公开(公告)号：US20020100295A1

公开(公告)日：2002-08-01

申请号：US10057129

申请日：2001-10-25

申请人： SHIN-ETSU CHEMICAL CO., LTD.

发明人： Masami Terashima ,  Tadakatsu Shimada ,  Hideo Hirasawa

IPC分类号： C03B037/018

CPC分类号： C03B37/01251 ,  C03B37/01228 ,  C03B37/0126 ,  C03B37/01466 ,  C03B2207/20 ,  C03C13/04

摘要： There are disclosed a method for producing an optical fiber base material ingot comprising depositing a soot on a starting core member, and subjecting the soot to dehydration, vitrification by sintering, and then cylindrical grinding, wherein the cylindrical grinding is performed while a core portion central axis is brought into line with a rotation axis of cylindrical grinding machine, and an optical fiber base material ingot produced by the method. According to the present invention, there are provided an optical fiber base material ingot having excellent ingot roundness and excellent core portion eccentricity, and a production method capable of producing the optical fiber base material ingot in a short period of time.

摘要翻译： 公开了一种光纤基材锭的制造方法，其特征在于，在起始芯部上沉积烟灰，并通过烧结对所述烟灰进行脱水，玻璃化，然后进行圆筒磨削，其中，在芯部中心 轴与圆筒磨床的旋转轴线成一直线，以及通过该方法制造的光纤基材锭。 根据本发明，提供一种具有优异的锭状圆度和优异的芯部偏心率的光纤基材锭，以及能够在短时间内制造光纤母材锭的制造方法。

公开(公告)号：US06376010B1

公开(公告)日：2002-04-23

申请号：US09098055

申请日：1998-06-16

申请人： Jeffery Lynn Blackwell ,  Lisa Anne Moore ,  Carlton Maurice Truesdale

发明人： Jeffery Lynn Blackwell ,  Lisa Anne Moore ,  Carlton Maurice Truesdale

IPC分类号： B05D506

CPC分类号： C03C3/06 ,  C03B19/1415 ,  C03B37/01413 ,  C03B2201/31 ,  C03B2207/20 ,  C03B2207/32 ,  C03B2207/36 ,  C03B2207/38 ,  C03B2207/81 ,  C03B2207/85 ,  C03C2201/31 ,  C03C2203/40 ,  G02B6/02 ,  G02B6/03611 ,  G02B6/0365

摘要： The present invention is directed to a silica forming feedstock and a method of making optical waveguides and optical waveguide preforms. The feedstock for use in the manufacturing of germanium doped silica glass products includes a siloxane and a germanium dopant component such as germanium alkoxide. The invention further relates to the manufacturing of optical waveguides and optical waveguide preforms using a fluid feedstock which includes a siloxane and germanium dopant component, preferably germanium alkoxide.

摘要翻译： 本发明涉及二氧化硅形成原料以及制造光波导和光波导预制件的方法。 用于锗掺杂石英玻璃产品制造的原料包括硅氧烷和锗掺杂剂组分，例如烷氧化锗。 本发明还涉及使用包括硅氧烷和锗掺杂剂组分，优选锗烷氧化物的流体原料的光波导和光波导预成型件的制造。

公开(公告)号：US06363746B1

公开(公告)日：2002-04-02

申请号：US09525409

申请日：2000-03-15

申请人： Huailiang Wei ,  Lisa A. Moore ,  Jeffery L. Blackwell ,  Daniel W. Hawtof

发明人： Huailiang Wei ,  Lisa A. Moore ,  Jeffery L. Blackwell ,  Daniel W. Hawtof

IPC分类号： C03B1906

CPC分类号： C03B37/0142 ,  C03B2201/32 ,  C03B2201/36 ,  C03B2201/50 ,  C03B2201/54 ,  C03B2207/06 ,  C03B2207/12 ,  C03B2207/14 ,  C03B2207/20 ,  C03B2207/34 ,  C03B2207/46

摘要： An apparatus for producing the glass soot used in the formation of optical fiber includes a burner with an internal atomizer. The atomizer includes an outer tube having a nozzle at an end thereof, and an inner tube located within the outer tube and having a closed end restricting fluid flow therethrough and defining a cylindrical sidewall having radially extending apertures spaced there along. The outer tube receives the glass-forming mixture in liquid form and the inner tube receives an atomizing gas which flows through the apertures in the sidewall of the inner tube and atomizes the glass-forming mixture as the glass-forming mixture travels through the outer tube.

