公开(公告)号：US20030118076A1

公开(公告)日：2003-06-26

申请号：US10238546

申请日：2002-09-10

Applicant: PerkinElmer Optoelectronics GmbH

Inventor： Jorg Schieferdecker ,  Martin Hausner ,  Wilhelm Leneke ,  Marion Simon

IPC: G01J005/00

CPC classification number: G01J5/02 ,  G01J5/0225 ,  G01J5/024 ,  G01J5/04 ,  G01J5/046 ,  G01J5/10 ,  G01J5/12 ,  G01J5/20 ,  H01L2224/48091 ,  H01L2924/10253 ,  H01L2924/30107 ,  H01L2924/00014 ,  H01L2924/00

Abstract: A sensor for measuring a temperature by means of a heat-sensitive area applied onto and/or underneath a membrane, the membrane being arranged above a recess. The recess is etched by a reactive ion etching method such that it is fully defined laterally by side walls arranged at an angle between 80null and 100null relative to the membrane, adjoining side walls being arranged at an angle of at least 40null relative to one another.

Abstract translation: 一种用于通过施加到膜上和/或膜下方的热敏区域来测量温度的传感器，所述膜布置在凹部上方。 通过反应离子蚀刻方法蚀刻凹部，使得其相对于膜以相对于膜的角度为80°至100°的侧壁被侧壁完全限定，相邻的侧壁相对于膜相对于至少40°的角度布置 另一个。