公开(公告)号：US20120052680A1

公开(公告)日：2012-03-01

申请号：US13041543

申请日：2011-03-07

申请人： Naoshi SAKUMA ,  Tadashi Sakai ,  Yuichi Yamazaki ,  Masayuki Katagiri ,  Mariko Suzuki ,  Makoto Wada

发明人： Naoshi SAKUMA ,  Tadashi Sakai ,  Yuichi Yamazaki ,  Masayuki Katagiri ,  Mariko Suzuki ,  Makoto Wada

IPC分类号： H01L21/28

CPC分类号： H01L21/76879 ,  H01L21/28556 ,  H01L21/76876 ,  H01L21/76883 ,  H01L23/53276 ,  H01L2221/1094 ,  H01L2924/0002 ,  H01L2924/00

摘要： a manufacturing method of a semiconductor substrate includes the following steps: forming a first wiring layer on a substrate; forming an interlayer insulating film having a via hole on the wiring layer; forming carbon nanotubes in the via hole; performing a fluorination treatment entirely to the substrate; forming an embedded film in the via hole having the carbon nanotubes therein; and polishing the substrate to entirely flatten the substrate.

摘要翻译： 半导体衬底的制造方法包括以下步骤：在衬底上形成第一布线层; 在所述布线层上形成具有通孔的层间绝缘膜; 在通孔中形成碳纳米管; 完全对基材进行氟化处理; 在其中具有碳纳米管的通孔中形成嵌入膜; 并抛光衬底以使衬底完全平坦化。

公开(公告)号：US08053678B2

公开(公告)日：2011-11-08

申请号：US12062112

申请日：2008-04-03

申请人： Tadashi Sakai ,  Naoshi Sakuma ,  Masayuki Katagiri ,  Tomio Ono ,  Mariko Suzuki

发明人： Tadashi Sakai ,  Naoshi Sakuma ,  Masayuki Katagiri ,  Tomio Ono ,  Mariko Suzuki

IPC分类号： H05K1/11

CPC分类号： H05K3/4038 ,  B82Y10/00 ,  H01L21/288 ,  H01L21/76879 ,  H01L23/53276 ,  H01L2221/1094 ,  H01L2924/0002 ,  H05K2201/026 ,  H05K2201/0323 ,  Y10S977/742 ,  Y10T29/49155 ,  H01L2924/00

摘要： An interconnection includes a bundle of conductive members, each of the conductive members being made of carbon nanotube having an end connected to a first conductive film, and another end connected to a second conductive film separated from the first conductive film; and carbon particles each having a diamond crystal structure, dispersed between the conductive members.

摘要翻译： 互连包括一组导电构件，每个导电构件由具有连接到第一导电膜的端部的碳纳米管制成，另一端连接到与第一导电膜分离的第二导电膜; 和各自具有金刚石晶体结构的碳颗粒分散在导电构件之间。

公开(公告)号：US20110057322A1

公开(公告)日：2011-03-10

申请号：US12876669

申请日：2010-09-07

申请人： Noriaki MATSUNAGA ,  Makoto Wada ,  Yosuke Akimoto ,  Tadashi Sakai ,  Naoshi Sakuma ,  Masayuki Katagiri ,  Yuichi Yamazaki

发明人： Noriaki MATSUNAGA ,  Makoto Wada ,  Yosuke Akimoto ,  Tadashi Sakai ,  Naoshi Sakuma ,  Masayuki Katagiri ,  Yuichi Yamazaki

IPC分类号： H01L23/522 ,  H01L21/768

CPC分类号： H01L23/5226 ,  H01L21/76814 ,  H01L21/76831 ,  H01L21/76834 ,  H01L21/7684 ,  H01L21/76849 ,  H01L21/76879 ,  H01L21/76883 ,  H01L23/53276 ,  H01L2221/1094 ,  H01L2224/13

摘要： According to one embodiment, a carbon nanotube interconnect includes a first interconnection layer, an interlayer dielectric film, a second interconnection layer, a contact hole, a plurality of carbon nanotubes and a film. The interlayer dielectric film is formed on the first interconnection layer. The second interconnection layer is formed on the interlayer dielectric film. The contact hole is formed in the interlayer dielectric film between the first interconnection layer and the second interconnection layer. The carbon nanotubes are formed in the contact hole. The carbon nanotubes have a first end connected to the first interconnection layer and a second end connected to the second interconnection layer. The film is formed between the interlayer dielectric film and the second interconnection layer. The film has a portion filled between the second ends of the carbon nanotubes.

