Invention Grant
- Patent Title: Reticle container
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Application No.: US16706612Application Date: 2019-12-06
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Publication No.: US11333967B2Publication Date: 2022-05-17
- Inventor: Ming-Chien Chiu , Yung-Chin Pan , Chih-Sheng Hung
- Applicant: Gudeng Precision Industrial CO., LTD.
- Applicant Address: TW New Taipei
- Assignee: Gudeng Precision Industrial CO., LTD.
- Current Assignee: Gudeng Precision Industrial CO., LTD.
- Current Assignee Address: TW New Taipei
- Agent Cheng-Ju Chiang
- Priority: TW107143848 20181206,TW108106377 20190225,TW108141709 20191118
- Main IPC: G03F1/66
- IPC: G03F1/66 ; H01L21/673

Abstract:
The present invention discloses a reticle container which comprises an upper cover and a lower cover. A plurality of identification modules is disposed on the edge of the reticle container. Therefore, the user can quickly identify the usage of the reticle container or number per se. On the other hand, the reticle container of the present invention further comprises supporters, sustainers and connecting modules. Therefore, the reticle container of the present invention is able to satisfy various structural requirements and conditions for carrying the reticle in a sealed environment.
Public/Granted literature
- US20200183267A1 RETICLE CONTAINER Public/Granted day:2020-06-11
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