Polishing apparatus
    11.
    发明授权
    Polishing apparatus 失效
    抛光设备

    公开(公告)号:US6142859A

    公开(公告)日:2000-11-07

    申请号:US176669

    申请日:1998-10-21

    摘要: A bristle carrier for leaning a polishing apparatus comprises a number of radial slots into which sub-frames carrying bristles can be releasably mounted. The bristle carrier is used in place of a component carrier used during normal polishing, and is driven in planetary fashion over clothed polishing surfaces to clean those surfaces. The same carrier can be used, even when the bristles have to be replaced due to wear, by replacing the sub-frames having new bristles.

    摘要翻译: 用于倾斜抛光装置的刷毛载体包括多个径向狭槽,其中承载刷毛的子框架可以被可释放地安装在该径向槽中。 使用刷毛载体代替在正常抛光期间使用的部件载体,并且以行星方式驱动穿过穿着的抛光表面以清洁这些表面。 可以使用相同的载体,即使当由于磨损而必须更换刷毛时,通过更换具有新刷毛的子框架。

    Superfinishing method and apparatus
    12.
    发明授权
    Superfinishing method and apparatus 失效
    超精加工方法和装置

    公开(公告)号:US5779518A

    公开(公告)日:1998-07-14

    申请号:US616710

    申请日:1996-03-15

    IPC分类号: B24B33/00 B24B49/16 B24C1/00

    CPC分类号: B24B33/00 B24B49/16

    摘要: A method and apparatus for the superfinishing of workpieces, particularly workpieces driven in rotary manner with the aid of a superfinishing tool driven in rotary manner proposes that although the superfinishing tool is driven, it is held in fixed manner. Infeeding takes place solely through the infeeding movement of the workpiece to be worked, which leads to a greater rigidity of the apparatus and at the same time a very simple construction.

    摘要翻译: 一种用于对工件进行超精加工的方法和装置,特别是以旋转方式驱动的超精加工工具以旋转方式驱动的工件提出,尽管超精加工工具被驱动,但是它被固定地保持。 进料仅通过待加工的工件的进料运动进行,这导致装置的更大的刚性,同时具有非常简单的结构。

    Apparatus and method for conditioning a chemical mechanical polishing pad
    13.
    发明授权
    Apparatus and method for conditioning a chemical mechanical polishing pad 失效
    用于调理化学机械抛光垫的装置和方法

    公开(公告)号:US5775983A

    公开(公告)日:1998-07-07

    申请号:US431934

    申请日:1995-05-01

    CPC分类号: B24B53/017

    摘要: A method and apparatus for conditioning a polishing pad improves the polishing characteristics of the pad by providing an embedded pattern that facilitates polishing and reduces glazing. Moreover, the present invention conditions a pad without significantly abrading the polishing surface, thereby prolonging the pad's useful life. A series of independently rotatable rollers having a knurled outer surface is used to embed a pattern of score marks in the surface of the polishing pad. Alternatively, a knurled conical roller engages a radius of the pad. The apparatus is adaptable to either manual or automated processes. The present invention is particularly useful for conditioning polishing pads used in the fabrication of semiconductor wafers.

    摘要翻译: 用于调理抛光垫的方法和设备通过提供便于抛光和减少玻璃窗的嵌入图案来提高垫的抛光特性。 此外,本发明对衬垫进行调节,而不会使抛光表面显着磨损,从而延长焊盘的使用寿命。 使用具有滚花外表面的一系列可独立旋转的滚子将磨痕图案嵌入抛光垫的表面。 或者,滚花锥形辊接合垫的半径。 该设备适用于手动或自动化过程。 本发明对于调节用于制造半导体晶片的抛光垫是特别有用的。

    Curve cutter with non-planar interface
    14.
    发明授权
    Curve cutter with non-planar interface 失效
    具有非平面界面的曲线切割机

    公开(公告)号:US5711702A

    公开(公告)日:1998-01-27

    申请号:US703864

    申请日:1996-08-27

    申请人: John T. Devlin

    发明人: John T. Devlin

    摘要: A cutting compact has a superhard abrasive layer bonded to a substrate layer, wherein the configuration of the interface between abrasive and substrate layers is a non-planar, or three dimensional, interface which increases the surface area between the layers available for bonding and optimizes the structural integrity of the compact according to its desired application. In one embodiment, the topography between the substrate and abrasive layers of the compact is characterized by interlocking concentric circular grooves and channels of varying width, depth and shape. In another embodiment, the interface between the grooves and channels is rounded and smooth. In additional embodiments, the grooves and channels are positioned on substantially angled interfaces or substantially curved interfaces. Additional configurations of the present invention provide that the grooves alternatingly start and stop along the path in interfacing with their respective channels. Yet additional configurations disclosed include variations in the width of the groove/channel along the diameter of the abrasive layer and the substrate layer. The present invention thus provides an increased mechanical interlock between the abrasive layer and the substrate layer. The increased surface area between the substrate and abrasive layers promotes the sintered bond between the layers, thereby improving resistance to spalling or delamination of the abrasive layer from the substrate layer. Another advantage is that the number, depths and widths of the channels can be adjusted to meet the desired performance characteristics of the compact and to strengthen points of particular stress according to specific applications of the compact.

