Cavity opto-mechanical sensor array
    61.
    发明授权
    Cavity opto-mechanical sensor array 有权
    腔体光电传感器阵列

    公开(公告)号:US08848197B2

    公开(公告)日:2014-09-30

    申请号:US13945075

    申请日:2013-07-18

    摘要: A mass sensor system including multiple Fabry-Perot microcavities connected in parallel by multiple waveguides. Each of the mass sensors includes a microbridge having a fundamental resonance frequency, and a movable reflective mirror etched into the microbridge; a fixed reflective mirror etched in a substrate, the fixed reflective mirror being fixed to the substrate in a region spaced apart from the movable reflective mirror; and an optical waveguide etched in the substrate that connects the movable mirror and the fixed mirror forming the Fabry-Perot microcavity interferometer. The system includes a tunable continuous-wave laser operative to optically interrogate the Fabry-Perot microcavity of each of the plurality of mass sensors, and a receiver operative to receive sensor signals from each of the plurality of mass sensors, the sensor signals comprising reflective signals and transmitted signals. A continuous-wave laser may generate optical forces that modify the motion, dynamics, or mechanical Q-factor of the microbridge.

    摘要翻译: 一种质量传感器系统,包括由多个波导并联连接的多个法布里 - 珀罗微腔。 每个质量传感器包括具有基本共振频率的微桥和蚀刻到微桥中的可移动反射镜; 在基板中蚀刻的固定反射镜,所述固定反射镜在与所述可移动反射镜间隔开的区域中固定到所述基板; 以及在连接可移动镜和形成法布里 - 珀罗微腔干涉仪的固定镜的基板中蚀刻的光波导。 该系统包括可调谐的连续波激光器,其可操作以光学询问多个质量传感器中的每一个的法布里 - 珀罗微腔,以及接收器,用于接收来自多个质量传感器中的每一个的传感器信号,传感器信号包括反射信号 并发送信号。 连续波激光器可以产生改变微桥的运动,动力学或机械Q因子的光学力。

    Surface Acoustic Wave Scale
    62.
    发明申请
    Surface Acoustic Wave Scale 有权
    表面声波刻度

    公开(公告)号:US20130185011A1

    公开(公告)日:2013-07-18

    申请号:US13742713

    申请日:2013-01-16

    IPC分类号: G06F17/00 G01G23/01

    摘要: Apparatus and related methods are provided for automatically recalibrating a SAW scale for changing environmental factors. During a period of time when there is no change to a weight applied to the scale, readings of SAW transducers which relate to weight indications and environmental factor indications are taken for two adjacent operating modes of the scale, and two calibrated weight calculations are made utilizing those readings. The difference in calibrated weight calculations is then related to a variable utilized to transform the readings into weights, which is updated, thereby recalibrating the scale.

    摘要翻译: 提供了用于自动重新校准用于改变环境因素的SAW标尺的装置和相关方法。 在施加到秤的重量没有变化的一段时间内,对于秤的两个相邻操作模式,采用与重量指示和环境因素指示相关的SAW换能器的读数,并且利用两个校准的重量计算 那些读数。 然后,校准重量计算的差异与用于将读数变换成权重的变量相关联,权重被更新,从而重新校准标度。

    DETECTION DEVICE
    63.
    发明申请
    DETECTION DEVICE 有权
    检测装置

    公开(公告)号:US20120318052A1

    公开(公告)日:2012-12-20

    申请号:US13519045

    申请日:2010-12-09

    IPC分类号: G01N29/02

    摘要: A detection device (10) includes: covers (1-3); an oscillator (4); antennas (9, 11, 12), a testing space (13), and a minute space (14). The testing space (13) and minute space (14) are formed in the covers (1-3). The minute space (14) is open to the testing space (13). The oscillator (4) is disposed in the testing space (13) such that its edge portions are inserted into the minute space (14). The antenna (9) works together with the antenna (12) to apply an electromagnetic field to the oscillator (4). The antenna (11) works together with the antenna (12) to receive a reception signal composed of a vibration signal from the oscillator (4).

