公开(公告)号：US20100181481A1

公开(公告)日：2010-07-22

申请号：US12659751

申请日：2010-03-19

Applicant: Gerd Benner ,  Marko Matijevic

Inventor： Gerd Benner ,  Marko Matijevic

IPC: H01J37/26 ,  H01J37/22

CPC classification number: H01J37/26 ,  G01N23/04 ,  H01J37/04 ,  H01J2237/0492 ,  H01J2237/2614

Abstract: A phase contrast electron microscope has an objective (8) with a back focal plane (10), a first diffraction lens (11), which images the back focal plane (10) of the objective (8) magnified into a diffraction intermediate image plane, a second diffraction lens (15) whose principal plane is mounted in the proximity of the diffraction intermediate image plane and a phase-shifting element (16) which is mounted in or in the proximity of the diffraction intermediate image plane. Also, a phase contrast electron microscope has an objective (8) having a back focal plane (10), a first diffraction lens (11), a first phase-shifting element and a second phase-shifting element which is mounted in or in the proximity of the diffraction intermediate image plane. The first diffraction lens (11) images the back focal plane of the objective magnified into a diffraction intermediate image plane and the first phase-shifting element is mounted in the back focal plane (10) of the objective (8). With the magnified imaging of the diffraction plane by the diffraction lens, the dimensional requirements imposed on the phase plate having the phase-shifting element are reduced.

Abstract translation: 相差电子显微镜具有物镜（8），具有后焦平面（10），第一衍射透镜（11），其将物镜（8）的后焦平面（10）成像放大到衍射中间像平面 ，其主平面安装在衍射中间像平面附近的第二衍射透镜（15）和安装在衍射中间像平面附近或附近的相移元件（16）。 此外，相位对比电子显微镜具有物镜（8），其具有后焦平面（10），第一衍射透镜（11），第一相移元件和第二相移元件，其安装在或 接近衍射中间像平面。 第一衍射透镜（11）将放大的物镜的后焦平面成像为衍射中间像平面，第一相移元件安装在物镜（8）的后焦平面（10）中。 通过衍射透镜对衍射平面的放大成像，施加在具有相移元件的相位板上的尺寸要求减小。

公开(公告)号：US07060978B2

公开(公告)日：2006-06-13

申请号：US09808714

申请日：2001-03-14

Applicant: Volker Drexel ,  Johannes Bihr ,  Gerd Benner ,  Stephan Kujawa

Inventor： Volker Drexel ,  Johannes Bihr ,  Gerd Benner ,  Stephan Kujawa

IPC: H01J37/28

CPC classification number: H01J37/244

Abstract: A detector system for a particle beam apparatus, in particular for a scanning electron microscope, has a target structure, which in a central region near the optical axis includes an electron-converting material. The target structure also includes either a non-converting material in a region remote from the optical axis or the region remote from the optical axis is offset in the direction of the optical axis with respect to the region near the optical axis that includes the electron-converting material. The detector system makes possible separate detection of only back-scattered electrons or only secondary electrons.

公开(公告)号：US06437353B1

公开(公告)日：2002-08-20

申请号：US09453991

申请日：1999-12-02

Applicant: Gerd Benner

Inventor： Gerd Benner

IPC: H01J37153

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  H01J37/05 ,  H01J37/3174

Abstract: The invention relates to a particle-optical apparatus for particle-optical mask projection. According to the invention, an energy filter is used, by which particles which are inelastically scattered in a mask plane are separated from particles which are elastically scattered in the mask plane. Particles from a selected energy range are used for the particle-optical imaging of the mask in the final image plane. The energy filter is an imaging energy filter, the mask plane being coincident with the input image plane of the energy filter or being imaged in it. The output image plane of the energy filter is imaged, reduced in scale, by a following imaging system on a wafer arranged in the projection plane. Beam deflection systems are provided in addition, by which the particle beam is deflectable in the mask plane and onto out-of-axis regions, so that different regions of the mask plane can be imaged in the image plane at successive times.