摘要翻译： 根据一个实施例，碳纳米管互连包括第一互连层，层间电介质膜，第二互连层，接触孔，多个碳纳米管和膜。 层间绝缘膜形成在第一互连层上。 第二互连层形成在层间绝缘膜上。 接触孔形成在第一互连层和第二互连层之间的层间绝缘膜中。 碳纳米管形成在接触孔中。 碳纳米管具有连接到第一互连层的第一端和连接到第二互连层的第二端。 该膜形成在层间绝缘膜和第二互连层之间。 该膜具有填充在碳纳米管的第二端之间的部分。

公开(公告)号：US07538423B2

公开(公告)日：2009-05-26

申请号：US11534355

申请日：2006-09-22

申请人： Tomio Ono ,  Tadashi Sakai ,  Naoshi Sakuma ,  Hiroaki Yoshida ,  Mariko Suzuki

发明人： Tomio Ono ,  Tadashi Sakai ,  Naoshi Sakuma ,  Hiroaki Yoshida ,  Mariko Suzuki

IPC分类号： H01L23/10 ,  H01L23/34

CPC分类号： H01L23/3732 ,  H01L2924/0002 ,  H01L2924/00

摘要： A heat sink includes a base portion formed of insulating diamond, and a plurality of pressure contacting members formed of the insulating diamond and arranged on the base portion

摘要翻译： 散热器包括由绝缘金刚石形成的基部和由绝缘金刚石形成并且布置在基部上的多个压力接触部件

公开(公告)号：US20080245553A1

公开(公告)日：2008-10-09

申请号：US12062112

申请日：2008-04-03

申请人： Tadashi SAKAI ,  Naoshi Sakuma ,  Masayuki Katagiri ,  Tomio Ono ,  Mariko Suzuki

发明人： Tadashi SAKAI ,  Naoshi Sakuma ,  Masayuki Katagiri ,  Tomio Ono ,  Mariko Suzuki

IPC分类号： H05K1/09 ,  H01B5/08 ,  H05K3/02

CPC分类号： H05K3/4038 ,  B82Y10/00 ,  H01L21/288 ,  H01L21/76879 ,  H01L23/53276 ,  H01L2221/1094 ,  H01L2924/0002 ,  H05K2201/026 ,  H05K2201/0323 ,  Y10S977/742 ,  Y10T29/49155 ,  H01L2924/00

摘要： An interconnection includes a bundle of conductive members, each of the conductive members being made of carbon nanotube having an end connected to a first conductive film, and another end connected to a second conductive film separated from the first conductive film; and carbon particles each having a diamond crystal structure, dispersed between the conductive members.

摘要翻译： 互连包括一组导电构件，每个导电构件由具有连接到第一导电膜的端部的碳纳米管制成，另一端连接到与第一导电膜分离的第二导电膜; 和各自具有金刚石晶体结构的碳颗粒分散在导电构件之间。

公开(公告)号：US07423369B2

公开(公告)日：2008-09-09

申请号：US11366468

申请日：2006-03-03

申请人： Tomio Ono ,  Tadashi Sakai ,  Naoshi Sakuma ,  Hiroaki Yoshida ,  Mariko Suzuki

发明人： Tomio Ono ,  Tadashi Sakai ,  Naoshi Sakuma ,  Hiroaki Yoshida ,  Mariko Suzuki

IPC分类号： H01J17/04

CPC分类号： H01J61/0672 ,  H01J9/022 ,  H01J61/0675 ,  H01J61/72

摘要： A cold cathode for a discharge lamp includes a metal plate that has bending portions; a diamond film that is formed on a face of the metal plate, except for the bending portions; and a metal member that is mounted on the metal plate.

摘要翻译： 用于放电灯的冷阴极包括具有弯曲部分的金属板; 形成在所述金属板的除了所述弯曲部之外的表面上的金刚石膜; 以及安装在金属板上的金属构件。

公开(公告)号：US20080160872A1

公开(公告)日：2008-07-03

申请号：US12010934

申请日：2008-01-31

申请人： Tadashi Sakai ,  Tomio Ono ,  Naoshi Sakuma ,  Mariko Suzuki ,  Hiroaki Yoshida

发明人： Tadashi Sakai ,  Tomio Ono ,  Naoshi Sakuma ,  Mariko Suzuki ,  Hiroaki Yoshida

IPC分类号： H01J9/02

CPC分类号： H01J9/042 ,  H01J1/15 ,  H01J61/0677 ,  H01J61/0737

摘要： A discharge electrode emitting electrons into a discharge gas, encompasses an emitter and current supply terminals configured to supply electric current to the emitter. The emitter embraces a wide bandgap semiconductor having at 300 K a bandgap of 2.2 eV or wider. Acceptor impurity atoms and donor impurity atoms being doped in the wide bandgap semiconductor, the activation energy of the donor impurity atoms being larger than the activation energy of the acceptor impurity atoms.

