Scanning optical system
    51.
    发明授权
    Scanning optical system 失效
    扫描光学系统

    公开(公告)号:US07042608B2

    公开(公告)日:2006-05-09

    申请号:US10663643

    申请日:2003-09-17

    IPC分类号: G02B26/08

    摘要: In a scanning optical system, a partial light blocking member having an annular light blocking part (for blocking off part of the incident laser beam entering the annular area around the central axis of the laser beam) is placed on an optical path between the laser light source and the polygon mirror. The scanning optical system including such a partial light blocking member is installed in a printer. By the effect of the partial light blocking member, the intensity of side lobes (several rings of light accompanying the main beam) is prevented from exceeding a threshold value even when optical surfaces of an imaging optical system of the scanning optical system have certain microscopic undulations, by which black stripes occurring in halftone printing can be eliminated.

    摘要翻译: 在扫描光学系统中,具有环形遮光部分(用于阻挡入射到激光束的中心轴线周围的环形区域的入射激光束的一部分)的局部遮光构件被放置在激光 源和多面镜。 包括这种部分遮光构件的扫描光学系统安装在打印机中。 通过部分遮光构件的作用,即使在扫描光学系统的成像光学系统的光学表面具有特定的微小波动的情况下,也防止了旁瓣(伴随主光束的几个光环)的强度超过阈值 可以消除在半色调印刷中发生的黑色条纹。

    Objective lens for optical disc
    52.
    发明授权
    Objective lens for optical disc 失效
    光学镜片

    公开(公告)号:US07035193B2

    公开(公告)日:2006-04-25

    申请号:US11033741

    申请日:2005-01-13

    IPC分类号: G11B7/00

    摘要: An objective lens for recording data to and/or reproducing data from first and second optical discs. The objective lens is provided with at least one surface including a plurality of annular zones divided by steps. The steps has functions of phase shifting a wavefront of light passing through the plurality of annular zones so that a beam spot formed at a converging point of an average wavefront of the wavefront phase shifted by the steps is used for the first and second optical discs. The plurality of annular zones of the at least one surface includes at least one annular zone structure which includes first and second annular zone groups, each of which has at least three steps for phase shifting the wavefront in a first direction, and a first return step which is a step formed at a boundary between the first and second annular zone groups. The first return step phase shifts the wavefront in a second direction opposite to the first direction. An absolute value |Δψ1| of a phase shifting amount of the first light beam given by the first return step satisfies a condition: 6π

    摘要翻译: 用于将数据记录到第一和第二光盘和/或从第一和第二光盘再现数据的物镜。 物镜设置有至少一个表面,其包括被台阶分割的多个环形区域。 这些步骤具有使通过多个环形区域的光的波前相移的功能,使得在第一和第二光盘处使用由步骤偏移的波前相位的平均波前的聚光点处形成的束斑。 所述至少一个表面的多个环形区域包括至少一个环形区域结构,其包括第一和第二环形区域组,每个环形区域组具有至少三个步骤,用于沿第一方向相移所述波阵面;以及第一返回步骤 其是在第一和第二环形区域组之间的边界处形成的台阶。 第一返回阶段相对于与第一方向相反的第二方向偏移波前。 绝对值| Deltapsi1 | 由第一返回步骤给出的第一光束的相移量满足条件:6pi <| Deltapsi1 | <14pi。 。 。 (1)。 绝对值| Deltapsi1 | 由第一返回步骤给出的第一光束的相移量的值小于由第一环形区域组给出的相移量之和的绝对值和相移量之和的绝对值中的较大值 由第二个环形区组给出。

    Scanning electron microscope and sample observing method using it
    53.
    发明授权
    Scanning electron microscope and sample observing method using it 有权
    扫描电子显微镜和使用它的样品观察方法

    公开(公告)号:US06963067B2

    公开(公告)日:2005-11-08

    申请号:US10750838

    申请日:2004-01-05

    CPC分类号: H01J37/21 H01J37/28

    摘要: The invention provides a sample observation method capable of understanding the three-dimensional shape of a sample in a wider range. The observation method of the invention calculates heights (height differences) in the whole domain of an image, from plural sheets of images of different field-of-view angles, being in focus over the whole image, attained by means of the focal depth expanding function to thereby create a map (Z map) of the height information by each pixel, and displays a three-dimensional image as a bird's-eye view. The method also displays to superpose a Z map attained from image signals reflecting the surface structure on a Z map attained from image signals reflecting the composition information with different colors, which makes it possible to clearly understand the spatial distribution of a substance of unique composition inside the sample.

