公开(公告)号：US20250053100A1

公开(公告)日：2025-02-13

申请号：US18758155

申请日：2024-06-28

Applicant: GUDENG PRECISION INDUSTRIAL CO,. LTD.

Inventor： Ming-Chien Chiu ,  Chia-Ho Chuang ,  Chang-Da Liu ,  Hsin-Min Hsueh

IPC: G03F7/00 ,  G03F1/66 ,  H01L21/673 ,  H01L21/687

Abstract: The present disclosure provides a reticle pod comprising a base and at least one reticle support disposed on the base, the reticle support reticle support is arranged for carrying a reticle and has a resilient means. When the downward pressure applied to the reticle support is less than or equal to a critical value, a height of the reticle support is maintained at a predetermined height; when the downward pressure applied to the reticle support is greater than the critical value, the reticle support absorbs the downward pressure by deforming, and then the reticle support restores to the predetermined height only when the downward pressure is shared by another reticle support.

公开(公告)号：US12087605B2

公开(公告)日：2024-09-10

申请号：US17237323

申请日：2021-04-22

Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD.

Inventor： Ming-Chien Chiu ,  Chia-Ho Chuang ,  Yi-Hsuan Lee ,  Hsing-Min Wen ,  Hsin-Min Hsueh

IPC: H01L21/673 ,  G03F7/00 ,  G08C17/02 ,  H05K5/00 ,  H05K5/02

CPC classification number: H01L21/67359 ,  G03F7/70741 ,  G08C17/02 ,  H01L21/67369 ,  H01L21/67383 ,  H01L21/67396 ,  H05K5/0034 ,  H05K5/0208

Abstract: A reticle pod with antistatic capability includes a base and plural of support members. The base has a carrying surface having a recess formed thereon and defined by a bottom surface. The support members encircle the carrying surface of the base and are adapted to support a reticle. The recess is defined by a depth extending between the carrying surface and the bottom surface. The depth ranges from 300 μm to 3400 μm to thereby weaken the electrostatic force exerted upon particles on the carrying surface.

公开(公告)号：US11982937B2

公开(公告)日：2024-05-14

申请号：US17146732

申请日：2021-01-12

Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD.

Inventor： Chia-Ho Chuang ,  Hsing-Min Wen ,  Yi-Hsuan Lee ,  Hsin-Min Hsueh ,  Ming-Chien Chiu

IPC: G03F1/66 ,  B65D81/24 ,  B65D85/30 ,  G03F1/22 ,  G03F7/00 ,  G06K7/14 ,  H01L21/67 ,  H01L21/673

CPC classification number: G03F1/66 ,  B65D81/24 ,  B65D85/30 ,  G03F1/22 ,  G03F7/70741 ,  G06K7/14 ,  H01L21/67294 ,  H01L21/67353 ,  H01L21/67359 ,  H01L21/67366 ,  H01L21/67376 ,  H01L21/67386

Abstract: The invention discloses a reticle pod including a base and a lid mounted to the base. The base has a bottom surface having at least one first mark and at least one second mark. The first mark has a first reflectivity relative to a light source, and the second mark has a second reflectivity relative to the light source. The first reflectivity is different from the second reflectivity, and both are also different from that of the rest area of the bottom surface.

公开(公告)号：US11442370B2

公开(公告)日：2022-09-13

申请号：US16798456

申请日：2020-02-24

Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD

Inventor： Chia-Ho Chuang ,  Hsing-Min Wen ,  Hsin-Min Hsueh ,  Yi-Hsuan Lee ,  Ming-Chien Chiu

IPC: H01L21/673 ,  G03F7/20

Abstract: A reticle retaining system including an inner pod and an outer pod is described. The inner pod includes an inner base configured to receive a workpiece; an inner cover configured to couple to the inner base, thereby forming an interior for housing the workpiece; and a hold down pin movably arranged through the inner cover and configured to press the workpiece. The outer pod includes an outer base configured to receive the inner base, an outer cover configured to couple to the outer base, and a pushing element arranged on the outer cover. The hold down pin, the outer cover and the pushing element have a charge dissipation property. When the pushing element pushes the hold down pin to press the workpiece, a charge dissipation path is established from the received workpiece, through the hold down pin and the pushing element, to the outer cover.

公开(公告)号：US20210080020A1

公开(公告)日：2021-03-18

申请号：US17102920

申请日：2020-11-24

Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD.

Inventor： MING-CHIEN CHIU ,  Chia-Ho Chuang ,  Hsin-Min Hsueh

IPC: F16K24/04 ,  B01D46/42 ,  B01D46/10 ,  F16K27/02 ,  H01L21/677

Abstract: A quick release purge valve and a substrate container using same are provided. The container includes a base which has a cover plate and a bottom plate. The quick release purge valve includes a snap plate, a gasket fitting, and a valve element. The snap plate detachably engages with the bottom plate and is at most evenly aligned with the bottom plate. The gasket fitting is disposed between the cover plate and the bottom plate and has an airflow conduit communicating the two plates. The valve element is disposed in the conduit for limiting a flow direction of the gas. The gasket fitting is fixed in the base when the snap plate and the bottom plate are in an engaged state and is removable from the base when the snap plate and the bottom plate are in a disengaged state.

公开(公告)号：US20240312816A1

公开(公告)日：2024-09-19

申请号：US18399889

申请日：2023-12-29

Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD.

