INJECTION MOLDING APPARATUS
    31.
    发明申请
    INJECTION MOLDING APPARATUS 有权
    注射成型设备

    公开(公告)号:US20080175946A1

    公开(公告)日:2008-07-24

    申请号:US11874302

    申请日:2007-10-18

    CPC classification number: B29C45/2675 B29C45/56 B29C45/64 B29C2045/7393

    Abstract: An injection molding apparatus capable of minimizing cracks at the corners of a mold is provided. The injection molding apparatus includes first and second molds that mate with each other to define a molding cavity, a stationary member that supports the first mold, a movable member that supports the second mold and moves backwards and forwards together with the second mold, and a plurality of pressing members installed around the first mold so as to press a periphery of the first mold toward the molding cavity by a pressing force of the movable member when the first mold is mated with the second mold.

    Abstract translation: 提供一种能够最小化模具的角落处的裂纹的注射成型装置。 注射成型装置包括彼此配合以限定模制腔的第一模具和第二模具,支撑第一模具的固定构件,支撑第二模具并与第二模具一起向前后移动的可动构件,以及 多个按压构件安装在第一模具周围,以便当第一模具与第二模具配合时,通过可移动构件的压力将第一模具的周边压向模制腔。

    Forming an EUV mask with a phase-shifter layer and an intensity balancer layer
    32.
    发明授权
    Forming an EUV mask with a phase-shifter layer and an intensity balancer layer 有权
    用移相器层和强度平衡器层形成EUV掩模

    公开(公告)号:US07384715B2

    公开(公告)日:2008-06-10

    申请号:US11450098

    申请日:2006-06-09

    Applicant: Sang Hun Lee

    Inventor: Sang Hun Lee

    CPC classification number: G03F1/32 B82Y10/00 B82Y40/00 G03F1/24

    Abstract: The present invention describes a method including: providing a substrate, the substrate including a first region and a second region; forming a multilayer mirror over the substrate; forming a phase-shifter layer over the multilayer mirror; forming a capping layer over the phase-shifter layer; removing the capping layer and the phase-shifter layer in the second region; illuminating the first region and the second region with EUV light; and reflecting the EUV light off the first region and the second region. The present invention also describes a structure including: a substrate, the substrate including a first region and a second region; a multilayer mirror located over the first region and the second region; a phase-shifter layer located over the multilayer mirror in the region; an intensity balancer layer located over the multilayer mirror in the second region; and a capping layer located over the phase-shifter layer in the first region and over the intensity balancer layer in the second region.

    Abstract translation: 本发明描述了一种方法,包括:提供衬底,所述衬底包括第一区域和第二区域; 在所述基板上形成多层反射镜; 在所述多层反射镜上形成移相器层; 在所述移相器层上形成覆盖层; 去除第二区域中的覆盖层和移相器层; 用EUV光照亮第一区域和第二区域; 并将EUV灯从第一个区域和第二个地区反射出来。 本发明还描述了一种结构,包括:基板,所述基板包括第一区域和第二区域; 位于所述第一区域和所述第二区域之上的多层反射镜; 位于所述区域中的所述多层反射镜上方的移相器层; 位于第二区域中的多层反射镜上方的强度平衡器层; 以及覆盖层,位于所述第一区域中的所述移相器层上方,并且位于所述第二区域中的所述强度平衡器层上方。

    Portable microwave plasma systems including a supply line for gas and microwaves
    33.
    发明授权
    Portable microwave plasma systems including a supply line for gas and microwaves 有权
    便携式微波等离子体系统,包括气体和微波的供应线

    公开(公告)号:US07271363B2

    公开(公告)日:2007-09-18

    申请号:US10931223

    申请日:2004-09-01

    CPC classification number: H05H1/46 H05H2001/4637 H05H2277/14

    Abstract: Portable microwave plasma systems including supply lines for providing microwaves and gas flow are disclosed. The supply line includes at least one gas line or conduit and a microwave coaxial cable. A portable microwave plasma system includes a microwave source, a waveguide-to-coax adapter and a waveguide that interconnects the microwave source with the waveguide-to-coax adapter, a portable discharge unit and the supply line. The portable discharge unit includes a gas flow tube coupled to the supply line to receive gas flow and a rod-shaped conductor that is axially disposed in the gas flow tube and has an end configured to receive microwaves from the microwave coaxial cable and a tapered tip positioned adjacent the outlet portion of the gas flow tube. The tapered tip is configured to focus microwave traveling through the rod-shaped conductor and generate plasma from the gas flow.

