公开(公告)号：US5875029A

公开(公告)日：1999-02-23

申请号：US908061

申请日：1997-08-11

Applicant: Peter C. Jann ,  Wayne W. Li ,  Igor Iosilevsky ,  Kenneth H. Womack ,  Vlastimil Cejna ,  George A. Burt, Jr.

Inventor： Peter C. Jann ,  Wayne W. Li ,  Igor Iosilevsky ,  Kenneth H. Womack ,  Vlastimil Cejna ,  George A. Burt, Jr.

IPC: G01N21/94 ,  G01N21/956 ,  G01B9/02

CPC classification number: G01N21/9501 ,  G01N21/94 ,  G01N2201/1045

Abstract: A simple yet versatile noncontact optical inspection instrument and method are described for the inspection of magnetic disk surfaces for surface defects. This instrument is capable of inspecting the disk surface at any point in the disk manufacturing process. Surface defects such as bumps, pits and scratches can be measured. Surface contaminants such as particles and stains can also be measured. The instrument is also capable of discriminating between surface defects and surface contaminants. The instrument is comprised of two identical optical sensors which are located on opposite sides of the disk. A carriage supports and translates these sensors along the disk radius while a spindle rotates the disk. Both surfaces of the disk are therefore simultaneously scanned in a spiral fashion. The sensor's illumination optics produce a monochromatic focused spot of light which is normally incident upon the disk surface. The sensor uses two collection optics channels which simultaneously detect both the specular reflected light and the diffuse scattered light produced by the disk surface. Both the angle and power of the specular reflected light are measured, while just the power of the diffuse scattered light is measured. The output signals from the sensors are processed to estimate the size of the defects and to determine the type of defect.

Abstract translation: 描述了一种简单而通用的非接触式光学检测仪器和方法，用于检查表面缺陷的磁盘表面。 该仪器能够在磁盘制造过程的任何时刻检查磁盘表面。 可以测量诸如凸块，凹坑和划痕的表面缺陷。 还可以测量颗粒和污渍等表面污染物。 该仪器还能够区分表面缺陷和表面污染物。 仪器由两个相同的光学传感器构成，位于光盘的相对两侧。 当主轴旋转磁盘时，滑架沿着磁盘半径支撑并平移这些传感器。 因此，盘的两个表面都以螺旋方式同时扫描。 传感器的照明光学器件产生通常入射在盘表面上的单色聚光光点。 该传感器使用两个收集光学通道，其同时检测镜面反射光和由盘表面产生的漫射散射光。 测量镜面反射光的角度和功率，同时测量漫射散射光的功率。 来自传感器的输出信号被处理以估计缺陷的尺寸并确定缺陷的类型。

公开(公告)号：US4800268A

公开(公告)日：1989-01-24

申请号：US91867

申请日：1987-09-01

Applicant: Motosuke Miyoshi ,  Katsuya Okumura ,  Shigeru Ogawa

Inventor： Motosuke Miyoshi ,  Katsuya Okumura ,  Shigeru Ogawa

IPC: H01L21/66 ,  G01B11/30 ,  G01N21/88 ,  G01N21/89 ,  G01N21/94 ,  G01N21/95 ,  G01N21/956 ,  H01J3/14

CPC classification number: G01N21/9501 ,  G01N2201/1045

Abstract: An apparatus for scanning a laser beam to examine the surface of a semiconductor wafer comprises a stage onto which a semiconductor wafer is mounted and a laser beam scanning unit for repeatedly rectilinearly scanning a laser beam in a predetermined direction on the semiconductor wafer. This scanning apparatus further has a drive unit for rotating the semiconductor wafer and for moving the semiconductor wafer by only a predetermined distance in the predetermined direction every rotation of the wafer. The laser beam scanning unit rectilinearly scans the laser beam at a swing width of a predetermined amount.