    摘要翻译: 本发明提供一种能够更宽范围地理解样品的三维形状的样本观察方法。 本发明的观察方法,通过使焦点深度扩大获得的图像的整个图像的整个区域的高度(高度差)从不同的视野角的多张图像对焦在整个图像上。 功能,从而由每个像素创建高度信息的地图(Z图),并将三维图像显示为鸟瞰图。 该方法还显示为从反映具有不同颜色的合成信息的图像信号获得的Z映射上反映表面结构的图像信号中叠加的Z映射,这使得可以清楚地了解内部独特成分的物质的空间分布 例子。

    Objective lens for optical head
    54.
    发明授权
    Objective lens for optical head 失效
    光学头物镜

    公开(公告)号:US06741402B2

    公开(公告)日:2004-05-25

    申请号:US09973114

    申请日:2001-10-10

    IPC分类号: G02B308

    摘要: A single element objective lens for an optical disc drive converges a laser beam, which is emitted by a laser source, on a data recording surface of an optical disc through a protective layer of the optical disc. One surface of the objective lens is divided into a central area including an optical axis thereof and a peripheral area surrounding the central area. The peripheral area is provided with a diffraction lens structure formed by a plurality of concentric annular zones including minute steps. The central area is a continuous surface having no stepped portions. The diffraction lens structure compensates for variation of converging characteristic of the objective lens due to a change of a temperature.

    摘要翻译: 用于光盘驱动器的单个元件物镜将由激光源发射的激光束通过光盘的保护层会聚在光盘的数据记录表面上。 物镜的一个表面被分成包括其光轴的中心区域和围绕中心区域的周边区域。 周边区域设置有由包括微小步骤的多个同心环形区域形成的衍射透镜结构。 中心区域是没有阶梯部分的连续表面。 衍射透镜结构由于温度的变化而补偿物镜的会聚特性的变化。

    Scanning drawing apparatus
    55.
    发明授权
    Scanning drawing apparatus 失效
    扫描绘图仪

    公开(公告)号:US06326609B1

    公开(公告)日:2001-12-04

    申请号:US09414607

    申请日:1999-10-08

    申请人: Shuichi Takeuchi

    发明人: Shuichi Takeuchi

    IPC分类号: B41J247

    CPC分类号: G02B26/127 B41J2/473

    摘要: A scanning drawing apparatus includes a light source, a beam separator for dividing the laser beam into a drawing beam and a monitor beam. A drawing optical path through which the drawing beam travels, and a monitor optical path through which the monitor beam travels are defined. The drawing beam passed through the drawing optical path and the monitor beam passed through the monitor optical path are combined by a beam combiner, and then deflected by a scanning deflector. The deflected beams pass through a scanning lens to form beam spots on an image surface and a monitor scale that is equivalent to the image surface, respectively. The monitor optical path has a different optical path length from the drawing optical path and/or effective diameters of optical elements in the monitor optical path is different from effective diameters of optical elements in the drawing optical path. A deviation of the beam spot of the drawing beam on the image surface due to an inclination or a shift of the light source is equal to a deviation of the beam spot of the monitor beam on the monitor scale in terms of directions and amounts.

    摘要翻译: 扫描绘图装置包括光源,用于将激光束分成拉制光束的光束分离器和监视光束。 绘制光束行进的绘图光路和监视器光束通过的监视器光路被限定。 拉制光束通过绘图光路,并且通过监视器光路的监视光束通过光束组合器组合,然后由扫描偏转器偏转。 偏转的光束通过扫描透镜,以在图像表面上形成光束斑点,并分别与图像表面相当的监视器刻度。 监视光路具有与绘图光路不同的光路长度和/或监视光路中的光学元件的有效直径与绘图光路中的光学元件的有效直径不同。 由于光源的倾斜或偏移导致的图像表面上的牵引光束的光束点的偏离等于监视器光束在方向和量方面的监视器光束的偏差。

    SAMPLE PREPARATION APPARATUS, SAMPLE PREPARATION METHOD, AND CHARGED PARTICLE BEAM APPARATUS USING THE SAME
    56.
    发明申请
    SAMPLE PREPARATION APPARATUS, SAMPLE PREPARATION METHOD, AND CHARGED PARTICLE BEAM APPARATUS USING THE SAME 审中-公开
    样品制备装置,样品制备方法和使用其的带电粒子束装置

    公开(公告)号:US20140124367A1

    公开(公告)日:2014-05-08

    申请号:US14128646

    申请日:2012-04-25

    摘要: There is provided an apparatus as well as a method for polishing, observing, and additionally polishing a sample in a vacuum with a charged particle beam apparatus furnished with no other apparatus.The charged particle beam apparatus has a vacuum chamber equipped with a liquid bath containing an ion liquid and a supersonic vibration means. With the ion liquid kept in contact with a polishing target area of the sample, supersonic vibration is propagated in the ion liquid to polish the sample.Because the charged particle beam apparatus permits polishing, observation, and additional polishing of the sample in a vacuum without being furnished with any additional apparatus, throughput is improved and the effects of the atmosphere on the sample are prevented.

