公开(公告)号：US06227050B1

公开(公告)日：2001-05-08

申请号：US09181615

申请日：1998-10-28

申请人： Tetsuo Fujii ,  Masahito Imai

发明人： Tetsuo Fujii ,  Masahito Imai

IPC分类号： G01P15125

CPC分类号： B81B7/0006 ,  B81B2201/0235 ,  C07C303/32 ,  C07C303/44 ,  G01C19/56 ,  G01C19/5656 ,  G01C19/5719 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0817 ,  G01P2015/0828 ,  Y10T29/49002 ,  Y10T29/49004 ,  C07C309/17

摘要： A semiconductor mechanical sensor having a new structure in which a S/N ratio is improved. In the central portion of a silicon substrate 1, a recess portion 2 is formed which includes a beam structure. A weight is formed at the tip of the beam, and in the bottom surface of the weight in the bottom surface of the recess portion 2 facing the same, an electrode 5 is formed. An alternating current electric power is applied between the weight portion 4 and the electrode 5 so that static electricity is created and the weight is excited by the static electricity. In an axial direction which is perpendicular to the direction of the excitation of the weight, an electrode 6 is disposed to face one surface of the weight and a wall surface of the substrate which faces the same. A change in a capacitance between the facing electrodes is electrically detected, and therefore, a change in a physical force acting in the same direction is detected.

摘要翻译： 具有S / N比提高的新结构的半导体机械传感器。 在硅衬底1的中心部分，形成包括梁结构的凹部2。 在梁的尖端处形成重物，并且在凹部2的底面中的重物的底面中，重物形成为电极5。 在重量部分4和电极5之间施加交流电力，从而产生静电，并且重量被静电激励。 在与重量的激励方向垂直的轴向方向上，电极6设置为面对重物的一个表面和面向其的基板的壁表面。 对面对电极之间的电容变化进行电检测，因此检测到以相同方向作用的物理力的变化。

公开(公告)号：US6085598A

公开(公告)日：2000-07-11

申请号：US342624

申请日：1999-06-29

申请人： Hironobu Baba ,  Michitaka Hayashi ,  Masaki Takakuwa ,  Masahito Imai ,  Akiteru Takae ,  Tokuhisa Nomura ,  Akira Ishimaru

发明人： Hironobu Baba ,  Michitaka Hayashi ,  Masaki Takakuwa ,  Masahito Imai ,  Akiteru Takae ,  Tokuhisa Nomura ,  Akira Ishimaru

IPC分类号： G01D11/30 ,  G01L9/00 ,  G01L19/00 ,  G01L7/00 ,  G01L7/08

CPC分类号： G01L19/003 ,  G01L19/0038 ,  G01L19/143

摘要： A pressure sensor portion having a pressure-responsive element for detecting gas pressure in reference to the atmospheric pressure is connected to a mounting body such as a canister mounted on a vehicle by means of a fragile connecting member. The connecting member breaks off to dismount the sensor device from the mounting body when a high impact due to an accidental collision or crash is imposed on the sensor device, and thereby an inlet port connected to the sensor portion for introducing gas pressure thereinto is prevented from being broken or damaged by such a collision impact. The fragile connecting member may include a tubular pipe formed integrally with a cover that hermetically closes an inner cavity of the sensor portion. A mounting bracket connected to the sensor portion via the fragile connecting member may be used to mount the sensor device on the mounting body.

摘要翻译： 具有用于相对于大气压检测气体压力的压力响应元件的压力传感器部分通过脆弱的连接部件连接到安装在车辆上的罐的安装体。 当由于意外碰撞或碰撞引起的高冲击施加在传感器装置上时，连接构件断开以将传感器装置从安装体上拆下，从而防止连接到传感器部分的用于引入气体压力的入口 被这种碰撞冲击破坏或损坏。 脆弱的连接构件可以包括与盖形成一体的管状管，其密封地封闭传感器部分的内腔。 通过脆弱的连接构件连接到传感器部分的安装支架可用于将传感器装置安装在安装体上。

公开(公告)号：US5635629A

公开(公告)日：1997-06-03

申请号：US411719

申请日：1995-04-03

申请人： Masahito Imai ,  Kenji Kanemaru ,  Norio Kitao ,  Nobuyasu Gotou ,  Naohito Mizuno ,  Koichi Kamabora

发明人： Masahito Imai ,  Kenji Kanemaru ,  Norio Kitao ,  Nobuyasu Gotou ,  Naohito Mizuno ,  Koichi Kamabora

