-
公开(公告)号：US11688579B2
公开(公告)日：2023-06-27
申请号：US17549854
申请日：2021-12-13
Applicant: ASML Netherlands B.V.
Inventor： Juying Dou , Zheng Fan , Tzu-Yi Kuo , Zhong-wei Chen
IPC: H01J37/073 , H01J37/065 , H01J1/304 , H01J1/14 , H01J9/02 , H01J9/04 , H01J37/26
CPC classification number: H01J37/073 , H01J1/14 , H01J1/304 , H01J9/025 , H01J9/042 , H01J37/065 , H01J37/26 , H01J2201/196 , H01J2201/30403 , H01J2201/30426 , H01J2201/30449 , H01J2201/30484 , H01J2201/30492 , H01J2209/0223 , H01J2237/06308 , H01J2237/06316 , H01J2237/06341
Abstract: Electron emitters and methods of fabricating the electron emitters are disclosed. According to certain embodiments, an electron emitter includes a tip with a planar region having a diameter in a range of approximately (0.05-10) micrometers. The electron emitter tip is configured to release field emission electrons. The electron emitter further includes a work-function-lowering material coated on the tip.
-
公开(公告)号：US09558907B2
公开(公告)日：2017-01-31
申请号：US14990035
申请日：2016-01-07
Applicant: Fred Sharifi , Henry Lezec , Myung-Gyu Kang
Inventor： Fred Sharifi , Henry Lezec , Myung-Gyu Kang
CPC classification number: H01J1/3044 , B82Y30/00 , B82Y40/00 , B82Y99/00 , C25F3/02 , H01J1/304 , H01J1/3046 , H01J9/022 , H01J9/025 , H01J2201/3048 , H01J2201/30484 , Y10S977/814 , Y10S977/888 , Y10S977/939
Abstract: A cold cathode field emission electron source capable of emission at levels comparable to thermal sources is described. Emission in excess of 6 A/cm2 at 7.5 V/μm is demonstrated in a macroscopic emitter array. The emitter has a monolithic and rigid porous semiconductor nanostructure with uniformly distributed emission sites, and is fabricated through a room temperature process which allows for control of emission properties. These electron sources can be used in a wide range of applications, including microwave electronics and x-ray imaging for medicine and security.
Abstract translation: 描述了能够以与热源相当的水平发射的冷阴极场致发射电子源。 在宏观发射极阵列中证明了在7.5V /μm下超过6A / cm 2的发射。 发射器具有均匀分布的发射位点的单片和刚性多孔半导体纳米结构，并且通过允许控制发射特性的室温工艺制造。 这些电子源可用于广泛的应用，包括微波电子学和医学和安全性的x射线成像。
-
公开(公告)号：US20130187532A1
公开(公告)日：2013-07-25
申请号：US13569245
申请日：2012-08-08
Applicant: Fred Sharifi , Myung-Gyu Kang , Henri Lezec
Inventor： Fred Sharifi , Myung-Gyu Kang , Henri Lezec
CPC classification number: H01J1/3044 , B82Y30/00 , B82Y40/00 , B82Y99/00 , C25F3/02 , H01J1/304 , H01J1/3046 , H01J9/022 , H01J9/025 , H01J2201/3048 , H01J2201/30484 , Y10S977/814 , Y10S977/888 , Y10S977/939
Abstract: A cold cathode field emission electron source capable of emission at levels comparable to thermal sources is described. Emission in excess of 6 A/cm2 at 7.5 V/μm is demonstrated in a macroscopic emitter array. The emitter is comprised of a monolithic and rigid porous semiconductor nanostructure with uniformly distributed emission sites, and is fabricated through a room temperature process which allows for control of emission properties. These electron sources can be used in a wide range of applications, including microwave electronics and x-ray imaging for medicine and security.