    摘要翻译: 提供了一种装置以及用没有其他装置的带电粒子束装置在真空中抛光,观察和附加抛光样品的方法。 带电粒子束装置具有配备有含有离子液体和超音速振动装置的液体浴的真空室。 当离子液体与样品的抛光目标区域保持接触时,在离子液体中传播超音速振动以抛光样品。 由于带电粒子束装置允许在没有任何附加装置的情况下在真空中抛光,观察和附加抛光样品,因此提高了生产能力并防止了样品对样品的影响。

    Optical information recording/reproducing apparatus and objective optical system for the same
    58.
    发明授权
    Optical information recording/reproducing apparatus and objective optical system for the same 失效
    光信息记录/再现装置和物镜光学系统相同

    公开(公告)号:US08483033B2

    公开(公告)日:2013-07-09

    申请号:US13547342

    申请日:2012-07-12

    IPC分类号: G11B7/135

    摘要: An objective optical system for an optical information recording/reproducing apparatus, at least one surface of the objective optical system being configured to be a phase shift surface having a phase shift structure, wherein: the phase shift surface has a first area contributing to converging first, second and third light beams onto recording surfaces of first, second and third optical discs, respectively; in the first area, the phase shift surface has at least two types of phase shift structures including a first phase shift structure having first steps and a second phase shift structure having second steps; the phase shift surface has a plurality of combinations of annular zones which satisfy a condition: 0.95

    摘要翻译: 一种用于光学信息记录/再现装置的物镜光学系统,所述物镜光学系统的至少一个表面被配置为具有相移结构的相移表面,其中:所述相移表面具有有助于首先收敛的第一区域 ,第二和第三光束分别连接到第一,第二和第三光盘的记录表面上; 在第一区域中,相移表面具有至少两种类型的相移结构,包括具有第一步骤的第一相移结构和具有第二步骤的第二相移结构; 相移面具有满足条件:0.95

    Optical information recording/reproducing apparatus and objective lens for the same
    59.
    发明授权
    Optical information recording/reproducing apparatus and objective lens for the same 失效
    光信息记录/再现装置和物镜相同

    公开(公告)号:US08270279B2

    公开(公告)日:2012-09-18

    申请号:US13069762

    申请日:2011-03-23

    IPC分类号: G11B7/00

    摘要: An objective lens for an optical information recording/reproducing apparatus, at least one of optical surfaces of the objective lens comprising a diffraction surface having a diffraction structure defined by an optical path difference function, and wherein: the diffraction surface has a first region contributing to converging first and second light beams and having a diffraction structure configured such that diffraction orders at which the diffraction efficiencies are maximized for the first and second light beams are 1st order; the diffraction surface has a second region located outside the first region, and the second region is configured to contribute to converging the first light beam and not to contribute to convergence of the second light beam; and the objective lens satisfies a condition: 35

    摘要翻译: 一种用于光学信息记录/再现装置的物镜,所述物镜的光学表面中的至少一个包括具有由光程差函数限定的衍射结构的衍射面,并且其中:所述衍射面具有有助于 会聚第一和第二光束并且具有被构造为使得第一和第二光束的衍射效率最大化的衍射级为1级的衍射结构; 所述衍射面具有位于所述第一区域外的第二区域,所述第二区域被配置为有助于会聚所述第一光束,并且不有助于所述第二光束的会聚; 并且物镜满足条件:35

    Objective lens for optical pick-up
    60.
    发明授权
    Objective lens for optical pick-up 有权
    物镜用于光学拾取

    公开(公告)号:US08089705B2

    公开(公告)日:2012-01-03

    申请号:US12103910

    申请日:2008-04-16

    IPC分类号: G02B13/18

    CPC分类号: G11B7/1374 G11B7/22

    摘要: There is provided an objective lens for an optical pick-up. The objective lens includes a first surface on a light source side, and a second surface on an optical disc side. The first surface has a convex shape. The objective lens is formed to be a single-element lens having a numerical aperture of 0.75 or more. In this configuration, the objective lens satisfies a condition: 0.95

    摘要翻译: 提供了用于光学拾取器的物镜。 物镜包括光源侧的第一表面和光盘侧的第二表面。 第一表面具有凸形。 物镜形成为数值孔径为0.75以上的单像素透镜。 在该结构中,物镜满足以下条件:0.95 <(n-1)·tan&Thetas; max <1.50(1)其中&thetas; max表示与第一表面相对于光轴的法线的最大角度 第一表面的有效直径,n表示物镜的折射率。