公开(公告)号：US20030063284A1

公开(公告)日：2003-04-03

申请号：US10287512

申请日：2002-11-05

Inventor： James McAndrew ,  Hwa-Chi Wang ,  Benjamin J. Jurcik JR.

IPC: G01N021/00 ,  G01J005/02

CPC classification number: G01N21/031 ,  C23C16/4412 ,  G01J3/433 ,  G01N21/3504 ,  G01N21/3554 ,  G01N21/39

Abstract: Provided is a novel chamber effluent monitoring system. The system comprises a chamber having an exhaust line connected thereto. The exhaust line includes a sample region, wherein substantially all of a chamber effluent also passes through the sample region. The system further comprises an absorption spectroscopy measurement system for detecting a gas phase molecular species. The measurement system comprises a light source and a main detector in optical communication with the sample region through one or more light transmissive window. The light source directs a light beam into the sample region through one of the one or more light transmissive window. The light beam passes through the sample region and exits the sample region through one of the one or more light transmissive window. The main detector responds to the light beam exiting the sample region. The system allows for in situ measurement of molecular gas impurities in a chamber effluent, and in particular, in the effluent from a semiconductor processing chamber. Particular applicability is found in semiconductor manufacturing process control and hazardous gas leak detection.

公开(公告)号：US20030052274A1

公开(公告)日：2003-03-20

申请号：US09960267

申请日：2001-09-20

Inventor： Donald Bruns

IPC: G01N021/55 ,  G01J005/02

CPC classification number: G02B6/3512 ,  G02B6/3516 ,  G02B6/3586 ,  H04Q11/0005 ,  H04Q2011/003 ,  H04Q2011/0083

Abstract: A light sampling system for sampling scattered light from mirrors in an optical switch. The system includes four basic components: an imaging lens, a multi-channel liquid crystal light valve (LCLV), a collecting lens, and a light sensor. Light scattered by each mirror, is collected by the imaging lens, which re-images the light onto the LCLV. The LCLV is divided into multiple regions, one for each mirror to be monitored. Each region can independently be made opaque (nullclosednull) or transparent (nullopennull) to light reaching it. Light passing through all open regions of the LCLV is collected by the collecting lens, which focuses the light onto the light sensor. The light sensor registers a response to light passing through the LCLV. Each region of the LCLV can be programmed to be open or closed for any length of time, in any combination or sequence with any other region or regions, depending upon how the user wishes to monitor the scattered light. The system is particularly useful for individually sampling scattered light from each of multiple mirrors.

Abstract translation: 一种用于从光学开关中的镜子采样散射光的光采样系统。 该系统包括四个基本部件：成像透镜，多通道液晶光阀（LCLV），收集透镜和光传感器。 由每个镜子散射的光由成像透镜收集，从而将光重新映射到LCLV上。 LCLV分为多个区域，每个镜像一个被监视。 每个区域可以独立地制成不透明（“封闭”）或透明（“打开”）以达到光。 通过LCLV的所有开放区域的光被收集透镜收集，聚光透镜将光聚焦到光传感器上。 光传感器对通过LCLV的光进行响应。 取决于用户如何监视散射光，LCLV的每个区域可以编程为任何长度的时间，以任何组合或顺序与任何其他区域或区域相关。 该系统对于从多个反射镜中的每一个单独采样散射光特别有用。

公开(公告)号：US20030043379A1

公开(公告)日：2003-03-06

申请号：US10099956

申请日：2002-03-19

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Takao Makino ,  Masaaki Chiba

IPC: G01J005/02

CPC classification number: G01N21/3504 ,  G01N1/22 ,  G01N15/06 ,  G01N21/94 ,  G01N2001/021 ,  G01N2021/3595

Abstract: A ground contamination detector has a duct (21) having an annular opening (21a). The annular opening blows air toward the ground (1) to form an air curtain that defines an enclosed space (2A) between the duct and the ground. The detector also has a pipe (23) having a nozzle that opens in the enclosed space and jets heated air toward the ground, to promote the evaporation of noxious substance (3) and diffuse the evaporated gas in the enclosed space. The detector also has a suction pipe (24) to suck the evaporated gas from the enclosed space and a sensor (25) to analyze the sucked gas. The enclosed space formed by the air curtain defines a detection area on the ground, and the detector collects and analyzes contaminants in the enclosed space in a noncontact way. The detector is installable on a vehicle, to efficiently detect the presence and position of contaminants on the ground in real time.

