Abstract:
A method of maintaining a mask for a semiconductor process, the method includes providing a first structure and a second structure being attached to each other via a thermosetting material, detaching the first and second structures from each other, and performing an ashing process on the first structure.
Abstract:
A composition for cleaning a phase shift mask, including an organic acid ammonium salt, wherein a base ionization constant (Kb) of organic acid ions is larger than an acid ionization constant (Ka) of ammonium ions, hydrogen peroxide, and water, and associated methods.
Abstract:
The present invention is a fuel cell system including a stack having an electricity generator, that includes separators disposed on both surfaces of a membrane-electrode assembly, a reformer that converts fuel to generate hydrogen gas and supplies the hydrogen gas to the stack, a fuel supply unit that supplies the fuel to the reformer, an air supply unit that supplies air to the stack, a cooling water supply unit that supplies cooling water to the stack, and a flow channel section that is formed in the separator and through that the cooling water supplied from the cooling water supply unit passes.
Abstract:
A fuel cell system includes a reformer for generating hydrogen gas from fuel containing hydrogen using a chemical catalytic reaction and thermal energy. At least one electricity generator generates electrical energy by an electrochemical reaction of the hydrogen gas and oxygen. A fuel supply assembly supplies fuel to the reformer, and an oxygen supply assembly supplies oxygen to the at least one electricity generator. A heat exchanger is connected to the reformer and to the at least one electricity generator. The heat exchanger supplies thermal energy of the reformer, during initial operation of the system, to the at least one electricity generator so as to pre-heat the at least one electricity generator.
Abstract:
A method of analyzing ions adsorbed on a surface of a mask for pattern formation of a semiconductor device, and an apparatus using the same are disclosed. The ion analyzing method includes: filling a heating container within a main chamber with a predetermined amount of a solvent; immersing a mask in the solvent-filled heating container; raising an internal pressure of the chamber to a predetermined level by supplying gas into the chamber; separating ions from a surface of the mask by heating the solvent within the heating container at a predetermined temperature for a predetermined period; and analyzing the ions by collecting the solvent.
Abstract:
A composite material for a bipolar plate of fuel cells is comprised of conductive carbon dispersed in polybenzoxazine matrix. The present invention also provides a composite material for preparing a bipolar plate for fuel cells comprising a polymer where a volume reduction percent is less than 5%, preferably 3%, and more preferably 1% after polymerization of the monomers with respect to total volume of the monomers before the polymerization thereof, and conductive carbon. The polymers of the present invention have good workability since there is little volume change during polymerization, and good mechanical and chemical properties, and they can be manufactured at a low cost.
Abstract:
A method of manufacturing a transistor of a semiconductor device is provided. The method includes forming an N type gate pattern and a P type gate pattern on a substrate, implanting N type impurities into an N type transistor area, forming an insulation layer on the substrate including the N type gate pattern, forming a first spacer on a sidewall of the P type gate pattern by partially etching the insulation layer in a P type transistor area, and implanting P type impurities into the P type gate pattern and into the P type transistor area, thereby forming a CMOS transistor on the substrate. Thus, damage to the substrate and the transistor is prevented, thereby improving electrical characteristics of the transistor.
Abstract:
A fuel cell system includes a reformer for generating hydrogen gas from fuel containing hydrogen using a chemical catalytic reaction and thermal energy. At least one electricity generator generates electrical energy by an electrochemical reaction of the hydrogen gas and oxygen. A fuel supply assembly supplies fuel to the reformer, and an oxygen supply assembly supplies oxygen to the at least one electricity generator. A heat exchanger is connected to the reformer and to the at least one electricity generator. The heat exchanger supplies thermal energy of the reformer, during initial operation of the system, to the at least one electricity generator so as to pre-heat the at least one electricity generator.
Abstract:
A fuel cell stack includes a generator that includes a membrane electrode assembly (MEA) that has opposing side surfaces, bipolar plates that are mounted to the side surfaces of the MEA, and a bar that is mounted to the generator by forming a rivet head on at least one end of the bar.
Abstract:
A separator for a fuel cell contains nano-graphite thin plates with a thickness of about 3 to 30 nm or clusters of the nano-graphite thin plates. As such, the separator is capable of providing enough electrical conductivity with only a small amount of graphite, is light in weight, and has sufficient mechanical characteristics due to increased binding of graphite to resin, excellent resistance, and excellent thermal stability due to a reduction in the thermal expansion coefficient.