公开(公告)号：US09799849B2

公开(公告)日：2017-10-24

申请号：US15358807

申请日：2016-11-22

Applicant: Samsung Display Co., Ltd.

Inventor： Sung-Chul Kim ,  Myung-Soo Huh ,  Chang-Woo Shim

IPC: H01L29/08 ,  H01L35/24 ,  H01L51/00 ,  H01L51/52 ,  H01L51/56 ,  H01L27/32

CPC classification number: H01L51/5256 ,  H01L27/3246 ,  H01L27/3258 ,  H01L27/3262 ,  H01L27/3274 ,  H01L51/0034 ,  H01L51/004 ,  H01L51/5218 ,  H01L51/56 ,  H01L2227/323 ,  H01L2251/303 ,  H01L2251/5338 ,  H01L2251/558

Abstract: In an aspect, an organic light-emitting display apparatus and a method of manufacturing the same are provided. The organic light-emitting display apparatus may include a substrate; a display unit formed on the substrate; and a thin film encapsulating layer encapsulating the display unit. The thin film encapsulating layer may include a plurality of organic layers and inorganic layers that are laminated alternately. At least one of the plurality of the inorganic films may include a first layer formed of a first material, a second layer formed of a second material other than the first material, and an intermediate layer provided between the first and second layers.

公开(公告)号：US09620738B2

公开(公告)日：2017-04-11

申请号：US14872978

申请日：2015-10-01

Applicant: SAMSUNG DISPLAY CO., LTD

Inventor： Sung-Joong Joo ,  Myung-Soo Huh ,  Suk-Won Jung

IPC: H01L51/50 ,  H05B33/04 ,  H01L51/52 ,  H05B33/10

CPC classification number: H01L51/5256 ,  H05B33/04 ,  H05B33/10

Abstract: A flat panel display device provides a sealing structure for comprising and sealing a display unit disposed in a first region on a substrate. The display unit includes the first region and a second region, and a barrier is disposed in the first region on the substrate, on an outer side of the display unit, and adjacent to the second region. The sealing structure contacts the barrier, and includes at least one first layer of an inorganic material and at least one second layer of an organic material. A method of manufacturing the flat panel display device is also disclosed.

公开(公告)号：US09219254B2

公开(公告)日：2015-12-22

申请号：US13975259

申请日：2013-08-23

Applicant: Samsung Display Co., Ltd.

Inventor： Myung-Soo Huh ,  Suk-Won Jung ,  Tae-Wook Kang

IPC: H01L51/56 ,  C23C14/06 ,  C23C14/08 ,  C23C14/34 ,  C23C14/35 ,  H01L51/52

CPC classification number: H01L51/56 ,  C23C14/0688 ,  C23C14/08 ,  C23C14/3464 ,  C23C14/352 ,  H01L51/5253

Abstract: A method of forming nanocrystals includes loading a substrate into a chamber, applying a first voltage to a first target to form a thin film including a first metal compound on the substrate by sputtering, and applying a second voltage to a second target and forming nanocrystals in the thin film by sputtering.

Abstract translation: 形成纳米晶体的方法包括将衬底加载到腔室中，向第一靶施加第一电压以通过溅射在衬底上形成包括第一金属化合物的薄膜，以及向第二靶施加第二电压并在第 该薄膜通过溅射。

公开(公告)号：US09184180B2

公开(公告)日：2015-11-10

申请号：US14162465

申请日：2014-01-23

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Myung-Soo Huh ,  Sung-Chul Kim ,  Suk-Won Jung

IPC: H01L27/12 ,  H01L29/786

CPC classification number: H01L27/1218 ,  H01L27/1266 ,  H01L29/78603 ,  H01L29/78684

Abstract: A method of manufacturing a flexible display apparatus includes: preparing a support substrate; forming a first graphene oxide layer having a first electrical charge on the support substrate; forming a second graphene oxide layer having a second electrical charge on the first graphene oxide layer; forming a flexible substrate on the second graphene oxide layer; forming a display unit on the flexible substrate; and separating the support substrate and the flexible substrate from each other.