摘要翻译： 用于生产用于形成光纤的玻璃烟灰的设备包括具有内部雾化器的燃烧器。 雾化器包括在其一端具有喷嘴的外管和位于外管内的内管，并且具有限制流过其中的流体流动的封闭端，并限定具有沿其间隔开的径向延伸的孔的圆柱形侧壁。 外管容纳液体形式的玻璃形成混合物，并且内管接收流过内管侧壁中的孔的雾化气体，并且当玻璃形成混合物通过外管时雾化玻璃形成混合物 。

公开(公告)号：US20020013208A1

公开(公告)日：2002-01-31

申请号：US09933749

申请日：2001-08-22

申请人： NIKON CORPORATION

发明人： Norio Komine ,  Seishi Fujiwara ,  Hiroki Jinbo

IPC分类号： C03C003/112

CPC分类号： C03B19/14 ,  C03B19/1423 ,  C03B19/1484 ,  C03B37/014 ,  C03B37/0142 ,  C03B2201/07 ,  C03B2201/12 ,  C03B2201/23 ,  C03B2207/06 ,  C03B2207/12 ,  C03B2207/20 ,  C03B2207/30 ,  C03B2207/36 ,  C03B2207/66 ,  C03C3/06 ,  C03C4/0085 ,  C03C2201/12 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/42 ,  C03C2203/46 ,  G03F7/2004 ,  Y10S65/90

摘要： A method is provided for manufacturing a silica glass that is substantially free of chlorine. The method includes the step of separately expelling a silicon tetrafluoride gas, a combustion gas, and a combustible gas from a burner made of silica glass, the flow velocity of the silicon tetrafluoride gas being within the range of about 9 slm/cm2 to about 20 slm/cm2. The method further includes the steps of producing minute silica glass particles by reacting the silicon tetrafluoride gas with water produced by a reaction of the combustion gas with the combustible gas, depositing the minute silica glass particles on a target, and producing the silica glass by fusing and vitrifying the minute silica glass particles deposited on the target.

公开(公告)号：US20010027025A1

公开(公告)日：2001-10-04

申请号：US09876194

申请日：2001-06-06

发明人： George Edward Berkey ,  Lisa Anne Moore ,  Charles Chunzhe Yu

IPC分类号： H01L021/302 ,  H01L021/461

CPC分类号： C03B23/07 ,  C03B19/1415 ,  C03B19/1423 ,  C03B19/1453 ,  C03B19/1469 ,  C03B19/1492 ,  C03B23/043 ,  C03B23/045 ,  C03B23/051 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/21 ,  C03B2207/02 ,  C03B2207/06 ,  C03B2207/20 ,  C03B2207/32 ,  C03B2207/52 ,  C03B2207/54 ,  C03B2207/66 ,  C03C3/06 ,  C03C4/0085 ,  C03C2201/12 ,  C03C2201/21 ,  C03C2203/50 ,  G03F1/60

摘要： The invention includes methods of making lithography photomask blanks. The invention also includes lithography photomask blanks and preforms for producing lithography photomask. The method of making a lithography photomask blank includes providing a soot deposition surface, producing SiO2 soot particles and projecting the SiO2 soot particles toward the soot deposition surface. The method includes successively depositing layers of the SiO2 soot particle on the deposition surface to form a coherent SiO2 porous glass preform body comprised of successive layers of the SiO2 soot particles and dehydrating the coherent SiO2 glass preform body to remove OH from the preform body. The SiO2 is exposed to and reacted with a fluorine containing compound and consolidated into a nonporous silicon oxyfluoride glass body with parallel layers of striae. The method further includes forming the consolidated silicon oxyfluoride glass body into a photomask blank having a planar surface with the orientation of the striae layer parallel to the photomask blank planar surface.

