Ultrasonic sensor
    75.
    发明申请
    Ultrasonic sensor 有权
    超声波传感器

    公开(公告)号:US20070040477A1

    公开(公告)日:2007-02-22

    申请号:US11586561

    申请日:2006-10-26

    IPC分类号: H01L41/08

    CPC分类号: G01S7/521 B06B1/0629 H04R1/02

    摘要: An ultrasonic sensor includes a plurality of converters and a protection component. The plurality of converters convert one of a received ultrasonic wave into an electric signal and an electric signal into an ultrasonic wave for transmission. The plurality of converters are juxtaposed. The protection component protects each of the converters.

    摘要翻译: 超声波传感器包括多个转换器和保护部件。 多个转换器将接收到的超声波中的一个转换为电信号和电信号,以进行超声波传输。 多个转换器并置。 保护部件保护每个转换器。

    Membrane type gas sensor and method for manufacturing membrane type gas sensor
    76.
    发明授权
    Membrane type gas sensor and method for manufacturing membrane type gas sensor 有权
    膜式气体传感器及膜式气体传感器的制造方法

    公开(公告)号:US07157054B2

    公开(公告)日:2007-01-02

    申请号:US10211259

    申请日:2002-08-05

    IPC分类号: B32B5/02 G01P21/00 G21C17/00

    CPC分类号: G01N27/128

    摘要: A gas sensor includes a semiconductor substrate and a sensing membrane. The sensing membrane is located at the bottom of a recess, which is formed by etching the substrate, and includes a heater, heater extension electrodes, a gas sensitive film, and gas-sensitive-film extension electrodes. A first end of each heater extension electrode is in contact with the heater, and a second end of each heater extension electrode extends outward from the sensing membrane. A first end of each gas-sensitive-film extension electrode is in contact with the gas sensitive film, and a second end of each gas-sensitive-film extension electrode extends outward from the sensing membrane. All of the heater, the heater extension electrodes, and the gas-sensitive-film extension electrodes are made of polycrystalline silicon.

    摘要翻译: 气体传感器包括半导体衬底和感测膜。 检测膜位于通过蚀刻基板形成的凹部的底部,并且包括加热器,加热器延伸电极,气敏膜和气敏膜延伸电极。 每个加热器延伸电极的第一端与加热器接触,并且每个加热器延伸电极的第二端从感测膜向外延伸。 每个气敏膜延伸电极的第一端与气体敏感膜接触,并且每个气敏膜延伸电极的第二端从感测膜向外延伸。 所有加热器,加热器延伸电极和气敏膜延伸电极均由多晶硅制成。

    Pressure sensor
    79.
    发明申请
    Pressure sensor 失效
    压力传感器

    公开(公告)号:US20050172724A1

    公开(公告)日:2005-08-11

    申请号:US11046792

    申请日:2005-02-01

    摘要: A pressure sensor includes a semiconductor substrate and a pedestal member such as a glass pedestal. The semiconductor substrate has a diaphragm for detecting a pressure and a thick portion positioned around the diaphragm. The pedestal member has one surface bonded to the thick portion of the semiconductor substrate and the other surface opposite to the one surface. In the pressure sensor, the pedestal member has a through hole through which pressure is introduced to the diaphragm. The through hole penetrates through the pedestal member from an opening of the other surface to the one surface of the pedestal member, and the through hole has a hole diameter that becomes smaller from the one surface toward the other surface of the pedestal member. Accordingly, it can effectively restrict foreign materials such as dusts from being introduced into the through hole of the pressure sensor.

    摘要翻译: 压力传感器包括半导体基板和诸如玻璃基座的基座构件。 半导体衬底具有用于检测压力的膜片和位于膜片周围的厚壁部分。 基座构件具有一个表面,其结合到半导体衬底的厚部分,另一个表面与该表面相对。 在压力传感器中,基座构件具有通向该隔膜的压力的通孔。 通孔从另一个表面的开口穿过基座构件到基座构件的一个表面,并且通孔具有从基座构件的一个表面朝向另一个表面变小的孔直径。 因此,能够有效地将诸如灰尘的异物引入压力传感器的通孔中。

    Infrared gas sensor
    80.
    发明申请
    Infrared gas sensor 审中-公开
    红外气体传感器

    公开(公告)号:US20050161605A1

    公开(公告)日:2005-07-28

    申请号:US11019261

    申请日:2004-12-23

    CPC分类号: G01N21/3504 G01N21/0303

    摘要: An infrared gas sensor includes: an infrared light source having a resistor for emitting an infrared light by heating the resistor; an infrared light sensor having a detection device for generating an electric signal in accordance with a temperature change of the detection device corresponding to the infrared light in a case where the sensor receives the infrared light; a reflection member for reflecting the infrared light emitted from the light source to introduce the infrared light to the sensor; a casing for accommodating the light source, the light sensor, and the reflection member; and a substrate. The reflection member faces the light source. The resistor and the detection device are disposed on the substrate.

    摘要翻译: 红外线气体传感器包括:红外光源,具有通过加热电阻器来发射红外光的电阻器; 红外光传感器,具有检测装置,用于在传感器接收到红外光的情况下,根据与红外光对应的检测装置的温度变化产生电信号; 用于反射从光源发射的红外光以将红外光引入传感器的反射构件; 用于容纳光源的壳体,光传感器和反射构件; 和基材。 反射构件面向光源。 电阻器和检测装置设置在基板上。