公开(公告)号：US5527209A

公开(公告)日：1996-06-18

申请号：US449556

申请日：1995-05-24

申请人： Konstantine Volodarsky ,  Jiro Kajiwara ,  Herbert W. Owens, Jr. ,  Jan H. King

发明人： Konstantine Volodarsky ,  Jiro Kajiwara ,  Herbert W. Owens, Jr. ,  Jan H. King

IPC分类号： B24B37/005 ,  B24B37/30 ,  B24B37/34 ,  B24B47/00

CPC分类号： B24B37/345 ,  B24B37/0053 ,  B24B37/30

摘要： Device is described that reduces the forces needed to release a wafer from a wet polishing surface after polishing. Device comprises attachment adapted to be mounted to a polishing apparatus to permit attachment surface, configured to mate with two regions of the wafer, to tilt relative to the polishing surface. Means for defining adhesive force between attachment surface and one of the two wafer regions, and means for defining adhesive force between attachment surface and other of the two wafer regions which is different than that defined between attachment surface and the one wafer region so as to cause a non-parallel relationship between the one wafer face and polishing surface, are provided. Unbalanced force causes a non-parallel relationship between wafer and polishing pad and facilitates separation and lifting of wafer from polishing surface. Embodiments wherein attachment is a wafer carrier, and unbalanced adhesive force is a vacuum communicated to a limited region of the surface of the carrier by a plurality of fluid transport channels. Other embodiments include a mechanical lifting force to actively tilt surface, a pressurized fluid delivered to the attachment surface for separating the wafer and cleaning the attachment surface, and/or rotary union for coupling fluids between rotatable and nonrotatable portions of the device. Independent pressure chambers for controlling polishing pressure and the adhesion or release of the wafer may be provided.

摘要翻译： 描述了在抛光之后减少从湿抛光表面释放晶片所需的力的装置。 装置包括适于安装到抛光装置的附件，以允许构造成与晶片的两个区域配合的附接表面相对于抛光表面倾斜。 用于限定附接表面和两个晶片区域中的一个之间的粘合力的装置，以及用于限定附着表面与两个晶片区域中的其它晶片区域之间的粘合力的装置，其不同于在附接表面和一个晶片区域之间限定的粘合力，从而导致 提供了一个晶片表面和抛光表面之间的非平行关系。 不平衡力导致晶片和抛光垫之间的非平行关系，并有利于晶片与抛光表面的分离和提升。 其中附接是晶片载体的实施例，并且不平衡的粘合力是通过多个流体输送通道传递到载体表面的有限区域的真空。 其他实施例包括用于主动倾斜表面的机械提升力，输送到附接表面的加压流体，用于分离晶片和清洁附接表面，和/或用于在装置的可旋转部分和不可旋转部分之间耦合流体的旋转联接件。 可以提供用于控制抛光压力和晶片的粘附或释放的独立压力室。

公开(公告)号：US4597228A

公开(公告)日：1986-07-01

申请号：US671676

申请日：1984-11-15

申请人： Isao Koyama ,  Toshikazu Hatsuse

发明人： Isao Koyama ,  Toshikazu Hatsuse

IPC分类号： B24B7/22 ,  B24B41/06 ,  B25B11/00 ,  H01L21/67 ,  H01L21/683 ,  B24B47/00

CPC分类号： B24B37/30 ,  B24B41/068 ,  B24B7/228 ,  B25B11/005 ,  H01L21/6838

摘要： A vacuum suction device comprises a vacuum suction plate formed by baking a porous material and having a flat suction face for holding a workpiece by suction; a base abutting on a bottom of the vacuum suction plate for supporting the vacuum suction plate and having a plurality of suction grooves in a part of a surface of the base abutting on the bottom of the suction plate, the suction grooves being coupled to a pipe of the base; an intake device coupled to the pipe of the base; a peripheral member formed of an airtight material for encircling the suction plate; and means for preventing a grinding liquid from getting into the vacuum suction device through the suction grooves. The preventing means prevents reduction in suction force applied by the intake device acting on the workpiece.

