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公开(公告)号：US06468021B1
公开(公告)日：2002-10-22
申请号：US09461498
申请日：1999-12-14
IPC分类号： B65G1558
CPC分类号： H01L21/67775 , H01L21/67706 , H01L21/67727 , H01L21/6773 , H01L21/67733 , H01L21/67736 , H01L21/67763 , H01L21/67766 , H01L21/67769
摘要： An integrated intra-bay transfer, storage and delivery system is provided for moving an article between a conveyor and a station such as a work station. The system includes a transfer assembly which includes a lift mechanism and a displacement mechanism. The transfer assembly transfers the article between the conveyor system and a buffer or storage station for storage of the article. A delivery robot transfers the article between the buffer or storage station and a work station for delivery to the station. The robot includes a vertical movement mechanism and a horizontal movement mechanism. The robot also includes an arm that is adapted to grip the article, particularly an article of a standard configuration having a mushroom-shaped handle on top. The arm engages the handle and lifts the article or transport pod from the storage station to a load port of the work station. In one embodiment, the arm includes a C-shaped adaptation that passively engages the handle from a side thereof. In other embodiments, the arm includes an actuator coupled to an assembly that actively grips the handle from above. Advantages of the invention include the ability to safely move the transport pod from a elevated storage station to the lower placed storage stations or load ports of a work station.
摘要翻译： 提供了一种集成的舱内转移，储存和输送系统，用于在输送机和诸如工作站的工位之间移动物品。 该系统包括一个转移组件，它包括一个升降机构和一个排量机构。 传送组件将物品在输送系统和缓冲器或储存站之间传送以存储物品。 递送机器人将物品在缓冲器或存储站和工作站之间传送以传送到站。 机器人包括垂直移动机构和水平移动机构。 机器人还包括适于夹紧物品的臂，特别是具有在顶部上具有蘑菇形手柄的标准配置的物品。 手臂接合手柄，将物品或运输吊舱从储存站提升到工作站的装载端口。 在一个实施例中，臂包括从其侧面被动地接合手柄的C形适配件。 在其他实施例中，臂包括联接到组件的致动器，该组件从上方主动地握住手柄。 本发明的优点包括将运输舱从高架存储站安全地移动到工作站的下部放置的储存站或负载端口的能力。
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公开(公告)号：US06364595B1
公开(公告)日：2002-04-02
申请号：US09247695
申请日：1999-02-10
IPC分类号： B65B6900
CPC分类号： G03F7/70741 , H01L21/67778 , H01L21/68707 , Y10S414/137 , Y10S414/141
摘要： A reticle transfer system is disclosed for transferring reticles between a reticle-carrying SMIF container and a process tool. The reticle transfer system according to the present invention includes an arm assembly having a transfer arm and a gripping mechanism affixed to the end of the transfer arm. Once the container carrying the reticle has been opened, the gripping mechanism is rotated and translated to a position adjacent the reticle so that it may access the reticle and transfer it into the minienvironment through an access port in the minienvironment. In order to precisely, easily and repeatedly position the gripping mechanism in the desired location to grip and transfer the reticle, the gripping mechanism includes four downwardly extending posts spaced apart from each other so as to contact an outer rim of the container door as the gripping mechanism is lowered into position to grip and transfer the reticle. Once the four posts are seated in contact with the outer rim of the container door, the gripping mechanism is fixed in the proper position so that a pair of grippers within the gripping mechanism may rotate inward and grip the reticle. The posts also allow proper positioning of the gripping mechanism with respect to the container door and support platform within the minienvironment when returning the reticle to the container door or depositing the reticle on the minienvironment support platform.
