Pressure measuring device with free-standing carrier

    公开(公告)号:US11754455B2

    公开(公告)日:2023-09-12

    申请号:US17277864

    申请日:2019-09-05

    IPC分类号: G01L19/04 G01L9/00 G01L19/14

    摘要: A pressure measuring device includes a ceramic pressure sensor and a process connection, the pressure sensor including a measuring membrane. The pressure measuring device further includes a carrier made of titanium and having a free-standing tubular carrier region running parallel to the surface normal onto the measuring membrane and having an end region adjacent the process connection connected to the process connection and an end region opposite the process connection to which the pressure sensor is fastened by a jointing that connects an outer edge of a front face of the pressure sensor to the end region of the carrier opposite the process connection and carries the pressure sensor.

    PACKAGED PRESSURE SENSOR DEVICE AND CORRESPONDING METHOD FOR DETECTING THE PRESENCE OF FOREIGN MATERIAL

    公开(公告)号:US20230273084A1

    公开(公告)日:2023-08-31

    申请号:US18171163

    申请日:2023-02-17

    IPC分类号: G01L9/00 G01L19/14 G01L27/00

    摘要: A pressure sensor device has: a pressure detection structure provided in a first die of semiconductor material; a package, configured to internally accommodate the pressure detection structure in an impermeable manner, the package having a base structure and a body structure, arranged on the base structure, with an access opening in contact with an external environment and internally defining a housing cavity, in which the first die is arranged covered with a coating material. A piezoelectric transduction structure, of a ultrasonic type, is accommodated in the housing cavity, in order to allow detection of foreign material above the coating material and within the package. In particular, the piezoelectric transduction structure is integrated in the first die, which comprises a first portion, wherein the pressure detection structure is integrated, and a second portion, separate and distinct from the first portion, wherein the piezoelectric transduction structure is integrated.

    Pressure sensor with reduced measurement error

    公开(公告)号:US11703409B2

    公开(公告)日:2023-07-18

    申请号:US17585762

    申请日:2022-01-27

    申请人: SICK AG

    IPC分类号: G01L19/00 G01L19/04 G01L19/14

    摘要: A pressure sensor is provided. The pressure sensor includes a housing with a control and evaluation unit. A plurality of pressure ports are arranged at the housing of the pressure sensor, with a pressure measuring cell being associated with every pressure port. The pressure measurement cells are connected to the control and evaluation unit, and the pressure sensor has at least one digital output interface. At least one pressure port is a port for inserting a pressure line, with the pressure line being installable without tools and with the pressure line being surrounded by a seal of the pressure port and being secured against being pulled out.

    Field serviceable, small form-factor pressure scanner

    公开(公告)号:US11692897B2

    公开(公告)日:2023-07-04

    申请号:US17174543

    申请日:2021-02-12

    IPC分类号: G01L15/00 G01L13/00 G01L19/14

    摘要: The disclosed technology relates to a field serviceable pressure scanner suitable for high-pressure sensing applications and replacement of large pressure transmitter panels. The pressure scanner includes a housing having a mounting plate comprising a plurality of through-hole bores extending from a front to back side for mating with corresponding transducer ports of the pressure sensors, and a plurality of input ports disposed on the front side of the mounting plate and in communication with the corresponding plurality of through-hole bores. The pressure scanner assembly includes two or more field-replaceable (swappable) pressure sensors seal mounted to the back side of the mounting plate, each pressure sensor comprising one or more sensor ports, each of the one or more sensor port in communication with corresponding through-hole bores in the mounting plate, and a multi-channel data acquisition system configured to receive pressure signals from the two or more field-replaceable pressure sensors.

    Differential pressure sensor
    29.
    发明授权

    公开(公告)号:US11692895B2

    公开(公告)日:2023-07-04

    申请号:US17217234

    申请日:2021-03-30

    摘要: A differential MEMS pressure sensor includes a topping wafer with a top side and a bottom side, a diaphragm wafer having a top side connected to the bottom side of the topping wafer and a bottom side, and a backing wafer having a top side connected to the bottom side of the diaphragm wafer and a bottom side. The topping wafer includes a first cavity formed in the bottom side of the topping wafer. The diaphragm wafer includes a diaphragm, a second cavity formed in the bottom side of the diaphragm wafer underneath the diaphragm, an outer portion surrounding the diaphragm, and a trench formed in the top side of the diaphragm wafer and positioned in the outer portion surrounding the diaphragm.