摘要翻译： 真空抽吸装置包括通过烘烤多孔材料并具有用于通过抽吸保持工件的平坦的吸力面而形成的真空吸附板; 底座，邻接在真空吸盘的底部，用于支撑真空吸盘，并且在底板的与吸板底部抵接的一部分表面中具有多个吸水槽，吸入槽与管 的基数 联接到所述基座的管道的进气装置; 由用于环绕吸板的气密材料形成的周边部件; 以及用于防止研磨液通过抽吸槽进入真空抽吸装置的装置。 防止装置防止由作用在工件上的进气装置施加的吸力减小。

公开(公告)号：US4308694A

公开(公告)日：1982-01-05

申请号：US168456

申请日：1980-07-10

申请人： Robert E. Bricker

发明人： Robert E. Bricker

IPC分类号： B23Q5/44 ,  B23Q5/40 ,  B24B5/42 ,  B24B47/00 ,  B24B47/04

CPC分类号： B24B47/00 ,  B23Q5/408 ,  F16H2025/2445

摘要： A cylindrical grinding machine comprising a slidable wheelhead assembly, a slide bed having ways supporting the wheelhead assembly, including means to prevent horizontal deviation of the wheelhead along the ways, and precision displacement means to slide the wheelhead assembly along the ways including, rotatable ball screw means axially secured to the slide bed, means to rotate the ball screw comprising a stepping motor, and nut housing means for coupling the nut means to the wheelhead assembly so that rotation of the ball screw slidably displaces the wheelhead assembly along the ways, the nut housing means including a medial flexible portion comprising two horizontal parallel plate portions having selectively configured transverse grooves so that vertical radial strain on the ball screw attributable to the wheelhead assembly is minimized.

摘要翻译： 一种圆柱形磨床，包括可滑动的砂轮头组件，具有支撑砂轮组件的方式的滑动床，包括防止砂轮沿着道路的水平偏移的装置和精确位移装置，以沿着包括可旋转的滚珠丝杠的方式滑动砂轮组件 轴向固定到滑动床的装置，用于旋转包括步进马达的滚珠丝杠的装置和用于将螺母装置联接到砂轮组件的螺母壳体装置，使得滚珠丝杠的旋转沿着路线滑动地移动砂轮组件，螺母 壳体装置包括一个内侧柔性部分，包括两个具有选择性地构造的横向槽的水平平行板部分，使得能够将归因于砂轮组件的滚珠丝杠上的垂直径向应变最小化。

公开(公告)号：US11554460B2

公开(公告)日：2023-01-17

申请号：US16640281

申请日：2018-08-09

申请人： MAKITA CORPORATION

发明人： Kenji Shibata ,  Masanori Furusawa

IPC分类号： B24B47/00 ,  B24B47/26 ,  B24B23/02 ,  B24B47/12

摘要： A grinder including a motor, a switch operated ON and OFF in accordance with an operation of a switch lever to control a rotation of an output shaft of the motor, a spindle that rotates in accordance with the rotation of the output shaft to rotate a disk-shaped grinding wheel and a brake mechanism controllable with respect to a brake plate that integrally rotates with the output shaft, in a housing, the brake plate includes fins.

公开(公告)号：US20190176289A1

公开(公告)日：2019-06-13

申请号：US16276416

申请日：2019-02-14

申请人： Robert Bosch GmbH

发明人： Florian Esenwein

IPC分类号： B24B23/04 ,  B25F5/02 ,  B24B47/00 ,  B25F5/00

摘要： A hand power tool includes at least one electric-motor drive that is configured to act upon at least one motor shaft, and that is accommodated by a first housing part, the motor shaft and the first housing part defining a first common axis. The electric-motor drive is an electronically commutated electric motor. The hand power tool further includes at least one output shaft configured to drive a tool in an oscillating manner, and at least one second housing part that is configured to accommodate a rechargeable battery, the rechargeable battery and the second housing part defining a second common axis.

公开(公告)号：US09498864B2

公开(公告)日：2016-11-22

申请号：US15187783

申请日：2016-06-21

申请人： ZHEJIANG JIADU SPRING MACHINE CO., LTD.

