Stage apparatus, exposure apparatus, and device manufacturing method
    51.
    发明授权
    Stage apparatus, exposure apparatus, and device manufacturing method 有权
    舞台装置,曝光装置和装置的制造方法

    公开(公告)号:US07952686B2

    公开(公告)日:2011-05-31

    申请号:US12060395

    申请日:2008-04-01

    申请人: Yasuhiro Fujiwara

    发明人: Yasuhiro Fujiwara

    IPC分类号: G03B27/62 G03B27/58

    CPC分类号: G03F7/70783 G03F7/707

    摘要: A stage apparatus that includes a stage and moves the stage in at least a first direction. The stage apparatus also includes a plurality of holding units fixed on the stage to extend in the first direction, in which the first direction is a longitudinal direction. Each of the holding units includes a first portion. A second portion is arranged between the first portion and the stage and a third portion is arranged between the second portion and the stage. The first portion includes a holding surface to hold an object. A length of the second portion in the first direction is less than a length of the first portion in the first direction, and the length of the second portion in the first direction is less than a length of the third portion in the first direction. Ends of the second portion are determined by two slits extending from both ends of the holding units in the first direction towards a central portion of the holding units, and the first portion is connected to the third portion at only one point via the second portion.

    摘要翻译: 一种舞台装置,包括舞台并且在至少第一方向上移动舞台。 舞台装置还包括固定在舞台上的多个保持单元,其沿第一方向在第一方向上延伸,其中第一方向是纵向方向。 每个保持单元包括第一部分。 第二部分布置在第一部分和台面之间,第三部分布置在第二部分和台面之间。 第一部分包括保持物体的保持表面。 第一方向上的第二部分的长度小于第一方向上的第一部分的长度,并且第二部分在第一方向上的长度小于第一部分在第一方向上的长度。 第二部分的端部由从第一方向的保持单元的两端朝向保持单元的中心部分延伸的两个狭缝确定,并且第一部分经由第二部分仅在一个点处连接到第三部分。

    Optical glass, press molding preform, method of manufacturing same, optical element, and method of manufacturing same
    52.
    发明授权
    Optical glass, press molding preform, method of manufacturing same, optical element, and method of manufacturing same 失效
    光学玻璃,压制成型预制件,其制造方法,光学元件及其制造方法

    公开(公告)号:US07670974B2

    公开(公告)日:2010-03-02

    申请号:US10825316

    申请日:2004-04-16

    摘要: A low dispersion optical glass comprising, given as molar percentages, 28 to 50 percent of P2O5; more than 20 percent but not more than 50 percent of BaO; 1 to 20 percent MgO; a sum of Li2O, Na2O, and K2O exceeding 3 percent (with 0 to 25 percent of Li2O, greater than or equal to 0 percent and less than 10 percent of Na2O, and 0 to 12 percent of K2O); more than 0 percent but not more than 15 percent of ZnO; 0 to 25 percent of B2O3; 0 to 5 percent of A12O3; 0 to 8 percent of Gd2O3; 0 to 20 percent of CaO; 0 to 15 percent of SrO; and 0 to 1 percent of Sb2O3; with a sum of oxide contents of P, Ba, Mg, Li, Na, K, Zn, B, Al, Gd, Ca, Sr, and Sb being greater than or equal to 98 percent. The optical glass comprises no La2O3. The press molding preform is comprised of the optical glass.

    摘要翻译: 一种低分散度光学玻璃,其以摩尔百分比给出28%至50%的P 2 O 5; BaO超过20%但不超过50% 1〜20%MgO; Li2O,Na2O和K2O的总和超过3%(Li2O为0〜25%,大于等于0%且小于10%的Na2O,0〜12%的K2O); 超过0%但不超过15%的ZnO; 0〜25%的B2O3; 0〜5%的A12O3; 0〜8%的Gd2O3; 0〜20%的CaO; 0〜15%的SrO; 和0〜1%的Sb2O3; 其中P,Ba,Mg,Li,Na,K,Zn,B,Al,Gd,Ca,Sr和Sb的氧化物含量之和大于或等于98%。 光学玻璃不含La2O3。 压制成型预制件由光学玻璃组成。

