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    An image forming method of a fluorescent sample
    31.
    发明申请
    An image forming method of a fluorescent sample 审中-公开
    荧光试样的成像方法

    公开(公告)号：US20160054226A1

    公开(公告)日：2016-02-25

    申请号：US14778351

    申请日：2014-03-22

    Applicant: Daniela Gandolfi ,  Jonathan Mapelli ,  Egidio D.Angelo ,  Paolo Pozzi

    Inventor： Daniela Gandolfi ,  Jonathan Mapelli ,  Egidio D.Angelo ,  Paolo Pozzi

    IPC: G01N21/64

    CPC classification number: G01N21/6458 ,  G01N2201/0675 ,  G02B21/004 ,  G02B21/0076

    Abstract: A method of imaging a fluorescent sample includes the steps of: scanning fluorescent points of the sample using a scanner apparatus, thereby obtaining scanned fluorescent points; and imaging the scanned fluorescent points on a display, the scanning including the steps of predefining a scan field for the sample, which includes a set of scannable fluorescent points; and sequentially irradiating, at least one first subset of points of the set of points and at least one second subset of the set of points, which complements the first subset with respect to the set of points. The first and second subsets can be irradiated at different focal irradiation distances.

    Abstract translation: 一种对荧光样品进行成像的方法包括以下步骤：使用扫描仪装置扫描样品的荧光点，从而获得扫描的荧光点; 并且对显示器上的扫描荧光点进行成像，所述扫描包括预定义样品的扫描场的步骤，其包括一组可扫描的荧光点; 以及顺序照射该组点的至少一个点的第一子集和该组点的至少一个第二子集，其相对于该组集合补充第一子集。 可以在不同的聚焦照射距离下照射第一和第二子集。

    Illumination System, Inspection Apparatus Including Such an Illumination System, Inspection Method and Manufacturing Method
    32.
    发明申请
    Illumination System, Inspection Apparatus Including Such an Illumination System, Inspection Method and Manufacturing Method 有权
    照明系统，包括这种照明系统的检查装置，检验方法和制造方法

    公开(公告)号：US20160025992A1

    公开(公告)日：2016-01-28

    申请号：US14805402

    申请日：2015-07-21

    Applicant: ASML Netherlands B.V.

    Inventor： Gerbrand VAN DER ZOUW ,  Martin Jacobus Johan Jak ,  Martin Ebert

    IPC: G02B27/28 ,  G01N21/47 ,  G01J1/08 ,  G02F1/01

    CPC classification number: G02B27/283 ,  G01J1/08 ,  G01N21/8806 ,  G01N21/9501 ,  G01N2021/8848 ,  G01N2201/0675 ,  G02F1/01 ,  G03F7/70633

    Abstract: In an illumination system (12, 13) for a scatterometer, first and second spatial light modulators lie in a common plane and are formed by different portions of a single liquid crystal cell (260). Pre-polarizers (250) apply polarization to first and second radiation prior to the spatial light modulators. A first spatial light modulator (236-S) varies a polarization state of the first radiation in accordance with a first programmable pattern. Second spatial light modulator (236-P) varies a polarization state of the second radiation accordance with a second programmable pattern. A polarizing beam splitter (234) selectively transmits each of the spatially modulated first and second radiation to a common output path, depending on the polarization state of the radiation. In an embodiment, functions of pre-polarizers are performed by the polarizing beam splitter.

    Abstract translation: 在用于散射仪的照明系统（12,13）中，第一和第二空间光调制器位于公共平面中，并且由单个液晶单元（260）的不同部分形成。 预偏光器（250）在空间光调制器之前将偏振应用于第一和第二辐射。 第一空间光调制器（236-S）根据第一可编程模式改变第一辐射的偏振状态。 第二空间光调制器（236-P）根据第二可编程图案改变第二辐射的偏振状态。 偏振分束器（234）根据辐射的偏振状态选择性地将空间调制的第一和第二辐射中的每一个传输到公共输出路径。 在一个实施例中，预偏振器的功能由偏振分束器执行。

    Method of fluorescence imaging
    34.
    发明授权
    Method of fluorescence imaging 有权
    荧光成像方法

