公开(公告)号：US20030121461A1

公开(公告)日：2003-07-03

申请号：US10248946

申请日：2003-03-04

Inventor： Mr. Ram Ganeshan

IPC: F26B003/00 ,  F23M003/00

CPC classification number: F22B37/10 ,  F23M5/08 ,  F28F1/124 ,  F28F9/20

Abstract: Abstract of DisclosureThe present invention utilizes radiation reflectors on the refractory wall of a fired furnace opposite the spaces between adjacent tubes. The refractory radiation reflectors have a base contiguous with the refractory surface and secured to a subjacent structure, and an isosceles triangular cross section with similar sides extending from the base. The base has a dimension less than the spaces between adjacent tubes to facilitate installation in a modular construction. The radiation reflectors focus the reflected radiation from the flame onto the dark side of the tubes. The invention increases the overall heat transfer of the tube by increasing the heat flux rate for the backside of the tube, and also decreases the flux and temperature differentials between the front and rear sides of the tubes.

Abstract translation: 发明内容本发明在与相邻管之间的空间相对的燃烧炉的耐火壁上使用辐射反射器。 耐火辐射反射器具有与耐火表面相邻并且固定到下部结构的基部，以及具有从基部延伸的类似侧面的等腰三角形横截面。 基座的尺寸小于相邻管之间的空间，以便于以模块化结构安装。 辐射反射器将来自火焰的反射辐射聚焦到管的黑暗面上。 本发明通过增加管的背面的热通量来增加管的整体传热，并且还降低了管的前侧和后侧之间的通量和温度差。

公开(公告)号：US20030115773A1

公开(公告)日：2003-06-26

申请号：US10027910

申请日：2001-12-21

Applicant: Kimberly-Clark Worldwide, Inc.

Inventor： Philip S. Lin ,  Ronald F. Gropp ,  Kevin B. Sartain

IPC: F26B003/00

CPC classification number: D21F5/181 ,  D21F5/182 ,  D21F11/14 ,  D21F11/145

Abstract: A paper web drying apparatus and process is provided in which the heated air drying medium is replaced with between 10 percent to 100 percent of live steam. The addition of a steam component to the drying medium provides for a higher drying temperature to be supplied to the wet moving web. The introduction of live pressurized steam contributes to the load of force of the drying medium, thereby decreasing the energy requirements of blower motors. The introduction of pressurized live steam also lowers the free atmospheric oxygen content of the drying medium which reduces the burning or scorch hazard associated with high temperature drying of a cellulose web.

Abstract translation: 提供了一种纸幅干燥装置和方法，其中加热的空气干燥介质被置于10％至100％的活蒸汽之间。 将蒸汽组分添加到干燥介质中提供更高的干燥温度以供应到湿移动幅材。 引入活的加压蒸汽有助于干燥介质的载荷，从而降低鼓风机电机的能量需求。 加压活蒸汽的引入也降低了干燥介质的自由大气氧含量，降低了与纤维素网的高温干燥相关的燃烧或焦烧危险。

公开(公告)号：US20030110660A1

公开(公告)日：2003-06-19

申请号：US10273160

申请日：2002-10-17

Inventor： Jens Muller

IPC: F26B003/00

CPC classification number: D21G1/006 ,  D21F5/00 ,  D21F5/042

Abstract: A drying section of a machine for the manufacture of a material web, in particular of a paper or of a board web, comprises a smoothing nip which is extended in the web running direction and is formed between two pressing areas lying opposite one another of which at least one is formed by a shoe roll, with at least 70%, and preferably at least 90%, of the outer shoe roll diameter lying above the machine base. In a method for the combined drying and smoothing of a material web, in particular of a paper web or of a board web, in a drying section, the following steps are provided: the material web is first dried to a pre-settable drying content>60%, in particular >65%, and preferably >70%; the material web having this pre-settable drying content is guided through a smoothing nip which is extended in the web running direction and is formed between two pressing surfaces lying opposite one another of which at least one is formed by a rotating belt and of which at least one is heated; the pressing time resulting in the extended smoothing nip is selected >0.8 ms; and the material web is further dried after the smoothing nip.

