公开(公告)号：US10607871B2

公开(公告)日：2020-03-31

申请号：US16232164

申请日：2018-12-26

Applicant: Gudeng Precision Industrial Co., LTD

Inventor： Ming-Chien Chiu ,  Chia-Ho Chuang ,  Hsin-Min Hsueh

IPC: H01L21/673 ,  G03F7/20 ,  G03F1/66

Abstract: A reticle pressing unit and an EUV reticle pod using the same are provided. An inner assembly includes an upper cover and a lower cover. The lower cover includes a supporting element for supporting the reticle. A pressing unit for pressing the reticle is disposed on the upper cover and includes a pressing element and a limiting cap. The pressing element has oppositely arranged pressing part and pressure receiving part. The pressing part extends through the upper cover to press against the reticle. The pressing element is covered by the limiting cap and is protruded outwardly from a top surface of the limiting cap. An outer cover has a pushing surface for forming a surface-to-surface contact with the pressure receiving part and for simultaneously pressing against the pressure receiving part and the top surface to solve the problems relating to the reticle which is applied with uneven forces.

公开(公告)号：USD749531S1

公开(公告)日：2016-02-16

申请号：US29510673

申请日：2014-12-02

Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD.

Designer： Chih-Ming Lin ,  Ming-Chien Chiu ,  Jui-Ken Kao ,  Chen-Hao Chang

公开(公告)号：USD1059445S1

公开(公告)日：2025-01-28

申请号：US29850239

申请日：2022-08-18

Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD.

Designer： Ming-Chien Chiu ,  Chia-Ho Chuang ,  Kuo-Hua Lee ,  Shu-Hung Lin

公开(公告)号：US20250020994A1

公开(公告)日：2025-01-16

申请号：US18740956

申请日：2024-06-12

Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD.

Inventor： Ming-Chien Chiu ,  CHIA-HO CHUANG ,  Hsin-Min HSUEH ,  Pin-Cheng CHEN

IPC: G03F1/66

Abstract: The present invention provides a dual pod including an inner pod and an outer pod. The inner pod has at least one engaging portion provided on a relative outside of the inner pod. The outer pod defines an accommodation space for receiving the inner pod. The outer pod has at least one guide mechanism provided on a relative inside of the outer pod, and the guide mechanism is guided by and limited at the engaging portion such that an offset movement of the inner pod within the outer pod is restricted.

公开(公告)号：US12183608B2

公开(公告)日：2024-12-31

申请号：US17197064

申请日：2021-03-10

Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD.

Inventor： Ming-Chien Chiu ,  En-Nien Shen ,  Yung-Chin Pan ,  Chih-Ming Lin ,  Wei-Chien Liu ,  Cheng-En Chung ,  Po-Ting Lee ,  Jyun-Yan Jiang

IPC: H01L21/673 ,  B65D21/02 ,  B65D21/08 ,  B65D25/10 ,  B65D47/32 ,  H01L21/67 ,  H01L21/677

Abstract: A substrate container with enhanced flow field therein includes a box, at least one offset inflation mechanism and at least one gas diffusion mechanism. The offset inflation mechanism is disposed outside internal receiving space of the box. The offset inflation mechanism has a gaseous chamber extending in the same direction as a bottom panel. The gas diffusion mechanism includes a base, a partition wall and at least one diffusion member. The base masks an outlet of the gaseous chamber to form an auxiliary gaseous chamber. The partition wall extends perpendicularly to the bottom panel to form a vertical first gas channel in communication with the auxiliary gaseous chamber. The diffusion member and the partition wall together define a second gas channel. The partition wall has at least one gap whereby the first gas channel and the second gas channel are in communication with each other.

公开(公告)号：US12094743B2

公开(公告)日：2024-09-17

申请号：US17382856

申请日：2021-07-22

Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD

Inventor： Ming-Chien Chiu ,  Chia-Ho Chuang ,  Hsin-Min Hsueh

IPC: H01L21/673 ,  G03F1/66 ,  G03F7/00

CPC classification number: H01L21/67359 ,  G03F1/66 ,  G03F7/70733 ,  G03F7/70741 ,  H01L21/67353 ,  H01L21/67369 ,  H01L21/67386

Abstract: A method for containing a reticle in a pod is provided. The method includes opening the pod such that a pressing element retained movably on the pod by a limiting cap moves to a first position, wherein a shoulder part of the pressing element between a pressure receiving part and a pressing part of the pressing element is spaced from the limiting cap. The method further includes placing the reticle in the pod such that the reticle is pressed by the pressing element.

