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    EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
    22.
    发明申请
    EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE 审中-公开

    公开(公告)号：US20180160519A1

    公开(公告)日：2018-06-07

    申请号：US15888110

    申请日：2018-02-05

    Applicant: Gigaphoton Inc.

    Inventor： Fumio IWAMOTO ,  Tsukasa HORI ,  Toshiyuki HIRASHITA

    IPC: H05G2/00

    CPC classification number: H05G2/006 ,  H05G2/00 ,  H05G2/005 ,  H05G2/008

    Abstract: An extreme ultraviolet light generation device may include a chamber in which a target is irradiated with laser light and extreme ultraviolet light is generated, and a target supply unit configured to eject a target into the chamber. The target supply unit may be provided with a nozzle member including an ejection face having an ejection port configured to eject the target into the chamber. An angle θ1 defined by the ejection face and the gravity axis may satisfy a condition of “0 degrees

    CHAMBER DEVICE, TARGET GENERATION METHOD, AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
    24.
    发明申请
    CHAMBER DEVICE, TARGET GENERATION METHOD, AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM 有权

    公开(公告)号：US20180007770A1

    公开(公告)日：2018-01-04

    申请号：US15697954

    申请日：2017-09-07

    Applicant: Gigaphoton Inc.

    Inventor： Takanobu ISHIHARA ,  Tsukasa HORI ,  Takashi SAITO ,  Yutaka SHIRAISHI

    IPC: H05G2/00 ,  G03F7/20

    CPC classification number: H05G2/006 ,  G03F7/2004 ,  G03F7/2008 ,  H05G2/008

    Abstract: A chamber device may include a chamber, and a target generation device assembled into the chamber and configured to supply a target material into the chamber, the target generation device including a tank configured to store the target material, a temperature variable device configured to vary temperature of the target material in the tank, and a nozzle section in which a nozzle hole configured to output the target material in a liquid form is formed, and the chamber device may further include a gas nozzle having an inlet port facing the nozzle section and configured to introduce gas into the chamber, a gas supply source configured to supply gas containing hydrogen to the gas nozzle to supply the gas containing the hydrogen to at least periphery of the nozzle section, and a moisture remover configured to remove moisture at least in the periphery of the nozzle section in the chamber.

    EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION METHOD
    27.
    发明申请
    EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION METHOD 有权
    极光紫外线发光装置和超极紫外光发生方法

    公开(公告)号：US20130320232A1

    公开(公告)日：2013-12-05

    申请号：US13904117

    申请日：2013-05-29

    Applicant: Gigaphoton Inc.

    Inventor： Tsukasa HORI ,  Junichi Fujimoto ,  Osamu Wakabayashi

    IPC: G21K5/04

    CPC classification number: H05G2/008 ,  G21K5/04 ,  H05G2/005 ,  H05G2/006

    Abstract: An extreme ultraviolet light generation apparatus may include a droplet production device configured to produce a droplet of a target substance in a predetermined traveling direction, a first laser device configured to generate a first laser beam and irradiate the droplet with the first laser beam to diffuse the droplet, a second laser device configured to generate a second laser beam and irradiate the target substance diffused by irradiation of the first laser beam with the second laser beam to produce plasma of the diffused target substance and generate extreme ultraviolet light from the plasma of the target substance, and a beam shaping unit configured to elongate a beam spot of the first laser beam in the traveling direction of the droplet produced by the droplet production device.

    Abstract translation: 极紫外线发生装置可以包括：液滴制造装置，其被配置为在预定的行进方向上产生目标物质的液滴;第一激光装置，其被配置为产生第一激光束并用第一激光束照射液滴， 液滴，第二激光装置，被配置为产生第二激光束并且通过用第二激光束照射第一激光束来照射被扩散的目标物质，以产生扩散目标物质的等离子体并从目标的等离子体产生极紫外光 以及光束整形单元，其被配置为在由液滴产生装置产生的液滴的行进方向上拉长第一激光束的束斑。

    TARGET SUPPLY DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS, AND METHOD FOR SUPPLYING TARGET
    28.
    发明申请
    TARGET SUPPLY DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS, AND METHOD FOR SUPPLYING TARGET 有权
    目标供应装置，极光紫外线发光装置和供应目标的方法

    公开(公告)号：US20130221246A1

    公开(公告)日：2013-08-29

    申请号：US13679930

    申请日：2012-11-16

    Applicant: GIGAPHOTON INC.

    Inventor： Tsukasa HORI ,  Hideo HOSHINO ,  Tatsuya YANAGIDA

    IPC: G21K5/02

    CPC classification number: G21K5/02 ,  H05G2/005 ,  H05G2/006 ,  H05G2/008

    Abstract: A target supply device is provided that may include a pair of rails arranged to face each other, the rails having electrically conductive properties, a target transport mechanism configured to supply a target material into a space between the rails and in contact with the rails, and a power supply connected to the rails and configured to supply a current to the target material through the rails. Methods and systems using the target supply device are also provided.

    Abstract translation: 提供目标供应装置，其可以包括一对导轨，其布置成彼此面对，所述导轨具有导电性质;目标传送机构，其配置成将目标材料供应到轨道之间的空间中并与导轨接触;以及 连接到轨道并被配置为通过轨道向目标材料提供电流的电源。 还提供了使用目标供应装置的方法和系统。

    TARGET SUPPLY DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD
    29.
    发明申请
    TARGET SUPPLY DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD 有权

    公开(公告)号：US20220015218A1

    公开(公告)日：2022-01-13

    申请号：US17333538

    申请日：2021-05-28

    Applicant: Gigaphoton Inc.

    Inventor： Yutaka SHIRAISHI ,  Toshihiro NISHISAKA ,  Tsukasa HORI

    IPC: H05G2/00 ,  G03F7/20

    Abstract: A target supply device may include a first containing member configured to contain a target substance; a second containing member configured to contain the target substance flowing from the first containing member; a ring-shaped sealing portion which is formed integrally with one of the first containing member and the second containing member, and is brought into close contact with the other containing member; and a fastening member which fastens the first containing member and the second containing member to each other so that the first containing member communicates with the second containing member through the communication portion, and presses the sealing portion against the other containing member. Here, the sealing portion being plastically deformed by being pressed against the other containing member by the fastening member to seal a gap between the first containing member and the second containing member around the communication portion due to the plastic deformation.

    TARGET SUPPLY DEVICE, TARGET SUPPLY METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD
    30.
    发明申请
    TARGET SUPPLY DEVICE, TARGET SUPPLY METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD 有权

    公开(公告)号：US20210410261A1

    公开(公告)日：2021-12-30

    申请号：US17308182

    申请日：2021-05-05

    Applicant: Gigaphoton Inc.

    Inventor： Yutaka SHIRAISHI ,  Tsukasa HORI

    IPC: H05G2/00 ,  G03F7/20

    Abstract: A target supply device may include a first container configured to contain a solid target substance; a second container including a first connection port connected to the first container, a second connection port connected to a first pressurized gas supply line, and a third connection port connected to a target substance lead-out path; a moving body including a first recessed portion configured to contain the solid target substance supplied from the first container and move the first recessed portion inside the second container to cause an opening of the first recessed portion to be overlapped sequentially with the first to third connection ports; a third container connected to both a second pressurized gas supply line and the target substance lead-out path and configured to melt the solid target substance supplied from the third connection port; and a nozzle configured to output the melted target substance supplied from the third container.

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