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    Acceleration sensor
    31.
    发明申请
    Acceleration sensor 审中-公开
    加速度传感器

    公开(公告)号：US20060086185A1

    公开(公告)日：2006-04-27

    申请号：US11105586

    申请日：2005-04-14

    申请人： Hiroshi Tanaka ,  Hiroshi Ishikawa ,  Kenji Nagata ,  Masaaki Ono ,  Tsutomu Miyashita ,  Sumio Yamada ,  Nobuko Ono

    发明人： Hiroshi Tanaka ,  Hiroshi Ishikawa ,  Kenji Nagata ,  Masaaki Ono ,  Tsutomu Miyashita ,  Sumio Yamada ,  Nobuko Ono

    IPC分类号： G01P15/125 ,  G01P15/00

    CPC分类号： B81B7/0048 ,  B81B3/0072 ,  B81B2201/0235 ,  G01D11/30 ,  G01P1/023 ,  G01P15/0802 ,  G01P15/123 ,  G01P15/18 ,  G01P2015/0842

    摘要： An acceleration sensor with reduced noise that resolves the problem of stress arising from a difference in thermal expansion coefficients is provided. The acceleration sensor detects acceleration in three-axis directions in a three-dimensional coordinate system, and includes a frame having four sides that is integrally formed by a semiconductor substrate; a weight portion that is positioned within the frame; and four beam portions, corresponding with each of the four sides, one end of which is connected to the weight portion to support the weight portion and the other end of which is connected to the center of the corresponding side of the four sides, wherein a detection element that detects flexure of the beam portions that corresponds to the acceleration acting on the weight portion is formed on each of the four beam portions; a pair of joint portions that are formed with a gap there between are formed on each of the four sides of the frame; and the gap between the pair of joint portions formed on one side has a predetermined length with the center of the one side as the point of symmetry.

    摘要翻译： 提供了一种降低噪声的加速度传感器，其解决了由热膨胀系数差引起的应力问题。 加速度传感器在三维坐标系中检测三轴方向的加速度，并且包括具有由半导体基板一体形成的四个侧面的框架; 位于框架内的重物部分; 以及四个梁部分，其对应于四个侧面中的每一个，其一端连接到配重部分，以支撑重物部分，另一端连接到四个侧面的相应侧部的中心，其中， 在所述四个梁部分中的每一个上形成检测对应于作用在所述配重部分上的加速度的梁部分的挠曲的检测元件; 在框架的四个侧面上形成有形成有间隙的一对接合部， 在一侧形成的一对接合部之间的间隙以一侧的中心为对称点，具有规定的长度。

    Film bulk acoustic resonator
    34.
    发明授权
    Film bulk acoustic resonator 有权
    薄膜体声共振器

    公开(公告)号：US06930437B2

    公开(公告)日：2005-08-16

    申请号：US10765887

    申请日：2004-01-29

    申请人： Tadashi Nakatani ,  Tsutomu Miyashita ,  Yoshio Satoh

    发明人： Tadashi Nakatani ,  Tsutomu Miyashita ,  Yoshio Satoh

    IPC分类号： H01L41/08 ,  H01L41/22 ,  H03H3/02 ,  H03H9/15 ,  H03H9/17

    CPC分类号： H03H9/173 ,  H03H3/02 ,  H03H2003/021 ,  Y10T29/42

    摘要： A film bulk acoustic resonator is fabricated in the following manner. First, a base layer is formed on an insulating substrate. Then, a resonator assembly is formed on the base layer. The resonator assembly includes a first electrode held in contact with the base layer, a second electrode, and a piezoelectric layer held between the first and the second electrodes. Then, a resist layer is formed to cover the resonator assembly and the base layer. Then, a through-hole is formed in the resist layer so that the base layer is exposed via the through-hole. Then, etchant is supplied via the through-hole to make a space in the base layer under the resonator assembly. Finally, the resist layer is removed.

    摘要翻译： 以下列方式制造膜体声波谐振器。 首先，在绝缘基板上形成基层。 然后，在基底层上形成谐振器组件。 谐振器组件包括与基极层保持接触的第一电极，第二电极和保持在第一和第二电极之间的压电层。 然后，形成抗蚀剂层以覆盖谐振器组件和基底层。 然后，在抗蚀剂层中形成通孔，使得基底层通过通孔露出。 然后，通过通孔提供蚀刻剂，以在谐振器组件下面的基底层中形成空间。 最后，去除抗蚀剂层。

    Surface acoustic wave filter
    37.
    再颁专利
    Surface acoustic wave filter 有权
    表面声波滤波器

    公开(公告)号：USRE37790E1

    公开(公告)日：2002-07-16

    申请号：US09314943

    申请日：1999-05-20

    申请人： Yoshio Satoh ,  Osamu Ikata ,  Tsutomu Miyashita ,  Takashi Matsuda ,  Mitsuo Takamatsu

    发明人： Yoshio Satoh ,  Osamu Ikata ,  Tsutomu Miyashita ,  Takashi Matsuda ,  Mitsuo Takamatsu

    IPC分类号： H03H900

    CPC分类号： H03H9/6436 ,  H03H9/0576 ,  H03H9/1071 ,  H03H9/6433 ,  H03H9/6483 ,  H03H9/72 ,  H03H9/725 ,  H03H2250/00

    摘要： A SAW filter includes a first SAW resonator having a pair of terminals and a predetermined resonance frequency (frp), the first SAW resonator being provided in a parallel arm of the SAW filter. A second SAW resonator has a pair of terminals and a predetermined resonance frequency (frs) approximately equal to a predetermined antiresonance frequency of the first SAW resonator (fap). The second SAW resonator is provided in a series arm of the SAW filter. An inductance element is connected in series to the first SAW resonator.

    摘要翻译： SAW滤波器包括具有一对端子和预定谐振频率（frp）的第一SAW谐振器，第一SAW谐振器设置在SAW滤波器的并联臂中。 第二SAW谐振器具有大约等于第一SAW谐振器（fap）的预定反谐振频率的一对端子和预定谐振频率（frs）。 第二SAW谐振器设置在SAW滤波器的串联臂中。 电感元件与第一SAW谐振器串联连接。