METHOD OF MANUFACTURING BASE BODY HAVING MICROSCOPIC HOLE, AND BASE BODY
    32.
    发明申请
    METHOD OF MANUFACTURING BASE BODY HAVING MICROSCOPIC HOLE, AND BASE BODY 审中-公开
    具有微孔孔和基体的制备基体的方法

    公开(公告)号:US20140326702A1

    公开(公告)日:2014-11-06

    申请号:US14331957

    申请日:2014-07-15

    Abstract: A method of manufacturing a base body having a microscopic hole, includes: forming at least one of a first modified region and a second modified region by scanning inside of a base body with a focal point of a first laser light having a pulse duration on order of picoseconds or less; forming a periodic modified group formed of a plurality of third modified regions and fourth modified regions by scanning an inside of the base body with a focal point of a second laser light having a pulse duration on order of picoseconds or less; obtaining the base body which is formed so that the first modified region and the second modified region overlap or come into contact with the modified group; and forming a microscopic hole by removing the first modified region and the third modified regions by etching.

    Abstract translation: 一种制造具有微小孔的基体的方法,包括:通过用具有脉冲持续时间的第一激光的焦点在基体上扫描来形成第一改质区域和第二改质区域中的至少一个 皮秒或更少; 通过用脉冲持续时间为皮秒或更小的第二激光的焦点扫描基体的内部,形成由多个第三改质区域和第四改质区域形成的周期性修饰基团; 获得形成为使得第一改质区域和第二改质区域与改性基团重叠或接触的基体; 并通过蚀刻去除第一改质区和第三改质区而形成微孔。

    LAMINATED COIL
    35.
    发明申请
    LAMINATED COIL 有权
    层压线圈

    公开(公告)号:US20130069754A1

    公开(公告)日:2013-03-21

    申请号:US13611940

    申请日:2012-09-12

    Inventor: Satoshi YAMAMOTO

    CPC classification number: H01F5/00 H01F27/2847 H01F27/303 H01F27/323

    Abstract: A laminated coil includes a plurality of circular conductive plates in the form of a flat plate, each of the circular conductive plates being laminated via an insulating material in an axis direction. The plurality of circular conductive plates each include a plurality of concentric circular arc parts having different inner diameter and outer diameter from each other, and a connection part interconnecting the plurality of circular arc parts. The plurality of circular conductive plates are arranged such that the connection parts thereof face each other and the circular arc parts thereof are juxtaposed to each other in a radial direction.

    Abstract translation: 层叠线圈包括平板形状的多个圆形导电板,每个圆形导电板通过绝缘材料沿轴向层压。 多个圆形导电板各自包括彼此具有不同内径和外径的多个同心圆弧部分和将多个圆弧部分互连的连接部分。 多个圆形导电板被布置成使得其连接部分彼此面对,并且其圆弧部分在径向方向上彼此并置。

    RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN
    36.
    发明申请
    RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN 有权
    耐蚀组合物及其制造方法

    公开(公告)号:US20130022922A1

    公开(公告)日:2013-01-24

    申请号:US13552273

    申请日:2012-07-18

    CPC classification number: G03F7/0045 G03F7/0046 G03F7/0397 G03F7/2041

    Abstract: A resist composition having a resin having a structural unit represented by the formula (I), a resin being insoluble or poorly soluble in alkali aqueous solution, but becoming soluble in an alkali aqueous solution by the action of an acid and not including the structural unit represented by the formula (I), and an acid generator represented by the formula (II), wherein R1, A1, A13, A14, X12, R23, R24, R25, X21 and Z1+ are defined in the specification.

    Abstract translation: 一种抗蚀剂组合物,其具有由式(I)表示的结构单元的树脂,树脂在碱性水溶液中不溶或难溶,但通过酸而不溶于碱性水溶液,不包括结构单元 由式(I)表示的酸衍生物和由式(II)表示的酸产生剂,其中R1,A1,A13,A14,X12,R23,R24,R25,X21和Z1 +在说明书中定义。

    SURFACE NANOSTRUCTURE FORMING METHOD AND BASE HAVING SURFACE NANOSTRUCTURE
    37.
    发明申请
    SURFACE NANOSTRUCTURE FORMING METHOD AND BASE HAVING SURFACE NANOSTRUCTURE 审中-公开
    表面纳米结构形成方法和具有表面纳米结构的基底

    公开(公告)号:US20120295066A1

    公开(公告)日:2012-11-22

    申请号:US13566679

    申请日:2012-08-03

    CPC classification number: C03C23/0025 B23K26/0624 B23K26/361 Y10T428/24479

    Abstract: A surface nanostructure forming method includes: preparing a substrate having an appropriate processing value; a first process of irradiating a part which is close to a surface of the substrate with laser light having a pulse duration of picosecond order or shorter at an irradiation intensity being close to the appropriate processing value of the substrate, or greater than or equal to the appropriate processing value and less than or equal to an ablation threshold and forming periodic nanostructures in which first modified portions and second modified portions are periodically arranged in a self-assembled manner at a focus at which the laser light is concentrated and in a region being close to the focus; and a second process of performing an etching treatment on the surface of the substrate having the periodic nanostructures formed thereon to form an uneven structure having the first modified portions as valleys.

