公开(公告)号：US20100313691A1

公开(公告)日：2010-12-16

申请号：US12446243

申请日：2007-10-09

Applicant: Simon Henein

Inventor： Simon Henein

IPC: B81B3/00

CPC classification number: B81B3/0027 ,  B81B2201/035 ,  F16H21/04 ,  Y10T74/18992

Abstract: A device for converting a first movement into a second movement responsive to the first movement under a demagnification scale includes: a) an input portion being drivable in a rectilinear translation in a first direction by an actuator causing the first movement; b) an output portion being movable by a converting blade causing the second movement responsive to the first movement in a second direction substantially perpendicular to the first direction; and c) a converting section connecting the input portion to the output portion. The converting section includes an intermediate spring portion and the converting blade. The intermediate spring portion has at least two parallel flexure blades; and the converting blade is substantially identical in shape to the a least two parallel flexure blades and is offset from its neutral position by a predetermined amount in the first direction as compared to the neutral position of the at least two parallel flexure blades. The device has a flexure-based structure that allows combining the advantages of classical actuators with accuracies in the micrometer range and the advantages of flexures to achieve nanometer accuracy.

Abstract translation: 一种用于将第一运动转换成响应于缩小标尺处的第一运动的第二运动的装置包括：a）输入部分通过致动器进行第一运动的第一方向在直线平移中被驱动; b）输出部分，其可由转换刀片移动，所述转换刀片在基本上垂直于所述第一方向的第二方向上响应于所述第一运动而引起所述第二运动; 以及c）将输入部分连接到输出部分的转换部分。 转换部分包括中间弹簧部分和转换刀片。 中间弹簧部分具有至少两个平行的弯曲叶片; 并且所述转换刀片的形状与所述至少两个平行的弯曲刀片基本上相同，并且与所述至少两个平行弯曲刀片的中立位置相比，在第一方向上从其中立位置偏移预定量。 该设备具有基于挠性的结构，可以将经典执行器的优点与微米范围的精度相结合，并具有实现纳米精度的挠曲优点。

公开(公告)号：US20100308010A1

公开(公告)日：2010-12-09

申请号：US12797389

申请日：2010-06-09

Applicant: Pierre Cusin ,  Jean-Philippe Thiebaud

Inventor： Pierre Cusin ,  Jean-Philippe Thiebaud

IPC: C23F1/02

CPC classification number: B81C99/008 ,  B81B3/0075 ,  B81B2201/035 ,  B81C1/00031 ,  B81C1/00087 ,  B81C1/00119 ,  B81C2201/0132 ,  B81C2201/032 ,  C25D1/003 ,  C25D1/20 ,  C25D5/022 ,  G04B13/022 ,  G04B13/026 ,  G04D3/0069

Abstract: The invention relates to a method (1) of fabricating a composite micromechanical component (41, 41′) including the following steps: a) providing (10) a substrate (9, 9′) that includes a horizontal top layer (21) and a horizontal bottom layer (23) made of electrically conductive, micromachinable material, and secured to each other by an electrically insulating, horizontal, intermediate layer (22); b) etching at least one pattern (26) in the top layer (21) through to the intermediate layer (22), so as to form at least one cavity (25) in the substrate (9, 9′); c) coating (16) the top part of said substrate with an electrically insulating coating (30); d) directionally etching (18) said coating and said intermediate layer so as to limit the presence thereof exclusively at each vertical wall (51, 52) formed in said top layer; e) performing (5) an electrodeposition by connecting the electrode to the conductive bottom layer (23) of the substrate (9, 9′) to form at least one metal part (33, 43, 43′) of said component; f) releasing the composite component (41, 41′) from the substrate (9, 9′). The invention concerns the field of micromechanical components, particularly for timepiece movements.

Abstract translation: 本发明涉及一种制造复合微机械部件（41,41'）的方法（1），包括以下步骤：a）提供（10）包括水平顶层（21）的衬底（9,9'）和 由导电的可微加工材料制成并由电绝缘的水平中间层（22）彼此固定的水平底层（23）; b）将顶层（21）中的至少一个图案（26）蚀刻到中间层（22），以在衬底（9,9'）中形成至少一个空腔（25）; c）用电绝缘涂层（30）涂覆（16）所述基底的顶部; d）定向地蚀刻（18）所述涂层和所述中间层，以限制其在形成在所述顶层中的每个垂直壁（51,52）处的存在; e）通过将电极连接到基板（9,9'）的导电底层（23）上来执行（5）电沉积，以形成所述部件的至少一个金属部分（33,43,43'）; f）从所述基板（9,9'）释放所述复合部件（41,41'）。 本发明涉及微机械部件的领域，特别是用于钟表运动。