发明人： Jialin Yu ,  Du Yu ,  Huali Huang

IPC分类号： B24B7/17 ,  B24B7/16 ,  B24B41/04 ,  B24B41/047 ,  B24B41/06 ,  B24B47/00

CPC分类号： B24B7/167 ,  B24B7/162 ,  B24B7/17 ,  B24B41/04 ,  B24B41/047 ,  B24B41/067 ,  B24B47/00 ,  B24B47/04

摘要： Disclosed is a method for grinding a spring with high quality and high efficiency, comprising the steps as follows: firstly, at least one of an upper grinding wheel (1) and a lower grinding wheel (2) is configured to comprise an inner grinding wheel (21) and an outer grinding wheel (24), wherein the inner grinding wheel (21) is fitted in the outer grinding wheel (24); the inner grinding wheel (21) or the outer grinding wheel (24) is driven by a transmission mechanism, the inner grinding wheel (21) and the outer grinding wheel (24) rotating in opposite directions; after a complete spring is fed to a space between the upper grinding wheel (1) and the lower grinding wheel (2), the complete spring is moved back and forth in the plane of the grinding wheels; and then the upper grinding wheel (1) is moved downwardly such that two end faces of the spring are ground by the grinding wheels, and when the height of the ground spring meets the requirement, the upper grinding wheel (1) is stopped moving downwardly and is returned to the original point later. Then, the ground spring movement is stopped and it is moved away from the space between the two grinding wheels, i.e., the complete spring is removed. In this way, the spring is ground in a revolving state, which can improve the yield and quality of ground springs, save energy and protect the environment, and result in a low cost of grinding, a simple structure, low cost for manufacturing parts, long persistence in precision of mechanisms, and good stability.

摘要翻译： 公开了一种高品质，高效率地研磨弹簧的方法，包括以下步骤：首先，上砂轮（1）和下砂轮（2）中的至少一个构造成包括内砂轮 （21）和外砂轮（24），其中所述内砂轮（21）装配在所述外砂轮（24）中; 内砂轮（21）或外砂轮（24）由传动机构驱动，内砂轮（21）和外砂轮（24）沿相反方向旋转; 在将完整的弹簧供给到上砂轮（1）和下砂轮（2）之间的空间之后，整个弹簧在砂轮的平面中前后移动; 然后将上砂轮（1）向下移动，使得两个端面通过砂轮磨削，当接地弹簧的高度满足要求时，上砂轮（1）停止向下移动 并在以后返回原点。 然后，停止地面弹簧运动，并将其移动离开两个砂轮之间的空间，即完全弹簧被移除。 以这种方式，弹簧在旋转状态下磨削，可以提高地弹簧的产量和质量，节约能源，保护环境，降低磨削成本，结构简单，零件制造成本低， 机械精度长期持续，稳定性好。

公开(公告)号：US20150217422A1

公开(公告)日：2015-08-06

申请号：US14615132

申请日：2015-02-05

申请人： Robert Bosch GmbH

发明人： Florian Esenwein

IPC分类号： B24B23/04 ,  B24B47/00 ,  B25F5/00

CPC分类号： B24B23/04 ,  B24B47/00 ,  B25F5/00 ,  B25F5/02

摘要： A hand power tool includes at least one electric-motor drive that is configured to act upon at least one motor shaft, and that is accommodated by a first housing part, the motor shaft and the first housing part defining a first common axis. The electric-motor drive is an electronically commutated electric motor. The hand power tool further includes at least one output shaft configured to drive a tool in an oscillating manner, and at least one second housing part that is configured to accommodate a rechargeable battery, the rechargeable battery and the second housing part defining a second common axis.

摘要翻译： 手动电动工具包括至少一个电动机驱动器，其构造成作用在至少一个电动机轴上，并且由电动机轴和第一壳体部分限定第一公共轴线容纳的至少一个电动机驱动器。 电动机驱动是电子换向电动机。 所述手动工具还包括至少一个输出轴，所述至少一个输出轴构造成以振荡方式驱动工具;以及至少一个第二壳体部分，其构造成容纳可再充电电池，所述可再充电电池和所述第二壳体部分限定第二公共轴线 。

公开(公告)号：US20120220203A1

公开(公告)日：2012-08-30

申请号：US13465631

申请日：2012-05-07

申请人： Wade C. King ,  Micah A. Coleman ,  Andrew Walker ,  Jason McRoberts ,  Frederick R. Bean ,  Christopher J. Murray ,  Frank A. DeSantis

发明人： Wade C. King ,  Micah A. Coleman ,  Andrew Walker ,  Jason McRoberts ,  Frederick R. Bean ,  Christopher J. Murray ,  Frank A. DeSantis

IPC分类号： B24B23/04 ,  B24B41/02 ,  B23P11/00 ,  B24B47/00

CPC分类号： B24B41/04 ,  B24B23/03 ,  B24B23/04 ,  B24B45/006 ,  B24B49/00 ,  Y10T29/49826 ,  Y10T29/4987

摘要： A tool for moving an abrasive media can include a tool body and a drive system housed in the tool body. The drive system can include an output member. A retaining member can be disposed on the tool body. A first platen having a first attachment hub can be selectively coupled with the retaining member in an installed position. The first platen can have a first rotatable member that selectively attaches to the output member in a first mode of operation. A second platen having a second attachment hub can selectively couple with the retaining member in an installed position. The second platen can have a second rotatable member that selectively attaches to the output member in a second mode of operation.

