公开(公告)号：US20020041620A1

公开(公告)日：2002-04-11

申请号：US09962851

申请日：2001-09-26

Inventor： Yicheng Li ,  Takashi Shigeoka ,  Takeshi Sakuma

IPC: G01J005/02

CPC classification number: G01J5/06 ,  G01J5/0003 ,  G01J5/0007 ,  G01J5/08 ,  G01J5/0853

Abstract: A thermal process apparatus for a semiconductor substrate, including a heating source heating the semiconductor substrate by irradiating a light on one side of the semiconductor substrate, a reflection plate facing to the semiconductor substrate in a state where a reflection cavity is formed with another side of the semiconductor substrate, a thermometer having a light-receiving part provided on the refection plate so as to measure a temperature of the semiconductor substrate by catching a radiation beam from the semiconductor substrate heated by the heating source by the light-receiving part; and light absorption means provided around the light-receiving part for absorbing a diffuse reflection light generated in the reflection cavity.

Abstract translation: 一种用于半导体衬底的热处理装置，包括通过在半导体衬底的一侧照射光来加热半导体衬底的加热源，在形成反射腔的状态下与半导体衬底相对的反射板， 半导体衬底，具有设置在反射板上的光接收部分的温度计，以便通过由受光部分捕获来自由加热源加热的半导体衬底的辐射束来测量半导体衬底的温度; 以及设置在光接收部分周围的用于吸收在反射腔中产生的漫反射光的光吸收装置。

公开(公告)号：US20010040216A1

公开(公告)日：2001-11-15

申请号：US09809554

申请日：2001-03-15

Inventor： Jonathan P. Knauth ,  Steven M. Balick

IPC: G01J005/02

CPC classification number: H04N5/3651 ,  G01J5/20 ,  H04N5/33

Abstract: A method and apparatus for correction of temperature-induced variations in the analog output characteristics of a microbolometer detector in an infrared detecting focal plane array utilizing electronic means to correct for the temperature variation of the individual microbolometer detector. The electronic circuitry and associated software necessary for implementation is also described.

Abstract translation: 一种用于校正红外检测焦平面阵列中微辐射热计检测器的模拟输出特性的温度引起的变化的方法和装置，利用电子装置来校正各个微测热计检测器的温度变化。 还描述了实现所需的电子电路和相关软件。

公开(公告)号：US20010038074A1

公开(公告)日：2001-11-08

申请号：US09826458

申请日：2001-04-05

Inventor： X.-C. Zhang ,  Masahiko Tani ,  Zhiping Jiang ,  Qin Chen

IPC: G01J005/02

CPC classification number: G01N21/3581 ,  G01J11/00

Abstract: A system for emitting and detecting terahertz frequency electromagnetic pulses. The system comprises a single transceiver device, which may be an electro-optic crystal or photoconductive antenna, for both emitting and detecting the pulses. A related method comprises using a single transceiver device to both emit and detect electromagnetic terahertz frequency pulses. The transceiver device is excited by a pump pulse to emit a terahertz output pulse, which is modulated with a chopper. An object reflects the terahertz pulse and the reflected pulse is detected in the transceiver using a probe pulse. A lock-in amplifier set to the same frequency of the chopper is used to reduce noise in the signal detected by the transceiver. An image of the object may be created using the intensity or the timing of the peak amplitude of the terahertz pulses reflected from the object.

Abstract translation: 用于发射和检测太赫兹频率电磁脉冲的系统。 该系统包括单个收发器装置，其可以是电光晶体或光电导天线，用于发射和检测脉冲。 相关方法包括使用单个收发器装置来发射和检测电磁太赫兹频率脉冲。 收发器设备被泵浦脉冲激发以发射用斩波器调制的太赫兹输出脉冲。 一个对象反映了太赫兹脉冲，并且使用探针脉冲在收发器中检测到反射的脉冲。 设置为与斩波器相同频率的锁定放大器用于降低由收发器检测到的信号中的噪声。 可以使用从对象反射的太赫兹脉冲的峰值振幅的强度或定时来创建对象的图像。

公开(公告)号：US20010028036A1

公开(公告)日：2001-10-11

申请号：US09795067

申请日：2001-02-26

Inventor： Thomas G. Thundat ,  Patrick I. Oden ,  Panagiotis G. Datskos

IPC: G01J005/02

CPC classification number: G01J5/40 ,  G01J3/02 ,  G01J3/0256 ,  G01J3/28 ,  G01J3/2803 ,  G01J5/44

Abstract: A spectrum of electromagnetic radiation is detected by spatially dispersing radiation of varying wavelengths onto micromechanical sensors. As the micromechanical sensors absorb radiation, the sensors bend and/or undergo a shift in the resonance characteristics. The device can be used as a spectrometer or a temperature sensing device. A temperature sensor using micromechanical sensors can accurately and quickly measure the temperature of a remote object by sensing a spectrum of infrared radiation emitted by the object. The temperature sensor can measure temperature without knowing the emissivity of the object or the distance of the object from the detector.