Abstract translation: 用于扫描激光束以检查半导体晶片的表面的装置包括其上安装半导体晶片的台和用于在半导体晶片上沿预定方向重复地直线扫描激光束的激光束扫描单元。 该扫描装置还具有驱动单元，用于旋转半导体晶片，并且用于每半转晶圆使预定方向仅移动半导体晶片预定距离。 激光束扫描单元以预定量的摆动宽度直线地扫描激光束。

公开(公告)号：US4626101A

公开(公告)日：1986-12-02

申请号：US675008

申请日：1984-11-26

Applicant: Shigeru Ogawa ,  Hiroshi Yamaji ,  Masaaki Kano

Inventor： Shigeru Ogawa ,  Hiroshi Yamaji ,  Masaaki Kano

IPC: G01N21/94 ,  G01N21/95 ,  G01N21/89

CPC classification number: G01N21/9501 ,  G01N21/94 ,  G01N2201/065 ,  G01N2201/1045

Abstract: The holding mechanism holds an object under inspection in a manner that the substantially entire surface of the object may relatively be scanned by a laser beam. A spherical integrating light collector has an opening disposed close to the inspected surface of the object held by the holding mechanism. A laser beam illuminating mechanism is coupled with the other end of the spherical integrating light collector, and illuminates the inspected surface of the object with the laser beam through the opening. A photo-electric converter receives the scattered light as is reflected by the inspected surface and collected by the spherical integrating light collector, and converts the scattered light into an electrical signal representing an amount of light. An analog to digital converter converts the electrical signal derived from the photo-electric converter into a digital signal. A peak detector receives the digital signal derived from the analog to digital converter to detect peak values at predetermined periods. A mean value calculator calculates a mean value using a digital signal output from the analog to digital converter. A reference value storing memory stores a reference value to determine defects present on the inspected surface of the object. A threshold level calculator calculates the threshold level using the reference value and the mean value. A defect detector compares peak values derived from the peak detector with the threshold level, and detects the surface defects on the basis of the result of the comparison.

Abstract translation: 保持机构以使得物体的大致整个表面可以相对地被激光束扫描的方式保持被检查物体。 球形积分光收集器具有靠近被保持机构保持的物体的检查表面设置的开口。 激光束照明机构与球面积分光收集器的另一端耦合，并且通过开口用激光束照射物体的检查表面。 光电转换器接收由被检查表面反射并被球面积分光收集器收集的散射光，并将散射光转换成表示光量的电信号。 模数转换器将从光电转换器得到的电信号转换为数字信号。 峰值检测器接收从模数转换器得到的数字信号，以在预定周期检测峰值。 平均值计算器使用从模数转换器输出的数字信号来计算平均值。 参考值存储存储器存储参考值以确定存在于物体的被检查表面上的缺陷。 阈值电平计算器使用参考值和平均值来计算阈值电平。 缺陷检测器将从峰值检测器导出的峰值与阈值水平进行比较，并根据比较结果检测表面缺陷。

公开(公告)号：US20170234806A1

公开(公告)日：2017-08-17

申请号：US15584628

申请日：2017-05-02

Applicant: General Electric Company

Inventor： Manuel Kenneth Bueno ,  Robert Martin Roney, JR.

IPC: G01N21/88 ,  G01N21/954 ,  G01S17/89 ,  G01S7/481

CPC classification number: G01N21/8851 ,  G01N21/88 ,  G01N21/954 ,  G01N2021/9544 ,  G01N2021/9546 ,  G01N2021/9548 ,  G01N2201/06113 ,  G01N2201/104 ,  G01N2201/1045 ,  G01S7/4815 ,  G01S7/4817 ,  G01S7/4818 ,  G01S17/88 ,  G01S17/89

Abstract: A system includes a vessel floating on a body of water. The system also includes at least one conduit extending from the vessel to below the body of water. The system also includes a scanning device disposed within the at least one conduit. The scanning device includes at least one two-dimensional (2D) line scanner and a rotary encoder coupled to the at least one 2D line scanner. The scanning device is configured to generate three-dimensional (3D) image data of a surface of the at least one conduit or at least one component disposed within the at least one conduit.

