公开(公告)号：US20210048114A1

公开(公告)日：2021-02-18

申请号：US16929823

申请日：2020-07-15

Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD.

Inventor： CHIA-HO CHUANG ,  Shu-Hung Lin ,  Ming-Chien Chiu

IPC: F16K27/02 ,  H01L21/673 ,  G03F1/66 ,  B01D46/42 ,  B01D46/54 ,  B01D46/00

Abstract: The present invention provides a quick-release valve module which includes a flexible grommet defining a channel, and a piston having a disc portion at an end thereof, wherein the disc portion of the piston is exposed to the flexible grommet.

公开(公告)号：US09786535B2

公开(公告)日：2017-10-10

申请号：US14556233

申请日：2014-11-30

Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD.

Inventor： Hui-Ming Pao ,  Cheng-Hsin Chen ,  Po-Ting Lee ,  Ming-Chien Chiu ,  Tien-Jui Lin

IPC: B08B3/00 ,  H01L21/677 ,  H01L21/673 ,  H01L21/68 ,  H01L21/687 ,  H01L21/67

CPC classification number: H01L21/67748 ,  H01L21/67259 ,  H01L21/67353 ,  H01L21/67393 ,  H01L21/6773 ,  H01L21/67736 ,  H01L21/67778 ,  H01L21/68 ,  H01L21/687

Abstract: The present invention relates to a wafer transport system and a method of operating the same. The wafer transport system comprises at least one semiconductor apparatus, a track, a transfer device, a positioning device, a carrier and a cleaning device. The wafer transport system transports wafers along the at least one semiconductor apparatus via the carrier riding on the track. The transfer device transfers the wafers from the carrier to the at least one semiconductor apparatus. The positioning device identifies and controls the position of the carrier on the track. The cleaning device maintains the cleanliness of the wafers. The present invention provides advantages for improving the yield rate of a wafer, shortening the fabrication time of a wafer, and offering the flexibility and the extendibility to a wafer transport system.

公开(公告)号：US09512876B2

公开(公告)日：2016-12-06

申请号：US14583751

申请日：2014-12-28

Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD.

Inventor： Hsiao-Chia Lo ,  Chih-Ming Lin

IPC: E05C19/10 ,  F16C29/00 ,  H01L21/673

CPC classification number: F16C29/005 ,  F16C29/004 ,  F16C29/04 ,  F16C2226/74 ,  H01L21/67373

Abstract: The present invention relates to a latch guide assembly configured on the bottom of a wafer carrier. The latch guide assembly comprises a guide module having at least one guiding groove, a latch module having at least one side plate and at least one recess on the at least one side plate, and at least one rolling unit configured between the at least one guiding groove and the at least one recess. The latch module combines with the guide module via the at least one rolling unit and moves along with the guide module. The latch guide assembly provides a precise moving mechanism to lock/unlock the wafer carrier and reduces both the failure rate and dust production.

Abstract translation: 本发明涉及一种构造在晶片载体的底部上的闩锁引导组件。 闩锁引导组件包括具有至少一个引导槽的引导模块，具有至少一个侧板和至少一个侧板上的至少一个凹部的闩锁模块以及至少一个引导件 凹槽和所述至少一个凹部。 闩锁模块通过至少一个滚动单元与引导模块组合，并与引导模块一起移动。 闩锁引导组件提供精确的移动机构以锁定/解锁晶片载体并且减少故障率和灰尘产生。

公开(公告)号：US09097980B2

公开(公告)日：2015-08-04

申请号：US13250395

申请日：2011-09-30

Applicant: Chen-Wei Ku ,  Pao-Yi Lu ,  Kun-Hong Liao ,  Jain-Ping Sheng

Inventor： Chen-Wei Ku ,  Pao-Yi Lu ,  Kun-Hong Liao ,  Jain-Ping Sheng

IPC: B65D85/30 ,  G03F1/66 ,  B65D25/04

CPC classification number: G03F1/66

Abstract: A transmission box using AMHS for transferring reticle pod is provided, wherein an OHT (Overhead Hoist Transfer) system is disposed on the transmission box to perform mechanical transferring of the reticle pod for greatly reducing risks of damaging reticles caused by operators when transferring, streamlining the allocation of operators, and thus decreasing the time needed for process to complete.