Abstract translation: 用于制造材料纤维网，特别是纸张或纸板的机器的干燥部分包括平滑辊隙，该辊隙在幅材运行方向上延伸并且形成在彼此相对的两个挤压区域之间 至少一个由鞋卷形成，其中至少70％，优选至少90％的外靴辊直径位于机器底座上方。 在干燥部分中的材料网，特别是纸幅或纸板的组合干燥和平滑的方法中，提供以下步骤：将材料纤维网首先干燥至可预先设定的干燥含量 > 60％，特别是> 65％，优选> 70％; 具有这种可预先设定的干燥含量的材料网被引导通过在卷筒纸运行方向上延伸的平滑辊隙，并且形成在彼此相对的两个挤压表面之间，其中至少一个由旋转带形成， 至少一个加热; 选择> 0.8ms的延长平滑压区的压制时间; 并且在平滑压区之后将材料纤维网进一步干燥。

公开(公告)号：US20030106239A1

公开(公告)日：2003-06-12

申请号：US10060021

申请日：2002-01-29

Inventor： Hun-jung Yi ,  Ki-seok Lee ,  Bo-yong Lee ,  Sang-oh Park ,  Pil-kwon Jun ,  Sang-mun Chon ,  Kyung-dae Kim

IPC: F26B003/00

CPC classification number: H01L21/67034

Abstract: A drying system for drying a semiconductor substrate is provided. The drying system includes: a chamber for housing a vapor distributor and a fluid bath, said fluid bath being disposed in a lower portion of the chamber and said distributor being disposed in an upper portion of the chamber for distributing vapor for drying the substrate; and a fluid flow system for supplying fluid flow into said fluid bath for cleaning and drying the substrate and for draining said fluid from the fluid bath, wherein the chamber includes a plurality of exhaust vents disposed at the upper portion for venting the vapor.

公开(公告)号：US20030101616A1

公开(公告)日：2003-06-05

申请号：US10336193

申请日：2003-01-03

Applicant: Semitool, Inc.

Inventor： Dana Scranton ,  Ian Sharp

IPC: F26B003/00

CPC classification number: H01L21/67034 ,  B08B3/06 ,  B08B3/10 ,  B08B3/12 ,  H01L21/67028

Abstract: A processor for rinsing and drying of semiconductor substrates includes a process vessel contained within an outer containment vessel. A diluted organic vapor creates a Marangoni effect flow along the surface of processing liquid contained within the process vessel. The process vessel includes porous walls that allow residual chemicals, organic species, and other unwanted materials to flow from the process vessel to the outer containment vessel. The porous walls allow for the maintenance of a stable surface tension gradient to sustain a consistent Marangoni force for even drying. Replacement processing fluid is preferably introduced to the process vessel to prevent the build up of organic species in the surface layer of the processing fluid.

公开(公告)号：US20030101614A1

公开(公告)日：2003-06-05

申请号：US10265368

申请日：2002-10-07

Applicant: Voith Paper Patent GmbH

Inventor： Klaus Dolle

IPC: F26B005/14 ,  F26B005/04 ,  F26B003/00 ,  F26B009/00 ,  F26B013/00 ,  F26B013/06

CPC classification number: D21F3/0263

Abstract: Device and process for dewatering a fibrous material web by expelling water via gas pressure. The dewatering device includes at least four rolls arranged to radially limit at least one pressure chamber and sealing units arranged to axially limit the at least one pressure chamber. Adjustment devices are arranged to at least partially individually axially adjust positions of the at least four rolls and the sealing units. A pressure gas is introducible into and the fibrous material web is guidable through the at least one pressure chamber.

Abstract translation: 通过气体压力排出水来对纤维材料网进行脱水的装置和方法。 脱水装置包括布置成径向限制至少一个压力室和布置成轴向限制至少一个压力室的密封单元的至少四个辊。 调整装置被布置成至少部分地单独地轴向地调节至少四个辊和密封单元的位置。 压力气体被引入并且纤维材料腹板通过至少一个压力室引导。

公开(公告)号：US20030084587A1

公开(公告)日：2003-05-08

申请号：US10322974

申请日：2002-12-18

Applicant: LSI Logic Corporation

Inventor： Kiran Kumar ,  Zhihai Wang ,  Rudy Rios ,  Wilbur G. Catabay ,  Richard D. Schinella

IPC: F26B019/00 ,  F26B025/06 ,  C23F001/00 ,  H01L021/306 ,  F26B003/00 ,  F26B009/00 ,  F26B013/00 ,  F26B013/06

CPC classification number: H01L21/67167 ,  C23C14/566 ,  C23C16/4401 ,  H01L21/67017 ,  H01L21/67201 ,  H01L21/76802 ,  H01L21/76843