Abstract translation: 描述了能够以与热源相当的水平发射的冷阴极场致发射电子源。 在宏观发射极阵列中证明了在7.5V / m时超过6A / cm 2的发射。 发射极由具有均匀分布的发射部位的单片和刚性多孔半导体纳米结构组成，并通过允许控制发射特性的室温工艺制造。 这些电子源可用于广泛的应用，包括微波电子学和医学和安全性的x射线成像。
-
14.发明申请WATER-BASED COMPOSITION FOR PREPARING ELECTRON EMITTER AND EMITTER PREPARED USING THE SAME 审中-公开用于制备电子发射器的水基组合物和使用其制备的发射体公开(公告)号：US20090206723A1
公开(公告)日：2009-08-20
申请号：US12345995
申请日：2008-12-30
Applicant: Yoon-Jin KIM , Jae-Myung Kim , Kyu-Nam Joo , Hyun-Ki Park , So-Ra Lee , Hee-Sung Moon
Inventor： Yoon-Jin KIM , Jae-Myung Kim , Kyu-Nam Joo , Hyun-Ki Park , So-Ra Lee , Hee-Sung Moon
CPC classification number: H01J1/304 , H01J31/127 , H01J2201/30446 , H01J2201/30469 , H01J2201/30484 , H01J2329/0439 , H01J2329/0455 , H01J2329/0465
Abstract: A water-based composition is used to form an electron and includes a carbonaceous compound, a silicate compound, and water. The electron emitter includes a carbonaceous compound and a silicate compound and is prepared using the water-based composition, and an electron emission device includes the electron emitter. The water-based composition that is used to form an electron emitter is suitable for forming a distinctive pattern, and the electron emitter prepared using the water-based composition has very small residual carbon content.
Abstract translation: 使用水性组合物形成电子，并且包括碳质化合物，硅酸盐化合物和水。 电子发射体包括碳质化合物和硅酸盐化合物，并使用水基组合物制备，电子发射装置包括电子发射体。 用于形成电子发射体的水基组合物适于形成独特的图案，并且使用水基组合物制备的电子发射体具有非常小的残留碳含量。
-
15.发明申请METHOD OF FABRICATING ELECTRON EMISSION SOURCE, ELECTRON EMISSION DEVICE, AND ELECTRON EMISSION DISPLAY DEVICE INCLUDING THE ELECTRON EMISSION DEVICE 审中-公开制造电子发射源的方法，电子发射装置和包括电子发射装置的电子发射显示装置公开(公告)号：US20080278062A1
公开(公告)日：2008-11-13
申请号：US11865208
申请日：2007-10-01
Applicant: Hee-Sung MOON , Jae-Myung KIM , Yoon-Jin KIM
Inventor： Hee-Sung MOON , Jae-Myung KIM , Yoon-Jin KIM
CPC classification number: H01J63/06 , H01J1/304 , H01J9/025 , H01J29/04 , H01J31/127 , H01J63/02 , H01J2201/30453 , H01J2201/30484 , H01J2329/0444 , H01J2329/0465
Abstract: A method is provided for fabricating an electron emission source which can attain improved electron emission efficiency and has simplified manufacturing processes. Also provided are an electron emission display device and an electron emission display device fabricated using the method of fabricating an electron emission source. The method includes forming an electrode, forming a carbide compound thin film on the electrode and forming a carbide-induced carbon thin film layer from the carbide compound thin film using an etching gas. The electron emission device and the electron emission display device each include a first electrode, a second electrode disposed to face the first electrode, and a carbide-induced carbon thin film layer formed to be electrically connected to f the first electrode or the second electrode.
Abstract translation: 提供了一种用于制造能够获得改善的电子发射效率和简化制造工艺的电子发射源的方法。 还提供了使用制造电子发射源的方法制造的电子发射显示装置和电子发射显示装置。 该方法包括形成电极，在电极上形成碳化物化合物薄膜，并使用蚀刻气体从碳化物化合物薄膜形成碳化物诱导的碳薄膜层。 电子发射装置和电子发射显示装置各自包括第一电极，与第一电极相对设置的第二电极和形成为与第一电极或第二电极电连接的碳化物诱导碳薄膜层。
-
Patent Agency Ranking
16.发明授权Thermal-field type electron source composed of transition metal carbide material 有权由过渡金属碳化物材料组成的热场型电子源公开(公告)号：US09490098B1
公开(公告)日：2016-11-08
申请号：US14992870
申请日：2016-01-11
Applicant: Applied Physics Technologies, Inc.
