公开(公告)号：US20120049062A1

公开(公告)日：2012-03-01

申请号：US13274066

申请日：2011-10-14

Applicant: Gerd Benner ,  Marko Matijevic

Inventor： Gerd Benner ,  Marko Matijevic

IPC: H01J37/28

CPC classification number: H01J37/26 ,  G01N23/04 ,  H01J37/04 ,  H01J2237/0492 ,  H01J2237/2614

Abstract: A phase contrast electron microscope has an objective with a back focal plane, a first diffraction lens, which images the back focal plane of the objective magnified into a diffraction intermediate image plane, a second diffraction lens whose principal plane is mounted in the proximity of the diffraction intermediate image plane and a phase-shifting element which is mounted in or in the proximity of the diffraction intermediate image plane. Also, a phase contrast electron microscope has an objective having a back focal plane, a first diffraction lens, a first phase-shifting element and a second phase-shifting element which is mounted in or in the proximity of the diffraction intermediate image plane. The first diffraction lens images the back focal plane of the objective magnified into a diffraction intermediate image plane and the first phase-shifting element is mounted in the back focal plane of the objective.

Abstract translation: 相位对比电子显微镜具有后焦面的目的，第一衍射透镜，其将物镜的后焦平面成像成衍射中间像平面，第二衍射透镜的主平面安装在 衍射中间像平面和安装在衍射中间像平面附近的相移元件。 此外，相位对比电子显微镜具有安装在衍射中间像平面附近或附近的具有后焦平面，第一衍射透镜，第一相移元件和第二相移元件的物镜。 第一衍射透镜将物镜的后焦平面成像成放大为衍射中间像平面，第一相移元件安装在物镜的后焦平面上。

公开(公告)号：US08330105B2

公开(公告)日：2012-12-11

申请号：US13274066

申请日：2011-10-14

Applicant: Gerd Benner ,  Marko Matijevic

Inventor： Gerd Benner ,  Marko Matijevic

IPC: G21K7/00

CPC classification number: H01J37/26 ,  G01N23/04 ,  H01J37/04 ,  H01J2237/0492 ,  H01J2237/2614

Abstract: A phase contrast electron microscope has an objective with a back focal plane, a first diffraction lens, which images the back focal plane of the objective magnified into a diffraction intermediate image plane, a second diffraction lens whose principal plane is mounted in the proximity of the diffraction intermediate image plane and a phase-shifting element which is mounted in or in the proximity of the diffraction intermediate image plane. Also, a phase contrast electron microscope has an objective having a back focal plane, a first diffraction lens, a first phase-shifting element and a second phase-shifting element which is mounted in or in the proximity of the diffraction intermediate image plane. The first diffraction lens images the back focal plane of the objective magnified into a diffraction intermediate image plane and the first phase-shifting element is mounted in the back focal plane of the objective.

Abstract translation: 相位对比电子显微镜具有后焦面的目的，第一衍射透镜，其将物镜的后焦平面成像成衍射中间像平面，第二衍射透镜的主平面安装在 衍射中间像平面和安装在衍射中间像平面附近的相移元件。 此外，相位对比电子显微镜具有安装在衍射中间像平面附近或附近的具有后焦平面，第一衍射透镜，第一相移元件和第二相移元件的物镜。 第一衍射透镜将物镜的后焦平面成像成放大为衍射中间像平面，第一相移元件安装在物镜的后焦平面上。

公开(公告)号：US20100181481A1

公开(公告)日：2010-07-22

申请号：US12659751

申请日：2010-03-19

Applicant: Gerd Benner ,  Marko Matijevic

Inventor： Gerd Benner ,  Marko Matijevic

IPC: H01J37/26 ,  H01J37/22

CPC classification number: H01J37/26 ,  G01N23/04 ,  H01J37/04 ,  H01J2237/0492 ,  H01J2237/2614

Abstract: A phase contrast electron microscope has an objective (8) with a back focal plane (10), a first diffraction lens (11), which images the back focal plane (10) of the objective (8) magnified into a diffraction intermediate image plane, a second diffraction lens (15) whose principal plane is mounted in the proximity of the diffraction intermediate image plane and a phase-shifting element (16) which is mounted in or in the proximity of the diffraction intermediate image plane. Also, a phase contrast electron microscope has an objective (8) having a back focal plane (10), a first diffraction lens (11), a first phase-shifting element and a second phase-shifting element which is mounted in or in the proximity of the diffraction intermediate image plane. The first diffraction lens (11) images the back focal plane of the objective magnified into a diffraction intermediate image plane and the first phase-shifting element is mounted in the back focal plane (10) of the objective (8). With the magnified imaging of the diffraction plane by the diffraction lens, the dimensional requirements imposed on the phase plate having the phase-shifting element are reduced.