Abstract: An apparatus for performing contaminant sensitive processing on a substrate. A substrate load chamber receives the substrate from an ambient contaminant laden environment, and isolates the substrate from the ambient contaminant laden environment. The substrate load chamber further forms a first environment of intermediate cleanliness around the substrate. A substrate pass through chamber receives the substrate from the substrate load chamber, and isolates the substrate from the intermediate cleanliness of the first environment of the substrate load chamber. The substrate pass through chamber further forms a second environment of high cleanliness around the substrate. A substrate transfer chamber receives the substrate from the substrate pass through chamber, and isolates the substrate from the high cleanliness of the second environment of the substrate pass through chamber. The substrate transfer chamber maintains a third environment of high cleanliness around the substrate, and transfers the substrate into more than one substrate processing chambers, where the substrate is selectively transferred into and out of the more than one substrate processing chambers without leaving the high cleanliness of the third environment. The substrate transfer chamber also selectively passes the substrate to the substrate pass through chamber when the substrate pass through chamber has formed the high cleanliness of the second environment. The substrate pass through chamber also receives the substrate from the substrate transfer chamber, and selectively passes the substrate to the substrate load chamber when the substrate load chamber has formed the intermediate cleanliness of the first environment. The substrate load chamber receives the substrate from the substrate pass through chamber, and selectively passes the substrate out of the substrate load chamber and into the ambient contaminant laden environment when the substrate load chamber is not open to the substrate pass through chamber.

公开(公告)号：US20020184789A1

公开(公告)日：2002-12-12

申请号：US09864362

申请日：2001-05-25

Applicant: Maytag Corporation

Inventor： Douglas W. Gardner ,  Michael D. Lafrenz ,  Kim L. Wright

IPC: F26B003/00

CPC classification number: D06F58/28 ,  D06F2058/2829 ,  D06F2058/2838 ,  D06F2058/2883 ,  D06F2058/2896

Abstract: A method of operating an automatic cycle of a clothes dryer is disclosed wherein, after initiation of an automatic cycle, a CPU displays the expected time remaining during the current cycle. At various times during the cycle, the expected time remaining is updated by comparing the time required to reach certain moisture levels of the articles contained therein to reference times. The comparison also results in the expected times being updated for future uses of the clothes dryer. Finally, the invention includes a system for updating the amount of time required to reach a desired final temperature during a cooldown sequence.

Abstract translation: 公开了一种操作干衣机自动循环的方法，其中，在自动循环开始之后，CPU显示当前循环期间剩余的预期时间。 在循环期间的不同时间，通过比较将其中包含的物品的某些水分含量与参考时间相比较所需的时间来更新剩余的预期时间。 该比较还导致预期的时间将更新为将来使用的干衣机。 最后，本发明包括一种用于在冷却时序期间更新达到所需最终温度所需的时间量的系统。

公开(公告)号：US20020170202A1

公开(公告)日：2002-11-21

申请号：US09854960

申请日：2001-05-15

Inventor： Fu-Sheng Peng

IPC: F26B003/00

CPC classification number: H01L21/67034

Abstract: The present invention provides a method and an apparatus for drying semiconductor wafers by using an IPA drying apparatus. The present invention uses a vapor generator to generate an IPA vapor. The IPA vapor is generated and saved in a closed surrounding and then transferred in a porous hollow plate in the dryer tank by using a quartz pipe. The IPA vapor is diffused evenly from the porous hollow plate. Furthermore, the present invention increases the safety of the process and can easily control the input amount of the IPA vapor.

Abstract translation: 本发明提供一种通过使用IPA干燥装置来干燥半导体晶片的方法和装置。 本发明使用蒸汽发生器来产生IPA蒸气。 产生IPA蒸气并将其保存在封闭的环境中，然后通过使用石英管在干燥箱中的多孔中空板中转移。 IPA蒸气从多孔中空板均匀扩散。 此外，本发明增加了该方法的安全性，并且可以容易地控制IPA蒸气的输入量。

公开(公告)号：US20020152636A1

公开(公告)日：2002-10-24

申请号：US10072250

申请日：2002-02-07

Inventor： Gerard W. Ernst ,  Thomas Albano ,  Dean L. Smith ,  Klaus R. Pohl

IPC: F26B003/00 ,  B08B005/04 ,  F26B019/00

CPC classification number: B08B6/00

Abstract: An apparatus and method for cleaning objects having generally irregular surface features, such as reloadable photographic cameras, has a partial enclosure having opposing side walls, and a top wall joining the opposing side walls. An air ionizing element composed of an ion emitter and an air knife is arranged in the enclosure for electrostatically neutralizing the object with ions entrained in a curtain-like stream of air directed onto the object.

Abstract translation: 用于清洁具有大致不规则表面特征的物体的装置和方法，例如可重新加载的照相机，具有具有相对侧壁的部分封闭体，以及连接相对侧壁的顶壁。 由离子发射器和气刀组成的空气电离元件设置在外壳中，用于静电中和物体，所述离子夹带在被引导到物体上的窗帘状空气流中。