Abstract translation: 柔性显示装置的制造方法包括：准备支撑基板; 在所述支撑基板上形成具有第一电荷的第一石墨烯氧化物层; 在所述第一石墨烯氧化物层上形成具有第二电荷的第二石墨烯氧化物层; 在第二石墨烯氧化物层上形成柔性基板; 在柔性基板上形成显示单元; 并将支撑基板和柔性基板彼此分离。

公开(公告)号：US09142415B2

公开(公告)日：2015-09-22

申请号：US14269175

申请日：2014-05-04

Applicant: Samsung Display Co., Ltd.

Inventor： Myung-Soo Huh ,  Suk-Won Jung ,  Sung-Chul Kim ,  Sang-Hyuk Hong ,  Choel-Min Jang

IPC: H01L21/285 ,  H01L21/02 ,  H01L51/56 ,  H01L51/00

CPC classification number: H01L21/28506 ,  C23C16/452 ,  C23C16/45565 ,  C23C16/45578 ,  C23C16/458 ,  C23C16/509 ,  H01J37/32357 ,  H01J37/3244 ,  H01L21/02274 ,  H01L51/001 ,  H01L51/56

Abstract: A deposition apparatus for performing a deposition process on a substrate includes: an injection unit including a plasma generating member which receives a raw material gas and converts the raw material gas to a deposition source material in a radical form; and a plasma processor disposed adjacent to the injection unit and facing a side of the injection unit, wherein the plasma processor performs a plasma process in a direction facing the substrate.

Abstract translation: 用于在基板上进行沉积处理的沉积装置包括：注入单元，其包括等离子体产生元件，该等离子体产生元件接纳原料气体，并将原料气体以基本形式转化为沉积源材料; 以及等离子体处理器，其与所述注入单元相邻并且面向所述注入单元的一侧，其中所述等离子体处理器在面向所述基板的方向上执行等离子体处理。

公开(公告)号：US20150144062A1

公开(公告)日：2015-05-28

申请号：US14590491

申请日：2015-01-06

Applicant: Samsung Display Co., Ltd.

Inventor： Choel-Min Jang ,  Myung-Soo Huh ,  Jeong-Ho Yi ,  Cheol-Rae Jo ,  Sang-Joon Seo ,  Seung-Hun Kim ,  Jin-Kwang Kim

IPC: C23C16/46 ,  C23C16/458 ,  C23C16/455

CPC classification number: C23C16/46 ,  C23C16/45551 ,  C23C16/45563 ,  C23C16/4583

Abstract: A vapor deposition apparatus includes a stage on which a substrate is mounted; a heater unit that is disposed at a side of the stage and includes a first heater and a second heater, wherein the first heater and the second heater are movable so that the first heater and the second heater are spaced apart from each other or are disposed adjacent to each other; and a nozzle unit that is disposed at a side opposite to the side at which the heater unit is disposed about the stage and includes one or more nozzles.

Abstract translation: 蒸镀装置包括：载置基板的载物台; 加热器单元，其设置在所述台的一侧并且包括第一加热器和第二加热器，其中所述第一加热器和所述第二加热器可移动，使得所述第一加热器和所述第二加热器彼此间隔开或布置 相邻; 以及喷嘴单元，其设置在与所述加热器单元围绕所述台架配置的一侧相对的一侧，并且包括一个或多个喷嘴。

公开(公告)号：US20150101535A1

公开(公告)日：2015-04-16

申请号：US14188017

申请日：2014-02-24

Applicant: Samsung Display Co., Ltd.

Inventor： Sung-Yong Lee ,  Sung-Hun Key ,  In-Kyo Kim ,  Cheol-Min Jang ,  Myung-Soo Huh

IPC: C23C16/455 ,  C23C16/50 ,  C23C16/52

CPC classification number: C23C16/45563 ,  C23C16/452 ,  C23C16/45536 ,  C23C16/45551

Abstract: A vapor deposition apparatus includes a substrate mount unit on which a substrate is mounted, a plurality of first nozzle units which injects a first raw material in a direction of the substrate mount unit, a plurality of second nozzle units which is alternately disposed with the plurality of first nozzle units and injects a second raw material in the direction of the substrate mount unit, and a plasma module unit which supplies the second raw material to the plurality of second nozzle units. The second raw material is a radical, and the substrate mount unit includes an electrostatic generation part.