摘要翻译： 公开了一种用于在标线片承载的SMIF容器和加工工具之间传送掩模版的掩模版传送系统。 根据本发明的掩模版传送系统包括具有传送臂和固定到传送臂的端部的夹持机构的臂组件。 一旦携带标线的容器已经打开，夹持机构就被旋转并转移到与掩模版相邻的位置，使得它可以进入掩模版并通过微型环境中的进入口将其传送到环境中。 为了精确地，容易地和重复地将夹持机构定位在期望的位置以夹持和传送掩模版，夹持机构包括彼此间隔开的四个向下延伸的柱，以便与容器门的外边缘接触，作为抓握 机构被降低到抓地力并传递标线的位置。 一旦四个柱子与容器门的外缘接触就位，夹持机构被固定在适当的位置，使得夹持机构内的一对夹具可以向内旋转并夹紧掩模版。 当将掩模版返回到容器门或将掩模版放置在微型环境支撑平台上时，柱还允许抓握机构相对于容器门和支撑平台在微型环境中的适当定位。
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公开(公告)号：US4077485A
公开(公告)日：1978-03-07
申请号：US645834
申请日：1975-12-31
申请人： Anthony C. Bonora , Thomas Holt
发明人： Anthony C. Bonora , Thomas Holt
CPC分类号： B62J11/00
摘要： Apparatus for mounting a battery on an electrically powered vehicle, as for example a bicycle, including a bracket slidably mounted on the vehicle frame upon which in turn are mounted one of the sprockets of a belt drive system and the battery, the weight of the battery urging the sprocket to tension the belt. The battery is mounted on the bracket by a hinge packed with a compressible resilient material to permit damped rotation of the battery about a transverse axis while dampingly constraining all other movement of the battery. The bracket is further provided with pad means having resilient frictional surfaces to absorb impact of the battery against the bracket and damp transverse movement of the battery.
摘要翻译： 用于将电池安装在电动车辆上的装置，例如自行车，包括可滑动地安装在车辆框架上的支架，所述支架又安装在带驱动系统的链轮和电池之间，电池的重量 推动链轮张紧皮带。 电池通过装有可压缩弹性材料的铰链安装在支架上，以允许电池围绕横向轴线阻尼旋转，同时阻尼地限制电池的所有其它运动。 支架还设置有具有弹性摩擦表面的垫片装置，以吸收电池抵靠支架的冲击并阻止电池的横向移动。
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24.发明授权公开(公告)号：US09184078B2
公开(公告)日：2015-11-10
申请号：US13464923
申请日：2012-05-04
申请人： Anthony C. Bonora , Richard Garcia
发明人： Anthony C. Bonora , Richard Garcia
IPC分类号： H01L21/677 , H01L21/67 , H01L21/687
CPC分类号： H01L21/67775 , H01L21/67265 , H01L21/68707
摘要： A system and method of transporting substrates includes a loadport system including a frame, an articulating arm, a mini environment and a tower substantially centered in the frame. The tower includes multiple motors, a first motor mechanically coupled to the mini environment for moving the mini environment vertically. A second motors mechanically coupled to the articulating arm for moving the articulating arm vertically. A tower enclosure is also included. The tower enclosure enclosing the motors separate from the mini environment.
摘要翻译： 输送基材的系统和方法包括载荷输送系统，其包括框架，铰接臂，迷你环境和基本上位于框架中心的塔架。 该塔包括多个电动机，第一电动机机械耦合到迷你环境以垂直移动迷你环境。 机械地联接到铰接臂的第二马达用于垂直地移动铰接臂。 还包括一个塔架。 包围电机的塔架与迷你环境分开。
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公开(公告)号：US07841820B2
公开(公告)日：2010-11-30
申请号：US11938236
申请日：2007-11-09
IPC分类号： B65G54/02
CPC分类号： H01L21/67778 , H01L21/67766 , H01L21/67775 , H01L21/68707 , Y10S414/139
摘要： The present invention is a wafer transfer system that transports individual wafers between chambers within an isolated environment. In one embodiment, a wafer is transported by a wafer shuttle that travel within a transport enclosure. The interior of the transport enclosure is isolated from the atmospheric conditions of the surrounding wafer fabrication facility. Thus, an individual wafer may be transported throughout the wafer fabrication facility without having to maintain a clean room environment for the entire facility. The wafer shuttle may be propelled by various technologies, such as, but not limited to, magnetic levitation or air bearings. The wafer shuttle may also transport more than one wafer simultaneously. The interior of the transport enclosure may also be under vacuum, gas-filled, or subject to filtered air.
