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公开(公告)号:US20230375424A1
公开(公告)日:2023-11-23
申请号:US18247926
申请日:2021-11-15
申请人: Robert Bosch GmbH
CPC分类号: G01L9/0072 , G01L19/14
摘要: A sensor device. The sensor device includes a housing component with a gas-tight internal volume, at least one electrode structure arranged in the internal volume in an adjustable and/or bendable manner, at least one counter electrode fixedly disposed on and/or in the housing component, and an electronic device configured to apply an electrical excitation voltage signal between the electrode structure and the counter electrode such that the at least one electrode structure is set in an oscillating motion relative to the housing component. The electronic device is configured to detect and/or determine the internal pressure in the internal volume and/or a change in the internal pressure while taking into consideration at least one sensor signal, which is dependent on an electric voltage or capacitance between the electrode structure and the counter electrode.
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22.
公开(公告)号:US11788912B2
公开(公告)日:2023-10-17
申请号:US16972588
申请日:2019-06-28
申请人: Robert Bosch GmbH
CPC分类号: G01L9/0048 , B81B3/0021 , B81C1/00182 , G01L9/005 , G01L9/0073 , G01L19/145 , B81B2201/0264 , B81B2203/0118 , B81B2203/0127 , B81B2203/0163 , B81B2203/0307 , B81B2203/04 , B81C2201/013 , B81C2201/0105
摘要: A micromechanical pressure sensor device and a corresponding manufacturing method. The micromechanical pressure sensor device is equipped with a sensor substrate; a diaphragm system that is anchored in the sensor substrate and that includes a first diaphragm and a second diaphragm situated spaced apart therefrom, which are circumferentially connected to one another in an edge area and enclose a reference pressure in an interior space formed in between; and a plate-shaped electrode that is suspended in the interior space and that is situated spaced apart from the first diaphragm and from the second diaphragm and forms a first capacitor with the first diaphragm and forms a second capacitor with the second diaphragm. The first diaphragm and the second diaphragm are designed in such a way that they are deformable toward one another when acted on by an external pressure.
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公开(公告)号:US11754455B2
公开(公告)日:2023-09-12
申请号:US17277864
申请日:2019-09-05
发明人: Nils Ponath , Andreas Rossberg , Elke Schmidt
CPC分类号: G01L19/04 , G01L9/0075 , G01L19/147
摘要: A pressure measuring device includes a ceramic pressure sensor and a process connection, the pressure sensor including a measuring membrane. The pressure measuring device further includes a carrier made of titanium and having a free-standing tubular carrier region running parallel to the surface normal onto the measuring membrane and having an end region adjacent the process connection connected to the process connection and an end region opposite the process connection to which the pressure sensor is fastened by a jointing that connects an outer edge of a front face of the pressure sensor to the end region of the carrier opposite the process connection and carries the pressure sensor.
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24.
公开(公告)号:US11745288B2
公开(公告)日:2023-09-05
申请号:US17251407
申请日:2019-05-23
发明人: Andreas Rossberg , Anh Tuan Tham , Elke Schmidt , Nils Ponath , Jonas Conradt , Yanli Wang , Thomas Uehlin
IPC分类号: B23K20/02 , B23K20/233 , C04B37/02 , G01L9/00 , G01L13/02 , G01L19/14 , B23K103/18 , B23K101/36 , B23K103/00 , B23K103/14
CPC分类号: B23K20/026 , B23K20/233 , C04B37/021 , G01L9/0075 , G01L13/025 , G01L19/147 , B23K2101/36 , B23K2103/14 , B23K2103/18 , B23K2103/52 , C04B2237/343 , C04B2237/403
摘要: A pressure measuring device includes a ceramic pressure sensor including a ceramic measuring membrane and a sensor mounting configured to secure the pressure sensor such that a membrane region of the measuring membrane surrounded by a membrane edge is contactable with a medium having a pressure to be measured. The sensor mounting includes a titanium or titanium alloy mounting element including an opening through which the membrane region is contactable with the medium. The membrane edge is connected directly with the mounting element by a diffusion weld produced by a diffusion welding method.
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25.
公开(公告)号:US20230273084A1
公开(公告)日:2023-08-31
申请号:US18171163
申请日:2023-02-17
发明人: Domenico GIUSTI , Enri DUQI
CPC分类号: G01L9/0054 , G01L19/147 , G01L19/148 , G01L27/007
摘要: A pressure sensor device has: a pressure detection structure provided in a first die of semiconductor material; a package, configured to internally accommodate the pressure detection structure in an impermeable manner, the package having a base structure and a body structure, arranged on the base structure, with an access opening in contact with an external environment and internally defining a housing cavity, in which the first die is arranged covered with a coating material. A piezoelectric transduction structure, of a ultrasonic type, is accommodated in the housing cavity, in order to allow detection of foreign material above the coating material and within the package. In particular, the piezoelectric transduction structure is integrated in the first die, which comprises a first portion, wherein the pressure detection structure is integrated, and a second portion, separate and distinct from the first portion, wherein the piezoelectric transduction structure is integrated.
