公开(公告)号：US20030222218A1

公开(公告)日：2003-12-04

申请号：US10448047

申请日：2003-05-30

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinya Nozu

IPC: G01J005/00

CPC classification number: G01J5/06 ,  G01J5/16 ,  H01L2224/48091 ,  H01L2924/3025 ,  H01L2924/00014 ,  H01L2924/00

Abstract: An infrared sensor includes a stem, a thermopile element disposed on a component-mounting surface of the stem, a case for covering the thermopile element, an inner cap that covers the thermopile element in order to shield infrared rays generated by secondary emission from an inside surface of the case, and a thermo-sensing element disposed inside the inner cap. In the infrared sensor, the case includes an infrared ray transmitting window for transmitting infrared rays radiating from an object. The inner cap is thermally coupled to the stem by being disposed on the component-mounting surface of the stem, and includes an opening for passing the infrared rays from the infrared ray transmitting window of the case towards the thermopile element. The thermopile element is disposed inside a recess in the component-mounting surface or so as to be substantially surrounded by a highly thermally conductive substrate disposed on the component-mounting surface.

Abstract translation: 一种红外线传感器，包括：杆，设置在杆的部件安装表面上的热电堆元件，用于覆盖热电堆元件的壳体;覆盖热电堆元件的内盖，以便屏蔽来自内部的二次发射产生的红外线 壳体的表面和设置在内盖内部的热敏元件。 在红外传感器中，壳体包括用于发射从物体辐射的红外线的红外线传输窗口。 内盖通过设置在杆的部件安装表面上而热连接到杆上，并且包括用于将来自壳体的红外线传输窗口的红外线传递到热电堆元件的开口。 热电堆元件设置在部件安装表面中的凹部内，或者被设置在部件安装表面上的高导热性基板基本包围。

公开(公告)号：US20030206573A1

公开(公告)日：2003-11-06

申请号：US10452551

申请日：2003-05-30

Inventor： John P. Gotthold ,  Anh N. Hoang ,  Surinder S. Sandhu ,  John Leonard Shaver ,  Terry M. Stapleton

IPC: G01J005/00

CPC classification number: G01J5/02 ,  G01J1/28 ,  G01J1/58 ,  G01J5/0003 ,  G01J5/0007 ,  G01J5/0205 ,  G01J5/025 ,  G01J5/046 ,  G01J5/08 ,  G01J5/0821 ,  G01J5/084 ,  G01J5/0887 ,  G01K1/14 ,  G01K11/3213

Abstract: A temperature sensor utilizing optical temperature measuring techniques is constructed to make firm contact with a surface whose temperature is being measured, an example application being the monitoring of semiconductor wafers or flat panel displays while being processed. A cap is mounted near but spaced apart from an end of a lightwave guide, with a resilient element that applies force of the cap against a surface whose temperature is being measured as the cap is urged toward the optical fiber end. An optical temperature sensing element, such as luminescent material or a surface of known emissivity, is carried within the cap. A bellows with a closed end conveniently serves as both the cap and the resilient element. An alternative temperature measuring device installs an optical temperature sensing material within a test substrate behind an optical window, and then views the sensing material through the window.

公开(公告)号：US20030173518A1

公开(公告)日：2003-09-18

申请号：US10366458

申请日：2003-02-14

Applicant: Fuji Photo Optical Co., Ltd.

Inventor： Takao Ozaki

IPC: G01J005/00

CPC classification number: H04N5/2226 ,  H04N5/23212 ,  H04N5/33 ,  H04N5/332

Abstract: In a visible/infrared imaging camera comprising lightwave separating means for separating light into visible and infrared light components, and visible and infrared light camera units for capturing visible and infrared light images formed by the visible and infrared light components, respectively, the infrared light camera unit is supported so as to be movable axially of the infrared light component emitted from the lightwave separating means, thereby adjusting the focusing of the infrared light image.

Abstract translation: 在包括用于将光分离为可见光和红外光分量的光波分离装置的可见/红外成像相机和用于捕获由可见光和红外光分量形成的可见光和红外光图像的可见光和红外光相机单元中，红外光照相机 单元被支撑为能够从从光波分离装置发射的红外线分量轴向移动，从而调节红外光图像的聚焦。

公开(公告)号：US20030168598A1

公开(公告)日：2003-09-11

申请号：US10301418

申请日：2002-11-21

Inventor： Naoki Oda

IPC: G01J005/00

CPC classification number: G01J5/02 ,  G01J5/023 ,  G01J5/20

Abstract: A thermal infrared detector has a substrate having a readout circuit and a plurality of pixels patterned on the substrate at a pitch p in the range of 15nullpnull50 (nullm). Each of the pixels has a photo-sensitive area including a thin film of bolometer and spaced from the substrate, two beams by which the photo-sensitive area is supported on the substrate, and interconnections formed respectively on the beams and connecting the readout circuit and the thin film of bolometer to each other. The length of each of the beams is determined in view of the patterning accuracy of a stepper used to produce the thermal infrared detector, based on the beam length index which is calculated by dividing the length of each of the beams by one-quarter of the peripheral length of the pixel. The beam length index is given by an approximate expression using the pixel pitch as a parameter, determined depending on the thermal conductivity of the interconnection material, etc. based on an equation representing temperature resolution.