Abstract translation: 相差电子显微镜具有物镜（8），具有后焦平面（10），第一衍射透镜（11），其将物镜（8）的后焦平面（10）成像放大到衍射中间像平面 ，其主平面安装在衍射中间像平面附近的第二衍射透镜（15）和安装在衍射中间像平面附近或附近的相移元件（16）。 此外，相位对比电子显微镜具有物镜（8），其具有后焦平面（10），第一衍射透镜（11），第一相移元件和第二相移元件，其安装在或 接近衍射中间像平面。 第一衍射透镜（11）将放大的物镜的后焦平面成像为衍射中间像平面，第一相移元件安装在物镜（8）的后焦平面（10）中。 通过衍射透镜对衍射平面的放大成像，施加在具有相移元件的相位板上的尺寸要求减小。

公开(公告)号：US08039796B2

公开(公告)日：2011-10-18

申请号：US12659751

申请日：2010-03-19

Applicant: Gerd Benner ,  Marko Matijevic

Inventor： Gerd Benner ,  Marko Matijevic

IPC: G21K7/00

CPC classification number: H01J37/26 ,  G01N23/04 ,  H01J37/04 ,  H01J2237/0492 ,  H01J2237/2614

Abstract: A phase contrast electron microscope has an objective (8) with a back focal plane (10), a first diffraction lens (11), which images the back focal plane (10) of the objective (8) magnified into a diffraction intermediate image plane, a second diffraction lens (15) whose principal plane is mounted in the proximity of the diffraction intermediate image plane and a phase-shifting element (16) which is mounted in or in the proximity of the diffraction intermediate image plane. Also, a phase contrast electron microscope has an objective (8) having a back focal plane (10), a first diffraction lens (11), a first phase-shifting element and a second phase-shifting element which is mounted in or in the proximity of the diffraction intermediate image plane. The first diffraction lens (11) images the back focal plane of the objective magnified into a diffraction intermediate image plane and the first phase-shifting element is mounted in the back focal plane (10) of the objective (8). With the magnified imaging of the diffraction plane by the diffraction lens, the dimensional requirements imposed on the phase plate having the phase-shifting element are reduced.

Abstract translation: 相差电子显微镜具有物镜（8），具有后焦平面（10），第一衍射透镜（11），其将物镜（8）的后焦平面（10）成像放大到衍射中间像平面 ，其主平面安装在衍射中间像平面附近的第二衍射透镜（15）和安装在衍射中间像平面附近或附近的相移元件（16）。 此外，相位对比电子显微镜具有物镜（8），其具有后焦平面（10），第一衍射透镜（11），第一相移元件和第二相移元件，其安装在或 接近衍射中间像平面。 第一衍射透镜（11）将放大的物镜的后焦平面成像为衍射中间像平面，第一相移元件安装在物镜（8）的后焦平面（10）中。 通过衍射透镜对衍射平面的放大成像，施加在具有相移元件的相位板上的尺寸要求减小。

公开(公告)号：US07741602B2

公开(公告)日：2010-06-22

申请号：US11717201

申请日：2007-03-13

Applicant: Gerd Benner ,  Marko Matijevic

Inventor： Gerd Benner ,  Marko Matijevic

IPC: G01N23/00

CPC classification number: H01J37/26 ,  G01N23/04 ,  H01J37/04 ,  H01J2237/0492 ,  H01J2237/2614

Abstract: A phase contrast electron microscope has an objective (8) with a back focal plane (10), a first diffraction lens (11), which images the back focal plane (10) of the objective (8) magnified into a diffraction intermediate image plane, a second diffraction lens (15) whose principal plane is mounted in the proximity of the diffraction intermediate image plane and a phase-shifting element (16) which is mounted in or in the proximity of the diffraction intermediate image plane. Also, a phase contrast electron microscope has an objective (8) having a back focal plane (10), a first diffraction lens (11), a first phase-shifting element and a second phase-shifting element which is mounted in or in the proximity of the diffraction intermediate image plane. The first diffraction lens (11) images the back focal plane of the objective magnified into a diffraction intermediate image plane and the first phase-shifting element is mounted in the back focal plane (10) of the objective (8). With the magnified imaging of the diffraction plane by the diffraction lens, the dimensional requirements imposed on the phase plate having the phase-shifting element are reduced.