公开(公告)号：US07239588B2

公开(公告)日：2007-07-03

申请号：US10516023

申请日：2003-05-30

Applicant: Yasuhiro Gotoh ,  Seiji Nishiwaki ,  Yoshiaki Komma

Inventor： Yasuhiro Gotoh ,  Seiji Nishiwaki ,  Yoshiaki Komma

IPC: G01N21/88

CPC classification number: G11B7/00375 ,  G01N21/94 ,  G01N21/9506 ,  G01N2201/1045 ,  G11B19/04

Abstract: In an foreign body detection apparatus, an optical signal detection unit irradiates a light spot onto a surface of an object to be inspected while scanning the surface by employing the light spot in a predetermined direction, and receives a reflected beam from the surface of the inspected object to generate a photodetection signal corresponding to the light intensity of the reflected beam. A foreign body detection unit generates a foreign body detection signal appearing with respect to a leader and a trailer in the scanning direction of a foreign body adhering to the inspected object from the photodetection signal. The foreign body detection signal is obtained, for example, as a difference signal between the photodetection signal and a delayed photodetection signal with a predetermined delay time. A foreign body discrimination unit generates a foreign body discriminating signal indicating a region in which the foreign body is present from the foreign body detection signal.

Abstract translation: 在异物检测装置中，光信号检测单元通过在预定方向上采用光点扫描表面，将光斑照射到待检查物体的表面上，并从被检查的表面接收反射光束 目的是产生对应于反射光束的光强度的光电检测信号。 异物检测单元从与光检测信号相对的被检查物体的异物的扫描方向上的引导部和拖车上产生异物检测信号。 例如，异物检测信号作为光检测信号和延迟光检测信号之间的差信号，具有预定的延迟时间。 异物识别单元从异物检测信号生成表示异物存在的区域的异物识别信号。

公开(公告)号：US07218389B2

公开(公告)日：2007-05-15

申请号：US10223422

申请日：2002-08-20

Applicant: Sachio Uto ,  Minoru Yoshida ,  Toshihiko Nakata ,  Shunji Maeda

Inventor： Sachio Uto ,  Minoru Yoshida ,  Toshihiko Nakata ,  Shunji Maeda

IPC: G02N21/88

CPC classification number: G01N21/956 ,  G01N21/94 ,  G01N2021/9513 ,  G01N2201/10 ,  G01N2201/1045

Abstract: A pattern defect inspection apparatus is capable of detecting defects, without being affected by non-uniform thickness of a thin film formed on a sample, even when using monochromatic light, such as a laser. The apparatus comprises a laser to illuminate a sample, coherence suppression optics to reduce laser beam coherence, a condenser to condense the laser beam onto a pupil plane of an objective lens, and a detector to detect the light reflected from a circuit pattern formed on a sample. The condenser is designed so that the intensity of light illuminating the sample under test can be partially adjusted according to the type of laser beam illumination condensed on the pupil of the objective lens. Variations in reflected light intensity caused by non-uniform film thickness on the surface of the sample are therefore reduced, and shading is minimized in the detected image to allow detecting of fine defects.

Abstract translation: 即使使用激光等单色光，图案缺陷检查装置也能够不受样品上形成的薄膜的不均匀的厚度的影响而检测缺陷。 该装置包括用于照亮样品的激光器，减少激光束相干性的相干抑制光学器件，将激光束冷凝到物镜的光瞳平面上的冷凝器，以及用于检测从形成在物镜上的电路图案反射的光的检测器 样品。 冷凝器被设计成使得照射待测试样品的光的强度可以根据在物镜的瞳孔上聚集的激光束照明的类型来部分地调节。 因此，在样品表面上由不均匀膜厚引起的反射光强度的变化因此减少，并且在检测图像中使阴影最小化以允许检测细小缺陷。

公开(公告)号：US07061601B2

公开(公告)日：2006-06-13

申请号：US10754275

申请日：2004-01-08

Applicant: Steven W. Meeks

Inventor： Steven W. Meeks

IPC: G01N21/00

CPC classification number: G01N21/9506 ,  G01B11/0616 ,  G01B11/0641 ,  G01B11/065 ,  G01B11/303 ,  G01B11/306 ,  G01N21/21 ,  G01N21/47 ,  G01N21/9501 ,  G01N21/958 ,  G01N2021/8427 ,  G01N2021/8841 ,  G01N2201/103 ,  G01N2201/104 ,  G01N2201/1045 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A double-sided optical inspection system is presented which may detect and classify particles, pits and scratches on thin film disks or wafers in a single scan of the surface. In one embodiment, the invention uses a pair of orthogonally oriented laser beams, one in the radial and one in the circumferential direction on both surfaces of the wafer or thin film disk. The scattered light from radial and circumferential beams is separated via their polarization or by the use of a dichroic mirror together with two different laser wavelengths.