摘要翻译： 本发明包括制造光刻光掩模坯料的方法。 本发明还包括光刻光掩模坯料和用于生产光刻光掩模的预成型件。 制造光刻光掩模坯料的方法包括提供烟灰沉积表面，产生SiO 2烟灰颗粒并将SiO 2烟灰颗粒投射到烟灰沉积表面。 该方法包括在沉积表面上依次沉积SiO 2烟灰颗粒的层，以形成由SiO 2烟灰颗粒的连续层组成的粘结SiO 2多孔玻璃预制体，并使相干的SiO 2玻璃预制体脱水以从预成型体中去除OH。 将SiO 2暴露于含氟化合物并与其反应，并固化成具有平行的条纹层的无孔氟氧化硅玻璃体。 该方法还包括将固化的氟氧化硅玻璃体形成为具有平坦表面的光掩模坯料，其中条纹层的取向平行于光掩模坯料平面。

公开(公告)号：US5622750A

公开(公告)日：1997-04-22

申请号：US331460

申请日：1994-10-31

申请人： Arnd H. Kilian ,  John B. MacChesney ,  Theodore F. Morse

发明人： Arnd H. Kilian ,  John B. MacChesney ,  Theodore F. Morse

IPC分类号： G02B6/13 ,  C01B21/48 ,  C03B19/01 ,  C03B19/12 ,  C03B19/14 ,  C03C17/02 ,  C23C16/448 ,  C23C16/453 ,  C23C26/00 ,  C30B29/06 ,  G02B6/12 ,  B05D5/06 ,  B05D3/08

CPC分类号： C03B19/1423 ,  C03C17/02 ,  C23C16/4486 ,  C23C16/453 ,  C03B2201/10 ,  C03B2201/34 ,  C03B2201/36 ,  C03B2201/50 ,  C03B2207/06 ,  C03B2207/20 ,  C03B2207/32 ,  C03B2207/34

摘要： A new method for the manufacture of glass films on substrates involves the flame reaction of an aerosol comprised of droplets of a solution containing all the precursors for the glass. A solution containing the precursors for all oxide components is atomized, and the resulting droplets are reacted in a flame to form spherical glass particles which are deposited on a heated substrate. By moving the substrate through the flame, a homogeneous deposit is achieved. Subsequent heat treatment in a furnace sinters the porous particle layer into a clear glass. The method has been successfully employed for the formation of sodium borosilicate glass films on silicon substrates and rare earth-doped multicomponent glass films for active devices.

摘要翻译： 用于在基材上制造玻璃膜的新方法涉及由包含玻璃的所有前体的溶液的液滴组成的气溶胶的火焰反应。 将含有所有氧化物组分的前体的溶液雾化，并将所得液滴在火焰中反应形成沉积在加热的基底上的球形玻璃颗粒。 通过移动基板通过火焰，实现均匀的沉积。 随后在炉中的热处理将多孔颗粒层烧结成透明玻璃。 该方法已经成功地用于在硅衬底上形成硼硅酸钠玻璃膜和用于有源器件的稀土掺杂多组分玻璃膜。

公开(公告)号：US5558693A

公开(公告)日：1996-09-24

申请号：US319394

申请日：1994-10-06

申请人： Arnab Sarkar

发明人： Arnab Sarkar

IPC分类号： C03B37/014 ,  C03B37/08

CPC分类号： C03B37/0148 ,  C03B37/014 ,  C03B37/0142 ,  C03B37/01446 ,  C03B37/01486 ,  C03B2201/12 ,  C03B2203/22 ,  C03B2203/24 ,  C03B2203/26 ,  C03B2207/06 ,  C03B2207/12 ,  C03B2207/20 ,  C03B2207/36 ,  C03B2207/54 ,  C03B2207/60 ,  C03B2207/64 ,  C03B2207/70

摘要： Low attenuation, low dispersion of optical waveguides are provided by a process initiating with axial deposition of a high velocity core soot stream impinging on, a target at a high angle of incidence relative to the axis of rotation of the target. A core cylinder is built up axially by relative movement between the soot stream and target during deposition, the movement being non-constant in order to maintain a substantially constant diameter with a constant deposition rate. A cladding layer is then built up by deposition of soot radially on the core. Subsequent drying and sintering provides a vitreous preform which may be drawn directly into optical waveguides. Alternatively, the sintered product may be drawn down to smaller rods, which then are covered with further deposited soot cladding to a desired final thickness, and after further drying and sintering may be drawn to optical waveguides.