Inventor： William A. Mackie , Gerald G. Magera
CPC classification number: H01J1/148 , H01J1/14 , H01J1/146 , H01J19/10 , H01J37/06 , H01J2201/196 , H01J2201/2889 , H01J2201/30484 , H01J2201/317 , H01J2237/06316
Abstract: An electron source is made from mixed-metal carbide materials of high refractory nature. Producing field-enhanced thermionic emission, i.e., thermal-field or extended Schottky emission, from these materials entails the use of a certain low work function crystallographic direction, such as, for example, (100), (210), and (310). These materials do not naturally facet because of their refractory nature. The disclosed electron source made from transition metal carbide material is especially useful when installed in a scanning electron microscope (SEM) performing advanced imaging applications that require a high brightness, high beam current source.
Abstract translation: 电子源由具有高耐火性质的混合金属碳化物材料制成。 从这些材料产生场强增强的热离子发射，即热场或延伸的肖特基发射需要使用某种低功函数的晶体学方向，例如（100），（210）和（310） 。 这些材料由于其耐火性质而不自然而然。 所披露的由过渡金属碳化物材料制成的电子源在安装在需要高亮度，远光束电流源的先进成像应用的扫描电子显微镜（SEM）中是特别有用的。
-
公开(公告)号：US20160118214A1
公开(公告)日：2016-04-28
申请号：US14990035
申请日：2016-01-07
Applicant: Fred Sharifi , Henry Lezec , Myung-Gyu Kang
Inventor： Fred Sharifi , Henry Lezec , Myung-Gyu Kang
IPC: H01J1/304
CPC classification number: H01J1/3044 , B82Y30/00 , B82Y40/00 , B82Y99/00 , C25F3/02 , H01J1/304 , H01J1/3046 , H01J9/022 , H01J9/025 , H01J2201/3048 , H01J2201/30484 , Y10S977/814 , Y10S977/888 , Y10S977/939
Abstract: A cold cathode field emission electron source capable of emission at levels comparable to thermal sources is described. Emission in excess of 6 A/cm2 at 7.5 V/μm is demonstrated in a macroscopic emitter array. The emitter has a monolithic and rigid porous semiconductor nanostructure with uniformly distributed emission sites, and is fabricated through a room temperature process which allows for control of emission properties. These electron sources can be used in a wide range of applications, including microwave electronics and x-ray imaging for medicine and security.
Abstract translation: 描述了能够以与热源相当的水平发射的冷阴极场致发射电子源。 在宏观发射极阵列中证明了在7.5V /μm下超过6A / cm 2的发射。 发射器具有均匀分布的发射位点的单片和刚性多孔半导体纳米结构，并且通过允许控制发射特性的室温工艺制造。 这些电子源可用于广泛的应用，包括微波电子学和医学和安全性的x射线成像。
-
公开(公告)号：US09006964B2
公开(公告)日：2015-04-14
申请号：US13639290
申请日：2011-04-04
Applicant: Qiu-Hong Hu
Inventor： Qiu-Hong Hu
CPC classification number: H01J1/3044 , B82Y20/00 , H01J1/304 , H01J31/123 , H01J63/02 , H01J63/04 , H01J2201/3043 , H01J2201/30446 , H01J2201/30484 , H01J2201/30488 , H01J2201/30492 , H01J2201/30496 , H01J2329/0428 , H01J2329/0439 , H01J2329/0465 , H01J2329/0468 , H01J2329/0471 , H01J2329/0473
Abstract: The present invention relates to afield emission cathode, comprising an at least partly electrically conductive base structure, and a plurality of electrically conductive micrometer sized sections spatially distributed at the base structure, wherein at least a portion of the plurality of micrometer sized sections each are provided with a plurality of electrically conductive nanostructures. Advantages of the invention include lower power consumption as well as an increase in light output of e.g. a field emission lighting arrangement comprising the field emission cathode.