    公开(公告)号：US09134236B2

    公开(公告)日：2015-09-15

    申请号：US12601587

    申请日：2008-05-30

    Applicant: Artur Bednarkiewicz ,  Maurice Whelan

    Inventor： Artur Bednarkiewicz ,  Maurice Whelan

    IPC: G06K9/00 ,  G01N21/64 ,  G02B21/16 ,  G02B21/36

    CPC classification number: G01N21/6408 ,  G01N21/6458 ,  G01N2021/6423 ,  G01N2201/0675 ,  G02B21/16 ,  G02B21/365

    Abstract: Method of fluorescence imaging including: illuminating a sample to excite its fluorescence and acquiring an image thereof; based on fluorescence spectral and spatial information from the sample's fluorescence image, segmenting the image into regions of similar spectral properties; for each image segment, exciting the fluorescence of the corresponding sample region, and detecting the corresponding fluorescence; based on modelling, determining expected fluorescence parameters from the fluorescence signals detected for each region; scanning the sample and determining final fluorescence parameters based on said expected fluorescence parameters.

    Abstract translation: 荧光成像方法包括：照射样品以激发其荧光并获得其图像; 基于来自样品荧光图像的荧光光谱和空间信息，将图像分割成具有相似光谱性质的区域; 对于每个图像片段，激发相应样品区域的荧光，并检测相应的荧光; 基于建模，从为每个区域检测的荧光信号确定预期的荧光参数; 扫描样品并基于所述预期荧光参数确定最终荧光参数。

    POLARIZATION ANALYSIS APPARATUS
    35.
    发明申请
    POLARIZATION ANALYSIS APPARATUS 有权
    极化分析装置

    公开(公告)号：US20150168291A1

    公开(公告)日：2015-06-18

    申请号：US14568122

    申请日：2014-12-12

    Applicant: Otsuka Electronics Co., Ltd.

    Inventor： Kazuhiro SUGITA ,  Yusuke YAMAZAKI ,  Haruka OTSUKA

    IPC: G01N21/21

    CPC classification number: G01N21/211 ,  G01N2021/213 ,  G01N2201/0675

    Abstract: Provided is a polarization analysis apparatus that can quickly measure the polarization properties of a sample. The polarization analysis apparatus includes a light source configured to emit light in a predetermined wavelength region, a polarizer configured to transmit the light emitted from the light source, a spatial phase modulator configured to transmit the light from the sample, an analyzer configured to transmit the light that has passed through the spatial phase modulator, and an imaging spectrometer configured to receive the light that has passed through the analyzer. The spatial phase modulator is formed of a birefringent material, and is configured to have different phase differences at respective positions in a first direction in a plane orthogonal to an optical axis. The imaging spectrometer disperses the received light in a second direction that is different from the first direction in the plane orthogonal to the optical axis.

    Abstract translation: 提供了一种可以快速测量样品的偏振特性的偏振分析装置。 所述偏振光分析装置包括被配置为发射预定波长区域的光的光源，被配置为透射从所述光源发射的光的偏振器，被配置为透射来自所述样品的光的空间相位调制器， 已经通过空间相位调制器的光和被配置为接收已经通过分析器的光的成像光谱仪。 空间相位调制器由双折射材料形成，并且被配置为在与光轴正交的平面中的第一方向上的各个位置处具有不同的相位差。 成像光谱仪将接收的光在与光轴正交的平面中与第一方向不同的第二方向分散。

    SYSTEMS AND METHODS FOR SELECTIVE DETECTION AND IMAGING IN COHERENT RAMAN MICROSCOPY BY SPECTRAL-TEMPORAL EXCITATION SHAPING
    38.
    发明申请
    SYSTEMS AND METHODS FOR SELECTIVE DETECTION AND IMAGING IN COHERENT RAMAN MICROSCOPY BY SPECTRAL-TEMPORAL EXCITATION SHAPING 有权
    通过光谱激发成像在相干拉曼显微镜中选择性检测和成像的系统和方法

    公开(公告)号：US20100188496A1

    公开(公告)日：2010-07-29

    申请号：US12690579

    申请日：2010-01-20

    Applicant: Xiaoliang Sunney Xie ,  Christian Freudiger ,  Wei Min

    Inventor： Xiaoliang Sunney Xie ,  Christian Freudiger ,  Wei Min

    IPC: H04N7/18

    CPC classification number: G02B21/002 ,  G01J3/10 ,  G01J3/44 ,  G01J2003/1282 ,  G01N21/65 ,  G01N2021/653 ,  G01N2021/655 ,  G01N2201/0675 ,  G02B21/082

