu Hirota ,  Kazuyoshi Shibata

Inventor： Toshikazu Hirota ,  Kazuyoshi Shibata

IPC: G01N15/02 ,  G01N3/48 ,  G01N15/06 ,  G01N29/04 ,  G01N29/22 ,  G01N33/28 ,  H01L41/08 ,  G01F1/30 ,  G01F1/66 ,  H01L41/04

CPC classification number: G01N15/0656 ,  G01N29/046 ,  G01N29/222 ,  G01N3/48 ,  G01N33/28 ,  G01N2203/0623 ,  G01N2291/0226 ,  G01N2291/02408 ,  G01N2291/02416

Abstract: A particle sensor includes, a sensor element including (a) a vibrating section having a mass that is sensitive to the collision of solid particles contained in a fluid with the vibrating section and (b) a detecting section for detecting the vibration of the vibrating section caused by the collision and converting the vibration to electric signals, a housing for fixing said sensor element, an inlet nozzle forming a fluid inlet, and an outlet nozzle forming a fluid outlet. In the particle sensor, the outlet nozzle is provided so that the sensor element is between the inlet nozzle and the outlet nozzle, throughholes are formed in the sensor element in at least part of the vicinity of the vibrating section, and the fluid entering the particle sensor from the inlet nozzle collides with the sensor element, passes through the throughholes and leaves the particle sensor from the outlet nozzle. The particle sensor has such a characteristic structure that the speed of a fluid colliding with the sensor element can be changed. The particle sensor can measure the sizes and particle size distribution of particles contained in a fluid, easily in a short time.

Abstract translation: 一种颗粒传感器包括：传感器元件，包括：（a）具有对包含在流体中的固体颗粒与振动部分的碰撞敏感的质量的振动部分，以及（b）检测振动部分的振动的检测部分 由碰撞引起的振动和电信号转换，用于固定传感器元件的壳体，形成流体入口的入口喷嘴和形成流体出口的出口喷嘴。 在颗粒传感器中，出口喷嘴被设置成使得传感器元件位于入口喷嘴和出口喷嘴之间，在传感器元件中至少部分地在振动部分附近形成通孔，并且进入颗粒的流体 来自入口喷嘴的传感器与传感器元件碰撞，穿过通孔并从出口喷嘴离开颗粒传感器。 粒子传感器具有能够改变与传感器元件碰撞的流体的速度的特征结构。 颗粒传感器可以在短时间内容易地测量流体中包含的颗粒的尺寸和粒度分布。

公开(公告)号：US5948996A

公开(公告)日：1999-09-07

申请号：US47117

申请日：1998-03-24

Applicant: Yukihisa Takeuchi ,  Masahiko Namerikawa ,  Kazuyoshi Shibata

Inventor： Yukihisa Takeuchi ,  Masahiko Namerikawa ,  Kazuyoshi Shibata

IPC: G01L1/16 ,  G01L5/16 ,  G01L25/00 ,  G01P15/09 ,  G01P15/18 ,  G01P21/00 ,  G01L1/00 ,  G01L3/00

CPC classification number: G01L5/167 ,  G01L1/16 ,  G01L25/00 ,  G01P2015/084

Abstract: A small-sized multielement sensor is capable of two- or three-dimensionally detecting a physical quantity. The sensor has the capability of compensating for an incorrect detection result given by a failed sensor element using detection results given by the other sensor elements thereby ensuring high accuracy is achieved regardless of the failure. The multielement sensor includes: a base including a disk-shaped substrate, an outer wall, and a column which are all disposed so that their center is located at the same point; flexible plates which are disposed along a circular line in such a manner that one end of each flexible plate is in contact with the outer wall and the other end is in contact with the column; weights suspended at the center of the lower surface of the respective flexible plates; and piezoelectric elements each having a pair of electrodes and disposed on both ends in the longitudinal direction of the flexible plates.

Abstract translation: 小尺寸多元件传感器能够二维或三维地检测物理量。 该传感器具有使用由其他传感器元件给出的检测结果来补偿由故障的传感器元件给出的不正确的检测结果的能力，从而确保无论故障如何实现高精度。 多元件传感器包括：基部，其包括圆盘状基板，外壁和列，它们全部设置成使得它们的中心位于同一点; 柔性板沿着圆形线设置成使得每个柔性板的一端与外壁接触并且另一端与柱接触; 悬挂在相应柔性板的下表面的中心的重物; 以及各自具有一对电极并且设置在柔性板的纵向两端的压电元件。

公开(公告)号：US5922946A

公开(公告)日：1999-07-13

申请号：US879020

申请日：1997-06-19

Applicant: Toshikazu Hirota ,  Kazuyoshi Shibata

Inventor： Toshikazu Hirota ,  Kazuyoshi Shibata

IPC: G01N15/10 ,  F16N29/00 ,  G01N29/036 ,  G01N29/04 ,  G01N29/22 ,  H01L41/08 ,  G01N15/06

CPC classification number: G01N29/036 ,  F16N29/00 ,  G01N29/045 ,  G01N29/222 ,  F16N2200/04 ,  G01N2291/0226 ,  G01N2291/02416 ,  G01N2291/02433

Abstract: A particle sensor includes a sensor element comprising (a) a vibrating section having such a mass that is sensitive to the collision of solid particles contained in a fluid, with the vibrating section and (b) a detecting section for detecting the vibration of the vibrating section caused by said collision and converting the vibration to electric signals, a housing for fixing said sensor element, a fluid inlet, and a fluid outlet. The particle sensor has a characteristic structure of having a net at the upstream side of the sensor element in order to allow the fluid entering the particle sensor from the fluid inlet to pass through said net and then contact with the sensor element. With this particle sensor, the detection of the solid particles contained in a fluid also containing bubbles can be made at a higher accuracy because the vibration caused by the bubbles, containing the primary resonance vibration of the sensor element is decreased.