Abstract translation: 本发明涉及一种用于粒子光学掩模投影的粒子光学装置。 根据本发明，使用能量过滤器，通过其将在掩模平面中非弹性散射的颗粒与在掩模平面中弹性散射的颗粒分离。 来自所选能量范围的粒子用于最终图像平面中掩模的粒子光学成像。 能量过滤器是成像能量过滤器，掩模平面与能量过滤器的输入图像平面重合或被成像在其中。 通过在投影平面上布置的晶片上的随后的成像系统对能量滤波器的输出像平面成像，缩小比例。 此外还提供光束偏转系统，通过该光束，粒子束可以在掩模平面中偏转到轴外区域，使得掩模平面的不同区域可以在连续的时间在图像平面中成像。

公开(公告)号：US08476589B2

公开(公告)日：2013-07-02

申请号：US13539291

申请日：2012-06-29

Applicant: Gerd Benner ,  Stefan Meyer ,  Steffen Niederberger ,  Dirk Preikszas

Inventor： Gerd Benner ,  Stefan Meyer ,  Steffen Niederberger ,  Dirk Preikszas

IPC: H01J37/244

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/024 ,  H01J2237/028 ,  H01J2237/2445 ,  H01J2237/24495 ,  H01J2237/2802

Abstract: A particle beam microscope comprises a magnetic lens 3 having an optical axis 53 and a pole piece 21. An object 5 to be examined is mounted at a point of intersection 51 between an optical axis 53 and the object plane 19. First and second X-ray detectors 33 have first and second radiation-sensitive substrates 35 arranged such that a first elevation angle β1 between a first straight line 551 extending through the point of intersection 51 and a center of the first substrate 351 and the object plane 19 differs from a second elevation angle β2 between a second straight line 552 extending through the point of intersection 51 and a center of the second substrate 352 and the object plane 19 by more than 14°.

Abstract translation: 粒子束显微镜包括具有光轴53和极片21的磁透镜3.被检查物5安装在光轴53与物面19之间的交点51处。第一和第二X射线 射线检测器33具有第一和第二辐射敏感基板35，其布置成使得延伸穿过交点51的第一直线551与第一基板351的中心与物平面19之间的第一仰角β1与第二 延伸穿过交点51的第二直线552与第二基板352的中心和物平面19之间的仰角β2超过14°。

公开(公告)号：US08431894B2

公开(公告)日：2013-04-30

申请号：US11659145

申请日：2005-07-28

Applicant: Erik Essers ,  Gerd Benner ,  Volker Drexel

Inventor： Erik Essers ,  Gerd Benner ,  Volker Drexel

IPC: G21K7/00

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/2449

Abstract: An electron beam device has an electron gun for generating an electron beam, an objective lens for focusing the electron beam on an object and at least one detector for detecting electrons emitted by the object or electrons backscattered by the object. Detection of electrons emitted by or backscattered by an object may be simplified and improved using quadrupole devices and certain configurations of these devices provided in the electron beam device.

公开(公告)号：US08299442B2

公开(公告)日：2012-10-30

申请号：US12461481

申请日：2009-08-13

Applicant: Gerd Benner

Inventor： Gerd Benner

IPC: G21K5/04

CPC classification number: H01J37/26 ,  H01J2237/2614

Abstract: A particle beam apparatus has an optical axis (OA), an illuminating system (1, 2, 3, 4) for illuminating an object, which is positioned in an object plane (7), with a beam of charged particles and an objective (6) for imaging the illuminated object. The beam of charged particles is split at the object into a null beam and higher diffraction orders. The illuminating system is so configured that it generates an annularly-shaped illuminating aperture in a plane Fourier transformed to the object plane (7). A phase-shifting element (9) is mounted in a focal plane (15) of the objective (6) or in a plane conjugated thereto. The focal plane (15) faces away from the object plane (7). The phase-shifting element can be an einzel lens having two outer electrodes and one or several inner electrodes disposed therebetween when seen in the direction of the optical axis. The phase-shifting element can have an additional electrode at or near the optical axis.