    Abstract translation: 公开了包括用于提供微波和气流的供应线的便携式微波等离子体系统。 供应线包括至少一条气体管线或导管以及微波同轴电缆。 便携式微波等离子体系统包括微波源,波导到同轴电缆适配器和将微波源与波导到同轴电缆适配器,便携式放电单元和电源线相互连接的波导。 便携式排放单元包括连接到供应管线以接收气流的气流管,以及轴向设置在气流管中的棒状导体,并且具有构造成从微波同轴电缆接收微波的端部和锥形尖端 定位在气流管的出口部分附近。 锥形尖端被配置为聚焦通过杆状导体传播的微波并从气流产生等离子体。

    Downward type MEMS switch and method for fabricating the same
    34.
    发明申请
    Downward type MEMS switch and method for fabricating the same 有权
    向下型MEMS开关及其制造方法

    公开(公告)号:US20070195464A1

    公开(公告)日:2007-08-23

    申请号:US11581435

    申请日:2006-10-17

    CPC classification number: H01H1/0036 H01H2057/006 H01P1/127

    Abstract: A downward type micro electro mechanical system (EMS) switch and a method of fabricating the same is provided. The downward type MEMS switch includes first and second cavities formed in a substrate, first and second actuators formed on upper portions of the first and second cavities, first and second fixing lines formed on an upper surface of the substrate and not overlapped with the first and second cavities, and a contact pad which is spaced apart at a predetermined distance from surfaces of the first fixing line and the second fixing line but which can be contacted with the first fixing line and the second fixing line when the first actuator and the second actuator are driven. The contact pad, which is actuated downward by piezoelectricity, is fabricated as it shares a layer with a RF signal line, after the RF signal line is fabricated.

    Abstract translation: 提供了向下型的微机电系统(EMS)开关及其制造方法。 向下型MEMS开关包括形成在基板中的第一和第二空腔,形成在第一和第二空腔的上部的第一和第二致动器,形成在基板的上表面上的第一和第二固定线, 第二空腔和接触垫,其间距第一固定线和第二固定线的表面隔开预定距离,但是当第一致动器和第二致动器能够与第一固定线和第二固定线接触时 被驱动。 在RF信号线被制造之后,通过压电性向下致动的接触垫被制造成与RF信号线共享一层。

    Tape substrate and method for fabricating the same
    35.
    发明授权
    Tape substrate and method for fabricating the same 失效
    胶带基材及其制造方法

    公开(公告)号:US07255802B2

    公开(公告)日:2007-08-14

    申请号:US11023162

    申请日:2004-12-28

    Abstract: A method for fabricating a tape substrate includes forming, on an insulating film, a copper foil pattern having a connecting area; coating a solder resist on the formed copper foil pattern, at a region other than the connecting area; plating a barrier layer on the copper foil pattern at the connecting area after the coating of the solder resist; and plating tin on the plated barrier layer plated, thereby forming a tin layer on the barrier layer. Another method for fabricating a tape substrate includes forming, on an insulating film, a copper foil pattern having a connecting area; plating a barrier layer over the formed copper foil pattern; plating tin over the barrier layer after the plating of the barrier layer, thereby forming a tin layer over the barrier layer; and coating a solder resist on the tin layer at a region other than the connecting area, after the formation of the tin layer.

    Abstract translation: 一种带状基片的制造方法包括在绝缘膜上形成具有连接面积的铜箔图案; 在形成的铜箔图案上的除了连接区域以外的区域涂覆阻焊剂; 在涂覆阻焊剂之后的连接区域上在铜箔图案上镀覆阻挡层; 并在镀覆的阻挡层上镀锡,从而在阻挡层上形成锡层。 制造带基片的另一种方法包括在绝缘膜上形成具有连接区域的铜箔图案; 在所形成的铜箔图案上镀覆阻挡层; 在阻挡层的镀覆之后,在阻挡层上电镀锡,从而在阻挡层上形成锡层; 在形成锡层之后,在除了连接区域之外的区域的锡层上涂覆阻焊剂。

    Pneumatic MEMS switch and method of fabricating the same
    36.
    发明申请
    Pneumatic MEMS switch and method of fabricating the same 有权
    气动MEMS开关及其制造方法

    公开(公告)号:US20070140614A1

    公开(公告)日:2007-06-21

    申请号:US11513036

    申请日:2006-08-31

    CPC classification number: H01H59/0009 H01H35/346 H01H2221/02

    Abstract: A pneumatic micro electro mechanical system switch includes a substrate, a pneumatic actuating unit disposed on the substrate; the pneumatic actuating unit having a plurality of variable air cavities communicating such that when one of the plurality of variable air cavities is compressed, the rest are expanded; a signal line having a plurality of switching lines, each of which passes through a corresponding one of the plurality of variable air cavities and has switching ends disposed in a spaced-apart relation with each other in the corresponding one of the plurality of variable air cavities; a movable switching unit to connect the first and the second switching ends of each of the plurality of switching lines if one of the plurality of variable air cavities is compressed; and a driving unit to drive the pneumatic actuating unit so as to selectively compress the plurality of variable air cavities.