公开(公告)号：US20070284528A1

公开(公告)日：2007-12-13

申请号：US11717201

申请日：2007-03-13

Applicant: Gerd Benner ,  Marko Matijevic

Inventor： Gerd Benner ,  Marko Matijevic

IPC: G01N23/00

CPC classification number: H01J37/26 ,  G01N23/04 ,  H01J37/04 ,  H01J2237/0492 ,  H01J2237/2614

Abstract: A phase contrast electron microscope has an objective (8) with a back focal plane (10), a first diffraction lens (11), which images the back focal plane (10) of the objective (8) magnified into a diffraction intermediate image plane, a second diffraction lens (15) whose principal plane is mounted in the proximity of the diffraction intermediate image plane and a phase-shifting element (16) which is mounted in or in the proximity of the diffraction intermediate image plane. Also, a phase contrast electron microscope has an objective (8) having a back focal plane (10), a first diffraction lens (11), a first phase-shifting element and a second phase-shifting element which is mounted in or in the proximity of the diffraction intermediate image plane. The first diffraction lens (11) images the back focal plane of the objective magnified into a diffraction intermediate image plane and the first phase-shifting element is mounted in the back focal plane (10) of the objective (8). With the magnified imaging of the diffraction plane by the diffraction lens, the dimensional requirements imposed on the phase plate having the phase-shifting element are reduced.

Abstract translation: 相差电子显微镜具有物镜（8），具有后焦平面（10），第一衍射透镜（11），其将物镜（8）的后焦平面（10）成像放大到衍射中间像平面 ，其主平面安装在衍射中间像平面附近的第二衍射透镜（15）和安装在衍射中间像平面附近或附近的相移元件（16）。 此外，相位对比电子显微镜具有物镜（8），其具有后焦平面（10），第一衍射透镜（11），第一相移元件和第二相移元件，其安装在或 接近衍射中间像平面。 第一衍射透镜（11）将放大的物镜的后焦平面成像为衍射中间像平面，第一相移元件安装在物镜（8）的后焦平面（10）中。 通过衍射透镜对衍射平面的放大成像，施加在具有相移元件的相位板上的尺寸要求减小。

公开(公告)号：US20080296509A1

公开(公告)日：2008-12-04

申请号：US12070055

申请日：2008-02-14

Applicant: Rasmus Schroder ,  Bastian Barton ,  Gerd Benner ,  Harald Rose

Inventor： Rasmus Schroder ,  Bastian Barton ,  Gerd Benner ,  Harald Rose

IPC: H01J3/14

CPC classification number: H01J37/26 ,  H01J37/295 ,  H01J2237/041 ,  H01J2237/0453 ,  H01J2237/1534 ,  H01J2237/2455 ,  H01J2237/2614 ,  H01J2237/2802 ,  H01J2237/2809

Abstract: A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a particle beam device having a phase-shifting element of this type. In the phase-shifting element and the particle beam device having a phase-shifting element, components shadowing the particle beam are avoided, so that proper information content is achieved and in which the phase contrast is essentially spatial frequency-independent. The phase-shifting element may have at least one means for generating a non-homogeneous or anisotropic potential. The particle beam device according to the system described herein may be provided with the phase-shifting element.

Abstract translation: 描述了用于移动粒子束的至少一部分的相位的相移元件，以及具有这种类型的相移元件的粒子束装置。 在具有相移元件的相移元件和粒子束装置中，避免了影响粒子束的分量，使得实现适当的信息内容，并且相位对比度基本上与空间频率无关。 相移元件可以具有至少一个用于产生非均匀或各向异性电位的装置。 根据本文所述的系统的粒子束装置可以设置有相移元件。

公开(公告)号：US5483073A

公开(公告)日：1996-01-09

申请号：US172122

申请日：1993-12-22

Applicant: Gerd Benner

Inventor： Gerd Benner

IPC: H01J37/04 ,  H01J37/26 ,  H01J37/147

CPC classification number: H01J37/04 ,  H01J37/26

Abstract: The invention is directed to a method for illuminating an object with a focused electron beam as well as to an electron-optical illuminating apparatus therefor. The crossover of an electron source is imaged, greatly demagnified, into the object plane via four imaging stages. The two first condenser stages define a zoom system. The cross section of the crossover image in the input image plane of the third condenser stage can be varied by varying the corresponding lens excitation. The third condenser stage images the crossover image from the input image plane into the input image plane of the objective. A multiple diaphragm is mounted between the third condenser stage and the input image plane of the objective. This multiple diaphragm has several apertures which are, in part, off-axis. The electron beam can be deflected by magnetic deflecting systems in such a manner that only the electron beam, which is transmitted through one diaphragm aperture of the multiple diaphragm, contributes an amount to the illumination of the object. In this way, the aperture of the illuminating beam component can be varied independently of the imaging scale with which the crossover is imaged on the object.

