公开(公告)号：US20030067645A1

公开(公告)日：2003-04-10

申请号：US09940554

申请日：2001-08-27

Applicant: ADC Denmark ApS.

Inventor： Per Eld Ibsen ,  Claus Friis Pedersen

IPC: H04J014/02

CPC classification number: G01J3/1804 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0213 ,  G01J3/0224 ,  G01J3/0256 ,  G01J3/0291 ,  G01J3/08 ,  G02B6/272 ,  G02B6/2773 ,  G02B6/29311 ,  G02B6/29313 ,  G02B6/2938 ,  G02B2005/1804 ,  H04J14/0221

Abstract: A wavelength division multiplexed device is based on a transmission grating spectrometer having at least two diffractive optical elements. The WDM device provides flexible use and may be widely applied in WDM systems. The device is useful for multiplexing and demultiplexing, channel monitoring, for adding and dropping channels, and for controlling the power in individual channels within a multiple channel signal. The device provides for dynamic control of individual channels, and may be advantageous in use as a gain flattening filter.

Abstract translation: 波分复用装置基于具有至少两个衍射光学元件的透射光栅光谱仪。 WDM设备提供灵活的使用，可广泛应用于WDM系统。 该器件可用于复用和解复用，信道监控，用于添加和删除通道，以及用于控制多通道信号中各个通道的功率。 该装置提供对各个通道的动态控制，并且在用作增益平坦化滤波器时可能是有利的。

公开(公告)号：US20020121608A1

公开(公告)日：2002-09-05

申请号：US10098975

申请日：2002-03-15

Inventor： Richard L. Sandstrom ,  Alexander I. Ershov ,  William N. Partlo ,  Igor V. Fomenkov ,  Scott T. Smith ,  Daniel J. W. Brown

IPC: G01J001/42

CPC classification number: G01J3/26 ,  G01J1/4257 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/12 ,  G01J3/1804 ,  G01J3/22 ,  G01J9/02

Abstract: A high resolution spectral measurement device. A preferred embodiment presents an extremely narrow slit function in the ultraviolet range and is very useful for measuring bandwidth of narrow-band excimer lasers used for integrated circuit lithography. Light from the laser is focused into a diffuser and the diffused light exiting the diffuser illuminates an etalon. A portion of its light exiting the etalon is collected and directed into a slit positioned at a fringe pattern of the etalon. Light passing through the slit is collimated and the collimated light illuminates a grating positioned in an approximately Littrow configuration which disburses the light according to wavelength. A portion of the dispursed light representing the wavelength corresponding to the selected etalon fringe is passed through a second slit and monitored by a light detector. When the etalon and the grating are tuned to the same precise wavelength a slit function is defined which is extremely narrow such as about 0.034 pm (FWHM) and about 0.091 pm (95 percent integral). The bandwidth of a laser beam can be measured very accurately by a directing portion of the laser beam into the insulator and scanning the laser wavelength over a range which includes the monochromator slit wavelength. In a second embodiment the second slit and the light detector is replaced by a photodiod array and the bandwidth of a laser beam is determined by analyzing a set of scan data from the photodiode array. Alternately, the laser wavelength can be fixed near the middle of the spectrum range of the grating spectrometer, and the etalon can be scanned.

Abstract translation: 高分辨率光谱测量装置。 优选的实施例在紫外线范围内呈现非常窄的狭缝功能，并且对于测量用于集成电路光刻的窄带准分子激光器的带宽是非常有用的。 来自激光的光被聚焦成漫射器，并且离开扩散器的漫射光照射标准具。 将其从标准具出射的光的一部分收集并引导到位于标准具的边缘图案处的狭缝中。 通过狭缝的光线被准直，并且准直光照射位于大约Littrow配置中的光栅，其根据波长散发光。 表示对应于所选择的标准具条纹的波长的调度光​​的一部分通过第二狭缝并由光检测器监视。 当标准具和光栅调谐到相同的精确波长时，定义狭缝功能，其极窄，例如约0.034μm（FWHM）和约0.091μm（95％积分）。 通过激光束的引导部分进入绝缘体并且在包括单色器狭缝波长的范围内扫描激光波长，可以非常精确地测量激光束的带宽。 在第二实施例中，第二狭缝和光检测器由光电二极管阵列替代，并且通过分析来自光电二极管阵列的一组扫描数据来确定激光束的带宽。 或者，激光波长可以固定在光栅光谱仪的光谱范围附近，可以扫描标准具。