    Abstract: A microscopy imaging system is disclosed that includes a light source system, a spectral shaper, a modulator system, an optics system, an optical detector and a processor. The light source system is for providing a first train of pulses and a second train of pulses. The spectral shaper is for spectrally modifying an optical property of at least some frequency components of the broadband range of frequency components such that the broadband range of frequency components is shaped producing a shaped first train of pulses to specifically probe a spectral feature of interest from a sample, and to reduce information from features that are not of interest from the sample. The modulator system is for modulating a property of at least one of the shaped first train of pulses and the second train of pulses at a modulation frequency. The optical detector is for detecting an integrated intensity of substantially all optical frequency components of a train of pulses of interest transmitted or reflected through the common focal volume. The processor is for detecting a modulation at the modulation frequency of the integrated intensity of substantially all of the optical frequency components of the train of pulses of interest due to the non-linear interaction of the shaped first train of pulses with the second train of pulses as modulated in the common focal volume, and for providing an output signal for a pixel of an image for the microscopy imaging system.

    Abstract translation: 公开了一种显微镜成像系统，其包括光源系统，光谱整形器，调制器系统，光学系统，光学检测器和处理器。 光源系统用于提供第一脉冲串和第二脉冲串。 频谱整形器用于频谱修改频率分量的宽带范围的至少一些频率分量的光学特性，使得频率分量的宽带范围成形，产生成形的第一脉冲串，从而特别地探测来自 样本，并从样本中不感兴趣的特征中减少信息。 调制器系统用于以调制频率调制成形的第一脉冲序列和第二脉冲串中的至少一个的性质。 光学检测器用于检测通过公共焦点体积传输或反射的感兴趣的脉冲串的基本上所有的光学频率分量的积分强度。 处理器用于检测由于成形的第一脉冲序列与第二脉冲串的非线性相互作用而导致的感兴趣的脉冲串的基本上所有的光学频率分量的积分强度的调制频率的调制 在公共焦点体积中调制，并且为显微镜成像系统提供用于图像的像素的输出信号。

    Method and apparatus for high-throughput inspection of large flat patterned media using dynamically programmable optical spatial filtering
    39.
    发明授权
    Method and apparatus for high-throughput inspection of large flat patterned media using dynamically programmable optical spatial filtering 失效
    使用动态可编程光学空间滤波对大平面图案化介质进行高通量检测的方法和装置

    公开(公告)号：US07180084B2

    公开(公告)日：2007-02-20

    申请号：US11377080

    申请日：2006-03-15

    Applicant: Adam Weiss ,  Afsar Saranli ,  Oleksiy Lopatin ,  Alexandre Obotnine

    Inventor： Adam Weiss ,  Afsar Saranli ,  Oleksiy Lopatin ,  Alexandre Obotnine

    IPC: G01N21/86 ,  G01N21/00 ,  H01J3/14

    CPC classification number: G01N21/95623 ,  G01N21/21 ,  G01N2021/1772 ,  G01N2021/8477 ,  G01N2201/0612 ,  G01N2201/0675

    Abstract: In an inspection system for planar objects having periodic structures, programmable optical Fourier filtering in the focal plane of a telecentric lens system is used to directly identify physical phenomena indicative of non-periodic defects. Lens assemblies and a coherent optical source are used to generate and observe a spatial Fourier transform of a periodic structure in the Fourier plane. Optical Fourier filtering (OFF) is performed in the focal plane using an electrically programmable and electrically alignable spatial light modulator. The spatial light modulator with high signal to noise ratio is electrically reconfigurable according to a feedback-driven, filter construction and alignment algorithm. The OFF enhances any non-periodic components present in the Fourier plane and final image plane of the object. A system having a plurality of inspection channels provides high-throughput inspection of objects with small non-periodic defects while maintaining high detection sensitivity.

    Abstract translation: 在具有周期结构的平面物体的检查系统中，使用远心透镜系统的焦平面中的可编程光学傅立叶滤波来直接识别指示非周期性缺陷的物理现象。 透镜组件和相干光源用于产生和观察傅立叶平面中周期性结构的空间傅立叶变换。 光学傅立叶滤波（OFF）在焦平面上使用电可编程且电可对准的空间光调制器执行。 具有高信噪比的空间光调制器根据反馈驱动的滤波器构造和对准算法进行电可重构。 OFF增强存在于对象的傅立叶平面和最终图像平面中的任何非周期性分量。 具有多个检查通道的系统提供具有小的非周期缺陷的物体的高通量检查，同时保持高检测灵敏度。

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