Abstract translation: 提供了一种使用AMHS传送光罩舱的传输箱，其中在传输箱上设置了一个OHT（顶起式起重机转移）系统，以进行标线舱的机械转移，从而大大降低了运营商在转运时造成的损坏标线的风险， 分配运营商，从而减少流程完成所需的时间。

公开(公告)号：US09091353B2

公开(公告)日：2015-07-28

申请号：US13711833

申请日：2012-12-12

Applicant: GUDENG PRECISION INDUSTRIAL CO, Ltd

Inventor： Hsaio-Chia Lo

IPC: F16K15/00 ,  F16K1/30 ,  F16K15/02 ,  F16K17/04 ,  F16K27/02

CPC classification number: F16K1/30 ,  F16K15/026 ,  F16K17/044 ,  F16K27/0209 ,  Y10T137/7904

Abstract: A gas charging check valve uses a first elastic element and a second elastic element, which respectively provide elastic force on a top valve and a bottom valve. The top valve and the bottom valve correspond to each other as a set. When the gas charging device is moved to apply an external force on a movement control portion of the gas charging check valve, the second elastic element removes the elastic force applied on the bottom valve to reduce the required gas inject force for a valve formed by the top valve and the bottom valve, so that the gas can more easily enter the valve.

Abstract translation: 气体充气止回阀使用分别在顶阀和底阀上提供弹力的第一弹性元件和第二弹性元件。 顶阀和底阀对应于一组。 当气体充气装置移动以对气体充电止回阀的移动控制部分施加外力时，第二弹性元件去除施加在底部阀上的弹性力，以减少由所述气体充填止回阀形成的阀所需的气体注入力 顶阀和底阀，使气体更容易进入阀门。

公开(公告)号：US20140299508A1

公开(公告)日：2014-10-09

申请号：US14246337

申请日：2014-04-07

Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD.

Inventor： CHIEN-FENG WANG ,  SHAO-WEI LU ,  PO-TIN LEE

IPC: H01L21/673

CPC classification number: H01L21/67396 ,  B65D85/30

Abstract: The present invention provides an anti-electrostatic cassette, which mainly comprises at least an electrostatic discharge (ESD) device connected electrically to the carrying frames, which are disposed in the substrate cassette and carry the substrates, and to the handles, which are disposed on the outer sides of the substrate cassette, for forming the conductive path. By means of the contact between the equipment and the two handles of the substrate cassette, the residual static charges on the substrates are conducted to the ground for reducing the residual static charges on the substrates. Consequently, the ESD phenomena in the substrates due to friction can be avoided and hence preventing the damages in the substrates caused by static charges.

Abstract translation: 本发明提供了一种抗静电盒，其主要包括至少一个静电放电（ESD）装置，其电连接到承载框架上，静电放电装置设置在基板盒中并承载基板，并且被放置在手柄上 用于形成导电路径的基板盒的外侧。 通过设备与基板盒的两个手柄之间的接触，将基板上的残留静电电荷传导到地面，以减少基板上的残余静电。 因此，可以避免由于摩擦而导致的基板中的ESD现象，并因此防止由静电引起的基板中的损坏。

公开(公告)号：US08794444B2

公开(公告)日：2014-08-05

申请号：US13309727

申请日：2011-12-02

Applicant: Jain-Ping Sheng ,  Tzu-Jeng Hsu ,  Shao-Wei Lu ,  Ming-Long Chiu

Inventor： Jain-Ping Sheng ,  Tzu-Jeng Hsu ,  Shao-Wei Lu ,  Ming-Long Chiu

IPC: B65D85/30

CPC classification number: H01L21/67386 ,  H01L21/67379

Abstract: A FOUP (front opening unified pod) is disposed with a plurality of supporting pieces, the positions of which are calibrated to be symmetrical for the supporting pieces to horizontally support wafers in the pod, and with an OHT pad (overhead hoist transport pad), a major function of which is to evenly distribute the weight of the FOUP and the wafers so that the transportation of the FOUP and the wafers by the OHT head can be further stabilized and more weight can be loaded to meet the demands of the process.