    摘要翻译: 检测装置(10)包括:盖(1-3); 振荡器(4); 天线(9,11,12),测试空间(13)和微小空间(14)。 测试空间(13)和微小空间(14)形成在盖(1-3)中。 微小空间(14)对测试空间(13)开放。 振荡器(4)设置在测试空间(13)中,使得其边缘部分插入到微小空间(14)中。 天线(9)与天线(12)一起工作以向振荡器(4)施加电磁场。 天线(11)与天线(12)一起工作,以接收由振荡器(4)的振动信号组成的接收信号。

    Optical MEMS Chemical Sensor Array
    64.
    发明申请
    Optical MEMS Chemical Sensor Array 有权
    光学MEMS化学传感器阵列

    公开(公告)号:US20100238454A1

    公开(公告)日:2010-09-23

    申请号:US12729482

    申请日:2010-03-23

    IPC分类号: G01N21/17 G01B9/02

    摘要: A change in mass of a microbridge in a mass sensor can be sensed by applying a time-varying amplitude modulated electrostatic force to excite the microbridge into resonance at the frequency of amplitude modulation. An optical energy is then transmitted at a wavelength close to a resonant wavelength of a Fabry-Perot microcavity, which is formed by etching a movable reflective mirror into a region of the microbridge and by etching a fixed reflective minor in a region spaced apart from the microbridge. The two mirrors are interconnected by an optical waveguide. The movable mirror and fixed mirror reflect the optical energy to a receiver, and a change in the Fabry-Perot microcavity's reflectivity is interferometrically determined. The change in reflectivity indicates a change in the microbridge's resonant frequency due to increased mass of the microbridge resulting from sorption of a target chemical by a layer of chemoselective material deposited on the microbridge.

    摘要翻译: 质量传感器中的微桥质量的变化可以通过施加时变幅度调制的静电力来感测,以便以幅度调制的频率激励微桥进入谐振。 然后以接近于法布里 - 珀罗微腔的谐振波长的波长传输光能,该法是通过将可移动反射镜蚀刻到微桥的区域而形成的,并且通过在与 微桥。 两个反射镜通过光波导相互连接。 可移动镜和固定镜将光能反射到接收器,并且法布里 - 珀罗微腔的反射率的变化被干涉测量。 反射率的变化表明由于通过沉积在微桥上的化学选择材料层吸附目标化学物而导致的微桥的质量增加,微桥的谐振频率发生变化。

    DETECTION SENSOR, VIBRATOR
    65.
    发明申请
    DETECTION SENSOR, VIBRATOR 有权
    检测传感器,振动器

    公开(公告)号:US20100107736A1

    公开(公告)日:2010-05-06

    申请号:US12555221

    申请日:2009-09-08

    IPC分类号: G01N29/02

    CPC分类号: G01G3/165

    摘要: An object of the present invention is to provide a detection sensor and a vibrator which can offer improved sensitivity. The present invention uses a scheme in which no piezoelectric layer, drive electrode, or the like is provided on the surface of a vibrator 30 and in which the vibrator 30 is driven by an actuator 40 provided separately from the vibrator 30. The actuator 40 is of a cantilever type and is provided near a fixed end 30a of the vibrator 30. Vibration of the actuator 40 is transmitted to the vibrator 30 via a coupling beam 70. Thus, vibration of the vibrator 30 is prevented from being inhibited by a piezoelectric layer, a drive electrode, or the like. This improves the Q value of the vibrator 30 and thus the sensitivity of the detection sensor 10. Furthermore, if the detection sensor 10 is configured to offer a sensitivity equivalent to that of a conventional one, the size of the detection sensor 10 can be sharply reduced compared to that of the conventional one.

    摘要翻译: 本发明的目的是提供一种能够提供更高灵敏度的检测传感器和振动器。 本发明使用在振动器30的表面上没有设置压电层,驱动电极等的方案,并且振动器30由与振动器30分开设置的致动器40驱动。致动器40是 并且设置在振动器30的固定端30a附近。致动器40的振动通过耦合梁70传递到振动器30.因此,防止振动器30的振动受到压电层的抑制 ,驱动电极等。 这提高了振动器30的Q值,从而提高了检测传感器10的灵敏度。此外,如果检测传感器10被配置为提供与常规灵敏度相当的灵敏度,则检测传感器10的尺寸可以是尖锐的 与传统方法相比有所减少。