Abstract translation: 热红外检测器具有衬底，其具有读出电路和在衬底上以15≤p≤50（mum）的间距p图案化的多个像素。 每个像素具有包括测辐射热计薄膜和与衬底间隔开的光敏区域，光敏区域被支撑在衬底上的两个光束和分别形成在光束上并连接读出电路和 辐射热计的薄膜彼此。 考虑到用于产生热红外探测器的步进器的图形精度，基于通过将每个光束的长度除以四分之一而计算的光束长度指数来确定每个光束的长度 像素的周长。 基于表示温度分辨率的方程，通过使用像素间距作为参数，根据互连材料的热导率确定的参数的近似表达式给出光束长度指数。

公开(公告)号：US20030160171A1

公开(公告)日：2003-08-28

申请号：US10085226

申请日：2002-02-27

Inventor： William J. Parrish ,  Jeffrey L, Heath ,  Naseem Y. Aziz ,  Joseph Kostrzewa ,  George H. Poe

IPC: G01J005/00

CPC classification number: H04N5/365 ,  G01J5/22 ,  G01J5/522 ,  H04N5/33 ,  H04N5/361 ,  H04N5/3651 ,  H04N5/3655

Abstract: Microbolometer circuitry and methods are disclosed to allow an individual microbolometer or groups of microbolometers, such as a microbolometer focal plane array, to operate over a wide temperature range. Temperature compensation is provided, such as through circuitry and/or calibration methods, to reduce non-uniform behavior over the desired operating temperatures. For example, the relative mismatch in the temperature coefficient of resistance of an active microbolometer and a reference microbolometer is compensated by employing a variable resistor in series with the active microbolometer. The variable resistor can be calibrated over the desired temperature range to minimize the affect of the relative mismatch. Various other circuit implementations, calibration methods, and processing of the microbolometer circuit output can be employed to provide further compensation.

Abstract translation: 公开了微测辐射热量计电路和方法，以允许各自的微测辐射热计或微量热计的组，例如微测热计焦平面阵列在宽的温度范围内运行。 提供温度补偿，例如通过电路和/或校准方法，以减少在所需操作温度下的不均匀性。 例如，通过采用与活性微测热计串联的可变电阻来补偿有源微测热计和参考微测热计的电阻温度系数的相对不匹配。 可变电阻器可以在所需的温度范围内校准，以最小化相对不匹配的影响。 可以采用各种其他电路实施方案，校准方法和微测热计电路输出的处理来提供进一步的补偿。

公开(公告)号：US20030146383A1

公开(公告)日：2003-08-07

申请号：US09804945

申请日：2001-03-13

Inventor： Jonathan P. Knauth ,  Steven M. Balick

IPC: G01J005/00

CPC classification number: G01J5/24 ,  H04N5/33 ,  H04N5/361 ,  H04N5/365

Abstract: A method and apparatus for correction of temperature-induced variations in the analog output characteristics of a microbolometer detector in an infrared detecting focal plane array utilizing electronic means to correct for the temperature variation of the individual microbolometer detector. The electronic circuitry and associated software necessary for implementation is also described.

Abstract translation: 一种用于校正红外检测焦平面阵列中微辐射热计检测器的模拟输出特性的温度引起的变化的方法和装置，利用电子装置来校正各个微测热计检测器的温度变化。 还描述了实现所需的电子电路和相关软件。

公开(公告)号：US20030142723A1

公开(公告)日：2003-07-31

申请号：US10350880

申请日：2003-01-24

Inventor： Laird W. Laurence ,  Jack C. Laurence ,  James D. King

IPC: G01J005/00

CPC classification number: G01J5/08 ,  G01J5/0022 ,  G01J5/0025 ,  G01J5/089 ,  G01J2005/068 ,  G01K11/006

Abstract: A method and apparatus for measuring the core temperature of an animal or human. Emissions from the eyeball are detected, at one or more wavelengths selected on the basis of various factors, including the ability of that wavelength to reach the interior of the eyeball. An illumination marker shines a spot of light on the eyeball, such that the spot corresponds to the area from which emissions are being detected.