    GLASS MATERIAL FOR MOLD PRESSING AND METHOD FOR MANUFACTURING OPTICAL GLASS ELEMENT
    53.
    发明申请
    GLASS MATERIAL FOR MOLD PRESSING AND METHOD FOR MANUFACTURING OPTICAL GLASS ELEMENT 有权
    用于模具压制的玻璃材料和用于制造光学玻璃元件的方法

    公开(公告)号:US20090314033A1

    公开(公告)日:2009-12-24

    申请号:US12295620

    申请日:2007-03-28

    摘要: A glass material for mold pressing, comprising a core portion comprised of an optical glass with a degree of abrasion FA of 200 or higher and a covering portion comprised of a second glass covering at least a portion of the surface of said core portion. A method for manufacturing an optical glass element, wherein a glass material that has been preformed to a prescribed shape is heat softened and press molded with a pressing mold and the outer perimeter portion of the molded product obtained is removed by mechanical processing. The above-mentioned glass material for mold pressing is used as the glass material. To provide a means whereby an optical element does not bear scratches on optically functional surfaces through contact during handling after the press molding of press molded glass products despite being comprised of a glass material with a high degree of abrasion, and a means whereby even when scratched, the function of the optical element finally obtained is unaffected.

    摘要翻译: 一种用于模压的玻璃材料,包括由磨损度为200以上的光学玻璃构成的芯部和由覆盖所述芯部的表面的至少一部分的第二玻璃构成的覆盖部。 一种制造光学玻璃元件的方法,其中已经预成形为规定形状的玻璃材料被热软化并用压模模压,并且通过机械加工除去所获得的模制产品的外周部分。 将上述用于模压的玻璃材料用作玻璃材料。 为了提供一种装置,其中光学元件在加压成型玻璃制品的加压成形之后的处理过程中通过接触而不会在光学功能表面上产生刮痕,尽管由具有高磨损性的玻璃材料组成, 最终获得的光学元件的功能不受影响。

    Precision press-molding preform, process for the production thereof, optical element and process for the production of the optical element
    54.
    发明申请
    Precision press-molding preform, process for the production thereof, optical element and process for the production of the optical element 有权
    精密压模预成型件,其制造方法,光学元件和用于制造光学元件的方法

    公开(公告)号:US20080187737A1

    公开(公告)日:2008-08-07

    申请号:US12078556

    申请日:2008-04-01

    IPC分类号: C03C3/19 B32B17/00 C03B11/00

    摘要: A precision press-molding preform for producing an optical element for use in an imaging device using a CCD type or MOS type solid image-sensing device, which is formed of a glass composition containing, by mol %, 25 to 45% of P2O5, 0.5 to 10% of CuO, 0 to 10% of B2O3, 0 to 10% of Al2O3, 2 to 30% of Li2O, 0 to 25% of Na2O, 0 to 15% of K2O, the total content of Li2O, Na2O and K2O being 3 to 40%, 3 to 45% of BaO, 0 to 30% of ZnO, 0 to 20% of MgO, 0 to 20% of CaO, 0 to 20% of SrO, 0 to 10% of Bi2O3, 0 to 5% of La2O3, 0 to 5% of Gd2O3 and 0 to 5% of Y2O3, the total content of these components being at least 98%, and a precision press-molding preform, which is formed of a phosphate glass containing CuO, an alkali metal oxide, BaO and ZnO and having a BaO content/ZnO content molar ratio (BaO/ZnO) of greater than 1.

    摘要翻译: 一种用于制造用于使用CCD型或MOS型固体摄像装置的成像装置的光学元件的精密压制成型预成型体,其由含有25%至45%的P < 0〜10%的CuO,0〜10%的B 2 O 3,0〜 10%的Al 2 O 3,2〜30%的Li 2 O,0〜25%的Na 2 O 3, O 2,0〜15%的K 2 O,Li 2 O,Na 2 O和K 2 O的总含量, 2 O 3为3〜40%,3〜45%的BaO,0〜30%的ZnO,0〜20%的MgO,0〜20%的CaO,0〜20%的SrO,0〜10 %2 O 3%,0〜5%的La 2 O 3 3,0〜5%的2%〜3% Gd 2 O 3 3和0〜5%的Y 2 O 3 3,这些成分的总含量为 至少98%,以及由含有CuO,碱金属氧化物,BaO和ZnO并且具有BaO含量/ ZnO含量的磷酸盐玻璃形成的精密压制成型预成型体 摩尔比(BaO / ZnO)大于1。

