公开(公告)号：US20120287433A1

公开(公告)日：2012-11-15

申请号：US13106940

申请日：2011-05-13

Applicant: Shankar Krishnan ,  Haiming Wang

Inventor： Shankar Krishnan ,  Haiming Wang

IPC: G01J4/00 ,  G01J3/447

CPC classification number: G01B11/0641 ,  G01B2210/56 ,  G01N21/211 ,  G01N21/956

Abstract: A Mueller ellipsometer of the type having a first rotating element on an incident beam side of a sample and a second rotating element on a reflected beam side of the sample and a detector having an integration time, having a controller for selectively and separately adjusting (1) a first angular frequency of the first rotating element and (2) a second angular frequency of the second rotating element.

Abstract translation: 具有在样品的入射光束侧的第一旋转元件和样品的反射光束侧的第二旋转元件和具有积分时间的检测器的Mueller椭偏仪具有用于选择性和分别地调节（1 ）第一旋转元件的第一角频率和（2）第二旋转元件的第二角频率。

公开(公告)号：US20090071525A1

公开(公告)日：2009-03-19

申请号：US11856201

申请日：2007-09-17

Applicant: Marc Scott Hodes ,  Shankar Krishnan

Inventor： Marc Scott Hodes ,  Shankar Krishnan

IPC: H01L35/32 ,  H01L21/50

CPC classification number: H01L23/38 ,  H01L2924/0002 ,  H01L2924/00

Abstract: An apparatus includes a thermoelectric cooler adjacent to a surface of a device substrate and including a first set of one or more metal electrodes, a second set of one or more metal electrodes, and one or more semiconductor members. Each member includes a material different from the device substrate and physically joins a corresponding one electrode of the first set to a corresponding one electrode of the second set. The electrodes and at least one member are configured to transport heat to or from a thermal load in a direction parallel to the surface of the device substrate.

Abstract translation: 一种装置包括邻近器件衬底的表面的热电冷却器，并且包括第一组一个或多个金属电极，第二组一个或多个金属电极和一个或多个半导体部件。 每个构件包括与装置基板不同的材料，并将第一组的对应的一个电极物理地连接到第二组的对应的一个电极。 电极和至少一个构件构造成在平行于器件衬底的表面的方向上将热量传递到热负载或从热负载传输热量。

公开(公告)号：US20080155992A1

公开(公告)日：2008-07-03

申请号：US11618056

申请日：2006-12-29

Applicant: Marc Scott Hodes ,  Christopher D.W. Jones ,  Shankar Krishnan ,  Oana Malis

Inventor： Marc Scott Hodes ,  Christopher D.W. Jones ,  Shankar Krishnan ,  Oana Malis

IPC: F25B21/02

CPC classification number: F25B21/02 ,  F25B2500/01 ,  H01L23/38 ,  H01L2924/0002 ,  H01L2924/00

Abstract: An apparatus includes a thermoelectric cooler having a first set of one or more metal electrodes, a second set of one or more metal electrodes, and one or more doped semiconductor members. Each member physically joins a corresponding one electrode of the first set to a corresponding one electrode of the second set. Each member has a cross-sectional area that increases along a path from the one metal electrode of the first set to the one metal electrode of the second set.

Abstract translation: 一种装置包括具有第一组一个或多个金属电极的热电冷却器，一个或多个金属电极的第二组和一个或多个掺杂的半导体部件。 每个构件将第一组的对应的一个电极物理地连接到第二组的对应的一个电极。 每个构件具有沿着从第一组的一个金属电极到第二组的一个金属电极的路径增加的横截面面积。

公开(公告)号：US09404872B1

公开(公告)日：2016-08-02

申请号：US13538552

申请日：2012-06-29

Applicant: Haiming Wang ,  Guorong V. Zhuang ,  Shankar Krishnan ,  Klaus Flock ,  Johannes D. de Veer

Inventor： Haiming Wang ,  Guorong V. Zhuang ,  Shankar Krishnan ,  Klaus Flock ,  Johannes D. de Veer

IPC: G01J4/00 ,  G01N21/55 ,  G01N21/88 ,  G01N21/21

CPC classification number: G01N21/8806 ,  G01N21/211 ,  G01N21/274 ,  G01N21/93 ,  G01N21/9501 ,  G01N21/95607 ,  G01N2021/213

Abstract: The present invention may include an illumination source configured to illuminate a surface of a sample, a detector configured to detect at least a portion of light reflected from the surface of the sample, a selectably configurable optical system comprising: a rotatable polarizing element disposed in the illumination arm of the optical system, an analyzing element disposed in the collection arm of the optical system, and a rotatable-translatable compensator element disposed in the collection arm of the optical system, and a control system communicatively configured to selectably configure the optical system in the a rotating compensator (RCSE) mode, a rotating polarizer (RPSE) mode, or a rotating polarizer and compensator (RPRC) mode.

