Method for etching trench in manufacturing semiconductor devices
    21.
    发明授权
    Method for etching trench in manufacturing semiconductor devices 失效
    在制造半导体器件中蚀刻沟槽的方法

    公开(公告)号:US06291315B1

    公开(公告)日:2001-09-18

    申请号:US08889918

    申请日:1997-07-10

    IPC分类号: H01L21304

    CPC分类号: H01L21/76251 H01L21/3081

    摘要: A semiconductor wafer in which black silicon does not form during trench etching even when side rinsing is carried out during a photolithography process. In an embedded oxide film interposed between first and second semiconductor wafers of a bonded SOI wafer, the film thickness of a peripheral part thereof is made greater than a predetermined thickness Dsio so that it functions as an oxide film for etching prevention. When side rinsing is carried out in a resist coating process to form an opening in an oxide film for masking use in trench etching, the oxide film for masking use at the periphery is also etched during formation of the opening. Due to over-etching at that time, the oxide film for etching prevention is etched by a film thickness d1. During trench etching also, the oxide film for etching prevention is etched by a film thickness d2. Accordingly, if the film thickness Dsio of the oxide film for etching prevention is set to be greater than the film thickness d1+d2, because an oxide film remains at the final stage, the formation of black silicon can be prevented.

    摘要翻译: 即使在光刻工序中进行侧面漂洗的情况下,在沟槽蚀刻中也不形成黑色硅的半导体晶片。 在插入接合的SOI晶片的第一和第二半导体晶片之间的嵌入式氧化膜中,其周边部分的膜厚度大于预定厚度Dsio,从而其用作防止蚀刻的氧化物膜。 当在抗蚀剂涂布工艺中进行侧面冲洗以在沟槽蚀刻中用于掩模使用的氧化膜中形成开口时,在形成开口期间也蚀刻在周边使用的用于掩蔽的氧化膜。 此时由于过蚀刻,用于防止蚀刻的氧化膜被膜厚度d1蚀刻。 在沟槽蚀刻期间,用于防蚀蚀的氧化膜也被膜厚d2蚀刻。 因此,如果将用于防蚀蚀的氧化膜的膜厚度Dsio设定为大于膜厚度d1 + d2,因为氧化膜保持在最后阶段,所以可以防止形成黑色硅。

    Movie camera for storing movie and still images in proper chronology on
a common recording medium
    23.
    发明授权
    Movie camera for storing movie and still images in proper chronology on a common recording medium 失效
    用于在通用记录介质上以适当的时间顺序存储电影和静止图像的电影摄像机

    公开(公告)号:US5751348A

    公开(公告)日:1998-05-12

    申请号:US659513

    申请日:1996-06-06

    摘要: A movie camera having: a strobe light for illuminating a subject; a shutter speed switching circuit for changing speeds of a shutter for the charge coupled device (CCD); a white balance switching circuit for adjusting the balance between color signals; an automatic gain control (AGC) circuit for adjusting amplifying gain for an image signal; a control circuit for energizing the shutter speed switching circuit so that a flash of the strobe light is terminated within the storing time of the CCD by changing the shutter speed to a higher speed, for energizing the white balance switching circuit so that the white balance is adjusted to coincide with the color temperature of the strobe light, and for fixing the gain of the AGC circuit. Accordingly, clear pictures having uniform brightness are obtained in each shot by terminating a flash of the strobe light within the storing time of CCD and by switching the shutter speed to a higher speed, and fluctuation of the brightness of pictures shot after a flash of the strobe light is prevented by fixing the gain of an AGC circuit and by making the white balance coincide with the color temperature of the strobe light.

    摘要翻译: 一种电影摄像机,具有:用于照亮被摄体的闪光灯; 用于改变电荷耦合器件(CCD)的快门速度的快门速度切换电路; 白平衡切换电路,用于调整色彩信号之间的平衡; 用于调整图像信号的放大增益的自动增益控制(AGC)电路; 用于对快门速度切换电路进行通电的控制电路,使得通过将快门速度改变为更高的速度在闪光灯的存储时间内终止闪光灯,以激活白平衡切换电路,使白平衡为 调节为与频闪光的色温一致,并且用于固定AGC电路的增益。 因此,通过在CCD的存储时间内终止闪光灯,并且通过将快门速度切换到更高的速度,并且闪光之后拍摄的图像的亮度的波动,在每次拍摄中获得具有均匀亮度的清晰图像 通过固定AGC电路的增益并使白平衡与闪光灯的色温一致来防止频闪光。

    Process of making plexifilamentary fiber
    24.
    发明授权
    Process of making plexifilamentary fiber 失效
    制作丛状纤维的方法

    公开(公告)号:US5607636A

    公开(公告)日:1997-03-04

    申请号:US233947

    申请日:1994-04-28

    摘要: A three-dimensional plexifilamentary fiber (26) of a high-density polyethylene group obtained by supplying a polymer to a dissolving area in a state such that the polymer is melted by a heated screw extruder (compressing zone 13, metering zone 14 to 16), supplying a solvent (CCl.sub.3 F) into the melted polymer (feed opening 18), mixing and dissolving the polymer and the solvent to make a polymer solution, and extruding the polymer solution from a nozzle (24 in FIG. 24 ) arranged in the dissolving area into a low pressure area. A nonwoven fabric is obtained through a process in which the fiber (26) is spread by striking the fiber against a skirt portion (33) having a fiber swinging face (34) and a cushioning face (35), and this nonwoven fabric has an excellent strength, covering property, and whiteness.