    Optical glass, preform for precision press molding and method of manufacturing thereof, optical element and method of manufacturing thereof
    55.
    发明申请
    Optical glass, preform for precision press molding and method of manufacturing thereof, optical element and method of manufacturing thereof 有权
    光学玻璃,精密加压成型用预成型体及其制造方法,光学元件及其制造方法

    公开(公告)号:US20070247721A1

    公开(公告)日:2007-10-25

    申请号:US11723468

    申请日:2007-03-20

    IPC分类号: G02B3/00

    CPC分类号: C03C3/068

    摘要: The present invention relates to an optical glass having a refractive index (nd) of greater than or equal to 1.65 and an Abbé number (ν (nu)d) of greater than or equal to 50 for use in precision press molding. The glass exhibits that a ratio α (alpha)1/α (alpha)2 is less than 17 when temperature denoting maximum value of differential in amount of elongation of glass relative to temperature differential DELTAT (where DELTAT denotes a constant value of 1° C. or less) over a temperature range from glass transition temperature (Tg) to sag temperature (Ts) is denoted as T1, average coefficient of linear expansion over a range from T1-5° C. to T1+5° C. is denoted as alpha1, and average coefficient of linear expansion over a range from the glass transition temperature (Tg)−160° C. to the glass transition temperature (Tg)−140° C. is denoted as alpha2.

    摘要翻译: 本发明涉及一种折射率(nd)大于或等于1.65的雅培数(nu(nu)d)大于或等于50的光学玻璃,用于精密加压成型。 玻璃表明当温度表示玻璃相对于温差DELTAT的伸长量的差异的最大值时,α(α)1 /α(α)2的比值小于17(其中DELTAT表示1℃的常数值 表示为从玻璃化转变温度(Tg)至下垂温度(Ts)的温度范围为T1,表示在T1-5℃〜T1 + 5℃的范围内的平均线膨胀系数 作为α1,在玻璃化转变温度(Tg)-160℃至玻璃化转变温度(Tg)-140℃的范围内的平均线膨胀系数表示为α2。

    Exposure apparatus, and device manufacturing method
    56.
    发明申请
    Exposure apparatus, and device manufacturing method 审中-公开
    曝光装置和装置制造方法

    公开(公告)号:US20060209289A1

    公开(公告)日:2006-09-21

    申请号:US11371100

    申请日:2006-03-09

    申请人: Yasuhiro Fujiwara

    发明人: Yasuhiro Fujiwara

    IPC分类号: G03B27/62

    CPC分类号: G03F7/707

    摘要: Disclosed is an exposure apparatus for exposing a substrate through a reticle, wherein the apparatus includes a clamp having a circumferential protrusion and a pin disposed inside the circumferential protrusion, a reticle stage configured to support the clamp, and an attraction mechanism configured to attract the reticle, placed on the circumferential protrusion, toward the pin.

    摘要翻译: 公开了一种用于通过掩模版曝光基板的曝光装置,其中所述装置包括具有周向突起的夹具和设置在所述周向突起内部的销,配置为支撑所述夹具的标线片台,以及被配置为吸引所述掩模版 ,放置在周向突起上,朝向销。

    Optical glass, preform for press molding and optical element
    57.
    发明申请
    Optical glass, preform for press molding and optical element 有权
    光学玻璃,用于压制成型的预成型件和光学元件

    公开(公告)号:US20050143250A1

    公开(公告)日:2005-06-30

    申请号:US10504595

    申请日:2003-10-29

    IPC分类号: C03C3/17 C03C3/19

    摘要: An optical glass has optical constants represented by a refractive index (nd) of 1.46 to 1.58 and an Abbe's number (νd) of 65 to 74, has excellent hot preform shapeability, low softenability and excellent climate resistance, and comprises, by mol %, 45 to 65% of P2O5, 8 to 19% of Al2O3, 5 to 30% of MgO, 1 to 25% of a total of Li2O, Na2O and K2O, 0 to 16% of B2O3, 0 to 25% of ZnO, 0 to 25% of CaO, 0 to 25% of SrO, 0 to 30% of BaO, 0 to 10% of La2O3, 0 to 10% of Gd2O3, 0 to 10% of Y2O3, 0 to 10% of Yb2O3 and 0 to 10% of Lu2O3, and the total content of the above components of the optical glass is at least 95%.