Abstract translation: 一种颗粒传感器包括：传感器元件，包括：（a）具有这样的质量的振动部分，其对包含在流体中的固体颗粒的碰撞敏感;以及（b）检测部分，用于检测振动 由所述碰撞引起的振动和将振动转换成电信号，用于固定所述传感器元件的壳体，流体入口和流体出口。 颗粒传感器具有在传感器元件的上游侧具有网的特征结构，以便允许从流体入口进入颗粒传感器的流体通过所述网，然后与传感器元件接触。 利用该粒子传感器，由于包含传感器元件的主共振振动的气泡引起的振动减少，所以能够更高精度地检测包含在也含有气泡的流体中的固体颗粒。

公开(公告)号：US5892143A

公开(公告)日：1999-04-06

申请号：US857338

申请日：1997-05-16

Applicant: Masahiko Namerikawa ,  Kazuyoshi Shibata ,  Yukihisa Takeuchi

Inventor： Masahiko Namerikawa ,  Kazuyoshi Shibata ,  Yukihisa Takeuchi

IPC: G01L1/10 ,  G01L9/00 ,  G01N9/00 ,  G01N11/16 ,  G01N29/036 ,  G01N29/22 ,  H01L41/08 ,  G01L1/16 ,  G01N11/10

CPC classification number: G01L9/008 ,  G01N29/036 ,  G01N29/222 ,  G01N2291/014 ,  G01N2291/015

Abstract: A sensor device includes a base body 12 having a vibrating portion 14, a piezoelectric element 20 fixed onto one surface of the vibrating portion 14 and having a piezoelectric film 22 and a pair of electrodes 24a, 24b which are in contact with the piezoelectric film 22, a space 16 that allows a fluid to lead to the other surface of the vibrating portion 14, and introduction holes 18 that communicate with the space 16, and the sensor device 10 is in a longitudinal shape. A recess 15 which contains at least an opening end of the introduction hole 18 on the surface side of the sensor device 10 in its region and extends up to the rear end portion 10' of the sensor device is formed on the surface of the sensor device 10 by a protrusion 13 disposed on the surface of said sensor device so as to extend substantially continuously from the periphery of the introduction holes 18 to the rear end portion 10' of said sensor device.

公开(公告)号：US5889351A

公开(公告)日：1999-03-30

申请号：US560658

申请日：1995-11-20

Applicant: Hidemasa Okumura ,  Kazuyoshi Shibata ,  Yukihisa Takeuchi

Inventor： Hidemasa Okumura ,  Kazuyoshi Shibata ,  Yukihisa Takeuchi

IPC: G01N11/00 ,  G01N11/16 ,  H01L41/08

CPC classification number: G01N11/16 ,  G01N2291/022 ,  G01N2291/02818

Abstract: A viscosity measuring device is equipped with a piezo-electric vibrator, an oscillator and a loss factor monitoring means. The elastic properties of the piezo-electric vibrator and the viscous resistance of the fluid are controlled so that the tangent of loss factor of the piezo-electric vibrator may change largely enough to measure the viscosity. The characteristics measuring device is equipped with a first ceramic plate, a piezo-electric element sandwiched between a pair of electrodes attached to one surface of this first ceramic plate, a second ceramic plate having a hollow portion therein sintered integrally with the first ceramic plate, and a lid disposed so as to sandwich the second ceramic plate between the lid and the first ceramic plate and so as to face the other surface of the first ceramic plate. The amount of a glass component on the other surface of the first ceramic plate is regulated to be smaller than that of the glass component on the one surface of the first ceramic plate. The device for measuring the viscosity of a fluid can easily measure the viscosity with the good reproducibility even in the flowing fluid irrespective of the magnitude of the viscosity, and an element and a device for effectively measuring characteristics such as viscosity, concentration and density of an acidic solution or a basic solution is easily provided.

Abstract translation: 粘度测量装置配备有压电振动器，振荡器和损耗因子监测装置。 压电振动器的弹性特性和流体的粘性阻力被控制，使得压电振动器的损耗因数的切线变化得足够大以测量粘度。 特征测量装置配备有第一陶瓷板，夹在安装在该第一陶瓷板的一个表面上的一对电极之间的压电元件，具有与第一陶瓷板一体烧结的中空部分的第二陶瓷板， 以及设置成将第二陶瓷板夹在盖和第一陶瓷板之间并且面向第一陶瓷板的另一表面的盖。 在第一陶瓷板的另一个表面上的玻璃成分的量被调节为小于第一陶瓷板的一个表面上的玻璃成分的量。 用于测量流体粘度的装置即使在流动的流体中也可以以良好的再现性测量粘度，而不管粘度的大小如何，以及用于有效测量诸如粘度，浓度和密度等特性的元件和装置 酸性溶液或碱性溶液容易提供。