公开(公告)号：US20020044725A1

公开(公告)日：2002-04-18

申请号：US09855056

申请日：2001-05-14

Inventor： James M. Tedesco ,  James Arns

IPC: G02B006/293 ,  G02B006/34 ,  G02B006/35

CPC classification number: G02B6/34 ,  G01J3/14 ,  G01J3/1804 ,  G02B5/1814 ,  G02B6/29307 ,  G02B6/29308 ,  G02B6/29311 ,  G02B6/29373 ,  G02B6/2938 ,  G02B6/29395 ,  G02B6/4215 ,  G02B27/4244 ,  G02B27/4272

Abstract: Multiplexed grating and grating/prism devices are particularly suited to DWDM optical telecommunications networks, finding utility in optical spectrum analyzers (OSAs) and fiber multiplexer/demultiplexers. The invention may be used to address both single- and dual-band configurations through adjustment of the grating, detector array, and/or inclusion of a fiber-optic switch. As a dual-band OSA covering the C- and L-bands, a device according to the invention may be used to replace two separate OSAs like those currently in production, at only a modest increase in cost relative to a single-band OSA.

Abstract translation: 复用光栅和光栅/棱镜器件特别适用于DWDM光通信网络，可用于光谱分析仪（OSA）和光纤多路复用器/解复用器。 本发明可以用于通过调整光栅，检测器阵列和/或包含光纤开关来解决单频和双频配置。 作为覆盖C波段和L波段的双波段OSA，根据本发明的设备可以用于替代目前在生产中的两个单独的OSA，仅仅是相对于单波段OSA的适度增加的成本。

公开(公告)号：US20020021493A1

公开(公告)日：2002-02-21

申请号：US09829875

申请日：2001-04-10

Inventor： Tsutomu Kaneko

IPC: G02B005/18

CPC classification number: G01J3/1804 ,  G02B17/004 ,  G02B27/4244

Abstract: In a four-stage type monochromator, there is provided a returning reflector 6 for making the dispersing direction of the wavelength of light 13e and 13h incident on and emergent from a plane diffraction grating 4 is reversed before and after its reflection. Angles of incident and emergent light at a time when the light is spectrally separated by the diffraction grating 4 are made identical.

Abstract translation: 在四级型单色仪中，设置有返回反射器6，用于使入射到平面衍射光栅4并在其反射之后的光13e和13h的波长的分散方向反转。 当光被衍射光栅4光谱分离时的入射角和出射光的角度相同。

公开(公告)号：US06219140B1

公开(公告)日：2001-04-17

申请号：US09212991

申请日：1998-12-16

Applicant: Martin C. Kaplan

Inventor： Martin C. Kaplan

IPC: G01J351

CPC classification number: G01J3/51 ,  G01J3/0251 ,  G01J3/10 ,  G01J3/1804 ,  G01J3/502 ,  G01J3/513 ,  H04N1/486 ,  H04N1/603

Abstract: The invention discloses an apparatus for compensation for spectral fluctuation of a light source. Additionally the invention discloses a scanner incorporating the apparatus for compensation. A lamp generates light, which is sent into a light directing device. From the light directing device a sensor means and a spectral monitor means for determining the spectral content of the light from said lamp receive the light. A signal processing means receives the output from said spectral monitor means and said sensor means for producing a signal compensated for spectral fluctuations. A scanner, incorporating the inventive apparatus, additionally comprises a medium for scanning which is positioned between said sensor means and said light directing device and a lens is positioned between said medium for scanning and said sensor means, for imaging said medium onto said sensor means.