公开(公告)号：US20100054092A1

公开(公告)日：2010-03-04

申请号：US12514352

申请日：2007-11-01

Applicant: Philippe Marmy ,  Jean-Luc Helfer ,  Thierry Conus

Inventor： Philippe Marmy ,  Jean-Luc Helfer ,  Thierry Conus

IPC: G04B29/00 ,  G04D3/00

CPC classification number: B81C99/0095 ,  B81B2201/035 ,  B81C2201/019 ,  B81C2201/056 ,  B81C2203/038 ,  B81C2203/051 ,  G04B31/004 ,  G04D3/0069 ,  Y10T29/49579

Abstract: The process comprises the following steps:a) a first element (3) or a plurality of said first elements (3) is/are machined in a first silicon wafer (1) keeping said elements (3) joined together via material bridges (5); b) step a) is repeated with a second silicon wafer (2) in order to machine a second element (4), differing in shape from that of the first element (3), or a plurality of said second elements (4); c) the first and second elements (3, 4) or the first and second wafers (1, 2) are applied, face to face, with the aid of positioning means (6, 7); d) the assembly formed in step c) undergoes oxidation; and e) the parts (10) are separated form the wafers (1, 2). Micromechanical timepiece parts obtained according to the process.

Abstract translation: 该方法包括以下步骤：a）在第一硅晶片（1）中加工第一元件（3）或多个所述第一元件（3），以使所述元件（3）通过材料桥（5）连接在一起 ）; b）用第二硅晶片（2）重复步骤a），以便加工与第一元件（3）的形状不同的第二元件（4）或多个所述第二元件（4）; c）第一和第二元件（3,4）或第一和第二晶片（1,2）通过定位装置（6,7）面对面地施加; d）步骤c）中形成的组件经历氧化; 和e）部件（10）从晶片（1,2）分离。 根据工艺获得的微型钟表零件。

公开(公告)号：US20100006540A1

公开(公告)日：2010-01-14

申请号：US12501009

申请日：2009-07-10

Applicant: Rudolf Dinger ,  Thierry Ravenel

Inventor： Rudolf Dinger ,  Thierry Ravenel

IPC: B44C1/22

CPC classification number: B81C99/008 ,  B81B2201/035 ,  B81C1/00674 ,  B81C2201/112 ,  G04B13/02 ,  G04D3/0069 ,  Y10T29/49579

Abstract: The invention relates to a method of manufacturing (1) a mechanical part (51) including the following steps:a) providing (3) a substrate (53) made of micro-machinable material;b) etching (5), with help of photolithography, a pattern (50) that includes said part through said entire substrate;According to the invention, the method further includes the following steps:c) mounting (7) said etched substrate on a support (55′) so as to leave the top and bottom surfaces of said substrate accessible;d) depositing (9, C′) a coating of better tribological quality than said micro-machinable material on the outer surface of said part e) releasing (11) the part from the substrate. The invention concerns the field of timepiece manufacture.

Abstract translation: 本发明涉及一种制造（1）机械部件（51）的方法，包括以下步骤：a）提供（3）由可微加工材料制成的基底（53）; b）借助于光刻法蚀刻（5）包括通过所述整个基板的所述部分的图案（50）; 根据本发明，该方法还包括以下步骤：c）将所述蚀刻的衬底安装（7）到支撑体（55'）上，以使所述衬底的顶表面和底表面可接近; d）在所述部件的外表面上沉积（9，C'）比所述可微加工材料更好的摩擦质量的涂层（e）将部件从基材上释放（11）。 本发明涉及钟表制造领域。

公开(公告)号：US07557044B2

公开(公告)日：2009-07-07

申请号：US11263476

申请日：2005-10-31

Applicant: Yong Ju Yun ,  Chil Seong Ah ,  Dong Han Ha ,  Hyung Ju Park ,  Wan Soo Yun ,  Kwang Cheol Lee ,  Gwang Seo Park

Inventor： Yong Ju Yun ,  Chil Seong Ah ,  Dong Han Ha ,  Hyung Ju Park ,  Wan Soo Yun ,  Kwang Cheol Lee ,  Gwang Seo Park

IPC: H01L21/302

CPC classification number: B81C99/0095 ,  B81B2201/035 ,  B81C2201/0143 ,  Y10S977/883 ,  Y10S977/888