Abstract translation: 通过将不同波长的辐射空间分散到微机械传感器上来检测电磁辐射的频谱。 当微机械传感器吸收辐射时，传感器弯曲和/或经历谐振特性的偏移。 该装置可用作光谱仪或温度感测装置。 使用微机械传感器的温度传感器可以通过感测由物体发射的红外辐射的光谱来精确而快速地测量远程物体的温度。 温度传感器可以在不知道物体的辐射率或物体距检测器的距离的情况下测量温度。

公开(公告)号：US20010021216A1

公开(公告)日：2001-09-13

申请号：US09799864

申请日：2001-03-02

Inventor： Olaf Storbeck

IPC: G01J005/02 ,  G01K001/14 ,  G01K013/00

CPC classification number: G01K5/48 ,  H01L22/12 ,  H01L22/26

Abstract: A configuration for measuring a temperature of a semiconductor disk is described and contains a supporting device for holding the disk, and at least two digital camera monitoring systems for locating edges of the disk. A data processing unit is connected to the digital camera monitoring systems for monitoring disk edge movement. The digital camera monitoring systems are placed in the supporting device in different positions. The digital camera monitoring systems face toward the disk. The supporting device further has transparent windows placed in the surface of the supporting device that are oriented towards the disk. With this configuration, disk dimensional growth due to disk heating during a manufacturing process can be measured in order to derive a disk temperature. Thus, a precise disk temperature measurement with real time data acquisition can be performed.

Abstract translation: 描述用于测量半导体盘的温度的配置，并且包括用于保持盘的支撑装置和用于定位盘的边缘的至少两个数字照相机监视系统。 数据处理单元连接到数字照相机监控系统，用于监视磁盘边缘移动。 数码相机监控系统以不同的位置放置在支撑装置中。 数码相机监控系统面向磁盘。 支撑装置还具有放置在支撑装置的表面中的朝向盘定向的透明窗口。 利用该构造，可以测量在制造过程中由于盘加热引起的盘尺寸增长，以便导出盘温度。 因此，可以执行具有实时数据采集的精确的盘温度测量。

公开(公告)号：US20010019574A1

公开(公告)日：2001-09-06

申请号：US09815817

申请日：2001-03-23

Applicant: Exergen Corp

Inventor： Francesco Pompei ,  Janus Ternullo

IPC: G01J005/02

CPC classification number: G01J5/16 ,  G01J5/0022 ,  G01J5/0025 ,  G01J5/02 ,  G01J5/021 ,  G01J5/025 ,  G01J5/026 ,  G01J5/0265 ,  G01J5/04 ,  G01J5/045 ,  G01J5/06 ,  G01J2005/068

Abstract: A radiation detector for axillary temperature measurement comprises a wand having an axially directed radiation sensor at one end and an offset handle at the opposite end. The radiation sensor is mounted within a heat sink and retained by an elastomer in compression. The radiation sensor views a target surface through an emissivity compensating cup and a plastic film. A variable reference is applied to a radiation sensor and amplifier circuit in order to maintain full analog-to-digital converter resolution over design ranges of target and sensor temperature with the sensor temperature either above or below target temperature.

公开(公告)号：US20040262523A1

公开(公告)日：2004-12-30

申请号：US10834120

申请日：2004-04-29

Inventor： Guillaume Bathelet ,  Marc Gerard

IPC: G01J005/02

CPC classification number: G01N25/72 ,  B29C49/80 ,  B29K2021/00 ,  G01N21/90 ,  G01N2021/9063 ,  G01N2021/933

Abstract: The invention provides a method of using at least one sensor sensitive to infrared radiation for inspecting hollow, transparent or translucent articles at high temperature leaving various different forming cavities. The method includes a step of evaluating the level of infrared radiation from the articles coming from the forming cavities so as to adapt the exposure of the sensor in a subsequent step of inspecting the articles in such a manner as to cause the response of the sensor to be uniform regardless of the different cavities from which the articles come.

Abstract translation: 本发明提供了一种使用至少一种对红外辐射敏感的传感器的方法，用于在高温下检查中空的，透明的或半透明的物品，留下各种不同的成形腔。 该方法包括评估来自成形腔的物品的红外线辐射水平的步骤，以便在随后的检查物品的步骤中调整传感器的曝光，以便使传感器的响应 无论制品来自不同的腔体如何，都是均匀的。

公开(公告)号：US20040238741A1

公开(公告)日：2004-12-02

申请号：US10250016

申请日：2003-05-28

Applicant: OPTO-KNOWLEDGE SYSTEMS, INC.