Abstract translation: 本发明公开了一种用于补偿光源的光谱波动的装置。 另外，本发明公开了一种结合了补偿装置的扫描仪。 灯产生光，其被发送到光导装置中。 从导光装置，传感器装置和用于确定来自所述灯的光的光谱含量的光谱监测装置接收光。 信号处理装置接收来自所述频谱监视装置和所述传感器装置的输出，用于产生补偿频谱波动的信号。 结合本发明的装置的扫描器还包括位于所述传感器装置和所述导光装置之间的用于扫描的介质，并且透镜位于所述用于扫描的介质和所述传感器装置之间，用于将所述介质成像到所述传感器装置上。

公开(公告)号：US5615008A

公开(公告)日：1997-03-25

申请号：US361314

申请日：1994-12-21

Applicant: Thomas M. Stachelek

Inventor： Thomas M. Stachelek

IPC: G01J3/18 ,  G02B6/34 ,  G01J3/44 ,  G01N21/64 ,  G01N21/65

CPC classification number: G01J3/1804 ,  G02B6/02076 ,  G02B6/29323

Abstract: An analytical system uses a waveguide having embedded Bragg gratings to redirect light from the waveguide outwardly for analytical determination by detectors. The analytical system can be a spectrophotometer, spectrofluorimeter, or other means for analyzing the components of light passed through a sample or emanating from a sample. The system can be single or multi-channeled and can be integrated with a detector onto a single chip device. A manifold with multiple input waveguides and multiple output waveguides is also provided. The interaction point between the input and output waveguides is a target area in which a sample capillary tube can be located.

Abstract translation: 分析系统使用具有嵌入布拉格光栅的波导将来自波导的光重定向到外部用于检测器的分析确定。 分析系统可以是分光光度计，分光荧光计或用于分析通过样品或从样品发出的光的分量的其它手段。 该系统可以是单通道或多通道的，并且可以将检测器集成到单个芯片器件上。 还提供了具有多个输入波导和多个输出波导的歧管。 输入和输出波导之间的相互作用点是其中可以定位样品毛细管的目标区域。

公开(公告)号：US5532818A

公开(公告)日：1996-07-02

申请号：US361369

申请日：1994-12-22

Applicant: Isao Tokumoto

Inventor： Isao Tokumoto

IPC: G01J3/18

CPC classification number: G01J3/1804

Abstract: Incoming light is reflected by a first parabolic mirror for incidence as parallel rays of light on a diffraction grating, the reflected light therefrom is incident on a second parabolic mirror, and the reflected light therefrom is bent by first and second reflecting mirror in a vertical direction and reflected back to the second parabolic mirror, from which it is reflected to the diffraction grating. The reflected light from the grating is reflected again by the first parabolic mirror for incidence on a photodetector. An optical glass plate is inserted in the optical path between the second reflecting mirror and the second parabolic mirror. By the passage through the optical glass plate, the optical axis in a horizontal plane is displaced to ensure the incidence of light from the first parabolic mirror on the photodetector regardless of the wavelength of the incoming light to be measured.

Abstract translation: 入射光被第一抛物面反射镜反射，作为衍射光栅上的平行光线入射，其反射光入射到第二抛物面镜上，其反射光沿垂直方向被第一和第二反射镜弯曲 并反射回第二个抛物面反射镜，从其反射到衍射光栅。 来自光栅的反射光再次被第一抛物面反射镜反射以入射在光电检测器上。 在第二反射镜和第二抛物面镜之间的光路中插入光学玻璃板。 通过光学玻璃板的通过，水平面中的光轴被移位，以确保来自光电检测器上的第一抛物面镜的光的入射，而不管待测量的入射光的波长。

公开(公告)号：US5268737A

公开(公告)日：1993-12-07

申请号：US469006

申请日：1990-01-23

Applicant: Toshiaki Fukuma ,  Tatsumi Sato ,  Hidehisa Nishigaki

Inventor： Toshiaki Fukuma ,  Tatsumi Sato ,  Hidehisa Nishigaki

IPC: G01J3/06 ,  G01J3/18 ,  G01J3/28 ,  G01J3/42

CPC classification number: G01J3/28 ,  G01J3/06 ,  G01J2003/062 ,  G01J3/1804 ,  G01J3/42

