Abstract:
After an ONO film in which a silicon nitride film (22) formed by a plasma nitriding method using a plasma processor having a radial line slot antenna is sandwiched by silicon oxide films (21), (23), a bit line diffusion layer (17) is formed in a memory cell array region (11) by an ion implantation as a resist pattern (16) taken as a mask, then lattice defects are given to the silicon nitride film (22) by a further ion implantation. Accordingly, a highly reliable semiconductor memory device can be realized, in which a high quality nitride film is formed in a low temperature condition, in addition, the nitride film can be used as a charge trap film having a charge capture function sufficiently adaptable for a miniaturization and a high integration which are recent demands.
Abstract:
After an ONO film in which a silicon nitride film (22) formed by a plasma nitriding method using a plasma processor having a radial line slot antenna is sandwiched by silicon oxide films (21), (23), a bit line diffusion layer (17) is formed in a memory cell array region (11) by an ion implantation as a resist pattern (16) taken as a mask, then lattice defects are given to the silicon nitride film (22) by a further ion implantation. Accordingly, a highly reliable semiconductor memory device can be realized, in which a high quality nitride film is formed in a low temperature condition, in addition, the nitride film can be used as a charge trap film having a charge capture function sufficiently adaptable for a miniaturization and a high integration which are recent demands.
Abstract:
A communication system for allowing communications as of Internet and the like to be universally used without restricting a second user to use communication and further without requiring any significant capital investment. According to this communication system, when a terminal (104) becomes able to communicate with a network usage terminal (101) and is about to use the Internet via the network usage terminal (101), it transmits the authentication information of its user (B), and the network usage terminal (101) then transmits the authentication information of its owner (A) and the received authentication information of the user (B) to an authentication server (105). If a result of authentication is OK, the network usage terminal (101) relays the communication of the terminal (104) to the Internet (103), thereby permitting the terminal (104) to use the Internet.
Abstract:
After an ONO film in which a silicon nitride film (22) formed by a plasma nitriding method using a plasma processor having a radial line slot antenna is sandwiched by silicon oxide films (21), (23), a bit line diffusion layer (17) is formed in a memory cell array region (11) by an ion implantation as a resist pattern (16) taken as a mask, then lattice defects are given to the silicon nitride film (22) by a further ion implantation. Accordingly, a highly reliable semiconductor memory device can be realized, in which a high quality nitride film is formed in a low temperature condition, in addition, the nitride film can be used as a charge trap film having a charge capture function sufficiently adaptable for a miniaturization and a high integration which are recent demands.
Abstract:
Tunnel insulating films (3) are formed in element regions demarcated by element isolation insulating films (2). Thereafter, for each memory cell, a floating gate (4) is formed, and an ONO film (5) and a control gate (6) are further formed. Next, a plasma insulating film (7) is formed on surfaces of stacked gates. The plasma insulating film is immune to plane orientation of a base film. Therefore, the entire plasma insulating film (7) has a substantially uniform thickness, and consequently, even if the maximum thickness thereof is not as large as that of a thermal oxide film, hydrogen entrance is prevented when the interlayer insulating film is thereafter formed, and electron leakage is also prevented. The reduction in thickness of this insulating film makes it possible to reduce birds' beaks, and efficiency in erase/write of data can be enhanced.
Abstract:
In embedded business apparatus, a Web server function receives a network protocol request including an IP address by a network protocol daemon and a port number, processes the request, and responds to the request by sending a network protocol response, and the request includes an obtain request of port information including a port number specifying the port, and the Web server function includes the response including the port information obtained by processing the obtain request and including Web information possible to input a change instruction for changing the port information.
Abstract:
A frequency extractor extracts an input frequency of an input signal. The frequency extractor includes a frequency multiplier, first and second filters, a binary circuit and a frequency divider. The frequency multiplier obtains a signal of a multiplied frequency, the multiplied frequency being N times the input frequency, N being an integer greater than 1. The first filter, having a first bandwidth, filters the signal of the multiplied frequency to provide a first filtered signal. The binary circuit binarizes the first filtered signal to a binary signal. The frequency divider divides the binary signal by a factor of N to provide a divided signal. The second filter, having a second bandwidth, filters the divided signal to generate the input frequency in a form of a continuous wave, wherein the second bandwidth is about 1/N times the first bandwidth.
Abstract:
One object of the present invention is to provide a medical container with multiple chambers and a production method thereof, where respective medicaments housed in a plurality of chambers can be separated without fail until performing the infusion and when performing the infusion, the respective medicaments can be easily mixed while keeping the sterile state. In order to achieve this object, a medical container (1) with multiple chambers is provided, where a container (10) having a chamber (11) for housing a liquid medicament (12) and a container (20) having a chamber (21) for housing a solid medicament (22) are integrated, a partitioning member (30) for partitioning these containers (10, 20) is provided, a hollow part (31) for connecting two adjacent containers (10, 20) to allow communication therebetween and a lid (32) for sealing at least one end of the hollow part (31) are formed in the partitioning member (30), and a thin-wall part (34) is formed in the connection part between the lid (32) and the partitioning member body (33).
Abstract:
An apparatus for splicing and sealing plural conductive wires comprising a support member and a flexible sealant held in the interior of the support member and a method for splicing and sealing plural conductive wires employing the apparatus are provided.