Abstract translation: 地面污染检测器具有具有环形开口（21a）的管道（21）。 环形开口朝向地面（1）吹动空气，形成一个在导管和地面之间形成封闭空间（2A）的气幕。 检测器还具有管（23），该管（23）具有在封闭空间内打开的喷嘴并将加热的空气喷射到地面，以促进有害物质（3）的蒸发并将蒸发的气体扩散到封闭空间中。 检测器还具有吸入管（24）以从封闭空间吸入蒸发气体和传感器（25）以分析吸入的气体。 由气幕形成的封闭空间限定了地面上的检测区域，检测器以非接触方式收集和分析封闭空间中的污染物。 检测器可安装在车辆上，以实时有效地检测地面上污染物的存在和位置。

公开(公告)号：US20030042422A1

公开(公告)日：2003-03-06

申请号：US09941940

申请日：2001-08-30

Inventor： D. Allan Roberts ,  Doug Cohen ,  David S. Smith

IPC: G01J005/02

CPC classification number: G01J5/522

Abstract: An apparatus for simulating a blackbody utilizes several plates to absorb and reflect electromagnetic radiation. Electromagnetic radiation entering the apparatus from a certain view is reflected from one plate to another, until the direction of travel of the electromagnetic radiation is reversed. Each time the electromagnetic radiation is reflected, the majority of the electromagnetic radiation is absorbed resulting in a negligible amount of incoming electromagnetic radiation escaping the apparatus.

公开(公告)号：US20030025083A1

公开(公告)日：2003-02-06

申请号：US09921525

申请日：2001-08-03

Inventor： Charles S. Kaufman

IPC: G01J005/02

CPC classification number: G01J5/06

Abstract: The illustrated embodiment of the invention is an improvement to an infrared camera in which an uncooled warm stop is provided which includes an array of miniature retro-reflectors on its rear surface oriented toward the detector in the camera and away from the exterior light source of interest instead of having a diffuse (i.e., Lambertian or white) or specular (i.e., mirror-like) reflector on the rear or interior surface of the warm stop.

Abstract translation: 本发明的所示实施例是红外照相机的改进，其中提供了未冷却的热止动器，其包括在其后表面上的朝向相机中的检测器并远离感兴趣的外部光源的微型反射器阵列 而不是在暖止的后挡板或内表面上具有漫反射（即朗伯或白色）或镜面反射镜（即反射镜）。

公开(公告)号：US20030001095A1

公开(公告)日：2003-01-02

申请号：US09898318

申请日：2001-07-02

Applicant: Schlumberger Technologies, Inc.

Inventor： Chiwoe Wayne Lo ,  Xinrong Jiang

IPC: G01J005/02

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  H01J37/3177

Abstract: A multi-charged particle beam tool for semiconductor wafer inspection or lithography includes an array of electron beam columns, each having its own electron or ion source. The objective lenses of the various electron beam columns, while each has its own pole piece, share a common single magnetic coil which generates a uniform magnetic field surrounding the entire array of electron beam columns. This advantageously improves the spacing between the beams while providing the superior optical properties of a strong magnetic objective lens. When used as an inspection tool, each column also has its own associated detector to detect secondary and back-scattered electrons from the wafer under inspection. In one version the gun lenses similarly have individual pole pieces for each column and share a common magnetic coil.

