Method of inspecting accuracy in stitching pattern elements
    31.
    发明授权
    Method of inspecting accuracy in stitching pattern elements 失效
    检查拼接图案元素精度的方法

    公开(公告)号:US06904164B2

    公开(公告)日:2005-06-07

    申请号:US09860242

    申请日:2001-05-18

    摘要: A method of quickly and accurately inspecting the stitching accuracy at which regions of a lithographic pattern are stitched at boundaries. The numerous regions of the lithographic pattern are exposed or delineated, one at a time. Inspected regions are scanned with a charged-particle beam to detect secondary electrons. The obtained signal is stored as an inspected image in an image memory, together with positional data about the inspected regions. After completion of acceptance of images from all the inspected regions, the inspected image is compared with a separately prepared reference image by an image processing unit. Pattern elements in the inspected regions corresponding to the reference image are extracted. Deviations at field boundaries or the like can be detected from the relative positions of these pattern elements, if any.

    摘要翻译: 快速准确地检查光刻图案的区域在边界处被缝合的缝合精度的方法。 光刻图案的许多区域被暴露或划定,一次一个。 用带电粒子束扫描检查区域以检测二次电子。 所获得的信号与检查区域的位置数据一起作为检查图像存储在图像存储器中。 在完成从所有检查区域的图像的接受之后,将检查图像与图像处理单元单独准备的参考图像进行比较。 提取与参考图像对应的被检查区域中的图案元素。 可以从这些图形元素的相对位置(如果有的话)检测场边界等的偏差。

    Drill bit
    34.
    发明授权
    Drill bit 有权
    钻头

    公开(公告)号:US09409239B2

    公开(公告)日:2016-08-09

    申请号:US13489938

    申请日:2012-06-06

    IPC分类号: B23B51/02 B23B51/00

    摘要: Provided is a step-shaped drill bit including at least two stepped cutting edges that are axially provided. A cutting edge of a first step from a tip is formed so as to satisfy at least one of the following conditions. That is, a number of blades is smaller, a point angle of the cutting edge is larger, or a clearance angle of the cutting edge is larger than that of cutting edges of a second and subsequent step(s). As a result, a thrust resistance during a perforation can be reduced compared with a case in which the first step cutting edge is formed such that the number of blades, the point angle of the cutting edge and the clearance angle of the cutting edge are the same as those of the second and subsequent step(s).

    摘要翻译: 提供了一种步进式钻头,其包括轴向设置的至少两个阶梯式切削刃。 形成从尖端的第一台阶的切削刃,以满足以下条件中的至少一个。 也就是说,多个叶片较小,切削刃的点角较大,或者切削刃的间隙角大于第二和后续台阶的切削刃的角度。 结果,与形成第一台阶切削刃的情况相比,可以减少穿孔期间的抗推力,使得刀片的数量,切削刃的点角度和切削刃的间隙角度为 与第二和随后的步骤相同。

    Milling Insert and Milling Tip-Replacement-Type Rotary Cutting Tool
    36.
    发明申请
    Milling Insert and Milling Tip-Replacement-Type Rotary Cutting Tool 有权
    铣削刀片和铣削尖头替换型旋转刀具

    公开(公告)号:US20130223942A1

    公开(公告)日:2013-08-29

    申请号:US13882290

    申请日:2011-10-26

    IPC分类号: B23C5/20 B23C5/10

    摘要: Disclosed is a milling insert, in which cutting resistance is reduced, wear advance of cutting edges is suppressed, and elongation of a lifetime is achieved, and is an indexable face milling cutter.When flanks 22 are viewed from the above, a cutting edge ridge line 23 is formed into a waveform shape, in which bottom portions are formed into concave circular arc portions 23b, top portions are formed into convex circular arc portions 23a, and the concave circular arc portions 23b and the convex circular arc portions 23a are alternately repeated, both of the concave circular arc portions and the convex circular arc portions are a ¼ circular arc or more to a ⅓ circular arc or less, and each of the concave circular arc portions is unevenly located at a position close to one of two convex circular arc portions adjacent to the concave circular arc portion, and far from other of the two convex circular arc portions. A virtual chord that connects both end points of each of the convex circular arc portions to each other is inclined to the concave circular arc portion closer to the convex circular arc portion concerned, the concave circular arc portion being one of the two concave circular arc portions adjacent to the convex circular arc portion. The ridge line is formed at a gradually narrower pitch at a time of being traced with respect to the concave circular arc portion toward a direction where the convex circular arc portion closer to the concave circular arc portion is present, the convex circular arc portion being one of the two convex circular arc portions adjacent to the concave circular arc portion.