    摘要翻译: 切割压块具有结合到基底层的超硬磨料层,其中研磨剂和基底层之间的界面的构型是非平面或三维界面,其增加可用于粘合的层之间的表面积,并优化 压块的结构完整性根据其所期望的应用。 在一个实施例中,压块的衬底和磨料层之间的形貌的特征在于互锁的同心圆形槽和不同宽度,深度和形状的通道。 在另一个实施例中,凹槽和通道之间的界面是圆形和光滑的。 在另外的实施例中,凹槽和通道被定位在基本成角度的界面或基本上弯曲的界面上。 本发明的另外的构造提供了在与它们各自的通道相接口的情况下沿着路径交替启动和停止凹槽。 所公开的附加结构包括沿研磨层和基底层的直径的槽/通道的宽度的变化。 因此,本发明提供了研磨层和基底层之间增加的机械互锁。 衬底和磨料层之间增加的表面积促进了层之间的烧结,从而提高了磨料层与衬底层的剥落或分层的抵抗性。 另一个优点是可以调节通道的数量,深度和宽度,以满足压块的期望性能特征,并根据压块的具体应用加强特定应力点。

    Method of forming sliding surfaces
    15.
    发明授权
    Method of forming sliding surfaces 失效
    形成滑动面的方法

    公开(公告)号:US5137619A

    公开(公告)日:1992-08-11

    申请号:US708564

    申请日:1991-05-31

    CPC分类号: C25D7/10 C25D5/14

    摘要: A method of forming sliding surfaces, wherein a first plating layer with a relatively high level of hardness is formed by using a first plating liquid which is at a relatively low temperature; and a second plating layer with a hardness lower than that of the first plating layer is formed on the surface of the first plating layer by using a second plating liquid which is at a temperature higher than that of the first plating liquid; the second plating layer being honed to a predetermined thickness.

    摘要翻译: 一种形成滑动面的方法,其中通过使用处于较低温度的第一电镀液形成具有相对高硬度水平的第一镀层; 并且通过使用比第一镀液高的第二镀液,在第一镀层的表面上形成具有比第一镀层低的硬度的第二镀层; 将第二镀层磨成预定厚度。

    Radially adjustable internal grinder
    16.
    发明授权
    Radially adjustable internal grinder 失效
    径向可调式内部磨床

    公开(公告)号:US4507895A

    公开(公告)日:1985-04-02

    申请号:US444397

    申请日:1982-11-15

    摘要: An internal grinder for grinding or polishing the inner surface and the like of a cylinder or ring gauge. A plurality of grind stones (256) are held by a grind stone holding member (251) in a manner to be movable in the radial directions of a spindle (203) and a projection value adjusting member (241) having engaged therewith the plurality of grind stones (256), respectively, is rotated relative to said grind stone holding member (251), whereby the plurality of grind stones (256) are adjusted in their projection values.

    摘要翻译: PCT No.PCT / JP82 / 00097 Sec。 371日期:1982年11月15日 102(e)1982年11月15日日期PCT提交1982年4月2日PCT公布。 出版物WO82 / 03354 日期:1982年10月14日。一种用于研磨或抛光圆筒或环形计的内表面等的内部研磨机。 多个磨石(256)由研磨石保持构件(251)以能够沿主轴(203)的径向移动的方式被保持,并且投影值调节构件(241)与多个 研磨石(256)分别相对于研磨石保持构件(251)旋转,由此多个研磨石(256)的投影值被调整。

    Device for controlling expansible grinding tools
    17.
    发明授权
    Device for controlling expansible grinding tools 失效
    用于控制可扩展研磨工具的装置

    公开(公告)号:US4206572A

    公开(公告)日:1980-06-10

    申请号:US927870

    申请日:1978-07-25

    申请人: Jack F. Delehonte

    发明人: Jack F. Delehonte

    IPC分类号: B24B33/06 B24B33/00

    CPC分类号: B24B33/06

    摘要: A device for controlling the expansion of an expansible grinding tool includes control means for effecting controlled axial movement of a cone in the tool. The control means includes a screw engaging a fixed nut and controllably rotatable by a driving motor, the resultant axial movement of the screw being transmitted to the cone. The expansion control device is provided in the form of a removable grinding head unit arranged to be inserted between a grinding machine and the grinding tool. The grinding head unit also includes means for transmitting rotary motion from the grinding machine to the grinding tool.