    Abstract translation: 表面纳米结构形成方法包括:制备具有适当处理值的基材; 或者在接近基板的适当处理值的照射强度下用脉冲持续时间为皮秒级或更短的激光照射靠近基板的表面的部分的第一工序,或大于或等于 适当的处理值并小于或等于烧蚀阈值并形成周期性纳米结构,其中第一改性部分和第二修饰部分以激光聚焦的焦点周期性地以自组装的方式布置,并且在紧密的区域中 重点; 以及对其上形成有周期性纳米结构的基板的表面进行蚀刻处理以形成具有第一改性部分作为凹谷的凹凸结构的第二工艺。

    RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN
    38.
    发明申请
    RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN 有权
    耐蚀组合物及其制造方法

    公开(公告)号:US20120100482A1

    公开(公告)日:2012-04-26

    申请号:US13280969

    申请日:2011-10-25

    CPC classification number: G03F7/2041 G03F7/0045 G03F7/0046 G03F7/0397

    Abstract: A resist composition contains a resin having a structural unit represented by the formula (aa) and a structural unit represented by the formula (ab); and an acid generator, wherein Raa1 represents a hydrogen atom and a methyl group; Aaa1 represents an optionally substituted C1 to C6 alkanediyl group etc.; Raa2 represents an optionally substituted C1 to C18 aliphatic hydrocarbon group; Rab1 represents a hydrogen atom and a methyl group; Aab1 represents a single bond, an optionally substituted C1 to C6 alkanediyl group etc.; W1 represents an optionally substituted C4 to C36 alicyclic hydrocarbon group; n represents 1 or 2; Aab2 in each occurrence independently represents an optionally substituted C1 to C6 aliphatic hydrocarbon group; Rab2 in each occurrence independently represents a C1 to C12 fluorinated alkyl group.

    Abstract translation: 抗蚀剂组合物含有具有由式(aa)表示的结构单元的树脂和由式(ab)表示的结构单元; 和酸产生剂,其中Raa1表示氢原子和甲基; Aaa1表示可以具有取代基的C1〜C6烷二基等。 Raa2表示任选取代的C1至C18脂族烃基; Rab1表示氢原子和甲基; Aab1表示单键,任选取代的C 1至C 6烷二基等; W1表示任选取代的C4至C36脂环族烃基; n表示1或2; Aab2各自独立地表示任选取代的C 1至C 6脂族烃基; Rab2各自独立地表示C1〜C12氟化烷基。

    METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
    40.
    发明申请
    METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE 审中-公开
    制造半导体器件的方法

    公开(公告)号:US20110129999A1

    公开(公告)日:2011-06-02

    申请号:US13020534

    申请日:2011-02-03

    CPC classification number: H01L21/76898 H01L21/76831

    Abstract: Provided is a method for manufacturing a semiconductor device including: an electrode formation step of forming an electrode on one surface of a semiconductor substrate; a through hole formation step of forming a through hole starting from a position on the other surface corresponding to the position of the electrode; a first insulating layer formation step of forming a first insulating layer on at least an inner circumferential surface, a periphery of an opening, and a bottom surface of the through hole; a modifying step of reforming a first portion of the first insulating layer formed on the bottom surface of the through hole; a modified region removal step of removing the modified region; and a conductive layer formation step of forming a conductive layer on the electrode exposed inside the through hole and on the first insulating layer such that the conductive layer is electrically connected with the electrode.

    Abstract translation: 提供一种半导体器件的制造方法,包括:电极形成步骤,在半导体衬底的一个表面上形成电极; 通孔形成步骤,从对应于电极位置的另一表面的位置开始形成通孔; 第一绝缘层形成步骤,在至少内周面,开口周边和通孔的底面上形成第一绝缘层; 改性步骤,对形成在通孔底面上的第一绝缘层的第一部分进行重整; 修改区域去除步骤,去除修饰区域; 以及导电层形成步骤,在暴露在通孔内部的电极和第一绝缘层上形成导电层,使得导电层与电极电连接。

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