    摘要翻译: 公开了一种铣削刀片,其中切削阻力减小,切削刃的磨损进给被抑制,并且实现了使用寿命的延长,并且是可转位的面铣刀。 当从上方观察到侧面22时,切割棱线23形成为波形,其中底部形成为凹圆弧部23b,顶部形成为凸圆弧部23a,并且凹形圆 圆弧部23b和凸圆弧部23a交替重复,凹圆弧部分和凸圆弧部分都是1/4圆弧或更多到1/3圆弧或更小,并且每个凹圆 弧形部分不均匀地位于与凹圆弧部分相邻的两个凸圆弧部分中的一个的位置处,并且远离两个凸圆弧部分中的另一个。 将每个凸圆弧部分的两个端点彼此连接的虚拟弦线相对于更靠近凸圆弧部分的凹圆弧部分倾斜,凹圆弧部分是两个凹圆弧部分之一 邻近凸圆弧部分。 在相对于凹形圆弧部分向着靠近凹圆弧部分的凸圆弧部分的方向跟踪时,脊线以逐渐变窄的间距形成,凸圆弧部分为一个 与凹圆弧部分相邻的两个凸圆弧部分。

    Fastening tool
    37.
    发明授权
    Fastening tool 有权
    紧固工具

    公开(公告)号:US08479613B2

    公开(公告)日:2013-07-09

    申请号:US13090705

    申请日:2011-04-20

    IPC分类号: B25B13/48

    摘要: This fastening tool supports a key wrench such that it cannot rotate at a location where a hexagonal hole on the tip end part comes in contact with a nut, so that even though the key wrench is pressed backward as a pin is screwed into the nut, a key wrench holder remains in a state of contact with the nut. After the pin has been screwed into the nut, the nut is twisted off at a weak section. The further the pin is screwed into the nut, the key wrench holder supports the key wrench at a location closer to the pin, which keeps the amount of torsional deformation of the tip end part of the wrench small, and thus makes it possible to securely engage with the pin, and in the final state of the fastening work, it is possible to completely twist off the twist-off type nut, which requires a large torque.

    摘要翻译: 这种紧固工具支撑一个扳手,使得它不能在尖端部分上的六角孔与螺母接触的位置处旋转,使得即使当销钉被拧入螺母中时按压扳手, 钥匙扳手保持与螺母接触的状态。 销已拧入螺母后,螺母在弱部分扭转。 另外,销钉拧入螺母,钥匙扳手支架在靠近销钉的位置处支撑扳手,这样可以使扳手的前端部分的扭转变形量变小,从而可靠 与销接合,并且在紧固工作的最终状态下,可以完全扭转需要大扭矩的扭转型螺母。

    FASTENING TOOL
    38.
    发明申请
    FASTENING TOOL 有权
    紧固工具

    公开(公告)号:US20110265610A1

    公开(公告)日:2011-11-03

    申请号:US13090705

    申请日:2011-04-20

    IPC分类号: B25B13/48

    摘要: This fastening tool supports a key wrench such that it cannot rotate at a location where a hexagonal hole on the tip end part comes in contact with a nut, so that even though the key wrench is pressed backward as a pin is screwed into the nut, a key wrench holder remains in a state of contact with the nut. After the pin has been screwed into the nut, the nut is twisted off at a weak section. The further the pin is screwed into the nut, the key wrench holder supports the key wrench at a location closer to the pin, which keeps the amount of torsional deformation of the tip end part of the wrench small, and thus makes it possible to securely engage with the pin, and in the final state of the fastening work, it is possible to completely twist off the twist-off type nut, which requires a large torque.