    摘要翻译: 光学玻璃具有折射率(nd)为1.46〜1.58,阿贝数(nud)为65〜74的光学常数,具有优异的热成型性,低软化性和优异的耐气候性, 45〜65%的P 2 O 5,8〜19%的Al 2 O 3,5〜 30%的MgO,1〜25%的Li 2 O,Na 2 O和K 2 O,0〜16% 的B 2 O 3 3,0〜25%的ZnO,0〜25%的CaO,0〜25%的SrO,0〜30%的BaO,0〜 10%的La 2 O 3 3,0〜10%的Gd 2 O 3 3,0〜10% 的Y 2 O 3 O 3,0〜10%的Yb 2 O 3 3和0〜10%的Lu 光学玻璃的上述成分的总含量为95%以上。

    Preforms for precision press molding, optical elements, and methods of manufacturing the same
    58.
    发明申请
    Preforms for precision press molding, optical elements, and methods of manufacturing the same 有权
    用于精密压模成型的预制件,光学元件及其制造方法

    公开(公告)号:US20050032621A1

    公开(公告)日:2005-02-10

    申请号:US10878618

    申请日:2004-06-29

    IPC分类号: C03C3/062 C03C3/16 C03C3/21

    CPC分类号: C03C3/21 C03C3/062 C03C3/16

    摘要: Preforms for precision press molding made of optical glass, optical elements, and methods of manufacturing the same are provided. The preforms are suited to precision press molding having a broad range of dispersion characteristics, a low glass transition temperature, a low sag point, and good resistance to devitrification while containing no PbO. The optical element is obtained by precision press molding the preform. One example of the preform has a refractive index (nd) of greater than or equal to 1.7 and an Abbé number (vd) of less than or equal to 32. The other example of the preform has an Abbé number (vd) exceeding 32.

    摘要翻译: 提供了由光学玻璃,光学元件及其制造方法制成的精密压制成型的预制件。 预成型件适合于具有宽范围的分散特性,低玻璃化转变温度,低凹陷点以及良好的耐失透性同时不含PbO的精密压模成型。 光学元件通过精密压模成型而获得。 预成型件的一个实例具有大于或等于1.7的折射率(nd)和小于或等于32的Abbé数(vd)。预成型件的另一个实例具有超过32的Abbé数(vd)。

    Heat sink, method manufacturing the same and cooling apparatus using the same
    59.
    发明授权
    Heat sink, method manufacturing the same and cooling apparatus using the same 失效
    散热器,制造方法及使用其的冷却装置

    公开(公告)号:US06397926B1

    公开(公告)日:2002-06-04

    申请号:US09501765

    申请日:2000-02-10

    IPC分类号: H05K720

    摘要: A heatsink of the present invention has a column having a heat conducting plate with a heat receiving face contacting a heat producing element. On the side faces of the column are a plurality of first slits and a plurality of second slits disposed transversely to the plurality of first slits. These slits form a plurality of pillar-type protrusions functioning as fins for cooling. The depths of the first and second slits in the column are different, and this difference in levels are used to cause the fluid for cooling to form a turbulent flow. A cross section of the column tapers off gradually or in stages as the vertical distance increases from the heat receiving face. A cooling apparatus for the present invention includes a cooling means mounted on the heatsink of the present invention. The cooling apparatus for the present invention enjoys a high cooling ability and reduced size.

    摘要翻译: 本发明的散热器具有具有导热板的列,该导热板具有与发热元件接触的热接收面。 在该列的侧面是多个第一狭缝和横向于多个第一狭缝设置的多个第二狭缝。 这些狭缝形成多个作为用于冷却的翅片的柱状突起。 列中的第一和第二狭缝的深度不同,并且该水平差用于使流体冷却以形成湍流。 当垂直距离从受热面增加时,柱的横截面逐渐逐渐逐渐变细。 本发明的冷却装置包括安装在本发明的散热片上的冷却装置。 本发明的冷却装置具有高的冷却能力和减小的尺寸。