Abstract: Disclosed herein is a method of fabricating nano-components using nanoplates, including the steps of: printing a grid on a substrate using photolithography and Electron Beam Lithography; spraying an aqueous solution dispersed with nanoplates onto the grid portion to position the nanoplates on the substrate; depositing a protective film of a predetermined thickness on the substrate and the nanoplates positioned on the substrate; ion-etching the nanoplates deposited with the protective film by using a Focused Ion Beam (FIB) or Electron Beam Lithography; and eliminating the protective film remaining on the substrate using a protective film remover after the ion-etching of the nanoplates, and a method of manufacturing nanomachines or nanostructures by transporting such nano-components using a nano probe and assembling with other nano-components. The present invention makes it possible to fabricate the high-quality nano-components in a more simple and easier manner at a lower cost, as compared to other conventional methods. Further, the present invention provides a method of implementing nanomachines through combination of such nano-components and biomolecules, etc.

Abstract translation: 本文公开了使用纳米板制造纳米组分的方法，包括以下步骤：使用光刻和电子束光刻在衬底上印刷栅格; 将分散有纳米板的水溶液喷射到栅格部分上以将纳米板定位在基底上; 在衬底和位于衬底上的纳米板上沉积预定厚度的保护膜; 通过使用聚焦离子束（FIB）或电子束光刻法离子蚀刻沉积有保护膜的纳米板; 并且在纳米板的离子蚀刻之后使用保护膜去除剂去除残留在基板上的保护膜，以及通过使用纳米探针传输这种纳米成分并与其他纳米成分组装来制造纳米机械或纳米结构的方法。 与其他常规方法相比，本发明可以以更简单和更容易的方式以更低的成本制造高质量的纳米组分。 此外，本发明提供了通过这些纳米组分和生物分子等的组合来实现纳米机器的方法。

公开(公告)号：US07067104B2

公开(公告)日：2006-06-27

申请号：US10158582

申请日：2002-05-30

Applicant: Kenneth H. Sandhage

Inventor： Kenneth H. Sandhage

IPC: C01B13/14

CPC classification number: G01N33/54346 ,  B81B2201/034 ,  B81B2201/035 ,  B81C1/00 ,  B81C99/0085 ,  G01N33/54353 ,  G01N33/544 ,  Y10S977/811 ,  Y10S977/84 ,  Y10S977/89 ,  Y10S977/90

Abstract: The present invention is focused on a revolutionary, low-cost (highly-scaleable) approach for the mass production of three-dimensional microcomponents: the biological reproduction of naturally-derived, biocatalytically-derived, and/or genetically-tailored three-dimensional microtemplates (e.g., frustules of diatoms, microskeletons of radiolarians, shells of mollusks) with desired dimensional features, followed by reactive conversion of such microtemplates into microcomponents with desired compositions that differ from the starting microtemplate and with dimensional features that are similar to those of the starting microtemplate. Because the shapes of such microcomponents may be tailored through genetic engineering of the shapes of the microtemplates, such microcomposites are considered to be Genetically-Engineered Materials (GEMs).

公开(公告)号：US20050272179A1

公开(公告)日：2005-12-08

申请号：US11136306

申请日：2005-05-24

Applicant: Andrew Frauenglass

Inventor： Andrew Frauenglass

IPC: B81C1/00 ,  H01L21/42

CPC classification number: H01L21/42 ,  B81B2201/035 ,  B81B2201/058 ,  B81C1/00492 ,  B81C99/0095 ,  B81C2201/0159

Abstract: Embodiments of a structure and embodiments of methods for fabricating structures provide three dimensional features defined by exposure to multiple wavelengths of light. In an embodiment, material is exposed to two different wavelengths of light. Embodiments of three dimensional structures may provide a variety of three-dimensional structural features and characteristics.

Abstract translation: 用于制造结构的方法的结构和实施例的实施例提供通过暴露于多个波长的光而限定的三维特征。 在一个实施例中，材料暴露于两种不同波长的光。 三维结构的实施例可以提供各种三维结构特征和特征。

公开(公告)号：US20040049918A1

公开(公告)日：2004-03-18

申请号：US10149055

申请日：2002-06-24

Inventor： Takashi Nishi

IPC: B21K001/30 ,  B23P015/14

CPC classification number: F16H55/22 ,  B23P15/14 ,  B81B2201/035 ,  B81C99/0085 ,  Y10T29/49462 ,  Y10T29/49467 ,  Y10T29/49469 ,  Y10T29/4948

Abstract: In order that a worm 1 is rotated, a clearance (a region constituting a clearance portion between bearings and a worm gear) is formed (FIGS. 4(1) to (3)) in an upper surface of a base plate 3. A mold 12 for forming a lower half region of the worm therein is formed (FIG. 4(8)). A material 5 for the worm is deposited (FIG. 4(9)) to a height equal to that of a lower half region plus that of an upper half of the worm. An upper half of the worm is formed (FIGS. 4(10) to (12). Finally, the material 13 in the clearance between the base plate 3 and gear 1 is removed (FIG. 4(13)).

