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公开(公告)号：US20220020867A1
公开(公告)日：2022-01-20
申请号：US17449607
申请日：2021-09-30
Inventor： Jun Liu , Luke Ding , Jingang Fang , Bin Zhou , Leilei Cheng , Wei Li
IPC: H01L29/66 , H01L29/786 , H01L21/44 , H01L21/4763 , H01L21/475 , H01L29/40 , H01L21/4757 , H01L27/12 , H01L21/027 , H01L21/311 , H01L21/3213
Abstract: A manufacturing method of a display substrate, a display substrate, and a display device. The manufacturing method includes: forming an active layer; forming a gate insulation film layer, a gate film layer and a photoresist film layer; exposing the photoresist film layer to a light and developing the exposed photoresist film layer until the developed photoresist film layer has a thickness of 1.8-2.2 μm and a slope angle not less than 70°; over-etching the gate film layer to form a gate electrode, an orthographic projection of the gate electrode being located within a region of an orthographic projection of the developed photoresist film layer; over-etching the gate insulation film layer by a gaseous corrosion method to form a gate insulation layer; peeling off the photoresist film layer remaining on a surface of the gate electrode; and performing a conductive treatment to the active layer.
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公开(公告)号：US20210305337A1
公开(公告)日：2021-09-30
申请号：US17346539
申请日：2021-06-14
Inventor： Wei Song , Liangchen Yan , Ce Zhao , Dongfang Wang , Bin Zhou , Yuankui Ding , Jun Liu , Yingbin Hu , Wei Li
Abstract: The present disclosure relates to the display technology, and provides an OLED display substrate, a method for manufacturing the OLED display substrate and a display device. The method includes: forming pixel definition layer transition patterns with metal; and oxidizing the pixel definition layer transition patterns to form an insulative pixel definition layer.
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33.发明授权公开(公告)号：US10818706B2
公开(公告)日：2020-10-27
申请号：US16337544
申请日：2018-05-29
Inventor： Tongshang Su , Guangcai Yuan , Dongfang Wang , Ce Zhao , Bin Zhou , Jun Liu , Jifeng Shao , Qinghe Wang , Yang Zhang
IPC: H01L27/12 , H01L29/423 , H01L29/66 , H01L29/786 , H01L29/417
Abstract: There are provided a thin-film transistor and a production method thereof, an array substrate, and a display panel. The method comprises forming an active layer, a gate insulating layer, and a gate electrode on a substrate, wherein conductor conversion treatment is performed on both sides of the homogeneous active material layer to obtain an active layer, and the active layer comprises conductor regions located at both sides and a non-conductor region located at the center, wherein a projection of the gate electrode on the substrate is within a projection of the non-conductor region on the substrate, and the distances from the projection of the gate electrode to projections of the two conductor regions on the substrate are each between 0 micrometer and 1 micrometer.
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34.发明申请公开(公告)号：US20200035836A1
公开(公告)日：2020-01-30
申请号：US16393023
申请日：2019-04-24
Inventor： Yingbin Hu , Ce Zhao , Yuankui Ding , Wei Li , Wei Song , Luke Ding , Jun Liu , Liangchen Yan
IPC: H01L29/786 , H01L29/66 , H01L27/32
Abstract: Provided is a thin film transistor, including: a conductive light shielding layer; a metal oxide layer arranged on the light shielding layer; a buffer layer, an active layer, a gate insulating layer, a gate electrode, and an interlayer insulating layer arranged in sequence on the metal oxide layer, the interlayer insulating layer and the buffer layer comprising a first via hole and a second via hole for exposing the active layer, and a third via hole for exposing the metal oxide layer, in which a portion of the metal oxide layer exposed through the third via hole is a conductive portion, and other portions are insulative; and a source electrode and a drain electrode arranged on the interlayer insulating layer, in which the source electrode is connected to the active layer through the first via hole, and the drain electrode is connected to the active layer through the second via hole and connected to the conductive portion through the third via hole.
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公开(公告)号：US10138547B2
公开(公告)日：2018-11-27
申请号：US15131929
申请日：2016-04-18
Inventor： Jun Liu , Xu Shi , Dongqing Li
Abstract: The present invention relates to a technical field of display, and discloses a substrate carrying apparatus. The apparatus comprises: a vertical bearing plate and an upper holding base; one side surface of the vertical bearing plate is a bearing surface, the upper holding base is provided at the upside of the bearing surface; the upper holding base is provided with a plurality of holder for holding the substrate; the left and right sides of the bearing surface are provided with a plurality of positioning clips for positioning the substrate from the left and right ends of the substrate. The substrate carrying apparatus of the present invention provides a holder on the upper holding base, and during loading of the substrate, after the substrate is transported in place by a manipulator, the substrate is held and hanged by the holder, and the substrate would not undergo a falling process, reducing the risk of substrate damage. The present invention further provides a sputtering device comprising one or more of the substrate carrying apparatuses.