Abstract translation: 本发明可以包括被配置为照亮样品的表面的照明源，被配置为检测从样品的表面反射的光的至少一部分的检测器，可选择地配置的光学系统，包括：可旋转偏振元件，其设置在 光学系统的照明臂，设置在光学系统的收集臂中的分析元件和设置在光学系统的收集臂中的可旋转平移补偿元件，以及通信地配置为可选择地将光学系统配置在 旋转补偿器（RCSE）模式，旋转偏振器（RPSE）模式或旋转偏振器和补偿器（RPRC）模式。

公开(公告)号：US08571309B2

公开(公告)日：2013-10-29

申请号：US13296417

申请日：2011-11-15

Applicant: Shankar Krishnan ,  James Klosowski

Inventor： Shankar Krishnan ,  James Klosowski

IPC: G06K9/00

CPC classification number: G06T3/4053

Abstract: A method includes receiving an image having a first resolution and generating an upsampled image having a second resolution based on the image. A multi-dimensional data structure corresponding to a multi-dimensional image space is generated from the upsampled image. Each node of the data structure is determined based on a weighted sum of values of one or more pixels in the upsampled image. Each of the one or more pixels corresponds to a pixel in the received image and is located within a region of the image space having a vertex defined by the node. A filter modifies the values of the nodes and a second upsampled image is generated based on the modified values. Each pixel of the second upsampled image not corresponding to a pixel in the received image is determined based on a weighted sum of the modified values of one or more nodes.

Abstract translation: 一种方法包括接收具有第一分辨率的图像并基于该图像生成具有第二分辨率的上采样图像。 从上采样图像生成对应于多维图像空间的多维数据结构。 基于上采样图像中的一个或多个像素的值的加权和来确定数据结构的每个节点。 一个或多个像素中的每一个对应于接收到的图像中的像素，并且位于具有由该节点定义的顶点的图像空间的区域内。 滤波器修改节点的值，并且基于修改的值生成第二上采样图像。 基于一个或多个节点的修改值的加权和来确定不对应于接收图像中的像素的第二上采样图像的每个像素。

公开(公告)号：US20130003068A1

公开(公告)日：2013-01-03

申请号：US13174815

申请日：2011-07-01

Applicant: Shankar Krishnan ,  Haiming Wang

Inventor： Shankar Krishnan ,  Haiming Wang

IPC: G01N21/55 ,  G01J1/42

CPC classification number: G01N21/55 ,  G01B11/065 ,  G01B2210/56 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/42 ,  G01N21/00 ,  G01N21/211 ,  G01N2021/213 ,  G01N2021/214 ,  G01N2201/0675

Abstract: A spectroscopic instrument for conducting multi-wavelength, multi-azimuth, multi-angle-of-incidence readings on a substrate, the instrument having a broadband light source for producing an illumination beam, an objective for directing the illumination onto the substrate at multiple azimuth angles and multiple angels-of-incidence simultaneously, thereby producing a reflection beam, an aperture plate having an illumination aperture and a plurality of collection apertures formed therein for selectively passing portions of the reflection beam having desired discreet combinations of azimuth angle and angle-of-incident, a detector for receiving the discreet combinations of azimuth angle and angle-of-incident and producing readings, and a processor for interpreting the readings.

Abstract translation: 一种用于在衬底上进行多波长，多方位角，多角度入射读数的光谱仪器，该仪器具有用于产生照明光束的宽带光源，用于将多个方位角的照明引导到衬底上的物镜 角度和多个入射角，从而产生反射光束，具有照明孔的孔板和形成在其中的多个收集孔，用于选择性地通过具有期望的方位角和角度的离散组合的反射光束的部分 - 用于接收方位角和入射角的离散组合并产生读数的检测器，以及用于解释读数的处理器。

公开(公告)号：US20110012898A1

公开(公告)日：2011-01-20

申请号：US12893404

申请日：2010-09-29

Applicant: Shankar Krishnan ,  Pei Yean Lee ,  John Barrett Moore ,  Suresh Venkatasubramanian

Inventor： Shankar Krishnan ,  Pei Yean Lee ,  John Barrett Moore ,  Suresh Venkatasubramanian

IPC: G06T15/00

CPC classification number: G06K9/00214 ,  G06K9/6211 ,  G06T7/30 ,  G06T17/00 ,  G06T2207/10028

Abstract: A method for registering multiple 3D point sets by determining optimal relative positions and orientations of the 3D point sets. Initial values are determined for the rotation matrices corresponding to the relative orientations of reference frames of the 3D point sets. A registration error cost function is optimized on a product manifold of all of the rotation matrices to determine optimal values of the rotation matrices. The optimal values of the rotation matrices are used to determine optimal values for translation vectors corresponding to the relative positions of the reference frames of the 3D point sets. The 3D point sets are registered on a common reference frame using the optimal rotation matrices and the optimal translation vectors.