摘要翻译： 光波导的低衰减，低色散是通过以相对于目标的旋转轴线以高入射角冲击目标的高速核心烟灰流的轴向沉积开始的过程来提供的。 在沉积期间通过烟灰流和靶之间的相对运动轴向地建立芯筒，该运动是不恒定的，以便以恒定的沉积速率保持基本上恒定的直径。 然后通过将烟灰放射在芯上沉积来形成包覆层。 随后的干燥和烧结提供可以直接拉入光波导的玻璃状预制件。 或者，烧结产品可以被拉伸到较小的杆，然后用另外沉积的烟灰覆层覆盖到所需的最终厚度，并且在进一步干燥和烧结之后，可以将其吸引到光波导。

公开(公告)号：US5207813A

公开(公告)日：1993-05-04

申请号：US754470

申请日：1991-09-04

申请人： Toshio Danzuka ,  Masumi Ito ,  Masahiro Takagi ,  Hiroshi Yokota

发明人： Toshio Danzuka ,  Masumi Ito ,  Masahiro Takagi ,  Hiroshi Yokota

IPC分类号： G02B6/00 ,  C03B8/04 ,  C03B37/014 ,  C03B37/018

CPC分类号： C03B37/0142 ,  C03B37/01413 ,  C03B2207/06 ,  C03B2207/20 ,  C03B2207/36 ,  C03B2207/38 ,  C03B2207/60 ,  C03B2207/70 ,  C03B2207/85 ,  Y02P40/57

摘要： A glass article is produced at a high production rate and a high yield by jetting a glass-forming raw material from a multi-port burner, synthesizing glass soot through hydrolysis of the glass-forming raw material, depositing the glass soot to form a soot preform and heating and vitrifying the soot preform to produce a transparent glass article, wherein the glass-forming raw material is vaporized by heating it at a temperature higher than its boiling point and directly supplied to the burner, the vaporized glass-forming raw material and a fuel gas for synthesizing glass soot are supplied to an inner port of the multi-port burner and a fuel gas for heating a formed preform is supplied to an outer port of the multi-port burner, and a molar ratio of water generated by a reaction of the fuel gas for synthesizing glass soot to the glass-foring raw material is from to 2 to 3.

公开(公告)号：US5140665A

公开(公告)日：1992-08-18

申请号：US456140

申请日：1989-12-22

申请人： Marcella R. Backer ,  Michael G. Blankenship ,  Ralston Cavender ,  Bernard de Jong ,  Melanie L. Elder ,  Gregory S. Glaesemann ,  Peter C. Jones

发明人： Marcella R. Backer ,  Michael G. Blankenship ,  Ralston Cavender ,  Bernard de Jong ,  Melanie L. Elder ,  Gregory S. Glaesemann ,  Peter C. Jones

IPC分类号： C03B37/014 ,  C03C13/04 ,  G02B6/036

CPC分类号： G02B6/03622 ,  C03B37/014 ,  C03B37/01446 ,  C03C13/045 ,  C03B2201/42 ,  C03B2207/06 ,  C03B2207/12 ,  C03B2207/20

摘要： An optical waveguide fiber with a fatigue resistant TiO.sub.2 -SiO.sub.2 outer cladding including a cylindrical outermost layer with TiO.sub.2 concentration greater than 10.5 wt. % and thickness less than 3 .mu.m. The fiber may include a two layer outer cladding with higher TiO.sub.2 concentration in the outer layer. The outer cladding may include a plurality of inhomogeneities dispersed in a TiO.sub.2 -SiO.sub.2 matrix.

摘要翻译： 一种具有耐疲劳性TiO 2 -SiO 2外包层的光波导纤维，其包括TiO 2浓度大于10.5重量％的圆柱形最外层。 ％和厚度小于3微米。 纤维可以包括在外层中具有较高TiO 2浓度的两层外包层。 外包层可以包括分散在TiO 2 -SiO 2基质中的多个不均匀性。

公开(公告)号：US5110335A

公开(公告)日：1992-05-05

申请号：US543286

申请日：1990-06-25

申请人： Thomas J. Miller ,  Douglas W. Monroe

发明人： Thomas J. Miller ,  Douglas W. Monroe

IPC分类号： B01J19/12 ,  C03B8/04 ,  C03B37/014 ,  C03B37/018 ,  G02B6/00

CPC分类号： C03B37/01413 ,  C03B37/0142 ,  C03B2207/06 ,  C03B2207/12 ,  C03B2207/20 ,  C03B2207/32 ,  C03B2207/34 ,  C03B2207/38 ,  Y10S65/901

摘要： In a flame hydrolysis method for depositing glass soot used ultimately to make optical fiber, a reactant that forms the glassy soot stream is delivered to the torch (20) in liquid form and an ultrasonic nozzle (34) in the torch atomizes the reactant or breaks the reactant into a fine mist without the use of a gas.