    ELECTRONIC CIRCUIT FOR MEASURING THE MASS OF BIOLOGICAL MATERIAL AND PROCESS FOR MANUFACTURING THE SAME
    66.
    发明申请
    ELECTRONIC CIRCUIT FOR MEASURING THE MASS OF BIOLOGICAL MATERIAL AND PROCESS FOR MANUFACTURING THE SAME 有权
    用于测量生物材料质量的电子电路及其制造方法

    公开(公告)号:US20090120193A1

    公开(公告)日:2009-05-14

    申请号:US12120073

    申请日:2008-05-13

    申请人: Nicolas Abele

    发明人: Nicolas Abele

    IPC分类号: G01H11/06 H01L21/56

    CPC分类号: G01N9/002 G01G3/165

    摘要: A micro scale includes one substrate forming a first zone constituting a first terminal, one conducting vibrating beam which has two opposite ends affixed on two supporting areas on the substrate, the conductive beam forming a second terminal; wherein the conductive beam is made of polymer gel having metallic microparticles in low quantity so as to avoid any contamination of a biological material to measure, the density of the metallic microparticles being high enough to achieve electrical conduction of the second terminal. A manufacturing process of such a micro scale circuit is also provided.

    摘要翻译: 微尺度包括形成构成第一端子的第一区域的一个衬底,一个导电振动梁,其具有固定在衬底上的两个支撑区域上的两个相对端,所述导电梁形成第二端子; 其特征在于,所述导电性束由低分子量金属微粒的聚合物凝胶构成,以避免对所述生物材料的任何污染物进行测量,所述金属微粒的密度足够高以实现所述第二末端的导电。 还提供了这种微尺度电路的制造工艺。

    Planar single-piece measuring string with two nodes for the measurement
of linear displacements or forces
    67.
    发明授权
    Planar single-piece measuring string with two nodes for the measurement of linear displacements or forces 失效
    具有两个节点的平面单件测量串,用于测量线性位移或力

    公开(公告)号:US5435195A

    公开(公告)日:1995-07-25

    申请号:US258424

    申请日:1994-06-10

    申请人: Eugen Meier

    发明人: Eugen Meier

    IPC分类号: G01G3/16 G01L1/10

    CPC分类号: G01G3/165 G01L1/106 Y10S73/01

    摘要: A planar single-piece measuring string which is designed to oscillate transversely to the plane defining its rest position has two attachment tabs, a resonating string section, two coupling sections connecting the resonating string section to the attachment tabs, and two defined nodal domains where the resonating string section meets the coupling sections. The measuring string includes at each nodal domain a pair of elastic flaps. The elastic flaps extend parallel to the resonating section and participate in the oscillation of the string. The elastic flaps are connected on one side thereof to the nodal domains and the free ends of the flaps are located at a distance opposite each other. The flaps have the same thickness as the other portions of the measuring string.

    摘要翻译: 设计成横向于限定其静止位置的平面摆动的平面单件测量线具有两个附接突出部,共振弦部分,将共鸣弦部分连接到附接突片的两个耦合部分,以及两个定义的节点域,其中 谐振弦部分与耦合部分相接。 测量线在每个节点处包括一对弹性翼片。 弹性翼片平行于谐振部分延伸并参与弦的振荡。 弹性翼片在其一侧连接到节点域,翼片的自由端位于彼此相对的距离处。 襟翼具有与测量弦的其他部分相同的厚度。

    Weighing apparatus including parallel guidance members having integral
guide arms
    68.
    发明授权
    Weighing apparatus including parallel guidance members having integral guide arms 失效
    称重装置包括具有整体导向臂的平行引导构件

    公开(公告)号:US4467883A

    公开(公告)日:1984-08-28

    申请号:US411994

    申请日:1982-08-27

    申请人: Eugen Meier

    发明人: Eugen Meier

    CPC分类号: G01G3/08 G01G21/244 G01G3/165

    摘要: A weighing apparatus is disclosed in which the load carrier (3) is arranged immediately adjacent the console (1), whereby the length of the transmission arm (3b) between the load carrier and the measuring component is reduced to a minimum. The parallel guidance system for the vertically movable components is provided by upper and lower resilient guide members (11, 11') having parallel spaced first (11a) and second (11bb) guide arms connected at one end with the console and load carrier members, respectively, and freely suspended means (11c) connecting together the other ends of the arms, thereby to define a folded guide arrangement in which the temperature-dependent changes in lengths of the arms balance each other, whereby temperature-independent guidance is produced. Furthermore, by the use of a transmission member 3b of relatively short length, directional imbalances in the application of the weighing force upon the measurement system are avoided.