Abstract translation: 一种用于通过确定3D点集合的最佳相对位置和取向来登记多个3D点集的方法。 对于与3D点集的参考帧的相对取向相对应的旋转矩阵确定初始值。 在所有旋转矩阵的乘积歧管上优化注册误差成本函数，以确定旋转矩阵的最佳值。 旋转矩阵的最佳值用于确定对应于3D点集的参考帧的相对位置的平移向量的最优值。 使用最佳旋转矩阵和最优平移向量将3D点集登记在公共参考帧上。

公开(公告)号：US20090321046A1

公开(公告)日：2009-12-31

申请号：US12165193

申请日：2008-06-30

Applicant: Domhnaill Hernon ,  Marc Hodes ,  Alan Lyons ,  Alan O'Loughlin ,  Shankar Krishnan

Inventor： Domhnaill Hernon ,  Marc Hodes ,  Alan Lyons ,  Alan O'Loughlin ,  Shankar Krishnan

IPC: F28F7/00

CPC classification number: F28F3/02 ,  B23P15/26 ,  F28F13/02 ,  H01L23/467 ,  H01L2924/0002 ,  Y10T29/4935 ,  H01L2924/00

Abstract: A heat sink includes a base and fins attached to the base. A flow diverter is in contact with the base or at least one of the fins and is configured to disturb a laminar flow region of a fluid flowing adjacent to at least one of the fins or the base.

Abstract translation: 散热器包括底座和连接到基座的翅片。 分流器与基座或至少一个翅片接触并且构造成扰乱流体相邻于至少一个翅片或底座流动的层流区域。

公开(公告)号：US20090321044A1

公开(公告)日：2009-12-31

申请号：US12165063

申请日：2008-06-30

Applicant: Domhnaill Hernon ,  Marc Hodes ,  Alan Lyons ,  Alan O'Loughlin ,  Shankar Krishnan

Inventor： Domhnaill Hernon ,  Marc Hodes ,  Alan Lyons ,  Alan O'Loughlin ,  Shankar Krishnan

IPC: F28F7/00

CPC classification number: H01L23/467 ,  F28F2013/008 ,  H01L23/34 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A heat sink includes a surface and a first active element connected to the surface. The first active element is configured to move from a first position relative to the surface to a second position relative to the surface. The movement alters the heat transfer characteristics of the heat sink.

Abstract translation: 散热器包括连接到表面的表面和第一有源元件。 第一活动元件构造成相对于表面从相对于表面的第一位置移动到第二位置。 运动改变散热器的传热特性。

公开(公告)号：US07274440B1

公开(公告)日：2007-09-25

申请号：US10936019

申请日：2004-09-08

Applicant: Gary Janik ,  Shankar Krishnan

Inventor： Gary Janik ,  Shankar Krishnan

IPC: G01B11/16 ,  G01J4/00

CPC classification number: G01L1/241 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/447 ,  G01J4/00 ,  G01N2203/0641 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Systems and methods for measuring stress in a specimen are provided. One system includes an optical subsystem configured to measure stress-induced birefringence in patterned structures formed on the specimen. In some embodiments, the optical subsystem may be configured as a spectroscopic ellipsometer, a multi-angle laser ellipsometer, a polarimeter, a polarized reflectometer, or some combination thereof. The system also includes a processor coupled to the optical subsystem. The processor is configured to determine stress in a material of the patterned structures using the stress-induced birefringence measurements. One method includes measuring stress-induced birefringence in patterned structures formed on the specimen using an optical technique. The method also includes determining stress in a material of the patterned structures using the stress-induced birefringence measurements.

Abstract translation: 提供了用于测量样品中应力的系统和方法。 一个系统包括被配置为测量形成在样本上的图案化结构中的应力诱导双折射的光学子系统。 在一些实施例中，光学子系统可以被配置为分光椭偏仪，多角度激光椭偏仪，偏振计，偏振反射计或其某种组合。 该系统还包括耦合到光学子系统的处理器。 处理器被配置为使用应力诱导的双折射测量来确定图案化结构的材料中的应力。 一种方法包括使用光学技术来测量在样品上形成的图案化结构中的应力诱导双折射。 该方法还包括使用应力诱导的双折射测量来确定图案化结构的材料中的应力。