摘要翻译： 本发明是一种晶片传送系统，其在隔离环境中的室之间输送各个晶片。 在一个实施例中，晶片由在运输箱内行进的晶片梭运送。 运输箱的内部与周围的晶片制造设备的大气条件隔离。 因此，单个晶片可以在整个晶片制造设备中运输，而不必为整个设备保持洁净室环境。 晶片梭可以通过各种技术来推动，例如但不限于磁悬浮或空气轴承。 晶片梭可能同时传送多于一个晶片。 运输箱的内部也可以在真空下，充满气体，或经过过滤的空气。
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公开(公告)号：US07737567B2
公开(公告)日：2010-06-15
申请号：US12143197
申请日：2008-06-20
IPC分类号： H01L23/544 , B65H1/00
CPC分类号： H01L23/544 , H01L21/67282 , H01L21/67294 , H01L2223/54426 , H01L2223/54433 , H01L2223/54453 , H01L2223/54473 , H01L2223/5448 , H01L2223/54493 , H01L2924/0002 , Y10S438/975 , H01L2924/00
摘要： A semiconductor substrate is provided. The substrate includes a first surface and an opposing second surface, wherein the first surface includes a marking in a centroid region of the first surface. The marking indicates a location of a center point on the first surface of the semiconductor substrate or identification data unique to the substrate. A system, methods of transporting and marking, and a device for reading the substrate markings are also provided.
摘要翻译： 提供半导体衬底。 衬底包括第一表面和相对的第二表面，其中第一表面包括在第一表面的质心区域中的标记。 标记表示半导体衬底的第一表面上的中心点的位置或衬底独有的识别数据。 还提供了系统，运输和标记的方法以及用于读取基板标记的装置。
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公开(公告)号：US07597523B2
公开(公告)日：2009-10-06
申请号：US11774750
申请日：2007-07-09
IPC分类号： B65G49/07
CPC分类号： H01L21/67772 , H01L21/67775 , Y10S414/14
摘要： A variable lot size load port assembly includes a tool interface, an advance plate, and a seal plate. The tool interface extends generally in a vertical dimension and has a front surface, a back surface generally parallel to the front surface, and an aperture. An advance plate is positioned to the front of the tool interface below the aperture. The advance plate extends generally horizontally and is configured to support a front opening unified pod (FOUP). The advance plate translates between a retracted position and an advanced position. The advanced position is proximate the tool interface and the retracted position is spaced from the tool interface. The seal plate has an upper end secured to the tool interface and a lower end covering a portion of the aperture to form a reduced aperture. The seal plate is shaped to form a proximity seal with a front flange of a FOUP of a selected capacity mounted to the advance plate and brought to the advanced position.
摘要翻译： 可变批量装载端口组件包括工具接口，前进板和密封板。 工具界面大致垂直延伸，并且具有前表面，大体平行于前表面的后表面和孔。 前进板位于孔下方的工具界面的前部。 前进板大致水平地延伸并且被配置为支撑前开口统一舱（FOUP）。 推进板在缩回位置和高级位置之间平移。 前进位置靠近工具界面，缩回位置与工具界面间隔开。 密封板具有固定到工具接口的上端，并且下端覆盖孔的一部分以形成减小的孔。 密封板成形为与安装到前进板的选定容量的FOUP的前凸缘形成邻近密封件并且被带到前进位置。
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公开(公告)号：US07445415B2
公开(公告)日：2008-11-04
申请号：US11177645
申请日：2005-07-08
申请人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
发明人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
IPC分类号： B65G1/133
CPC分类号： H01L21/67775 , H01L21/67736 , Y10S414/14
摘要： The present invention comprises a load port for providing access to an article that is stored in a container having a container door removably coupled to a container shell. The load port preferably loads/unloads a container directly from a container transport system. In one embodiment, the load port includes a plate having an opening, a container support plate, a drive assembly for moving the support plate vertically and a shroud to partially enclose the opening. The shroud, which may be affixed to the mounting plate, has an open top and bottom. The shroud contains a mechanism for retaining the container shell at a controllable height. During operation, a container is raised from the transport system into the shroud until the container shell is retained by the mechanism. After the container shell is uncoupled from the container door, the container support plate is lowered until the article is accessible through the opening. The container shell remains located at the controllable height. The container shell, in combination with the shroud, creates a mini-environment isolating the article from ambient conditions in the fabrication facility.