Abstract translation: FOUP（前开口统一吊舱）设置有多个支撑件，其位置被校准为对于支撑件对称以水平地支撑吊舱中的晶片，以及使用OHT垫（顶部起重运输垫）， 其主要功能是均匀分配FOUP和晶片的重量，使得通过OHT头的FOUP和晶片的输送可以进一步稳定，并且可以加载更多的重量以满足该过程的要求。

公开(公告)号：US20140190857A1

公开(公告)日：2014-07-10

申请号：US13774176

申请日：2013-02-22

Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD.

Inventor： JAIN-PING SHENG ,  TZU-JENG HSU ,  CHEN-HAO CHANG ,  CHENG-EN CHUNG

IPC: H01L21/673

CPC classification number: H01L21/67369

Abstract: The present invention provides a limit member having a protection cover. The limit member is disposed in a substrate container and holds against the edge of at least one substrate received in the substrate container. The limit member has at least one limit portion and at least one protection cover. The protection cover is disposed on the limit portion. When the limit portion holds against the edge of the substrate, the substrate is against the protection cover on the limit portion, not being direct contact with the limit portion. This prevents the substrate from rubbing against the limit member to bring contamination particles, and further prevents the passivation layer of the substrate from being broken to pieces by the limit member to bring more contamination particles.

Abstract translation: 本发明提供一种具有保护罩的限位件。 极限构件设置在基板容器中并且抵靠容纳在基板容器中的至少一个基板的边缘。 极限构件具有至少一个限制部分和至少一个保护盖。 保护盖设置在限位部上。 当限制部分抵靠基板的边缘时，基板抵靠极限部分上的保护盖，而不是与极限部分直接接触。 这防止了基板摩擦限制构件而带来污染物颗粒，并且进一步防止了基板的钝化层被极限构件破碎成碎片以产生更多的污染颗粒。

公开(公告)号：US08657310B2

公开(公告)日：2014-02-25

申请号：US13488757

申请日：2012-06-05

Applicant: Yung-Chin Pan

Inventor： Yung-Chin Pan

IPC: B62B3/10

CPC classification number: H01L21/67724 ,  B62B3/04 ,  B62B2203/10 ,  B62B2203/44 ,  H01L21/6773

Abstract: The wafer box conveyer includes a chassis, a transverse moving mechanism, a longitudinal moving mechanism, a loading mechanism and a shock reduction mechanism. The chassis includes a frame and a plurality of wheels mounted under the frame. The transverse moving mechanism is movably connected to the frame. The longitudinal moving mechanism is movably connected to the transverse moving mechanism. A moving direction of the longitudinal moving mechanism is perpendicular to that of the transverse moving mechanism. The loading mechanism includes at least one tray for a wafer box. The shock reduction mechanism is disposed between the at least one tray and the frame for absorbing a load of the tray.

Abstract translation: 晶片盒输送机包括底架，横向移动机构，纵向移动机构，装载机构和减震机构。 底盘包括安装在框架下方的框架和多个轮子。 横向移动机构可移动地连接到框架。 纵向移动机构可移动地连接到横向移动机构。 纵向移动机构的移动方向垂直于横向移动机构的移动方向。 装载机构包括用于晶片盒的至少一个托盘。 减震机构设置在至少一个托盘和框架之间，用于吸收托盘的载荷。

公开(公告)号：US08573264B2

公开(公告)日：2013-11-05

申请号：US12983355

申请日：2011-01-03

Applicant: Ni-Shin Lee ,  Shao-Wei Lu

Inventor： Ni-Shin Lee ,  Shao-Wei Lu

IPC: B65D85/48

CPC classification number: H01L21/67353 ,  H01L21/67359 ,  H01L21/67393

Abstract: A reticle pod for storing reticles, into the gas channel of partition of which gas is filled through a gas inlet, wherein strong gas flow is formed around the pellicle film and the pellicle film expands outward in accordance with the Bernoulli's principle; when no gas is filled in through the gas inlet, the pellicle film contracts inward. Therefore, by turning on and shutting off the gas inlet valve, the pellicle film will be set in a breathing motion for the gas inside the pellicle film to be exchanged.

Abstract translation: 一种用于将掩模版保存在通过气体入口填充气体的隔板的气体通道中，其中在防护薄膜周围形成强气流，防护薄膜根据伯努利原理向外膨胀; 当没有气体通过气体入口填充时，防护薄膜组件向内收缩。 因此，通过打开和关闭进气阀，防护薄膜将被设置为呼吸运动，以防止薄膜内的气体被更换。