Inventor： Ming-Chien Chiu ,  Chia-Ho Chuang ,  Hsin-Min Hsueh ,  Yu-Ruei Chen

IPC: H01L21/673 ,  G03F1/66 ,  G03F7/00 ,  H05F3/00

CPC classification number: H01L21/67386 ,  G03F1/66 ,  G03F7/70741 ,  H01L21/67359 ,  H05F3/00

Abstract: A reticle pod with backside static dissipation has an inner pod defining an accommodation space for a reticle. Multiple flexible guiding components are correspondingly disposed on multiple outer mounting portions of the inner pod in order to guide an inner cover and an inner base of the inner pod to position without relative displacement. Multiple conductive retainers are correspondingly arranged in the accommodation space to push against a backside of the reticle and form a full-time electrical conduction with the back side of the reticle, so as to establish a static dissipation path by the conductive retainers and the inner pod. Meanwhile, with the conductive retainers pushing against the reticle as well as the flexible guiding components providing the inner cover and the inner base with automatic position guiding, the reticle is automatically pushed and positioned to a center position of the inner base.

公开(公告)号：US11511920B2

公开(公告)日：2022-11-29

申请号：US16929748

申请日：2020-07-15

Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD.

Inventor： Chia-Ho Chuang ,  Hsin-Min Hsueh ,  Yi-Hsuan Lee ,  Hsing-Min Wen ,  Ming-Chien Chiu

IPC: B65D53/06 ,  B65D85/38 ,  G03F1/66 ,  H01L21/673 ,  B01D46/00 ,  B01D46/42 ,  B01D46/54 ,  F16K27/02 ,  B65D81/24 ,  B65D85/30 ,  G03F7/20

Abstract: The invention discloses a reticle storage device including a top lid, a bottom lid and a soft contact member. The top lid has a ceiling and a cover surrounding the ceiling. The bottom lid has a carrier and a peripheral structure surrounding the carrier. The soft contact member is configured to laterally extend in between the cover and the peripheral structure when the top lid and the bottom lid engage with each other, and to extend from an inside to an outside of the device in order to buffer the contact among the two lids.

公开(公告)号：US11314176B2

公开(公告)日：2022-04-26

申请号：US17343025

申请日：2021-06-09

Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD.

Inventor： Chia-Ho Chuang ,  Hsin-Min Hsueh ,  Ming-Chien Chiu

IPC: G03F7/20

Abstract: An apparatus for containing a substrate and a method of manufacturing the apparatus are provided. The apparatus for containing a substrate includes: a base having a periphery and an upward-facing top horizontal planar surface with a plurality of contact elements, the contact elements being used for engaging the substrate to hold the substrate upon the upward-facing top horizontal planar surface, an upward-facing frame-like support surface extending from the upward-facing top horizontal planar surface and surrounding the contact elements at a position proximate to the periphery of the base; and a cover having a downward-facing frame-like support surface being in large-area contact with the upward-facing frame-like support surface to define a cavity for containing the substrate between the base and the cover. The downward-facing and upward-facing frame-like support surfaces in contact with each other are not at the same level as the upward-facing top horizontal planar surface.

公开(公告)号：US11306841B2

公开(公告)日：2022-04-19

申请号：US17102920

申请日：2020-11-24

Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD.

Inventor： Ming-Chien Chiu ,  Chia-Ho Chuang ,  Hsin-Min Hsueh

IPC: F16K24/04 ,  B01D46/42 ,  B01D46/10 ,  F16K27/02 ,  H01L21/677

Abstract: A quick release purge valve and a substrate container using same are provided. The container includes a base which has a cover plate and a bottom plate. The quick release purge valve includes a snap plate, a gasket fitting, and a valve element. The snap plate detachably engages with the bottom plate and is at most evenly aligned with the bottom plate. The gasket fitting is disposed between the cover plate and the bottom plate and has an airflow conduit communicating the two plates. The valve element is disposed in the conduit for limiting a flow direction of the gas. The gasket fitting is fixed in the base when the snap plate and the bottom plate are in an engaged state and is removable from the base when the snap plate and the bottom plate are in a disengaged state.

公开(公告)号：US11175579B2

公开(公告)日：2021-11-16

申请号：US16876149

申请日：2020-05-18

Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD.

Inventor： Chia-Ho Chuang ,  Hsin-Min Hsueh ,  Yu-Chen Chu ,  Ming-Chien Chiu

IPC: G03F1/66

Abstract: A reticle pod includes a body, cover, sliding-rail member, sliding-fastening member and shut-corresponding element. The sliding-rail member has a dent portion and a slot portion and defines a locked direction. The dent portion extends from the slot portion in the locked direction. The sliding-fastening member is slidably disposed at the sliding-rail member. The sliding-fastening member has a fastening portion and resilient arms. The resilient arms are inserted into a slot of the slot portion. The fastening portion has a fastening groove corresponding in height to the slot portion. An oblique-guide surface is disposed above the fastening groove. When the cover switches from an open state to a closed state, the shut-corresponding element pushes the sliding-fastening member across the oblique-guide surface and thus compresses the sliding-fastening member, allowing the shut-corresponding element to enter the fastening groove. Then, the resilient arms releases resilient potential energy whereby the sliding-fastening member rebounds.