    摘要翻译: 通过在聚合物通过加热的螺杆挤出机(压缩区域13,计量区域14至16)熔化的状态下将聚合物供给到溶解区而获得的高密度聚乙烯组的三维丛状纤维(26) 向熔融的聚合物(进料口18)供应溶剂(CCl 3 F),混合和溶解聚合物和溶剂以制备聚合物溶液,并将聚合物溶液从布置在溶解的 区域进入低压区域。 通过纤维(26)通过将纤维撞击在具有纤维摆动面(34)和缓冲面(35)的裙部(33)上而被扩展的方法得到无纺布,该无纺布具有 优异的强度,覆盖性和白度。

    Printer having discharge rollers
    25.
    发明授权
    Printer having discharge rollers 失效
    打印机有排纸辊

    公开(公告)号:US5482390A

    公开(公告)日:1996-01-09

    申请号:US354799

    申请日:1994-12-12

    摘要: A printer which is compact, can accurately supply paper and has reduced noise characteristics. Additionally, the printer enables easy correction of paper jams and can be selectively operated in various modes according to the user's preference. The printer includes a paper feed roller which is pivotable between a paper feed position and a non-feeding position, a drive force transmitting mechanism for transmitting a drive force to the paper feed roller, a carriage reciprocatively movable along the width of the paper fed by the paper feed roller, and an intermediate transmission mechanism attached to the side of the carriage. Only when the carriage is in a stand-by position, the intermediate transmission mechanism couples with the drive force transmitting mechanism to transmit to the paper feed roller a paper-feed directional rotating force so as to rotate the paper feed roller to the paper feed position. The intermediate transmission mechanism is preferably an idler rotatably mounted on the side of the carriage. The paper feed roller is preferably driven through a planetary gear mechanism including a sun gear provided on a drive shaft, a paper-feed roller holder rotatably mounted on the drive shaft, and a planetary gear coaxially provided with the paper feed roller supported with the paper-feed roller holder.

    摘要翻译: 一种紧凑的打印机,可以准确地提供纸张并降低噪音特性。 此外,打印机能够容易地校正卡纸,并且可以根据用户的偏好以各种模式选择性地操作。 打印机包括可在进纸位置和非进给位置之间枢转的供纸辊,用于将驱动力传送到供纸辊的驱动力传递机构,沿着纸张供给辊的宽度可往复移动的托架 供纸辊和安装在滑架侧面的中间传动机构。 只有当托架处于待机位置时,中间传动机构与驱动力传递机构相连,才能将供纸辊传送给供纸辊的送纸定向旋转力,以便将供纸辊旋转到送纸位置 。 中间传动机构优选为可旋转地安装在滑架侧面的惰轮。 供纸辊优选地通过行星齿轮机构驱动,该行星齿轮机构包括设置在驱动轴上的太阳齿轮,可旋转地安装在驱动轴上的供纸辊保持架和同轴地设置有被纸张支撑的供纸辊的行星齿轮 进纸辊架。

    Process for producing three-dimensional fiber using a halogen group
solvent
    27.
    发明授权
    Process for producing three-dimensional fiber using a halogen group solvent 失效
    使用卤素基溶剂生产三维纤维的方法

    公开(公告)号:US5286422A

    公开(公告)日:1994-02-15

    申请号:US922546

    申请日:1992-07-31

    IPC分类号: D01D5/11 D01F6/04

    CPC分类号: D01F6/04 D01D5/11

    摘要: A halogen group solvent comprising a mixed solvent consisting essentially of bromochloromethane and/or 1,2-dichloroethylene and a co-solvent, wherein the co-solvent is at least one member selected from the group consisting of carbon dioxide, sulfur hexafluoride, difluorochloromethane, 1,1,1,2-tetrafluoroethane, etc., and the content of said co-solvent in the mixed solvent is 3 to 65% by weight; a polyolefin solution using the solvent; and a process for producing a three-dimensional fiber of a polyolefin using the solution.

    摘要翻译: 包含基本上由溴氯甲烷和/或1,2-二氯乙烯和共溶剂组成的混合溶剂的卤素基溶剂,其中所述助溶剂是选自二氧化碳,六氟化硫,二氟氯甲烷, 1,1,1,2-四氟乙烷等,所述助溶剂在混合溶剂中的含量为3〜65重量%。 使用溶剂的聚烯烃溶液; 以及使用该溶液制造聚烯烃的三维纤维的方法。

    Video camera capable of effecting remote control operation
    29.
    发明授权
    Video camera capable of effecting remote control operation 失效
    能够进行遥控操作的摄像机

    公开(公告)号:US4928179A

    公开(公告)日:1990-05-22

    申请号:US351050

    申请日:1989-05-12

    CPC分类号: H04N5/2251

    摘要: A video camera includes a light receiving device to enable a remote control operation to be achieved and a tally lamp to indicate a state of operation of the camera to the operator. The light receiving device and the tally lamp are installed in a housing such that when travel members disposed in a lower portion of the housing travel on an annular rail arranged on the body of the camera, the light receiving device and the tally lamp are moved to change directions thereof with respect to the body. An operator causes light to enter the light receiving device from a desired direction so as to operate the camera and to recognize a state of the operation of the camera by visually checking the tally lamp.

    摘要翻译: 视频摄像机包括能够实现遥控操作的光接收装置和用于指示摄像机对操作者的操作状态的计数灯。 光接收装置和标记灯安装在壳体中,使得当设置在壳体的下部的行进构件在布置在照相机主体上的环形轨道上行进时,光接收装置和标记灯被移动到 改变相对于身体的方向。 操作者使光从期望的方向进入光接收装置,以便操作相机并通过目视检查标示灯来识别相机的操作状态。