Abstract translation: 用于半导体晶片检查或光刻的多电荷粒子束工具包括每个具有其自己的电子或离子源的电子束列阵列。 各个电子束列的物镜虽然各自具有自己的极片，共享共同的单个电磁线圈，其产生围绕整个电子束列阵列的均匀磁场。 这有利地改善了光束之间的间隔，同时提供了强磁性物镜的优异的光学特性。 当用作检查工具时，每列还具有其自己的相关检测器，以检测来自晶片的次级和反向散射电子。 在一个版本中，枪式镜头类似地具有用于每列的单独的极片并且共享公共的电磁线圈。

公开(公告)号：US20020195561A1

公开(公告)日：2002-12-26

申请号：US09888133

申请日：2001-06-22

Inventor： Antonio V. Bacarella ,  Timothy E. Ostromek

IPC: G01J005/02

CPC classification number: G01J5/08 ,  G01J1/0411 ,  G01J1/4228 ,  G01J3/36 ,  G01J5/02 ,  G01J5/026 ,  G01J5/0806 ,  G01J5/0846 ,  G01J5/089 ,  G01J5/0893 ,  G01J2005/0077

Abstract: A system and method for gathering image data are disclosed. A first sensor (120) receives light directly from an aperture (114) and generates a first data set in response to the received light. A first reflective surface (130) receives light from the aperture (114) and reflects the received light. A second reflective surface (132) receives light reflected from the first reflective surface (130) and reflects the received light. A second sensor (134) receives light reflected from the second reflective surface (132) and generates a second data set in response to the received light. The second sensor (134) is substantially coaxial with the first sensor (120).

Abstract translation: 公开了一种用于收集图像数据的系统和方法。 第一传感器（120）直接从孔径（114）接收光，并响应于所接收的光产生第一数据集。 第一反射表面（130）从孔（114）接收光并反射所接收的光。 第二反射表面（132）接收从第一反射表面（130）反射并反射所接收的光的光。 第二传感器（134）接收从第二反射表面（132）反射的光并且响应于所接收的光产生第二数据集。 第二传感器（134）与第一传感器（120）基本上同轴。

公开(公告)号：US20020110178A1

公开(公告)日：2002-08-15

申请号：US10125946

申请日：2002-04-19

Applicant: DELPHI TECHNOLOGIES, INC.

Inventor： Christopher M. Puranen ,  Ronald P. Jones ,  Phillip B. Sprecher

IPC: G01J005/02 ,  G01K001/14 ,  G01K013/00

CPC classification number: G01J5/02 ,  G01J5/0205 ,  G01J5/026 ,  G01J5/04 ,  G01J5/16 ,  G01J2005/068 ,  H05K1/0201 ,  H05K1/148 ,  H05K3/0052 ,  H05K3/36

Abstract: In one aspect of the invention, a temperature sensing system, including: control components; and an infrared sensor to provide a temperature input signal to the control components, the infrared sensor being located remotely from the control components. In an additional aspect of the invention, a circuit board for an infrared temperature sensing system, including: a first portion; a second portion coplanar with the first portion; and at least one necked down portion joining the first portion and the second portion. In a further aspect of the invention, a housing for an infrared temperature sensing system, including: a base member; and first support members attached to the base member to permit an infrared temperature sensor to be mounted in a selected one of two positions.

Abstract translation: 在本发明的一个方面，一种温度感测系统，包括：控制部件; 以及红外传感器，用于向控制部件提供温度输入信号，红外传感器远离控制部件。 在本发明的另一方面，一种用于红外温度感测系统的电路板，包括：第一部分; 第二部分与第一部分共面; 以及连接第一部分和第二部分的至少一个颈缩部分。 在本发明的另一方面，一种用于红外温度感测系统的壳体，包括：基座构件; 以及附接到所述基座构件的第一支撑构件，以允许将红外温度传感器安装在两个位置中选定的一个位置。