Abstract translation: 为了使蜗杆1旋转，在基板3的上表面形成有间隙（构成轴承和蜗轮之间的间隙部的区域）（图4（1）〜（3））。 形成用于形成蜗杆下半部分的模具12（图4（8））。 将蠕虫的材料5（图4（9））沉积到等于下半部分加上蠕虫上半部的高度的高度。 形成蜗杆的上半部（图4（10）〜（12）），最后移除基板3与齿轮1之间的间隙中的材料13（图4（13））。

公开(公告)号：US20030099763A1

公开(公告)日：2003-05-29

申请号：US10158582

申请日：2002-05-30

Applicant: The Ohio State University

Inventor： Kenneth H. Sandhage

IPC: B05D003/00 ,  B01J013/00 ,  A61J001/00

CPC classification number: G01N33/54346 ,  B81B2201/034 ,  B81B2201/035 ,  B81C1/00 ,  B81C99/0085 ,  G01N33/54353 ,  G01N33/544 ,  Y10S977/811 ,  Y10S977/84 ,  Y10S977/89 ,  Y10S977/90

Abstract: The present invention is focused on a revolutionary, low-cost (highly-scaleable) approach for the mass production of three-dimensional microcomponents: the biological reproduction of naturally-derived, biocatalytically-derived, and/or genetically-tailored three-dimensional microtemplates (e.g., frustules of diatoms, microskeletons of radiolarians, shells of mollusks) with desired dimensional features, followed by reactive conversion of such microtemplates into microcomponents with desired compositions that differ from the starting microtemplate and with dimensional features that are similar to those of the starting microtemplate. Because the shapes of such microcomponents may be tailored through genetic engineering of the shapes of the microtemplates, such microcomposites are considered to be Genetically-Engineered Materials (GEMs).

Abstract translation: 本发明集中在用于大规模生产三维微型组件的革命性的低成本（高度可扩展）方法：天然衍生的，生物催化衍生的和/或基因定制的三维微型模板的生物繁殖 （例如，硅藻的截头圆锥体，放射体的微骨架，软体动物的壳）具有所需的尺寸特征，随后将这种微模板反应转化成具有与起始微模板不同的所需组成的微组件，并具有与起始微模板类似的尺寸特征 微模板。 由于这些微型组件的形状可以通过微型模板的形状的遗传工程来定制，所以这种微复合材料被认为是基因工程材料（GEM）。

公开(公告)号：US5417801A

公开(公告)日：1995-05-23

申请号：US083226

申请日：1993-06-29

Applicant: Igor I. Bol

Inventor： Igor I. Bol

IPC: B23P15/00 ,  B81C1/00 ,  G03F7/00 ,  H01H1/00 ,  H02N1/00 ,  H01L21/302

CPC classification number: B81C1/00198 ,  B23P15/00 ,  G03F7/00 ,  H01H1/0036 ,  H02N1/002 ,  B81B2201/035

Abstract: A process in which micromechanical bushings can be made and the application of such process to making micromechanical devices. Bushings are made on a surface of a stationary structure extending from a planar surface. The bushings are separated from the stationary structure by a sacrificial layer. The stationary structure, the bushing and the planar surface are then further processed by coating with a second sacrificial layer, and a structural layer. The structural layer is patterned into a movable structure that is held onto the stationary structure by a curved, undercut edge such as gear on stool. Final processing includes removing both sacrificial layers to free the movable structure, the bushing, and the stationary structure from each other. The bushing is trapped between the movable structure and the stationary structure but able to move freely.

Abstract translation: 可以制造微机械套管的过程以及制造微机械装置的这种工艺的应用。 衬套在从平坦表面延伸的固定结构的表面上制成。 衬套通过牺牲层与静止结构分离。 然后通过用第二牺牲层和结构层进行涂覆来进一步处理固定结构，衬套和平面表面。 结构层被图案化成可移动的结构，其通过弯曲的底切边缘（例如在凳子上的齿轮）保持在固定结构上。 最终处理包括移除两个牺牲层以使可移动结构，衬套和固定结构彼此释放。 衬套被夹在可移动结构和固定结构之间，但能够自由移动。