Abstract translation: 提出了一种双面光学检测系统，其可以在表面的单次扫描中检测和分类薄膜盘或晶片上的颗粒，凹坑和划痕。 在一个实施例中，本发明使用一对正交取向的激光束，一个在径向上，一个在圆周方向上在晶片或薄膜盘的两个表面上。 来自径向和周向光束的散射光通过其偏振分离，或者通过使用二向色镜与两种不同的激光波长分离。

公开(公告)号：US20050230647A1

公开(公告)日：2005-10-20

申请号：US10516023

申请日：2003-05-30

Applicant: Yasuhiro Gotoh ,  Seiji Nishiwaki ,  Yoshiaki Komma

Inventor： Yasuhiro Gotoh ,  Seiji Nishiwaki ,  Yoshiaki Komma

IPC: G01N21/90 ,  G01N21/94 ,  G01N21/95 ,  G11B7/0037 ,  G11B19/04 ,  G01N21/88

CPC classification number: G11B7/00375 ,  G01N21/94 ,  G01N21/9506 ,  G01N2201/1045 ,  G11B19/04

Abstract: In an foreign body detection apparatus, an optical signal detection unit (1) irradiates a light spot onto a surface of an object to be inspected while scanning the surface by the light spot in a predetermined direction, and receives a reflected beam from the surface of the inspected object to generate a photodetection signal (HF) corresponding to the light intensity of the reflected beam. A foreign body detection unit (2a to 2h) generates a foreign body detection signal (C) appearing with respect to a leader and a trailer in the scanning direction of a foreign body adhering to the inspected object from the photodetection signal (HF). The foreign body detection signal is obtained for example as a difference signal between the photodetection signal (HF) and the delayed photodetection signal (HF) with a predetermined delay time. A foreign body discrimination unit (3) generates a foreign body discriminating signal (H) indicating a region in which the foreign body is present from the foreign body detection signal (C).

Abstract translation: 在异物检测装置中，光信号检测单元（1）在预定方向上通过光点扫描表面而将光斑照射到待检查对象的表面上，并且从表面接收反射光束 被检查对象以产生对应于反射光束的光强度的光电检测信号（HF）。 异物检测单元（2 a〜2 h）从光检测信号（HF）生成与检测对象物附近的异物的扫描方向上的引导部和拖车相对的异物检测信号（C） 。 异物检测信号例如作为光检测信号（HF）和延迟光检测信号（HF）之间的差信号以预定的延迟时间获得。 异物识别单元（3）从异物检测信号（C）生成表示异物存在的区域的异物识别信号（H）。

公开(公告)号：US5377002A

公开(公告)日：1994-12-27

申请号：US913592

申请日：1992-07-14

Applicant: Comas Malin ,  Edgar F. Steigmeier ,  Thomas Nesensohn ,  Harry L. Sawatzki ,  Heinrich Auderset ,  Gert Schmid

Inventor： Comas Malin ,  Edgar F. Steigmeier ,  Thomas Nesensohn ,  Harry L. Sawatzki ,  Heinrich Auderset ,  Gert Schmid

IPC: G01M11/02 ,  G01N21/89 ,  G01N21/93 ,  G01N21/95 ,  G01N21/00

CPC classification number: G01M11/0278 ,  G01N21/9501 ,  G01N2021/8822 ,  G01N2021/8867 ,  G01N2021/8907 ,  G01N21/93 ,  G01N21/9503 ,  G01N2201/1045

