THIN FILM TRANSISTOR, THIN FILM TRANSISTOR ARRAY PANEL INCLUDING THE SAME, AND MANUFACTURING METHOD THEREOF
    44.
    发明申请
    THIN FILM TRANSISTOR, THIN FILM TRANSISTOR ARRAY PANEL INCLUDING THE SAME, AND MANUFACTURING METHOD THEREOF 审中-公开
    薄膜晶体管,薄膜晶体管阵列及其制造方法

    公开(公告)号:US20150333154A1

    公开(公告)日:2015-11-19

    申请号:US14808769

    申请日:2015-07-24

    Abstract: The present invention relates to a thin film transistor, a thin film transistor array panel, and a manufacturing method thereof. A thin film transistor according to an exemplary embodiments of the present invention includes: a gate electrode; a gate insulating layer positioned on or under the gate electrode; a channel region overlapping the gate electrode, the gate insulating layer interposed between the channel region and the gate electrode; and a source region and a drain region, facing each other with respect to the channel region, positioned in the same layer as the channel region, and connected to the channel region, wherein the channel region, the source region, and the drain region comprise an oxide semiconductor, and wherein a carrier concentration of the source region and the drain region is larger than a carrier concentration of the channel region.

    Abstract translation: 本发明涉及薄膜晶体管,薄膜晶体管阵列面板及其制造方法。 根据本发明的示例性实施例的薄膜晶体管包括:栅电极; 位于栅极电极上或下方的栅极绝缘层; 与所述栅电极重叠的沟道区,位于所述沟道区与所述栅电极之间的所述栅绝缘层; 以及源极区域和漏极区域,其相对于沟道区域彼此面对,位于与沟道区域相同的层中,并且连接到沟道区域,其中沟道区域,源极区域和漏极区域包括 氧化物半导体,其中源极区域和漏极区域的载流子浓度大于沟道区域的载流子浓度。

    Thin film transistor and manufacturing method thereof
    45.
    发明授权
    Thin film transistor and manufacturing method thereof 有权
    薄膜晶体管及其制造方法

    公开(公告)号:US09142682B2

    公开(公告)日:2015-09-22

    申请号:US13826905

    申请日:2013-03-14

    CPC classification number: H01L29/7869 H01L29/66969 H01L29/78696

    Abstract: A thin film transistor and a manufacturing method thereof. The thin film transistor includes: a gate electrode; a gate insulating layer disposed on the gate electrode; a first semiconductor disposed on the gate insulating layer; a second semiconductor disposed on the first semiconductor and having a different plane shape from the first semiconductor; and a source electrode and a drain electrode that are disposed on the second semiconductor and face each other.

    Abstract translation: 一种薄膜晶体管及其制造方法。 薄膜晶体管包括:栅电极; 设置在栅电极上的栅极绝缘层; 设置在所述栅极绝缘层上的第一半导体; 设置在所述第一半导体上并且具有与所述第一半导体不同的平面形状的第二半导体; 以及设置在第二半导体上并且彼此面对的源电极和漏电极。

Patent Agency Ranking