    摘要翻译: 用于控制可膨胀研磨工具的膨胀的装置包括用于实现锥体在工具中受控的轴向运动的控制装置。 控制装置包括一个与固定螺母啮合的螺钉,并通过驱动电机可控制地旋转,螺杆的所得轴向运动被传递到锥体。 膨胀控制装置设置成可拆卸的研磨头单元的形式,其布置成插入研磨机和研磨工具之间。 研磨头单元还包括用于将旋转运动从研磨机传递到研磨工具的装置。

    Cylinder liner honing
    18.
    发明授权
    Cylinder liner honing 失效
    气缸珩磨

    公开(公告)号:US4196547A

    公开(公告)日:1980-04-08

    申请号:US879844

    申请日:1978-02-22

    申请人: Frank E. Keske

    发明人: Frank E. Keske

    IPC分类号: B24B33/00 B24B33/02 B24B33/08

    CPC分类号: B24B33/08

    摘要: It is desirable to provide a relatively coarse finish at one end of an inner cylindrical wall of a cylinder or a cylinder liner and a relatively finer finish towards another end of said inner cylinder wall. A honing member is provided for rotation and oscillation in contact with the inner cylinder walls. A first section of the honing member has a relatively coarse grit surface and a second section of the honing member has a relatively fine grit surface. The abovementioned oscillation and rotation of such a honing member comprises an improved method for honing a cylindrical wall.

    摘要翻译: 期望在圆柱体或气缸套的内圆柱形壁的一端提供相对粗糙的表面,并且朝向所述内圆筒壁的另一端提供相对更细的表面。 提供珩磨构件用于与内筒壁接触的旋转和振动。 珩磨部件的第一部分具有较粗的砂砾表面,并且珩磨件的第二部分具有相对较细的砂砾表面。 上述这种珩磨件的振动和旋转包括一种用于珩磨圆柱形壁的改进方法。

    Method and apparatus for honing a workpiece

    公开(公告)号:US10207879B2

    公开(公告)日:2019-02-19

    申请号:US15632306

    申请日:2017-06-24

    申请人: Gehring L.P.

    摘要: A honing machine using a robot to load gears into a loadbox at a loadbox station. The loadbox moves downstream to a position over an empty pallet in a pallet load station where the gears are released into the empty pallet. A series of downstream machining stations performing a series of honing operations on the bores of the gears in a series of pallets. A removal mechanism removing the honed gears simultaneously from the pallet at a pallet unload station. An overhead gripper on a movable gantry grips the empty pallet at the unload station and returns the pallet to the pallet load station where the pallet is reloaded with additional gears from the loadbox. The honing machine can continuously hone gears using only one pallet at each machining station and one pallet at the pallet loading station.

    HONING MACHINE WITH OIL-TIGHT OPERATING TANK
    20.
    发明申请
    HONING MACHINE WITH OIL-TIGHT OPERATING TANK 有权
    具有油压操作性能的罐机

    公开(公告)号:US20140199924A1

    公开(公告)日:2014-07-17

    申请号:US14214783

    申请日:2014-03-15

    发明人: Helmut F. Jaeger

    IPC分类号: B23F19/05 B24B33/00

    摘要: A honing machine includes a machine housing enclosing a workpiece spindle and a tool spindle. The workpiece spindle includes a spindle collar with a spindle head configured to hold a workpiece. The tool spindle includes a cup-shaped holder with a honing ring located on an inside of the cup shaped holder. An operating tank is also located within the machine housing, where the operating tank surrounds the tool spindle in an oil-tight manner. The operating tank includes a panel with a recess, where the workpiece spindle is configured to insert the spindle head through the recess and form a first oil-tight seal between the recess and the spindle collar. The panel is moveable relative to the operating tank and tool spindle when the panel is carried along by the workpiece spindle during a feed motion. A second oil-tight seal is formed between the panel and the operating tank.

    摘要翻译: 珩磨机包括包围工件主轴和工具主轴的机壳。 工件主轴包括主轴套环,主轴头配置成夹持工件。 工具主轴包括杯形保持器,其具有位于杯形保持器内侧的珩磨环。 操作箱也位于机器壳体内,其中操作箱以不透油的方式围绕工具主轴。 操作箱包括具有凹部的面板,其中工件主轴构造成通过凹槽插入主轴头并在凹部和主轴套环之间形成第一不透油密封。 在进给运动期间当面板由工件主轴携带时,面板可相对于操作箱和刀具主轴移动。 在面板和操作箱之间形成第二个无油密封。