    摘要翻译: 公开了一种称重装置,其中负载承载件(3)紧邻控制台(1)布置,由此将负载载体和测量部件之间的传动臂(3b)的长度减小到最小。 用于可垂直移动部件的平行引导系统由具有平行隔开的第一(11a)和第二(11bb)引导臂的上下弹性引导构件(11,11')提供,其一端与控制台和负载承载构件连接, 以及自由悬挂装置(11c),其将臂的另一端连接在一起,从而限定折叠的引导装置,其中臂的长度的温度依赖性变化彼此平衡,由此产生不依赖于温度的引导。 此外,通过使用长度较短的传动部件3b,避免了在测量系统上施加称重力的方向不平衡。

    String-type measurement cell
    69.
    发明授权
    String-type measurement cell 失效
    串式测量单元

    公开(公告)号:US4420984A

    公开(公告)日:1983-12-20

    申请号:US310978

    申请日:1981-12-09

    申请人: Hans R. Zulliger

    发明人: Hans R. Zulliger

    IPC分类号: G01D5/00 G01G3/16 G01L1/10

    CPC分类号: G01G3/165 G01L1/106 Y10S73/01

    摘要: A cast string-type measurement cell, including a metallic string member having cast thereto nodal masses, clamping elements, and spring and suspension elements, thereby to define an integral structural assembly that may be formed by a casting mold in substantially finished condition ready for installation in the measuring apparatus. Preferably, the string is formed of an amorphous metal, and the cast components comprise a glass-fiber-reinforced synthetic plastic material.

    摘要翻译: 一种铸造弦式测量单元,包括具有铸造节点的金属线构件,夹紧元件和弹簧和悬挂元件,从而限定可由准备安装的基本完成状态的铸模形成的整体结构组件 在测量装置中。 优选地,该串由非晶态金属形成,并且铸造组件包括玻璃纤维增​​强的合成塑料材料。

    Weight or force measuring apparatus
    70.
    发明授权
    Weight or force measuring apparatus 失效
    重量或力测量装置

    公开(公告)号:US4418774A

    公开(公告)日:1983-12-06

    申请号:US328746

    申请日:1981-12-08

    IPC分类号: G01G3/16 G01G3/14 G01G21/10

    CPC分类号: G01G3/165 Y10S177/06

    摘要: This apparatus is for use in measuring a weight, or force, and it is particularly useful as a scale. The apparatus includes a single vibrating wire and wire supports that rigidly clamp the two ends of the wire. A weight to be measured is applied to the wire in substantially the direction of its length, and the applied weight changes the tension in the wire. The apparatus includes a wire drive circuit that causes the wire to vibrate at essentially its natural resonant frequency. The frequency varies as a known cubic equation with respect to the applied weight, and a computer, operating in accordance with the equation, converts the measured frequency to a weight signal. The apparatus further includes vibration dampers and isolators for reducing the effects of sympathetic vibrations and of externally induced vibrations, and means to correct for external influences such as disturbing frequencies and ambient temperature.

    摘要翻译: 该装置用于测量重量或力,并且作为刻度尺特别有用。 该装置包括一根单根的振弦和电线支架,其将电线的两端刚性地夹紧。 要测量的重量基本上沿其长度方向施加到导线上,并且所施加的重量改变线中的张力。 该装置包括导线驱动电路,其使导线基本上以其固有谐振频率振动。 相对于所施加的重量,频率随着已知的三次方程而变化,并且根据等式操作的计算机将测量的频率转换为加权信号。 该装置还包括用于减少交感振动和外部诱发振动的影响的振动阻尼器和隔离器,以及用于校正诸如扰动频率和环境温度的外部影响的装置。