公开(公告)号：US20020106000A1

公开(公告)日：2002-08-08

申请号：US09527239

申请日：2000-03-16

Inventor： Eisuke Morisaki ,  Masayuki Kitamura ,  Nobuaki Takahashi ,  Takashi Shigeoka

IPC: G01J005/02 ,  G01K015/00

CPC classification number: G01J5/522

Abstract: A virtual blackbody radiation system (10) includes a light-emitting unit (1) including an LED driven by a fixed current, a light-receiving unit (2) including a sapphire rod, and an optical unit (3) including lenses (31, 32) for converging light emitted by the light-emitting unit in a convergent light. A cylindrical member (41)included in the optical unit (3)can be moved along the optical axis by a servomotor (42) included in a focus adjusting unit (4) for positional adjustment. The focus of convergent light relative to the light-receiving unit (2) can be adjusted by moving the lens (32) disposed in the cylindrical member (41) along the optical axis relative to the light-receiving unit (2). The intensity of the convergent light on the light-receiving unit (2) can be adjusted to the intensity of predetermined blackbody radiation. Thus, the virtual blackbody radiation system (10) is able to obtain light of a desired intensity without changing the driving current for driving a light source; consequently, the life time of the light source can be extended and the stability of radiation can be improved.

Abstract translation: 虚拟黑体辐射系统（10）包括包括由固定电流驱动的LED的发光单元（1），包括蓝宝石棒的光接收单元（2）和包括透镜（31）的光学单元（3） ，32），用于会聚由所述发光单元发射的光。 包括在光学单元（3）中的圆柱形构件（41）可以通过包括在聚焦调节单元（4）中的伺服电动机（42）沿光轴移动，用于位置调节。 可以通过相对于光接收单元（2）沿着光轴移动设置在圆柱形构件（41）中的透镜（32）来调节相对于光接收单元（2）的会聚光的聚焦。 光接收单元（2）上的会聚光的强度可以被调整到预定黑体辐射的强度。 因此，虚拟黑体辐射系统（10）能够在不改变用于驱动光源的驱动电流的情况下获得所需强度的光; 因此，可以延长光源的寿命并且可以提高辐射的稳定性。

公开(公告)号：US20020079451A1

公开(公告)日：2002-06-27

申请号：US09747032

申请日：2000-12-22

Inventor： Justin G. Droessler ,  Andrzej Peczalski

IPC: G01J005/02

CPC classification number: G01N21/35 ,  G01J3/02 ,  G01N21/3577 ,  G01N21/552

Abstract: A low profile spectrometer includes one or more electromagnetic energy emitters, one or more electromagnetic energy detectors, and an optical path including a sampling element. The optical path optically couples each of the one or more electromagnetic energy emitters to one of the one or more electromagnetic energy detectors. The one or more electromagnetic energy detectors and the one or more electromagnetic energy emitters are formed on a common substrate. The spectrometer may also include one or more first re-imaging elements for optically coupling the one or more electromagnetic energy emitters to the sampling element, and one or more second re-imaging elements for optically coupling the one or more electromagnetic energy detectors to the sampling element. The sampling element is capable of being optically coupled to a sample and provides a path for optically coupling the one or more first re-imaging elements to the one or more second re-imaging elements.

Abstract translation: 低分辨光谱仪包括一个或多个电磁能量发射器，一个或多个电磁能量检测器和包括采样元件的光路。 光路将一个或多个电磁能量发射器中的每一个光学地耦合到一个或多个电磁能量检测器中的一个。 一个或多个电磁能量检测器和一个或多个电磁能量发射器形成在公共衬底上。 光谱仪还可以包括用于将一个或多个电磁能发射器光学地耦合到采样元件的一个或多个第一重新成像元件，以及用于将一个或多个电磁能量检测器光学耦合到采样的一个或多个第二重新成像元件 元件。 采样元件能够光学耦合到样本并且提供用于将一个或多个第一重新成像元件光学耦合到一个或多个第二重新成像元件的路径。