Abstract: A spectrophotometer of the type using a pulse motor to rotate a diffraction grating through a speed reducing mechanism has a capability of constructing a conversion table according to a program, by which table a rotation amount of the motor is converted to a corresponding wavelength of output light from a monochromator. The spectrophotometer is capable of designating a calibration mode in which an emission peak at a known wavelength of light from a light source is detected, a coefficient in a conversion equation is determined on the basis of the known wavelength of the emission peak and a rotation amount of the motor at a time when the emission peak is detected, and the determined coefficient is used to construct the conversion table which is then stored in a nonvolatile memory. In an analysis mode, a rotation amount of the motor is converted to a corresponding wavelength in accordance with the conversion table in the nonvolatile memory.

公开(公告)号：US5026160A

公开(公告)日：1991-06-25

申请号：US417623

申请日：1989-10-04

Applicant: Paul B. Dorain ,  Judith B. Snow

Inventor： Paul B. Dorain ,  Judith B. Snow

IPC: G01J3/02 ,  G01J3/18 ,  G01J3/24 ,  G01J3/28

CPC classification number: G01J3/02 ,  G01J3/0218 ,  G01J3/0221 ,  G01J3/0259 ,  G01J3/0294 ,  G01J3/18 ,  G01J3/0256 ,  G01J3/1804 ,  G01J3/24 ,  G01J3/2803

Abstract: A solid monolithic spectrograph utilizes the Czerny-Turner geometric confration. It has a base constructed of BK7 optical glass to which all components are affixed with optical epoxy. The compact spectrograph operates in the visible spectrum in second order thereby permitting it to be smaller by a factor of two than if it operated in first order. The spectrograph is programmable and is capable of simultaneous multi-channel measurements of wavelengths and bandwidths of sources in the visible and near infrared spectral regions.

Abstract translation: 固体单片光谱仪采用Czerny-Turner几何配置。 它具有由BK7光学玻璃构成的基座，所有部件都用光学环氧树脂固定。 紧凑型光谱仪在可见光谱中以二次方式操作，从而允许其比以一级操作的方式更小二倍。 光谱仪是可编程的，并且能够同时对可见光和近红外光谱区域中的光源的波长和带宽进行多通道测量。

公开(公告)号：US4991934A

公开(公告)日：1991-02-12

申请号：US392428

申请日：1989-08-10

Applicant: Michael C. Hettrick

Inventor： Michael C. Hettrick

IPC: G01J1/04 ,  G01J3/06 ,  G01J3/18 ,  G02B5/18

CPC classification number: G02B5/1861 ,  G01J3/06 ,  G01J3/18 ,  G01J2003/069 ,  G01J2003/1847 ,  G01J2003/1852 ,  G01J3/1804

Abstract: An optical system and method comprising a diffraction grating which consists of diffracting elements spaced from one another by unequal distances. Correction of residual defocusing in the image produced by such a grating is accomplished by translating it along its surface. As one embodiment, a monochromator is constructed on which a self-focusing grating scans the value in wavelength which is transmitted between fixed slits by rotation of the grating about an axis fixed in space. Combined with a translation of the grating along its surface, such a monochromator produces a symmetrical image exactly in focus at the exit slit for all scanned wavelengths.

Abstract translation: 一种光学系统和方法，包括衍射光栅，该衍射光栅由衍射元件彼此间隔不等距离组成。 通过这种光栅产生的图像中的残余散焦的校正是通过沿其表面平移来实现的。 作为一个实施例，构建单色仪，其上自聚焦光栅通过围绕固定在空间中的轴旋转光栅扫描在固定狭缝之间传输的波长值。 结合光栅沿着其表面的平移，这样的单色仪在所有扫描波长的出射狭缝处产生精确对焦的对称图像。