摘要翻译： 用于移动研磨介质的工具可以包括容纳在工具主体中的工具主体和驱动系统。 驱动系统可以包括输出构件。 保持构件可以设置在工具主体上。 具有第一附接轮毂的第一压板可以与保持构件选择性地联接在安装位置。 第一压板可以具有在第一操作模式下选择性地附接到输出构件的第一可旋转构件。 具有第二附接轮毂的第二压板可以在安装位置上与保持构件选择性地联接。 第二压板可以具有第二可旋转构件，其以第二操作模式选择性地附接到输出构件。

公开(公告)号：US20110021118A1

公开(公告)日：2011-01-27

申请号：US12458849

申请日：2009-07-24

申请人： Tain Wang Wang

发明人： Tain Wang Wang

IPC分类号： B24B21/04 ,  B24B47/00

CPC分类号： B24B21/04 ,  B24B47/12

摘要： A swing device for a grinding machine includes a motor located on a fixed table beside the sanding unit which includes a frame with two mandrels and a sanding belt is mounted to the two mandrels. A movable member is movably mounted to the shaft of the motor so as to move back and forth to activate two limit switches which are activated to stop the motor. The movable member is connected to a fixed plate connected to an end plate on the sanding unit and a link is connected between the fixed plate and an elongate slot of the movable member. The sanding unit together with the sanding belt swing when the movable member moves. The sanding belt swings and activates two micro switches to change the rotation direction of the shaft. The sanding belt swings to change the sanding portion contacting the objects to be polished.

摘要翻译： 用于研磨机的摆动装置包括位于打磨单元旁边的固定台上的电动机，其包括具有两个心轴的框架，并且砂带安装在两个心轴上。 可移动构件可移动地安装到电动机的轴上以便前后移动以激活两个限位开关，这些限位开关被启动以停止电动机。 可移动部件连接到连接到打磨单元上的端板的固定板，并且连接件连接在固定板和可移动部件的细长槽之间。 当可动件移动时，打磨单元与砂带一起摆动。 打磨带摆动并启动两个微动开关以改变轴的旋转方向。 打磨带摆动以改变接触待抛光物体的砂光部分。

公开(公告)号：US20100144249A1

公开(公告)日：2010-06-10

申请号：US12449400

申请日：2008-01-29

申请人： Koji Kitagawa ,  Junichi Ueno ,  Syuichi Kobayashi ,  Hideo Kudo ,  Tadakazu Miyashita ,  Atsushi Kajikura ,  Yoshinobu Nishimoto

发明人： Koji Kitagawa ,  Junichi Ueno ,  Syuichi Kobayashi ,  Hideo Kudo ,  Tadakazu Miyashita ,  Atsushi Kajikura ,  Yoshinobu Nishimoto

IPC分类号： B24B7/17 ,  B24B7/20 ,  B24B41/06 ,  B24B55/00 ,  B24B47/00

CPC分类号： B24B37/015 ,  B24B37/08 ,  B24B55/06

摘要： Provided is a polishing apparatus comprising a lower stool (12), a motor (18a) and a speed reducer (19a) for driving the lower stool, and a box (17) for covering at least the portion of the lower stool below the working action face. The polishing apparatus polishes a wafer by forcing the wafer to contact the lower stool and by rotating the lower stool. The box has its inside separated by partitions (31a and 31b) into a plurality of regions, and the motor for driving the lower stool is arranged in a region other than the region containing the lower stool. The polishing apparatus can manufacture a wafer of a stable shape, irrespective of the time elapsed from the running start and the presence/absence of the stop of the polishing apparatus.

摘要翻译： 本发明提供一种抛光装置，其包括下部凳子（12），用于驱动下部凳子的电动机（18a）和减速器（19a）以及用于至少覆盖下部工作部分的下部凳子的箱体（17） 动作面。 抛光装置通过迫使晶片接触下粪和旋转下粪来抛光晶片。 箱体的内部由隔板（31a和31b）分隔成多个区域，并且用于驱动下部便器的电动机布置在除了包含下部凳子的区域以外的区域中。 抛光装置可以制造具有稳定形状的晶片，而与运行开始所经过的时间和抛光装置的停止的存在/不存在无关。