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公开(公告)号:US20230243711A1
公开(公告)日:2023-08-03
申请号:US18132331
申请日:2023-04-07
发明人: Siegmar SCHMIDT , William A. DAI , Boon Khai NG
CPC分类号: G01L9/0075 , G01L19/0618 , G01L9/0048 , G01L9/0047 , G01L19/04 , G01L19/14 , G01L9/0016 , G01L19/147 , G01L1/142 , G01L9/0042 , G01L9/0072 , G01L9/0073 , G01L9/12 , G01L7/082 , G01L9/0044
摘要: Pressure sensors having ring-tensioned membranes are disclosed. A tensioning ring is bonded to a membrane in a manner that results in the tensioning ring applying a tensile force to the membrane, flattening the membrane and reducing or eliminating defects that may have occurred during production. The membrane is bonded to the sensor housing at a point outside the tensioning ring, preventing the process of bonding the membrane to the housing from introducing defects into the tensioned portion of the membrane. A dielectric may be introduced into the gap between the membrane and the counter electrode in a capacitive pressure sensor, resulting in an improved dynamic range.
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公开(公告)号:US11703409B2
公开(公告)日:2023-07-18
申请号:US17585762
申请日:2022-01-27
申请人: SICK AG
发明人: Stefan Schweiger , Thomas Weber
CPC分类号: G01L19/0038 , G01L19/0092 , G01L19/04 , G01L19/14
摘要: A pressure sensor is provided. The pressure sensor includes a housing with a control and evaluation unit. A plurality of pressure ports are arranged at the housing of the pressure sensor, with a pressure measuring cell being associated with every pressure port. The pressure measurement cells are connected to the control and evaluation unit, and the pressure sensor has at least one digital output interface. At least one pressure port is a port for inserting a pressure line, with the pressure line being installable without tools and with the pressure line being surrounded by a seal of the pressure port and being secured against being pulled out.
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公开(公告)号:US11692897B2
公开(公告)日:2023-07-04
申请号:US17174543
申请日:2021-02-12
CPC分类号: G01L19/147 , G01L13/00 , G01L15/00 , G01L19/14
摘要: The disclosed technology relates to a field serviceable pressure scanner suitable for high-pressure sensing applications and replacement of large pressure transmitter panels. The pressure scanner includes a housing having a mounting plate comprising a plurality of through-hole bores extending from a front to back side for mating with corresponding transducer ports of the pressure sensors, and a plurality of input ports disposed on the front side of the mounting plate and in communication with the corresponding plurality of through-hole bores. The pressure scanner assembly includes two or more field-replaceable (swappable) pressure sensors seal mounted to the back side of the mounting plate, each pressure sensor comprising one or more sensor ports, each of the one or more sensor port in communication with corresponding through-hole bores in the mounting plate, and a multi-channel data acquisition system configured to receive pressure signals from the two or more field-replaceable pressure sensors.
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公开(公告)号:US11692895B2
公开(公告)日:2023-07-04
申请号:US17217234
申请日:2021-03-30
发明人: David P. Potasek , Jun Zheng
CPC分类号: G01L13/026 , G01F1/36 , G01L9/0048 , G01L13/025 , G01L19/142 , G01L19/145 , G01L27/005
摘要: A differential MEMS pressure sensor includes a topping wafer with a top side and a bottom side, a diaphragm wafer having a top side connected to the bottom side of the topping wafer and a bottom side, and a backing wafer having a top side connected to the bottom side of the diaphragm wafer and a bottom side. The topping wafer includes a first cavity formed in the bottom side of the topping wafer. The diaphragm wafer includes a diaphragm, a second cavity formed in the bottom side of the diaphragm wafer underneath the diaphragm, an outer portion surrounding the diaphragm, and a trench formed in the top side of the diaphragm wafer and positioned in the outer portion surrounding the diaphragm.
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公开(公告)号:US20230141143A1
公开(公告)日:2023-05-11
申请号:US17524010
申请日:2021-11-11
申请人: NIBCO Inc.
发明人: Christopher W. Mason
CPC分类号: F24D19/083 , F16K11/22 , G01L19/14
摘要: An isolation assembly for a boiler unit that incorporates a pressure relief valve and an automatic air vent to a valve body that includes a valve positioned adjacent to the automatic air vent. The unitary valve body reduces the number of components and leak paths and incorporates a ball valve to permit removing and/or securing the automatic air vent without having to purge the adjacent plumbing system.
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