公开(公告)号：US12009239B2

公开(公告)日：2024-06-11

申请号：US17695004

申请日：2022-03-15

Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD.

Inventor： Ming-Chien Chiu ,  Chia-Ho Chuang ,  Hsin-Min Hsueh

IPC: F16K27/02 ,  G03F1/66 ,  H01L21/673

CPC classification number: H01L21/67389 ,  F16K27/0209 ,  G03F1/66 ,  H01L21/67359 ,  F16K2200/50

Abstract: Provided is a quick-release valve including: a quick-release member having a collar detachably coupled to a bottom opening of a base; and a sleeve having a flow passage for allowing a gas to enter or exit a substrate container. The collar has a pair of ear portions extending outward therefrom along a diameter direction and a handle extending outward therefrom along a radius direction. The ear portions are at a height substantially different from the handle.

公开(公告)号：US11948820B1

公开(公告)日：2024-04-02

申请号：US18070390

申请日：2022-11-28

Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD.

Inventor： Ming-Chien Chiu ,  Chih-Ming Lin ,  Cheng-Han Chou ,  Po-Ting Lee

IPC: H01L21/673

CPC classification number: H01L21/67373 ,  H01L21/67369 ,  H01L21/67386

Abstract: The present invention provides a latching guide structure arranged inside a door of semiconductor carrier. The latching guide structure comprises an upper latching part, a lower latching part, at least one elastic unit and a driver. Moreover, a first guiding portion of the upper latching part is matched with a second guiding portion of the lower latching part, therefore to define the installation space for the at least one elastic unit. On the other hand, the driver simultaneously actuates an upper actuating unit of the first guiding portion and a lower actuating unit of the second guiding portion to linearly move in reverse direction therebetween. The range of the linear motion of the upper actuating unit and the lower actuating unit represents the compression or extension of the at least one elastic unit, determining to control the open/close status of the upper latching part and the lower latching part.

公开(公告)号：USD1013822S1

公开(公告)日：2024-02-06

申请号：US29804256

申请日：2021-08-19

Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD.

Designer： Ming-Chien Chiu ,  Yung-Chin Pan ,  Cheng-En Chung ,  Tzu-Wei Huang

Abstract: FIG. 1 is a perspective view of a support for upper cover of reticle box showing my new design;
FIG. 2 is a front elevation view thereof;
FIG. 3 is a rear elevation view thereof;
FIG. 4 is a left side elevation view thereof;
FIG. 5 is a right side elevation view thereof;
FIG. 6 is a top plan view thereof;
FIG. 7 is a bottom plan view thereof;
FIG. 8 is another perspective view thereof;
FIG. 9 is a perspective view thereof, in an unclaimed upper cover of a reticle box; and,
FIG. 10 is an isolated enlarged view thereof, as identified in FIG. 9.
The evenly broken line discloses unclaimed environmental subject matter; the dash-dot line discloses unclaimed boundaries of the partial views; the broken lines form no part of the claimed design.

公开(公告)号：US11822257B2

公开(公告)日：2023-11-21

申请号：US17684879

申请日：2022-03-02

Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD.

Inventor： Ming-Chien Chiu ,  Chia-Ho Chuang ,  Hsin-Min Hsueh ,  Hsing-Min Wen

IPC: G03F7/20 ,  G03F7/00

CPC classification number: G03F7/70741

Abstract: The present invention discloses a reticle storage pod including an outer pod which includes an outer cover and an outer base. The outer cover and the outer base can be coupled to securely accommodate one of a first inner pod and a second inner pod that are differently structured in the outer pod. The first inner pod and the second inner pod are for individually accommodating a reticle. The outer cover is provided with at least one first hold-down mechanism and at least one second hold-down mechanism, and the first hold-down mechanism and the second hold-down mechanism respectively act on a cover of the first inner pod and a cover of the second inner pod that are differently structured.