Abstract translation: 本发明涉及一种用聚焦电子束照射物体的方法及其电子 - 光学照明装置。 电子源的交叉通过四个成像阶段成像，大大地缩小到物平面。 两个第一个冷凝器阶段定义了一个缩放系统。 可以通过改变对应的透镜激发来改变第三电容器级的输入图像平面中的交叉图像的横截面。 第三个聚光阶段将交叉图像从输入图像平面成像到物镜的输入图像平面。 多个隔膜安装在第三聚光镜台与物镜的输入像平面之间。 该多个隔膜具有多个部分地偏轴的孔。 电子束可以由磁偏转系统偏转，使得只有通过多个隔膜的一个光阑孔径传播的电子束才能对物体的照明贡献一定量。 以这种方式，照明光束分量的光圈可以独立于在对象上成像交叉的成像标度而变化。

公开(公告)号：US08173963B2

公开(公告)日：2012-05-08

申请号：US12931046

申请日：2011-01-20

Applicant: Rasmus Schröder ,  Bastian Barton ,  Gerd Benner ,  Harald Rose

Inventor： Rasmus Schröder ,  Bastian Barton ,  Gerd Benner ,  Harald Rose

IPC: G01N23/00

CPC classification number: H01J37/26 ,  H01J37/295 ,  H01J2237/041 ,  H01J2237/0453 ,  H01J2237/1534 ,  H01J2237/2455 ,  H01J2237/2614 ,  H01J2237/2802 ,  H01J2237/2809

Abstract: A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a particle beam device having a phase-shifting element of this type. In the phase-shifting element and the particle beam device having a phase-shifting element, components shadowing the particle beam are avoided, so that proper information content is achieved and in which the phase contrast is essentially spatial frequency-independent. The phase-shifting element may have at least one means for generating a non-homogeneous or anisotropic potential. The particle beam device according to the system described herein may be provided with the phase-shifting element.

Abstract translation: 描述了用于移动粒子束的至少一部分的相位的相移元件，以及具有这种类型的相移元件的粒子束装置。 在具有相移元件的相移元件和粒子束装置中，避免了影响粒子束的分量，使得实现适当的信息内容，并且相位对比度基本上与空间频率无关。 相移元件可以具有至少一个用于产生非均匀或各向异性电位的装置。 根据本文所述的系统的粒子束装置可以设置有相移元件。

公开(公告)号：US20110233402A1

公开(公告)日：2011-09-29

申请号：US12931046

申请日：2011-01-20

Applicant: Rasmus Schröder ,  Bastian Barton ,  Gerd Benner ,  Harald Rose

Inventor： Rasmus Schröder ,  Bastian Barton ,  Gerd Benner ,  Harald Rose

IPC: H01J37/26

CPC classification number: H01J37/26 ,  H01J37/295 ,  H01J2237/041 ,  H01J2237/0453 ,  H01J2237/1534 ,  H01J2237/2455 ,  H01J2237/2614 ,  H01J2237/2802 ,  H01J2237/2809

Abstract: A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a particle beam device having a phase-shifting element of this type. In the phase-shifting element and the particle beam device having a phase-shifting element, components shadowing the particle beam are avoided, so that proper information content is achieved and in which the phase contrast is essentially spatial frequency-independent. The phase-shifting element may have at least one means for generating a non-homogeneous or anisotropic potential. The particle beam device according to the system described herein may be provided with the phase-shifting element.

Abstract translation: 描述了用于移动粒子束的至少一部分的相位的相移元件，以及具有这种类型的相移元件的粒子束装置。 在具有相移元件的相移元件和粒子束装置中，避免了影响粒子束的分量，使得实现适当的信息内容，并且相位对比度基本上与空间频率无关。 相移元件可以具有至少一个用于产生非均匀或各向异性电位的装置。 根据本文所述的系统的粒子束装置可以设置有相移元件。