Abstract translation: 粒子束装置具有光轴（OA），用于照射位于物平面（7）中的物体的照明系统（1,2,3,4），其具有带电粒子束和物镜（ 6）用于成像照明物体。 带电粒子束在物体处被分裂为零光束和更高的衍射级数。 照明系统被配置为使得其在傅立叶变换到物平面（7）的平面中产生环形的照明孔。 相移元件（9）安装在物镜（6）的焦平面（15）中或与其共轭的平面中。 焦平面（15）面向物体平面（7）。 相移元件可以是具有两个外部电极的一个或多个内部电极的一个或多个内部电极，当沿着光轴的方向观察时，其具有一个或多个内部电极。 相移元件可以在光轴处或附近具有附加电极。

公开(公告)号：US08039796B2

公开(公告)日：2011-10-18

申请号：US12659751

申请日：2010-03-19

Applicant: Gerd Benner ,  Marko Matijevic

Inventor： Gerd Benner ,  Marko Matijevic

IPC: G21K7/00

CPC classification number: H01J37/26 ,  G01N23/04 ,  H01J37/04 ,  H01J2237/0492 ,  H01J2237/2614

Abstract: A phase contrast electron microscope has an objective (8) with a back focal plane (10), a first diffraction lens (11), which images the back focal plane (10) of the objective (8) magnified into a diffraction intermediate image plane, a second diffraction lens (15) whose principal plane is mounted in the proximity of the diffraction intermediate image plane and a phase-shifting element (16) which is mounted in or in the proximity of the diffraction intermediate image plane. Also, a phase contrast electron microscope has an objective (8) having a back focal plane (10), a first diffraction lens (11), a first phase-shifting element and a second phase-shifting element which is mounted in or in the proximity of the diffraction intermediate image plane. The first diffraction lens (11) images the back focal plane of the objective magnified into a diffraction intermediate image plane and the first phase-shifting element is mounted in the back focal plane (10) of the objective (8). With the magnified imaging of the diffraction plane by the diffraction lens, the dimensional requirements imposed on the phase plate having the phase-shifting element are reduced.

Abstract translation: 相差电子显微镜具有物镜（8），具有后焦平面（10），第一衍射透镜（11），其将物镜（8）的后焦平面（10）成像放大到衍射中间像平面 ，其主平面安装在衍射中间像平面附近的第二衍射透镜（15）和安装在衍射中间像平面附近或附近的相移元件（16）。 此外，相位对比电子显微镜具有物镜（8），其具有后焦平面（10），第一衍射透镜（11），第一相移元件和第二相移元件，其安装在或 接近衍射中间像平面。 第一衍射透镜（11）将放大的物镜的后焦平面成像为衍射中间像平面，第一相移元件安装在物镜（8）的后焦平面（10）中。 通过衍射透镜对衍射平面的放大成像，施加在具有相移元件的相位板上的尺寸要求减小。

公开(公告)号：US07741602B2

公开(公告)日：2010-06-22

申请号：US11717201

申请日：2007-03-13

Applicant: Gerd Benner ,  Marko Matijevic

Inventor： Gerd Benner ,  Marko Matijevic

IPC: G01N23/00

CPC classification number: H01J37/26 ,  G01N23/04 ,  H01J37/04 ,  H01J2237/0492 ,  H01J2237/2614

Abstract: A phase contrast electron microscope has an objective (8) with a back focal plane (10), a first diffraction lens (11), which images the back focal plane (10) of the objective (8) magnified into a diffraction intermediate image plane, a second diffraction lens (15) whose principal plane is mounted in the proximity of the diffraction intermediate image plane and a phase-shifting element (16) which is mounted in or in the proximity of the diffraction intermediate image plane. Also, a phase contrast electron microscope has an objective (8) having a back focal plane (10), a first diffraction lens (11), a first phase-shifting element and a second phase-shifting element which is mounted in or in the proximity of the diffraction intermediate image plane. The first diffraction lens (11) images the back focal plane of the objective magnified into a diffraction intermediate image plane and the first phase-shifting element is mounted in the back focal plane (10) of the objective (8). With the magnified imaging of the diffraction plane by the diffraction lens, the dimensional requirements imposed on the phase plate having the phase-shifting element are reduced.