IPC分类号： G01H11/08 ,  G01L23/22 ,  G01L1/10 ,  G01H9/00

CPC分类号： G01L23/222 ,  G01H11/08

摘要： A knock sensor for which a fabrication process is simple and moreover which can detect up to a high-frequency region is provided. A sensing element 11 composed of a semiconductor the weight (mass) thereof being 1 g or less and a signal processing circuit 11 are mounted on a fixing pedestal 9. The fixing pedestal 9 is fixed to a connector 2 side by means of adhesive or the like. Additionally, the connector 2 is fixed by means of caulking 16 of a housing 1. As a result thereof, the sensing element 11 is disposed within a space formed by the fixing pedestal 9 and the housing 1.

摘要翻译： PCT No.PCT / JP94 / 01267 Sec。 371日期：1995年4月3日 102（e）日期1995年4月3日PCT 1994年8月1日PCT PCT。 出版物WO95 / 04262 日期1995年2月9日提供了一种制造工艺简单的爆震传感器，而且可以检测到高频区域。 将由其重量（质量）为1g或更小的半导体组成的感测元件11和信号处理电路11安装在固定台9上。固定台9通过粘合剂或 喜欢。 此外，连接器2通过壳体1的铆接16固定。其结果是，感测元件11设置在由固定基座9和壳体1形成的空间内。

公开(公告)号：US20090179288A1

公开(公告)日：2009-07-16

申请号：US12381356

申请日：2009-03-11

申请人： Tetsuo Fujii ,  Masahito Imai

发明人： Tetsuo Fujii ,  Masahito Imai

IPC分类号： H01L29/84

CPC分类号： B81B7/0006 ,  B81B2201/0235 ,  C07C303/32 ,  C07C303/44 ,  G01C19/56 ,  G01C19/5656 ,  G01C19/5719 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0817 ,  G01P2015/0828 ,  Y10T29/49002 ,  Y10T29/49004 ,  C07C309/17

摘要： A semiconductor mechanical sensor having a new structure in which a S/N ratio is improved. In the central portion of a silicon substrate 1, a recess portion 2 is formed which includes a beam structure. A weight is formed at the tip of the beam, and in the bottom surface of the weight in the bottom surface of the recess portion 2 facing the same, an electrode 5 is formed. An alternating current electric power is applied between the weight portion 4 and the electrode 5 so that static electricity is created and the weight is excited by the static electricity. In an axial direction which is perpendicular to the direction of the excitation of the weight, an electrode 6 is disposed to face one surface of the weight and a wall surface of the substrate which faces the same. A change in a capacitance between the facing electrodes is electrically detected, and therefore, a change in a physical force acting in the same direction is detected.

摘要翻译： 具有S / N比提高的新结构的半导体机械传感器。 在硅衬底1的中心部分，形成包括梁结构的凹部2。 在梁的尖端处形成重物，并且在凹部2的底面中的重物的底面中，重物形成为电极5。 在重量部分4和电极5之间施加交流电力，从而产生静电，并且重量被静电激励。 在与重量的激励方向垂直的轴向方向上，电极6设置为面对重物的一个表面和面向其的基板的壁表面。 对面对电极之间的电容变化进行电检测，因此检测到以相同方向作用的物理力的变化。

公开(公告)号：US07036383B2

公开(公告)日：2006-05-02

申请号：US10972474

申请日：2004-10-26

申请人： Masahito Imai ,  Yoshifumi Murakami

发明人： Masahito Imai ,  Yoshifumi Murakami

IPC分类号： G01L7/00

CPC分类号： G01L9/0055 ,  G01L19/0627 ,  G01L19/147 ,  G01L19/148 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2924/00014

摘要： A pressure sensor for detecting a pressure such as a brake oil pressure in an automobile is composed of a cylindrical stem, a sensor chip and a circuit board for processing an electrical signal from the sensor chip. The cylindrical stem includes a thin diaphragm formed at an axial end and an opening formed at the other axial end. The sensor chip is mounted on the diaphragm, and the circuit board is mounted on a flat side surface formed on the outer periphery of the cylindrical stem so that the circuit board is positioned perpendicularly to the sensor chip, thereby reducing a size of the pressure sensor in the radial direction of the stem. The pressure to be detected is introduced into the cylindrical stem from its opening, and the pressure is detected by the sensor chip mounted on the diaphragm.

