Shielding jig
    1.
    发明授权

    公开(公告)号:US12162029B2

    公开(公告)日:2024-12-10

    申请号:US17163451

    申请日:2021-01-31

    Abstract: The present invention discloses a shielding jig which mainly comprises an adjustment unit, a positioning unit and a sealing unit. The adjustment unit is configured and engaged between the positioning unit and the sealing unit. Therefore, a first actuation surface of the adjustment unit matches with a second actuation surface of the sealing unit, resulting in expansion of the sealing unit. This expansion makes the shielding jig be able to shade and seal any workpiece.

    Central support device for supporting plate-shaped object and storage apparatus for storing plate-shaped object

    公开(公告)号:US11292637B1

    公开(公告)日:2022-04-05

    申请号:US17160331

    申请日:2021-01-27

    Abstract: A central support device for supporting plate-shaped objects and a storage apparatus for storing the plate-shaped objects are provided and adapted to regulate the heights of support elements and confine front ends thereof to a specified range. The central support device includes a casing, the support elements and height adjustment elements. Partition portions each having a dent portions are disposed at the casing and arranged in the heightwise direction, with a support element receiving slot defined between every two adjacent partition portions. Bottom sides of the dent portions slope in the heightwise direction. One end of each support element is connected to a bottom portion of a corresponding support element receiving slot. The height adjustment elements are disposed in the dent portions, respectively, and extend in the heightwise direction to form top ends for supporting the support elements. The storage apparatus also includes the central support device.

    Substrate carrier latching structure

    公开(公告)号:US12154806B2

    公开(公告)日:2024-11-26

    申请号:US17163450

    申请日:2021-01-31

    Abstract: The invention discloses a substrate carrier latching structure, which mainly comprises a top portion, a cover and a detachable module. The top portion is disposed on the enclosure of a substrate carrier, and the cover is connected to the top portion via a detachable module. As such, the excessive stress on the substrate carrier is avoided to maintain the integrity of substrates stored in the inner portion of the substrate carrier.

    Photomask cleaning device
    5.
    发明授权
    Photomask cleaning device 有权
    光掩模清洗装置

    公开(公告)号:US08973199B2

    公开(公告)日:2015-03-10

    申请号:US13761236

    申请日:2013-02-07

    Inventor: Yung-Chin Pan

    CPC classification number: G03F1/82

    Abstract: A photomask cleaning device includes a stage, a fluid dispenser, a scrubbing unit, a cover and a fixing unit. The fluid dispenser includes a direct dispensing unit disposed correspondingly to the scrubbing unit, and an oblique dispensing unit obliquely spraying water onto a photomask. Majority of the particles can be removed with the combined application of the oblique dispensing unit and the scrubbing unit.

    Abstract translation: 光掩模清洁装置包括台,流体分配器,擦洗单元,盖和定影单元。 流体分配器包括对应于洗涤单元设置的直接分配单元和倾斜分配单元,其将水喷射到光掩模上。 可以通过倾斜分配单元和洗涤单元的组合应用来去除大部分颗粒。

    Reticle container
    8.
    发明授权

    公开(公告)号:US11333967B2

    公开(公告)日:2022-05-17

    申请号:US16706612

    申请日:2019-12-06

    Abstract: The present invention discloses a reticle container which comprises an upper cover and a lower cover. A plurality of identification modules is disposed on the edge of the reticle container. Therefore, the user can quickly identify the usage of the reticle container or number per se. On the other hand, the reticle container of the present invention further comprises supporters, sustainers and connecting modules. Therefore, the reticle container of the present invention is able to satisfy various structural requirements and conditions for carrying the reticle in a sealed environment.

    Supporting shelf module and wafer container using same

    公开(公告)号:US12237190B2

    公开(公告)日:2025-02-25

    申请号:US17406116

    申请日:2021-08-19

    Abstract: A supporting shelf module includes a plurality of plastic supporting plates parallelly arranged in a height direction, and at least one pair of metal-made connectors located at two opposite ends of the supporting plates in the height direction. The connectors in one pair are correspondingly located in two horizontal planes perpendicular to the height direction. A wafer container is also disclosed, which includes a container body having at least two sets of the supporting shelf modules mounted therein, at least two top retaining brackets and at least two bottom retaining grooves provided on an inward side of a top and a bottom panel of the container body, respectively. The supporting shelf module has upper ends engaged with the top retaining brackets and lower ends engaged with and limited to the bottom retaining grooves in an engaging direction. Thus, the tolerance problem of the conventional wafer shelf can be solved.

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