Abstract translation: 一种用于测量动物或人的核心温度的方法和装置。 在基于各种因素选择的一个或多个波长处检测来自眼球的排放物，包括该波长到达眼球内部的能力。 照明标记物将眼睛上的光照射到眼球上，使得斑点对应于检测到排放物的区域。

公开(公告)号：US20030132386A1

公开(公告)日：2003-07-17

申请号：US10044436

申请日：2002-01-14

Inventor： William Carr ,  Dadi Setiadi

IPC: G01J005/00

CPC classification number: G01J5/061 ,  G01J3/26 ,  G01J3/36 ,  G01J5/04 ,  G01J5/046 ,  G01J5/10 ,  G01J5/602 ,  G01J2005/0077

Abstract: This invention is a micromachined sensor pixel structure that can be fabricated either as a discrete sensor or in array form with application to thermal sensing of radiation received from various wavelength emitters. The transmissivity of a thermally-isolated microplatform is a sensitive function of temperature. This transmissivity is modulated by incident radiation from sources including infrared sources. The transmissivity of a micromachined structure is interrogated by means of an optical carrier. Readout is obtained by means of conventional silicon optical sensers or imagers. A multiplicity of micromachined pixels can be tailored for specific wavelengths permitting the array to operate as a multispectral imager with windows ranging from ultraviolet to millimeter wavelengths.

Abstract translation: 本发明是一种微机械传感器像素结构，其可以被构造为离散传感器或阵列形式，其应用于从各种波长发射器接收的辐射的热感测。 热隔离微平台的透射率是温度的敏感函数。 这种透射率由来自包括红外源的源的入射辐射调制。 通过光学载体询问微加工结构的透射率。 通过传统的硅光学传感器或成像器获得读数。 可以针对特定波长调整多个微加工像素，允许阵列作为具有从紫外到毫米波长的窗口的多光谱成像器操作。

公开(公告)号：US20030118076A1

公开(公告)日：2003-06-26

申请号：US10238546

申请日：2002-09-10

Applicant: PerkinElmer Optoelectronics GmbH

Inventor： Jorg Schieferdecker ,  Martin Hausner ,  Wilhelm Leneke ,  Marion Simon

IPC: G01J005/00

CPC classification number: G01J5/02 ,  G01J5/0225 ,  G01J5/024 ,  G01J5/04 ,  G01J5/046 ,  G01J5/10 ,  G01J5/12 ,  G01J5/20 ,  H01L2224/48091 ,  H01L2924/10253 ,  H01L2924/30107 ,  H01L2924/00014 ,  H01L2924/00

Abstract: A sensor for measuring a temperature by means of a heat-sensitive area applied onto and/or underneath a membrane, the membrane being arranged above a recess. The recess is etched by a reactive ion etching method such that it is fully defined laterally by side walls arranged at an angle between 80null and 100null relative to the membrane, adjoining side walls being arranged at an angle of at least 40null relative to one another.

Abstract translation: 一种用于通过施加到膜上和/或膜下方的热敏区域来测量温度的传感器，所述膜布置在凹部上方。 通过反应离子蚀刻方法蚀刻凹部，使得其相对于膜以相对于膜的角度为80°至100°的侧壁被侧壁完全限定，相邻的侧壁相对于膜相对于至少40°的角度布置 另一个。

公开(公告)号：US20030116711A1

公开(公告)日：2003-06-26

申请号：US10310586

申请日：2002-12-05

Applicant: YOKOGAWA ELECTRIC CORPORATION, a Japan corporation

Inventor： Hitosh Hara ,  Naoki Kishi ,  Makoto Noro ,  Hideto Iwaoka ,  Kentaro Suzuki

IPC: G01J005/00

CPC classification number: G01J3/26 ,  G01N21/3504

Abstract: A Fabry-Perot filter device for selectively transmitting three wavelength bands of infrared radiation, including a reference light band, wherein the filter device comprises a fixed mirror formed on a substrate; a movable mirror arranged opposite to the fixed mirror with a gap formed therebetween so that the movable mirror is displaced with respect to the fixed mirror by applying an external force; a fixed electrode formed on the fixed mirror; and a movable electrode formed on the movable mirror and arranged opposite to the fixed electrode wherein the movable electrode is displaced by applying a potential difference across the fixed and movable electrodes so that the width of the gap is varied in at least three steps, whereby at least three wavelength bands of infrared radiation are selectively transmitted through the filter device.

Abstract translation: 一种用于选择性地透射包括参考光带的红外辐射的三个波长带的法布里 - 珀罗滤波器装置，其中所述滤波器装置包括形成在基板上的固定反射镜; 与固定反射镜相对设置的可动镜，其间形成有间隙，使得可移动镜通过施加外力相对于固定镜移位; 形成在固定镜上的固定电极; 以及可动电极，形成在可动反射镜上并且与固定电极相对设置，其中可动电极通过在固定电极和可移动​​电极之间施加电位而移位，使得间隙的宽度至少在三个步骤中变化，由此在 红外辐射的最少三个波长带选择性地透过滤光器件。