    摘要翻译: 这种紧固工具支撑一个扳手,使得它不能在尖端部分上的六角孔与螺母接触的位置处旋转,使得即使当销钉被拧入螺母中时按压扳手, 钥匙扳手保持与螺母接触的状态。 销已拧入螺母后,螺母在弱部分扭转。 另外,销钉拧入螺母,钥匙扳手支架在靠近销钉的位置处支撑扳手,这样可以使扳手的前端部分的扭转变形量变小,从而可靠 与销接合,并且在紧固工作的最终状态下,可以完全扭转需要大扭矩的扭转型螺母。

    ROTARY CUTTER
    39.
    发明申请
    ROTARY CUTTER 有权
    旋转切割机

    公开(公告)号:US20110070042A1

    公开(公告)日:2011-03-24

    申请号:US12889959

    申请日:2010-09-24

    IPC分类号: B23B51/06

    摘要: The object of the invention is to stably spray cutting fluid in a good mist form, when cutting fluid and air are supplied from the surrounding area and cutting fluid is sprayed in a mist form from the tip end section of a rotary cutting tool. The rotary cutter of the present invention sequentially feeds a mixture of cutting fluid and air through a supply pipe 4, first supply path b in a cover 3, second supply paths c, d in a chuck 2, a hollow center cavity (front throttle chamber d, throttle 24a, and rear throttle chamber e) in the chuck, and a third supply path g in a rotary cutting tool 1. The first supply path and second supply path are intermittently connected when the respective openings thereof face each other as the cover and chuck turn relative to each other; the second supply path sprays fluid toward the throttle; the front throttle chamber is formed such the diameter thereof expands from the second supply path; the throttle is formed such that the diameter thereof is less than the smallest diameter of the second supply path; the rear throttle chamber is formed by the rear end surface of the rotary cutting tool and the inner conical surface on the down-flow side of the throttle when that rear end surface and inner conical surface on the down-flow side come in close contact with each other; and the front throttle chamber is formed such that the capacity thereof is greater than that of the rear throttle chamber.

    摘要翻译: 本发明的目的是在切割流体和从周围区域供应空气并且从旋转切削工具的末端部分以雾状喷射切削流体时,以良好的雾状来稳定地喷射切削液。 本发明的旋转切割机通过供给管4,第一供给路径b,盖3,卡盘2的第二供给路径c,d,中空中心腔(前节流室 d,节流阀24a和后节流室e)以及旋转切削工具1中的第三供给路径g。当其各个开口彼此面对时,第一供给路径和第二供给路径间歇地连接,作为盖 并相对于卡盘转动; 第二供应路径朝向节气门喷射流体; 前节气门腔形成为其直径从第二供应路径膨胀; 节气门形成为使得其直径小于第二供给路径的最小直径; 后节流室由旋转切削工具的后端面和节流阀的下流侧的内圆锥面形成,该下端面与下流侧的内圆锥面紧密接触 彼此; 并且前节气门腔形成为使得其能力大于后节气门腔的容量。

    Apparatus for detecting backscattered electrons in a beam apparatus
    40.
    发明授权
    Apparatus for detecting backscattered electrons in a beam apparatus 有权
    用于在光束装置中检测反向散射电子的装置

    公开(公告)号:US07851755B2

    公开(公告)日:2010-12-14

    申请号:US11961263

    申请日:2007-12-20

    申请人: Manabu Saito

    发明人: Manabu Saito

    IPC分类号: H01J37/26 G21K5/04

    摘要: A beam apparatus has a beam source producing a primary electron beam, an objective lens focusing the beam onto an observed sample, and at least one condenser lens mounted between the beam source and the objective lens. The condenser lens operates such that the beam forms one crossover point between the condenser lens and the objective lens. A first detector is mounted at the crossover point or at a position closer to the sample than the crossover point. A second detector is mounted at a position closer to the electron source than the crossover point.

    摘要翻译: 光束装置具有产生一次电子束的光束源,将光束聚焦到观察到的样本上的物镜,以及安装在光束源和物镜之间的至少一个聚光透镜。 聚光透镜的操作使得光束在聚光透镜和物镜之间形成一个交叉点。 第一个检测器安装在交叉点或比交叉点更靠近样品的位置。 第二检测器安装在比交叉点更靠近电子源的位置处。