Abstract: This apparatus permits the non-destructive examination of entire surfaces for defects and contamination, and can detect microscopically small dot-shaped and linear defects and extremely fine macroscopic non-homogeneous areas. For this purpose, an adjustable lens system (5) is placed in the optical path between light source (2) and objective (9) which produces various intermediate images (31). A first cigar-shaped intermediate image is used for the first scan of the whole of the surface at a relatively large feed offset, and a second dot-shaped intermediate image is used for a second scan of partial areas of the surface at a small feed offset.A dark-field stop assembly (18) with an adjustable dark-field deflection system (8) is placed in the optical path between the lens system (5) and the objective (9), which projects the light beam (1) after deflection exactly centered at right angles through the objective (9) upon the surface of the object (10). The light reflected by the surface (10) and collected by the objective (9) is projected to a photo detector. An electronic analysis system (21) breaks down the amplified output signals from the photo detector (19) into measured values due to dot-shaped, linear, and planiform defects. The electronic analysis system (21) is connected via a computer unit (22) to peripheral equipment (23, 24, 25) which permits the representation of all the measured values obtained in a measuring cycle.

Abstract translation: 该装置允许对整个表面进行无损检测以用于缺陷和污染，并且可以检测微小的点状和线性缺陷以及极细的宏观非均匀区域。 为此，将可调透镜系统（5）放置在产生各种中间图像（31）的光源（2）和物镜（9）之间的光路中。 第一个雪茄状中间图像用于以相对大的进给偏移量对整个表面的第一次扫描，并且第二点状中间图像用于在小进给处的表面的部分区域的第二次扫描 抵消。 具有可调暗场偏转系统（8）的暗场停止组件（18）被放置在透镜系统（5）和物镜（9）之间的光路中，其在偏转之后突出光束（1） 在物体（10）的表面上通过物镜（9）以正交的角度准确地居中。 由表面（10）反射并由物镜（9）收集的光被投射到光电探测器。 电子分析系统（21）由于点状，线性和平面状缺陷将放大的从光检测器（19）输出的信号分解为测量值。 电子分析系统（21）经由计算机单元（22）连接到外围设备（23,24,25），其允许表示在测量周期中获得的所有测量值。

公开(公告)号：US4841139A

公开(公告)日：1989-06-20

申请号：US62181

申请日：1987-06-15

Applicant: Harald Schmalfuss ,  Hubert Kurpiella ,  Bernhard Schneider

Inventor： Harald Schmalfuss ,  Hubert Kurpiella ,  Bernhard Schneider

IPC: G01M11/00 ,  G01N21/88 ,  G01N21/93 ,  G01N21/95 ,  G01N21/958

CPC classification number: G01N21/88 ,  G01N2021/9511 ,  G01N2201/1045

Abstract: A method for testing components of transparent material for surface irregularities and occlusions, comprising the steps of dot-scanning the component by moving a light ray completely therethrough; detecting the light which represents flaws in at least the front and back surfaces of the component by receivers located on one side of the component; generating fault signals based on the light detected in the detecting step; digitizing the fault signals which are generated in the generating step; feeding the digitized signal to a mapped memory; and analyzing the signal by: (a) feeding the digitized signal to a number of sector counters via a preselectable number of thresholds; (b) evaluating the sector counters on-line according to preselected criterion regarding the number, location and gray tone distribution of the digitized fault signals; and (c) evaluating the signals in the mapped memory in a computer if the fulfillment of the criterion for evaluation of the sector counters cannot be sufficiently assured.

Abstract translation: 一种用于测试表面不规则和闭塞的透明材料的组件的方法，包括以下步骤：通过完全移动光线对所述部件进行点扫描; 通过位于所述部件的一侧的接收器来检测表示所述部件的至少前表面和后表面中的缺陷的光; 基于在检测步骤中检测到的光产生故障信号; 数字化在生成步骤中生成的故障信号; 将数字化信号馈送到映射存储器; 以及通过以下步骤分析所述信号：（a）经由预选数量的阈值将所述数字化信号馈送到多个扇区计数器; （b）根据关于数字化故障信号的数量，位置和灰度分布的预选标准在线评估扇区计数器; 以及（c）如果不能充分确保扇区计数器的评估标准的满足，则对计算机中的映射存储器中的信号进行评估。