摘要翻译： 用于检测汽车中的制动油压等压力的压力传感器由圆筒形杆，传感器芯片和用于处理来自传感器芯片的电信号的电路板构成。 圆柱形杆包括形成在轴向端部处的薄隔膜和形成在另一轴向端部处的开口。 传感器芯片安装在隔膜上，电路板安装在形成在圆柱形杆的外周上的平坦侧表面上，使得电路板垂直于传感器芯片定位，从而减小压力传感器的尺寸 在杆的径向方向。 要检测的压力从其开口引入圆柱形杆，并且压力由安装在隔膜上的传感器芯片检测。

公开(公告)号：US20050132800A1

公开(公告)日：2005-06-23

申请号：US11062935

申请日：2005-02-22

申请人： Tetsuo Fujii ,  Masahito Imai

发明人： Tetsuo Fujii ,  Masahito Imai

IPC分类号： B81B7/00 ,  C07C303/32 ,  C07C303/44 ,  C07C309/17 ,  G01C19/56 ,  G01C19/5656 ,  G01C19/5719 ,  G01G3/14 ,  G01P15/00 ,  H01S4/00

CPC分类号： B81B7/0006 ,  B81B2201/0235 ,  C07C303/32 ,  C07C303/44 ,  G01C19/56 ,  G01C19/5656 ,  G01C19/5719 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0817 ,  G01P2015/0828 ,  Y10T29/49002 ,  Y10T29/49004 ,  C07C309/17

摘要： A semiconductor mechanical sensor having a new structure in which a S/N ratio is improved. In the central portion of a silicon substrate 1, a recess portion 2 is formed which includes a beam structure. A weight is formed at the tip of the beam, and in the bottom surface of the weight in the bottom surface of the recess portion 2 facing the same, an electrode 5 is formed. An alternating current electric power is applied between the weight portion 4 and the electrode 5 so that static electricity is created and the weight is excited by the static electricity. In an axial direction which is perpendicular to the direction of the excitation of the weight, an electrode 6 is disposed to face one surface of the weight and a wall surface of the substrate which faces the same. A change in a capacitance between the facing electrodes is electrically detected, and therefore, a change in a physical force acting in the same direction is detected.

摘要翻译： 具有S / N比提高的新结构的半导体机械传感器。 在硅衬底1的中心部分，形成包括梁结构的凹部2。 在梁的尖端处形成重物，并且在凹部2的底面中的重物的底面中，重物形成为电极5。 在重量部分4和电极5之间施加交流电力，从而产生静电，并且重量被静电激励。 在与重量的激励方向垂直的轴向方向上，电极6设置为面对重物的一个表面和面向其的基板的壁表面。 对面对电极之间的电容变化进行电检测，因此检测到以相同方向作用的物理力的变化。

公开(公告)号：US06868727B2

公开(公告)日：2005-03-22

申请号：US10358691

申请日：2003-02-05

申请人： Tetsuo Fujii ,  Masahito Imai

发明人： Tetsuo Fujii ,  Masahito Imai

IPC分类号： B81B7/00 ,  C07C303/32 ,  C07C303/44 ,  C07C309/17 ,  G01C19/56 ,  G01C19/5656 ,  G01C19/5719 ,  G01P15/125

CPC分类号： B81B7/0006 ,  B81B2201/0235 ,  C07C303/32 ,  C07C303/44 ,  G01C19/56 ,  G01C19/5656 ,  G01C19/5719 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0817 ,  G01P2015/0828 ,  Y10T29/49002 ,  Y10T29/49004 ,  C07C309/17

摘要： A semiconductor mechanical sensor having a new structure in which a S/N ratio is improved. In the central portion of a silicon substrate 1, a recess portion 2 is formed which includes a beam structure. A weight is formed at the tip of the beam, and in the bottom surface of the weight in the bottom surface of the recess portion 2 facing the same, an electrode 5 is formed. An alternating current electric power is applied between the weight portion 4 and the electrode 5 so that static electricity is created and the weight is excited by the static electricity. In an axial direction which is perpendicular to the direction of the excitation of the weight, an electrode 6 is disposed to face one surface of the weight and a wall surface of the substrate which faces the same. A change in a capacitance between the facing electrodes is electrically detected, and therefore, a change in a physical force acting in the same direction is detected.

