Wafer container with air-tight device

    公开(公告)号:US09947563B2

    公开(公告)日:2018-04-17

    申请号:US14645648

    申请日:2015-03-12

    CPC classification number: H01L21/67376

    Abstract: A wafer container is provided. The wafer container includes a housing, a door and an air-tight device. The housing has a room with an opening formed therein, and a door frame surrounding the opening. The door fits in the door frame to close the opening. The air-tight device is disposed around the door, located between the door and the door frame, and having a protruding part extending toward the room. The protruding part has an early-stage pressure-adjusting element configured to exhaust a first gas from the room by pumping a second gas into the room when the door is closed.

    WAFER CONTAINER WITH AIR-TIGHT DEVICE
    4.
    发明申请
    WAFER CONTAINER WITH AIR-TIGHT DEVICE 有权
    带冷气装置的散热容器

    公开(公告)号:US20150262853A1

    公开(公告)日:2015-09-17

    申请号:US14645648

    申请日:2015-03-12

    CPC classification number: H01L21/67376

    Abstract: A wafer container is provided. The wafer container includes a housing, a door and an air-tight device. The housing has a room with an opening formed therein, and a door frame surrounding the opening. The door fits in the door frame to close the opening. The air-tight device is disposed around the door, located between the door and the door frame, and having a protruding part extending toward the room. The protruding part has an early-stage pressure-adjusting element configured to exhaust a first gas from the room by pumping a second gas into the room when the door is closed.

    Abstract translation: 提供晶片容器。 晶片容器包括壳体,门和气密装置。 壳体具有形成在其中的开口的房间和围绕开口的门框。 门装在门框上以关闭开口。 气密装置设置在门周围,位于门和门框之间,并且具有朝向房间延伸的突出部分。 突出部分具有早期压力调节元件,其构造成当门关闭时通过将第二气体泵送到房间中来从房间排出第一气体。

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