Inventor： Nahum Gat ,  John Dwight Garman

IPC: G01J005/02

CPC classification number: G01J5/061 ,  G01J5/06 ,  G01J5/08 ,  G01J5/0831 ,  G01J5/084 ,  G01J5/0865 ,  G03B9/04 ,  G03B9/06 ,  H04N5/238 ,  H04N5/33

Abstract: A continuously variable diaphragm or swappable fixed aperture for use in thermal infrared cameras, which aperture or diaphragm can be cooled to cryogenic temperatures. The invention contemplates mounting aperture control means, if necessary, in a vacuum or extending the control mechanism through a vacuum in a thermally isolated manner to avoid radiation load on the photocell. The inventive method implements such a diaphragm and control system. The invention makes possible the object of using a single thermal infrared camera under a wide variety of target-scene radiation conditions that may be rapidly changing, with interchangeable or zoom camera lenses requiring matching or different size cold stops, and under other such dynamic situations.

Abstract translation: 用于热红外摄像机的可连续变化的隔膜或可插拔固定孔，该孔或隔膜可以冷却至低温。 本发明考虑如果需要，在真空中安装孔径控制装置，或者以热隔离方式通过真空延伸控制机构，以避免光电池上的辐射负载。 本发明的方法实现了这种隔膜和控制系统。 本发明使得在可能快速变化的各种目标场景辐射条件下使用单个热红外摄像机成为可能，具有需要匹配或不同尺寸的冷停止的可互换或变焦相机镜头以及在其他这样的动态情况下。

公开(公告)号：US20040232340A1

公开(公告)日：2004-11-25

申请号：US10489985

申请日：2004-03-17

Inventor： Ian Beethom Benson

IPC: G01J005/02

CPC classification number: G02B27/0006 ,  G01N21/15

Abstract: The invention is concerned with a material processing apparatus, e.g. a dryer such as a fluid bed dryer, for processing material, e.g. pharmaceuticals, in a compartment (12) having a wall (10). The wall has a window for transmitting radiation from an infrared spectrometer (30) into the dryer and for transmitting radiation from the material to the spectrometer. The spectrometer (30) can analyse the radiation transmitted from the material to measure a property of the material within the compartment, e.g. its moisture content. The radiation-transmitting element (28) is present in a moveable body (24), e.g. a sphere, that can be moved to bring the element (28) into a second position (31) in which the element is in contact with a duct (40) through which fluid can be passed to clean the element (28). In addition, a wiper member (34) may be provided that wipes the element (28) as it passes over it as the moveable body (26) is moved into the second position.

Abstract translation: 本发明涉及一种材料加工装置，例如， 诸如流化床干燥器的干燥器，用于处理材料，例如。 药物，在具有壁（10）的隔室（12）中。 壁具有用于将辐射从红外光谱仪（30）传送到干燥器中并用于将辐射从材料传输到光谱仪的窗口。 光谱仪（30）可以分析从材料透射的辐射，以测量隔室内的材料的性质，例如， 其含水量。 辐射透射元件（28）存在于可移动体（24）中，例如， 可以将元件（28）移动到第二位置（31）中的球体，在第二位置（31）中，元件与管道（40）接触，流体可以通过管道（40）通过以清洁元件（28）。 此外，可以设置擦拭器构件（34），当可移动主体（26）移动到第二位置时，擦拭构件（34）在其穿过其时擦拭元件（28）。

公开(公告)号：US20040232333A1

公开(公告)日：2004-11-25

申请号：US10480052

申请日：2003-12-09

Inventor： Ulf Guldevall

IPC: G01J005/02

CPC classification number: H04N5/367 ,  H04N5/33 ,  H04N5/332

Abstract: A method and a device to provide a full representation of an object having a wide dynamic intensive range and maintain a good sensitivity for signal levels throughout the whole intensive range is disclosed. The wide intensive range is divided into a predetermined number of intensive intervals (INT1 to INT3) inside the wide intensive range. The intensive intervals are provided at the side of each other or are partly overlapping. The same number of interval representations (IM1 to IMn; F1 to Fn; T1 to Tn) of the object are provided as the predetermined number of intervals. Each interval representation is adapted to one individual of the intervals. The sizes, acquisition parameters and/or calibration parameters of the interval representations (IM1 to IMn; F1 to Fn; T1 to Tn) are adapted to each other. The interval representations respective intervals are provided in the same full representation (18; 18null; 20).

Abstract translation: 公开了一种方法和装置，用于提供具有宽动态密集范围的物体的完整表示，并且在整个密集范围内对于信号电平保持良好的灵敏度。 广泛的浓度范围在广泛的浓度范围内分为预定数量的强化间隔（INT1至INT3）。 密集间隔设置在彼此的一侧或部分重叠。 提供相同数量的间隔表示（IM1至IMn; F1至Fn; T1至Tn）作为预定数量的间隔。 每个间隔表示适应于间隔中的一个个体。 间隔表示（IM1至IMn; F1至Fn; T1至Tn）的尺寸，采集参数和/或校准参数彼此适配。 以相同的全部表示（18; 18'; 20）提供间隔表示各自间隔。