摘要翻译： 将电子发射到放电气体中的放电电极包括被配置为向发射极提供电流的发射极和电流源端子。 发射极包含宽度为300K的宽带隙半导体，其带隙为2.2eV或更宽。 受主杂质原子和施主杂质原子被掺杂在宽带隙半导体中，施主杂质原子的活化能大于受主杂质原子的活化能。

公开(公告)号：US20070152561A1

公开(公告)日：2007-07-05

申请号：US11715968

申请日：2007-03-09

申请人： Tomio Ono ,  Naoshi Sakuma ,  Tadashi Sakai ,  Mariko Suzuki ,  Hiroaki Yoshida

发明人： Tomio Ono ,  Naoshi Sakuma ,  Tadashi Sakai ,  Mariko Suzuki ,  Hiroaki Yoshida

IPC分类号： H01J1/62

CPC分类号： H01J65/00 ,  H01J61/04 ,  H01J61/12 ,  H01J61/545

摘要： A discharge lamp, in which diamond high in secondary electron emission efficiency and low in sputtering ratio is used as a cold cathode, includes an outer envelope filled with a discharge gas, a fluorescent film provided on an inner surface of the outer envelope, and a pair of electrodes which cause discharge to occur within the outer envelope. A diamond member is provided on a surface of each electrode, and oxygen is contained in the discharge gas at a ratio not less than 0.002% and not more than 12.5%.

摘要翻译： 使用高二次电子发射效率高且溅射比低的金刚石作为冷阴极的放电灯包括填充有放电气体的外壳，设置在外壳的内表面上的荧光膜，以及 导致放电发生在外壳内的一对电极。 在每个电极的表面上设置金刚石构件，并且放电气体中以不小于0.002％且不大于12.5％的比率含有氧。

公开(公告)号：US20050264157A1

公开(公告)日：2005-12-01

申请号：US11140222

申请日：2005-05-31

申请人： Tadashi Sakai ,  Tomio Ono ,  Naoshi Sakuma ,  Hiroaki Yoshida ,  Mariko Suzuki

发明人： Tadashi Sakai ,  Tomio Ono ,  Naoshi Sakuma ,  Hiroaki Yoshida ,  Mariko Suzuki

IPC分类号： H01J61/06 ,  H01J1/00 ,  H01J1/05 ,  H01J1/14 ,  H01J1/308 ,  H01J61/067 ,  H01J61/073

CPC分类号： H01J1/308 ,  H01J61/0677 ,  H01J61/0737

摘要： A discharge lamp encompassing a sealed-off tube filled with a discharge gas and a discharge electrode provided in the sealed-off tube. The discharge electrode embraces a supporting base and an electron-emitting layer formed of a wide bandgap semiconductor and provided on the supporting base, implemented by a plurality of protrusions, at least part of surfaces of the protrusions are unseen from a perpendicular direction to thereof above a top surface of the electron-emitting layer, dangling bonds of the wide bandgap semiconductor at the surfaces are terminated with hydrogen atoms.

摘要翻译： 一种放电灯，包括填充有放电气体的封闭管和设置在密封管中的放电电极。 放电电极包括支撑基底和由宽带隙半导体形成的电子发射层，并且设置在由多个突起构成的支撑基底上，突起的至少一部分表面从其上方的垂直方向看不见 电子发射层的顶表面，表面处的宽带隙半导体的悬挂键被氢原子终止。

公开(公告)号：US20050218773A1

公开(公告)日：2005-10-06

申请号：US11075883

申请日：2005-03-10

申请人： Tomio Ono ,  Tadashi Sakai ,  Naoshi Sakuma ,  Mariko Suzuki ,  Hiroaki Yoshida

发明人： Tomio Ono ,  Tadashi Sakai ,  Naoshi Sakuma ,  Mariko Suzuki ,  Hiroaki Yoshida

IPC分类号： H01J61/067 ,  H01J1/30 ,  H01J1/32 ,  H01J9/02 ,  H01J9/24 ,  H01J17/38 ,  H01J65/04

CPC分类号： H01J1/32 ,  H01J9/247 ,  H01J65/046

摘要： A cold cathode discharge lamp includes: a transparent hollow housing; a fluorescent film formed on inner surfaces of the hollow housing; a pair of cold cathodes that are located in the hollow housing; and a discharge gas that contains hydrogen gas sealed within the hollow housing. Each of the cold cathodes includes: a supporting body that has conductivity; an insulating diamond film formed on the supporting body; and an insulating layer that insulates the supporting body from the insulating diamond film.

摘要翻译： 冷阴极放电灯包括：透明中空壳体; 形成在中空壳体的内表面上的荧光膜; 位于中空壳体中的一对冷阴极; 以及包含密封在中空壳体内的氢气的放电气体。 每个冷阴极包括：具有导电性的支撑体; 形成在所述支撑体上的绝缘金刚石膜; 以及将支撑体与绝缘金刚石膜绝缘的绝缘层。