Abstract translation: 本发明涉及包括至少部分导电的基底结构的外部发射阴极和空间上分布在基部结构处的多个导电千分尺尺寸的部分，其中每个微米尺寸部分的至少一部分被提供 具有多个导电纳米结构。 本发明的优点包括降低功率消耗以及例如增加光输出。 包括场发射阴极的场发射照明装置。
-
公开(公告)号：US08350459B2
公开(公告)日：2013-01-08
申请号：US12180210
申请日：2008-07-25
Applicant: Li Qian , Liang Liu , Shou-Shan Fan
Inventor： Li Qian , Liang Liu , Shou-Shan Fan
CPC classification number: H01J31/127 , H01J1/304 , H01J3/021 , H01J9/025 , H01J2201/30484 , H01J2201/30492 , H01J2201/30496 , H01J2203/0272
Abstract: A method for manufacturing a field electron emission source includes: providing an insulating substrate; patterning a cathode layer on at least one portion of the insulating substrate; forming a number of emitters on the cathode layer; coating a photoresist layer on the insulating substrate, the cathode layer and the emitters; exposing predetermined portions of the photoresist layer to radiation, wherein the exposed portions are corresponding to the emitters; forming a mesh structure on the photoresist layer; and removing the exposed portions of photoresist layer. The method can be easily performed and the achieved the field electron emission source has a high electron emission efficiency.
Abstract translation: 场致发射源的制造方法包括：提供绝缘基板; 在绝缘基板的至少一部分上构图阴极层; 在阴极层上形成多个发射体; 在绝缘基板，阴极层和发射体上涂覆光致抗蚀剂层; 将光致抗蚀剂层的预定部分暴露于辐射，其中暴露部分对应于发射体; 在光致抗蚀剂层上形成网状结构; 并去除光致抗蚀剂层的暴露部分。 该方法可以容易地进行，并且实现了场电子发射源具有高的电子发射效率。
-
20.发明授权公开(公告)号：US07732764B2
公开(公告)日：2010-06-08
申请号：US11831989
申请日：2007-08-01
Applicant: Tadashi Fujieda , Makoto Okai , Kishio Hidaka , Mitsuo Hayashibara , Shunichi Watanabe
Inventor： Tadashi Fujieda , Makoto Okai , Kishio Hidaka , Mitsuo Hayashibara , Shunichi Watanabe
IPC: H01J31/073 , H01J37/26 , H01J37/30
CPC classification number: H01J37/073 , B82Y10/00 , B82Y40/00 , H01J1/3044 , H01J9/025 , H01J37/3174 , H01J2201/3043 , H01J2201/30434 , H01J2201/30469 , H01J2201/30484 , H01J2201/30488 , H01J2201/30496 , H01J2237/06341 , H01J2237/26
Abstract: The object of the present invention is to enable the optical axis of an electron beam of a field emission electron gun mounting thereon an electron gun composed of a fibrous carbon material to be adjusted easily. Moreover, it is also to obtain an electron beam whose energy spread is narrower than that of the electron gun. Further, it is also to provide a high resolution electron beam applied device mounting thereon the field emission electron gun. The means for achieving the objects of the present invention is in that the fibrous carbon material is coated with a material having a band gap, in the field emission electron gun including an electron source composed of a fibrous carbon material and an electrically conductive base material for supporting the fibrous carbon material, an extractor for field-emitting electrons, and an accelerator for accelerating the electrons. Moreover, it is also to apply the field emission electron gun to various kinds of electron beam applied devices.
Abstract translation: 本发明的目的是使得能够容易地调整由其上安装有由纤维状碳材料构成的电子枪的场发射电子枪的电子束的光轴。 此外，还要获得能量扩散比电子枪窄的电子束。 此外，还提供安装在其上的高分辨率电子束施加装置的场致发射电子枪。 用于实现本发明的目的的手段在于，在场发射电子枪中包括具有带隙的材料的纤维状碳材料包括由纤维状碳材料构成的电子源和用于 支撑纤维状碳材料，用于场发射电子的提取器和用于加速电子的加速器。 此外，还将场致发射电子枪应用于各种电子束施加装置。
-
-
-
-
-
-
-
-
-
Search Results
21
records
(took 0.013 seconds)