摘要翻译： 本发明包括一个负载端口，用于提供对存储在具有可拆卸地联接到容器壳体的容器门的容器中的物品的通路。 负载端口优选地从容器运输系统直接装载/卸载容器。 在一个实施例中，负载端口包括具有开口的板，容器支撑板，用于垂直移动支撑板的驱动组件和用于部分地封闭开口的护罩。 可以固定到安装板的护罩具有敞开的顶部和底部。 护罩包含用于将容器壳保持在可控高度的机构。 在操作期间，容器从运输系统升起到护罩中，直到容器壳体被机构保持。 在容器壳与容器门分离后，容器支撑板被降低直到制品通过开口接近。 容器壳保持位于可控高度。 容器壳与护罩组合形成了将制品与制造设备中的环境条件隔离的迷你环境。
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公开(公告)号：US20080118334A1
公开(公告)日：2008-05-22
申请号：US11603714
申请日：2006-11-22
申请人： Anthony C. Bonora
发明人： Anthony C. Bonora
IPC分类号： B65H1/00
CPC分类号： B65G1/02
摘要： The present invention generally comprises a container storage system for efficiently storing large capacity and small capacity containers or FOUPs. In one embodiment, each storage location within the stocker comprises a pair of spaced apart supports. A large capacity container or a small capacity container may be seated in any storage location. The storage locations are arranged within the stocker to minimize the amount of empty space between the supports of a storage location and a container seated in an adjacent storage location. In one embodiment, the vertical pitch between supports of adjacent storage locations is less than the height of a large capacity FOUP container shell. Thus, when a FOUP is seated in a storage location, its container shell extends between the supports of the storage location located directly above.
摘要翻译： 本发明通常包括用于有效地存储大容量和小容量容器或FOUP的容器储存系统。 在一个实施例中，储盘器内的每个储存位置包括一对间隔开的支撑件。 大容量容器或小容量容器可以放置在任何存放位置。 存储位置被布置在储存器内，以最小化存储位置的支撑件和位于相邻存储位置的容器之间的空间空间的量。 在一个实施例中，相邻存储位置的支撑件之间的垂直间距小于大容量FOUP容器壳体的高度。 因此，当FOUP位于存储位置时，其容器壳体在位于直接位于上方的存储位置的支撑件之间延伸。
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公开(公告)号：US07100340B2
公开(公告)日：2006-09-05
申请号：US10087638
申请日：2002-03-01
IPC分类号： H01J5/02
CPC分类号： H01L21/68707 , H01L21/67766 , H01L21/67775 , H01L21/67778 , Y10S414/135
摘要： The present invention is a unified spine structure that EFEM components, such as a wafer handling robot and a SMIF pod advance assembly, may mount to. The frame includes multiple vertical struts that are mounted to an upper support member and a lower support member. Structurally tying the vertical struts to the support members creates a rigid body to support the EFEM components. The vertical struts also provide a common reference that the EFEM components may align with. This eliminates the need for each EFEM component to align with respect to each other. Thus, if one EFEM component is removed it will not affect the alignment and calibration of the remaining secured EFEM components. The unified frame also creates an isolated storage area for the SMIF pod door and the port door within the environment that is isolated from the outside ambient conditions.
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