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Patent Agency Ranking
公开(公告)号：US20160362779A1
公开(公告)日：2016-12-15
申请号：US15131929
申请日：2016-04-18
Inventor： Jun Liu , Xu Shi , Dongqing Li
CPC classification number: C23C14/505 , C23C14/34 , C23C14/50
Abstract: The present invention relates to a technical field of display, and discloses a substrate carrying apparatus. The apparatus comprises: a vertical bearing plate and an upper holding base; one side surface of the vertical bearing plate is a bearing surface, the upper holding base is provided at the upside of the bearing surface; the upper holding base is provided with a plurality of holder for holding the substrate; the left and right sides of the bearing surface are provided with a plurality of positioning clips for positioning the substrate from the left and right ends of the substrate. The substrate carrying apparatus of the present invention provides a holder on the upper holding base, and during loading of the substrate, after the substrate is transported in place by a manipulator, the substrate is held and hanged by the holder, and the substrate would not undergo a falling process, reducing the risk of substrate damage. The present invention further provides a sputtering device comprising one or more of the substrate carrying apparatuses.
Abstract translation: 本发明涉及显示技术领域，并公开了一种基板输送装置。 该装置包括：垂直轴承板和上保持基座; 垂直轴承板的一个侧面是轴承面，上部保持基座设置在轴承面的上侧; 上保持基座设置有用于保持基板的多个保持器; 轴承表面的左侧和右侧设置有多个定位夹，用于从衬底的左端和右端定位衬底。 本发明的基板承载装置在上保持基座上设置保持器，并且在基板的装载期间，在通过机械手将基板输送到适当位置之后，基板被保持架保持并悬挂，基板不会 经历下降过程，降低底物损伤的风险。 本发明还提供一种溅射装置，其包括一个或多个基板输送装置。
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公开(公告)号：US20240363737A1
公开(公告)日：2024-10-31
申请号：US18769204
申请日：2024-07-10
Inventor： Jun Liu , Luke Ding , Jingang Fang , Bin Zhou , Leilei Cheng , Wei Li
IPC: H01L29/66 , H01L21/027 , H01L21/311 , H01L21/3213 , H01L21/44 , H01L21/475 , H01L21/4757 , H01L21/4763 , H01L27/12 , H01L29/40 , H01L29/417 , H01L29/786
CPC classification number: H01L29/66969 , H01L21/0274 , H01L21/31116 , H01L21/31144 , H01L21/32139 , H01L21/44 , H01L21/475 , H01L21/47573 , H01L21/47635 , H01L27/1288 , H01L29/401 , H01L29/7869 , H01L29/41733 , H01L29/78633
Abstract: Provided are a manufacturing method of a display substrate, a display substrate, and a display device. The display substrate includes: a base substrate; and a top-gate type thin film transistor located on a side of the base substrate, the top-gate type thin film transistor comprises an active layer, a gate insulation layer and a gate electrode sequentially disposed in a direction away from the base substrate. A side surface of the gate insulation layer close to the gate electrode extends beyond an edge of the gate electrode in a direction parallel to the base substrate, and a side surface of the active layer close to the gate insulation layer extends beyond an edge of the gate insulation layer in the direction parallel to the base substrate.
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公开(公告)号：US11700688B2
公开(公告)日：2023-07-11
申请号：US17183909
申请日：2021-02-24
Inventor： Yongchao Huang , Qinghe Wang , Haitao Wang , Jun Liu , Jun Cheng , Ce Zhao , Liangchen Yan
CPC classification number: H05K1/09 , H05K3/04 , H05K2201/10128
Abstract: The present disclosure provides a display substrate, a method for manufacturing the display substrate, and a display device. The display substrate includes a first conductive line extending in a first direction on a base substrate, a second conductive line extending in a second direction crossing the first direction on the base substrate, and an insulation layer arranged between the first conductive line and the second conductive line. The display substrate further includes a buffer layer arranged between the first conductive line and the base substrate, a groove extending in the first direction is formed in the buffer layer, the first conductive line is arranged in the groove, and a surface of the first conductive line away from the base substrate is flush with a surface of the buffer layer away from the base substrate.
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公开(公告)号：US11637127B2
公开(公告)日：2023-04-25
申请号：US17206254
申请日：2021-03-19
Inventor： Jun Liu , Liangchen Yan , Bin Zhou , Yang Zhang , Tongshang Su , Wei Li , Liusong Ni
IPC: H01L27/00 , H01L29/00 , H01L27/12 , H01L29/786
Abstract: A display substrate, a method for forming the display substrate and a display device are provided. The display substrate includes: a first conductive pattern located on a base substrate, where a ring-shaped conductive protection structure is arranged at an edge of a preset region of the first conductive pattern and surrounds the preset region, and the conductive protection structure is made of an anti-dry-etching material; an insulation layer covering the first conductive pattern; and a second conductive pattern located on a side of the insulation layer away from the first conductive pattern, where the second conductive pattern is electrically connected to the first conductive pattern through the via-hole.
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40.发明授权公开(公告)号：US11579525B2
公开(公告)日：2023-02-14
申请号：US16458341
申请日：2019-07-01
Inventor： Wei Li , Jingjing Xia , Bin Zhou , Jun Liu , Tongshang Su , Yang Zhang , Liangchen Yan
Abstract: Disclosed are a photoresist composition, a pixel definition structure and a manufacturing method thereof, and a display panel. The photoresist composition includes an organic film-forming resin, a superhydrophobic polymerizable monomer, a polyfunctional crosslinkable polymerizable monomer, a photoinitiator, an additive and a solvent.
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