公开(公告)号：US20050005697A1

公开(公告)日：2005-01-13

申请号：US10899729

申请日：2004-07-27

申请人： Tetsuo Fujii ,  Masahito Imai

发明人： Tetsuo Fujii ,  Masahito Imai

IPC分类号： B81B7/00 ,  C07C303/32 ,  C07C303/44 ,  C07C309/17 ,  G01C19/56 ,  G01C19/5656 ,  G01C19/5719 ,  G01P9/00

CPC分类号： B81B7/0006 ,  B81B2201/0235 ,  C07C303/32 ,  C07C303/44 ,  G01C19/56 ,  G01C19/5656 ,  G01C19/5719 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0817 ,  G01P2015/0828 ,  Y10T29/49002 ,  Y10T29/49004 ,  C07C309/17

摘要： A semiconductor mechanical sensor having a new structure in which a S/N ratio is improved. In the central portion of a silicon substrate 1, a recess portion 2 is formed which includes a beam structure. A weight is formed at the tip of the beam, and in the bottom surface of the weight in the bottom surface of the recess portion 2 facing the same, an electrode 5 is formed. An alternating current electric power is applied between the weight portion 4 and the electrode 5 so that static electricity is created and the weight is excited by the static electricity. In an axial direction which is perpendicular to the direction of the excitation of the weight, an electrode 6 is disposed to face one surface of the weight and a wall surface of the substrate which faces the same. A change in a capacitance between the facing electrodes is electrically detected, and therefore, a change in a physical force acting in the same direction is detected.

摘要翻译： 具有S / N比提高的新结构的半导体机械传感器。 在硅衬底1的中心部分，形成包括梁结构的凹部2。 在梁的尖端处形成重物，并且在凹部2的底面中的重物的底面中，重物形成为电极5。 在重量部分4和电极5之间施加交流电力，从而产生静电，并且重量被静电激励。 在与重量的激励方向垂直的轴向方向上，电极6设置为面对重物的一个表面和面向其的基板的壁表面。 对面对电极之间的电容变化进行电检测，因此检测到以相同方向作用的物理力的变化。

公开(公告)号：US06807864B2

公开(公告)日：2004-10-26

申请号：US09824708

申请日：2001-04-04

申请人： Masaki Takakuwa ,  Masahito Imai

发明人： Masaki Takakuwa ,  Masahito Imai

IPC分类号： G01L700

CPC分类号： G01L19/0654 ,  G01L19/0038 ,  G01L19/0636 ,  G01L19/141 ,  G01L19/147 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2924/00014

摘要： A case of a pressure sensor has an atmospheric pressure introduction port for introducing atmospheric pressure into the case, and a water repellent filter that is attached to the atmospheric pressure introduction port to prevent passage of moisture, dust and the like while allowing flow of air. The filter is disposed to have a filter surface extending along a gravitational direction when the pressure sensor is used.

摘要翻译： 压力传感器的壳体具有用于将大气压引入壳体的大气压引入口，以及附着于大气压导入口的防水过滤器，以防止湿气，灰尘等在允许空气流动的同时进行。 过滤器设置成当使用压力传感器时具有沿重力方向延伸的过滤器表面。

公开(公告)号：US5872315A

公开(公告)日：1999-02-16

申请号：US805171

申请日：1997-02-24

申请人： Kazuyoshi Nagase ,  Hironobu Baba ,  Masahito Imai ,  Yukihiko Tanizawa

发明人： Kazuyoshi Nagase ,  Hironobu Baba ,  Masahito Imai ,  Yukihiko Tanizawa

IPC分类号： G01L9/04 ,  G01L9/00 ,  H01L29/84

CPC分类号： G01L19/147 ,  G01L19/0038 ,  G01L19/0084 ,  G01L19/148 ,  G01L9/0052

摘要： A pressure detecting apparatus includes a sensing body with a diaphragm to which pressure is applied and a strain gauge plate having a {100} silicon substrate and a glass base, which is bonded on the sensing body. A thin portion and through holes are formed in the silicon substrate so that the thin portion has a beam structure on which strain gauges are formed. When the pressure is applied, the resistances of the strain gauges change in a positive direction, while the resistances of the strain gauges change in a negative direction. Accordingly, the linearity of the output from the pressure detecting apparatus can be improved.

摘要翻译： 压力检测装置包括具有施加压力的隔膜的感测体和粘附在感测体上的具有{100}硅衬底和玻璃基底的应变片。 在硅衬底中形成薄的部分和通孔，使得薄部分具有在其上形成应变计的梁结构。 当施加压力时，应变计的电阻在正方向上变化，而应变计的电阻在负方向上变化。 因此，能够提高来自压力检测装置的输出的线性。