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    Stabilized emitter and method for stabilizing same
    41.
    发明申请
    Stabilized emitter and method for stabilizing same 审中-公开
    稳定发射体及其稳定方法

    公开(公告)号：US20060226753A1

    公开(公告)日：2006-10-12

    申请号：US11387090

    申请日：2006-03-22

    Applicant: Pavel Adamec ,  Stefan Lanio

    Inventor： Pavel Adamec ,  Stefan Lanio

    IPC: H01J9/02

    CPC classification number: H01J1/135 ,  H01J1/18 ,  H01J37/07 ,  H01J37/242 ,  H01J2237/06316

    Abstract: An emitter for a charged particle beam apparatus is provided, said emitter comprising a filament extending between and being attached to first and second supports, an emitter tip attached to the filament, and a stabilization element attached to a third support and to the filament, wherein the first, second and third supports define a triangle so that the stabilization element extends at least partially in a direction perpendicular to the direction in which the filament extends.

    Abstract translation: 提供了一种用于带电粒子束装置的发射器，所述发射器包括在第一和第二支撑件之间延伸并连接到第一和第二支撑件的灯丝，连接到灯丝的发射极尖端以及连接到第三支撑件和灯丝的稳定元件，其中 第一，第二和第三支撑件限定三角形，使得稳定元件至少部分地沿垂直于灯丝延伸方向的方向延伸。

    Beam generating system for electron beam measuring instruments having cathode support structure
    42.
    发明授权
    Beam generating system for electron beam measuring instruments having cathode support structure 失效
    具有阴极支撑结构的电子束测量仪的光束发生系统

    公开(公告)号：US4924136A

    公开(公告)日：1990-05-08

    申请号：US219580

    申请日：1988-07-15

    Applicant: Burkhard Lischke ,  Dieter Winkler

    Inventor： Burkhard Lischke ,  Dieter Winkler

    IPC: H01J37/06 ,  H01J1/18 ,  H01J37/07 ,  H01J49/08

    CPC classification number: H01J37/07 ,  H01J1/18

    Abstract: Beam generating system for electron beam measuring instruments. In prior art beam generators, the life expectancy of directly heated boride cathodes is limited by their thermally disadvantageous mount. The present invention provides a cathode not clamped at the lower end of the crystal shank as was previously standard, but clamped immediately below the cathode tip. The inventive mount of the boride cathode results in the crystal being only insignificantly hotter in the region of the clamping plane than at the electron-emitting tip.

    Abstract translation: 用于电子束测量仪器的光束发生系统。 在现有技术的光束发生器中，直接加热的硼化物阴极的寿命受其不利的安装限制。 本发明提供了一个阴极，不像以前标准那样夹在晶体柄的下端，而是紧紧地夹在阴极尖端的正下方。 本发明的硼化阴极的安装导致晶体在夹持平面的区域中比在电子发射尖端处仅显着更热。

    Structure for Particle Acceleration And Charged Particle Beam Apparatus
    50.
    发明公开
    Structure for Particle Acceleration And Charged Particle Beam Apparatus 审中-公开

    公开(公告)号：US20240242918A1

    公开(公告)日：2024-07-18

    申请号：US18559160

    申请日：2021-05-21

    Applicant: Hitachi High-Tech Corporation

    Inventor： RYO SUGIYAMA ,  Kenji TANIMOTO ,  Shuhei ISHIKAWA

    IPC: H01J37/07 ,  H01J37/063 ,  H01J37/08

    CPC classification number: H01J37/07 ,  H01J37/063 ,  H01J37/08 ,  H01J2237/038 ,  H01J2237/04735 ,  H01J2237/061

    Abstract: Provided are a structure for particle acceleration and a charged particle beam apparatus, which enable the suppression of electric field concentration occurring near a negative electrode part. The structure for particle acceleration includes: a ceramic body 1 having a through hole 10 formed by an inner wall surface; and a negative electrode 2 and a positive electrode 3 which are arranged, respectively, on one end and the other end of the through hole 10 in the ceramic body. The inner wall surface of the ceramic body 1 is configured such that a first region 22, which is electrically connected with the negative electrode 2, and a second region 23, which is electrically connected with the positive electrode 3, are electrically connected to each other. The surface resistivity of the first region 22 is lower than the surface resistivity of the second region 23.

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