    Abstract translation: 气动微机电系统开关包括基板,设置在基板上的气动执行单元; 所述气动致动单元具有多个可变空气腔,所述多个可变空气腔连通,使得当所述多个可变空气腔中的一个被压缩时,其余部分被膨胀; 信号线具有多个切换线,每个切换线通过多个可变空气腔中的相应一个,并且具有相互间隔开的多个可变空气腔中相应的一个中的彼此间隔开的切换端 ; 如果多个可变空气腔中的一个被压缩,则可移动切换单元连接多个切换线中的每一个的第一和第二切换端; 以及驱动单元以驱动气动致动单元,以选择性地压缩多个可变空气腔。

    Extreme ultraviolet mask with molybdenum phase shifter
    38.
    发明授权
    Extreme ultraviolet mask with molybdenum phase shifter 有权
    极紫外线掩膜与钼移相器

    公开(公告)号:US07169514B2

    公开(公告)日:2007-01-30

    申请号:US10750122

    申请日:2003-12-31

    Applicant: Sang Hun Lee

    Inventor: Sang Hun Lee

    CPC classification number: G03F1/32 B82Y10/00 B82Y40/00 G03F1/24

    Abstract: The present invention describes a method including: providing a substrate, the substrate including a first region and a second region; forming a multilayer mirror over the substrate; forming a phase-shifter layer over the multilayer mirror; forming a capping layer over the phase-shifter layer; removing the capping layer and the phase-shifter layer in the second region; illuminating the first region and the second region with EUV light; and reflecting the EUV light off the first region and the second region.The present invention also describes a structure including: a substrate, the substrate including a first region and a second region; a multilayer mirror located over the first region and the second region; a phase-shifter layer located over the multilayer mirror in the region; an intensity balancer layer located over the multilayer mirror in the second region; and a capping layer located over the phase-shifter layer in the first region and over the intensity balancer layer in the second region.

    Abstract translation: 本发明描述了一种方法,包括:提供衬底,所述衬底包括第一区域和第二区域; 在所述基板上形成多层反射镜; 在所述多层反射镜上形成移相器层; 在所述移相器层上形成覆盖层; 去除第二区域中的覆盖层和移相器层; 用EUV光照亮第一区域和第二区域; 并将EUV灯从第一个区域和第二个地区反射出来。 本发明还描述了一种结构,包括:基板,所述基板包括第一区域和第二区域; 位于所述第一区域和所述第二区域之上的多层反射镜; 位于所述区域中的所述多层反射镜上方的移相器层; 位于第二区域中的多层反射镜上方的强度平衡器层; 以及覆盖层,位于所述第一区域中的所述移相器层上方,并且位于所述第二区域中的所述强度平衡器层上方。

    Molding apparatus
    39.
    发明申请
    Molding apparatus 有权
    成型设备

    公开(公告)号:US20070003659A1

    公开(公告)日:2007-01-04

    申请号:US11475182

    申请日:2006-06-27

    CPC classification number: B29C45/40

    Abstract: An molding apparatus includes a core having a recessed part corresponding to a protruding part of a molded article, an ejector pin movably provided in the core to eject the molded article, an ejector sleeve movably provided in the core to push the protruding part of the molded article, and an ejector actuating part to move the ejector pin and the ejector sleeve together to a separation position where the protruding part of the molded article is separated from the recessed portion of the core, to bring the ejector sleeve into a stop position so that the ejector sleeve does not protrude from the core, and to move the ejector pin from the separation position to a removal position where the molded article is spaced apart from the core by a predetermined distance. Accordingly, the molding apparatus is capable of preventing damage caused on an ejector sleeve.

    Abstract translation: 一种成型装置,具有芯部,该芯部具有与模制品的突出部相对应的凹部,可移动地设置在芯部中以推出模制品的推出销,可移动地设置在芯中以推动模制品的突出部分的推出器套筒 物品和喷射器致动部件,以将顶出销和推出器套筒一起移动到模制品的突出部分与芯部的凹部分离的分离位置,以使顶出器套筒处于停止位置,使得 推出器套筒不从芯部突出,并且将顶出销从分离位置移动到模制品与芯部间隔预定距离的移除位置。 因此,成型设备能够防止在顶出套筒上造成的损坏。

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