Abstract translation: 一种气相沉积设备，包括：基板安装单元，其上安装有基板;多个第一喷嘴单元，其在所述基板安装单元的方向上注入第一原料;多个第二喷嘴单元，其与所述多个第一喷嘴单元交替布置; 的第一喷嘴单元，并且在所述基板安装单元的方向上注入第二原料;以及等离子体模块单元，其将所述第二原料供给到所述多个第二喷嘴单元。 第二原料是自由基，基板安装单元包括静电发生部。

公开(公告)号：US20150072453A1

公开(公告)日：2015-03-12

申请号：US14177180

申请日：2014-02-10

Applicant: Samsung Display Co., Ltd.

Inventor： Choel-Min Jang ,  Sung-Hun Key ,  In-Kyo Kim ,  Suk-Won Jung ,  Myung-Soo Huh

IPC: H01L51/00 ,  H01L51/56

CPC classification number: C23C16/45551

Abstract: A vapor deposition apparatus for depositing thin films on a substrate includes a supply unit including a plurality of linear supply members configured to supply at least one gas; and a nozzle unit including a plurality of nozzle members connected to the plurality of supply members and configured to supply the at least one gas toward the substrate, wherein two adjacent nozzle members of the plurality of nozzle members are connected to at least one common supply member of the plurality of supply members.

Abstract translation: 一种用于在衬底上沉积薄膜的气相沉积设备包括：供给单元，包括多个线性供应构件，其被构造成供应至少一种气体; 以及喷嘴单元，其包括连接到所述多个供应构件并被配置为朝向所述基板供应所述至少一种气体的多个喷嘴构件，其中所述多个喷嘴构件中的两个相邻的喷嘴构件连接到至少一个共同的供应构件 的多个供应构件。

公开(公告)号：US20150027374A1

公开(公告)日：2015-01-29

申请号：US14302646

申请日：2014-06-12

Applicant: Samsung Display Co., Ltd.

Inventor： Jin-Kwang Kim ,  Seung-Yong Song ,  Myung-Soo Huh ,  Suk-Won Jung ,  Choel-Min Jang ,  Jae-Hyun Kim ,  Sung-Chul Kim

IPC: C23C16/44 ,  C23C16/455 ,  C23C16/50

CPC classification number: C23C16/4412 ,  C23C16/4402 ,  C23C16/45536 ,  C23C16/45551 ,  Y10T137/794

Abstract: A vapor deposition apparatus includes a first injection unit through which a first raw gas is injected in a first direction, and a first filter unit which is mounted in the first injection unit and includes a plurality of plates separated from one another in the first direction and disposed in parallel to one another, where holes are defined in each of the plurality of plates which is detachably coupled in the first filter unit.

Abstract translation: 一种气相沉积装置包括：第一注入单元，通过该第一注入单元沿第一方向注入第一原料气体;第一过滤器单元，其安装在第一注射单元中并且包括沿第一方向彼此分离的多个板; 彼此平行设置，其中，在可拆卸地联接在第一过滤器单元中的多个板中的每一个中限定有孔。

公开(公告)号：US20150021631A1

公开(公告)日：2015-01-22

申请号：US14162465

申请日：2014-01-23

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Myung-Soo Huh ,  Sung-Chul Kim ,  Suk-Won Jung

IPC: H01L27/12

CPC classification number: H01L27/1218 ,  H01L27/1266 ,  H01L29/78603 ,  H01L29/78684

Abstract: A method of manufacturing a flexible display apparatus includes: preparing a support substrate; forming a first graphene oxide layer having a first electrical charge on the support substrate; forming a second graphene oxide layer having a second electrical charge on the first graphene oxide layer; forming a flexible substrate on the second graphene oxide layer; forming a display unit on the flexible substrate; and separating the support substrate and the flexible substrate from each other.

Abstract translation: 柔性显示装置的制造方法包括：准备支撑基板; 在所述支撑基板上形成具有第一电荷的第一石墨烯氧化物层; 在所述第一石墨烯氧化物层上形成具有第二电荷的第二石墨烯氧化物层; 在第二石墨烯氧化物层上形成柔性基板; 在柔性基板上形成显示单元; 以及将所述支撑基板和所述柔性基板彼此分离。