公开(公告)号：US20100038537A1

公开(公告)日：2010-02-18

申请号：US12461481

申请日：2009-08-13

Applicant: Gerd Benner

Inventor： Gerd Benner

IPC: G01N23/00

CPC classification number: H01J37/26 ,  H01J2237/2614

Abstract: A particle beam apparatus has an optical axis (OA), an illuminating system (1, 2, 3, 4) for illuminating an object, which is positioned in an object plane (7), with a beam of charged particles and an objective (6) for imaging the illuminated object. The beam of charged particles is split at the object into a null beam and higher diffraction orders. The illuminating system is so configured that it generates an annularly-shaped illuminating aperture in a plane Fourier transformed to the object plane (7). A phase-shifting element (9) is mounted in a focal plane (15) of the objective (6) or in a plane conjugated thereto. The focal plane (15) faces away from the object plane (7). The phase-shifting element can be an einzel lens having two outer electrodes and one or several inner electrodes disposed therebetween when seen in the direction of the optical axis. The phase-shifting element can have an additional electrode at or near the optical axis.

Abstract translation: 粒子束装置具有光轴（OA），用于照射位于物平面（7）中的物体的照明系统（1,2,3,4），其具有带电粒子束和物镜（ 6）用于成像照明物体。 带电粒子束在物体处被分裂为零光束和更高的衍射级数。 照明系统被配置为使得其在傅立叶变换到物平面（7）的平面中产生环形的照明孔。 相移元件（9）安装在物镜（6）的焦平面（15）中或与其共轭的平面中。 焦平面（15）面向物体平面（7）。 相移元件可以是具有两个外部电极的一个或多个内部电极的一个或多个内部电极，当沿着光轴的方向观察时，其具有一个或多个内部电极。 相移元件可以在光轴处或附近具有附加电极。

公开(公告)号：US20070284528A1

公开(公告)日：2007-12-13

申请号：US11717201

申请日：2007-03-13

Applicant: Gerd Benner ,  Marko Matijevic

Inventor： Gerd Benner ,  Marko Matijevic

IPC: G01N23/00

CPC classification number: H01J37/26 ,  G01N23/04 ,  H01J37/04 ,  H01J2237/0492 ,  H01J2237/2614

Abstract: A phase contrast electron microscope has an objective (8) with a back focal plane (10), a first diffraction lens (11), which images the back focal plane (10) of the objective (8) magnified into a diffraction intermediate image plane, a second diffraction lens (15) whose principal plane is mounted in the proximity of the diffraction intermediate image plane and a phase-shifting element (16) which is mounted in or in the proximity of the diffraction intermediate image plane. Also, a phase contrast electron microscope has an objective (8) having a back focal plane (10), a first diffraction lens (11), a first phase-shifting element and a second phase-shifting element which is mounted in or in the proximity of the diffraction intermediate image plane. The first diffraction lens (11) images the back focal plane of the objective magnified into a diffraction intermediate image plane and the first phase-shifting element is mounted in the back focal plane (10) of the objective (8). With the magnified imaging of the diffraction plane by the diffraction lens, the dimensional requirements imposed on the phase plate having the phase-shifting element are reduced.

Abstract translation: 相差电子显微镜具有物镜（8），具有后焦平面（10），第一衍射透镜（11），其将物镜（8）的后焦平面（10）成像放大到衍射中间像平面 ，其主平面安装在衍射中间像平面附近的第二衍射透镜（15）和安装在衍射中间像平面附近或附近的相移元件（16）。 此外，相位对比电子显微镜具有物镜（8），其具有后焦平面（10），第一衍射透镜（11），第一相移元件和第二相移元件，其安装在或 接近衍射中间像平面。 第一衍射透镜（11）将放大的物镜的后焦平面成像为衍射中间像平面，第一相移元件安装在物镜（8）的后焦平面（10）中。 通过衍射透镜对衍射平面的放大成像，施加在具有相移元件的相位板上的尺寸要求减小。