Pulsed spectroscopy with spatially variable polarization modulation element
    11.
    发明授权
    Pulsed spectroscopy with spatially variable polarization modulation element 失效
    脉冲光谱与空间可变偏振调制元件

    公开(公告)号:US07064828B1

    公开(公告)日:2006-06-20

    申请号:US10027940

    申请日:2001-12-19

    CPC classification number: G01N21/211 G01J3/447 G01J4/02 G01N2021/213

    Abstract: A metrology device, such as an ellipsometer, includes a light source that produces a pulsed electromagnetic beam, such as a flash bulb or pulsed laser, and a spatially dependent polarizing element that introduces a spatially dependent retardation in the light beam. The use of a pulsed light source is advantageous over a continuous light source, as a pulsed light source generates less heat, is stronger, lasts longer, and does not need the use of a mechanical shutter. The use of a spatially dependent polarizing element advantageously eliminates the use of temporally dependent moving polarization modulation elements, thereby allowing the use of a pulsed light source. Downstream of the spatially dependent polarizing element are the analyzer and a multi-element detector that may be synchronized with the pulsed electromagnetic beam to detect after one or several pulses of light have been emitted from the pulsed light source.

    Abstract translation: 诸如椭圆计的计量装置包括产生诸如闪光灯泡或脉冲激光器的脉冲电磁波束的光源和在光束中引入空间上相关的延迟的空间依赖的偏振元件。 脉冲光源的使用优于连续光源,因为脉冲光源产生较少的热量,更强烈,持续更长时间,并且不需要使用机械快门。 使用空间依赖的偏振元件有利地消除了使用时间上依赖的移动偏振调制元件,从而允许使用脉冲光源。 空间依赖的偏振元件的下游是分析仪和多元素检测器,其可以与脉冲电磁波束同步,以在从脉冲光源发射一个或几个脉冲之后进行检测。

    System for analyzing surface characteristics with self-calibrating capability

    公开(公告)号:US06734968B1

    公开(公告)日:2004-05-11

    申请号:US09298007

    申请日:1999-04-22

    CPC classification number: G01J4/02 G01J3/447 G01N21/21

    Abstract: Two phase modulators or polarizing elements are employed to modulate the polarization of an interrogating radiation beam before and after the beam has been modified by a sample to be measured. Radiation so modulated and modified by the sample is detected and up to 25 harmonics may be derived from the detected signal. The up to 25 harmonics may be used to derive ellipsometric and system parameters, such as parameters related to the angles of fixed polarizing elements, circular deattenuation, depolarization of the polarizing elements and retardances of phase modulators. A portion of the radiation may be diverted for detecting sample tilt or a change in sample height. A cylindrical objective may be used for focusing the beam onto the sample to illuminate a circular spot on the sample. The above-described self-calibrating ellipsometer may be combined with another optical measurement instrument such as a polarimeter, a spectroreflectometer or another ellipsometer to improve the accuracy of measurement and/or to provide calibration standards for the optical measurement instrument. The self-calibrating ellipsometer as well as the combined system may be used for measuring sample characteristics such as film thickness and depolarization of radiation caused by the sample.

    Cavity enhanced polarimeter and related methods

    公开(公告)号:US09702812B2

    公开(公告)日:2017-07-11

    申请号:US14706743

    申请日:2015-05-07

    Abstract: A polarimeter for measuring chirality of a material comprising an optical ring cavity comprising a plurality of reflective elements configured to promote bi-directional propagation of a laser beam within the cavity, a laser-emitting device configured to introduce a first input laser beam and a second input laser beam into the ring cavity, and a Faraday rotator and a phase compensator configured to suppress a birefringent background as the first and second laser beams pass through the ring cavity, wherein the plurality of mirrors, Faraday rotator, and phase compensator are configured such that light from the first and second laser beams passes through a chiral material located within the cavity a sufficient number of times for a measurement of optical rotary dispersion (ORD) and circular dichroism (CD) of light transmitted through the chiral material to be obtained. Particular implementations include monolithic ring cavities or microresonators or use of intra-cavity gain media.

    Photon entanglement router
    19.
    发明授权

    公开(公告)号:US09664566B2

    公开(公告)日:2017-05-30

    申请号:US14824390

    申请日:2015-08-12

    Abstract: A photon entanglement router comprises a modified birefringent spectral filter followed by a polarization beam splitter (PBS). Frequency degenerate or non-degenerate entangled photons, generated by a collinear laser source and incident on one input port of the photon entanglement router, are comprised of congruent photons and/or incongruent photons. The invention adds a plurality of additional filter stacks at each output port such that they invert the action of the first birefringent stack at the input port. Intermediate output photons from the invention is input to two ports of an additional PBS where they are spatially projected according to their frequencies and polarizations. Two congruent photons of an entangled photon pair exit as an entangled pair in one direction, while two incongruent photons exit as an entangled pair in the orthogonal direction. If one photon is congruent and the other photon incongruent, the photons remain entangled but are spectrally divided into orthogonal directions. The invention's birefringent spectral filter accepts specific input frequencies from the ITU optical C-band grid for proper operation.

    PHOTON ENTANGLEMENT ROUTER
    20.
    发明申请

    公开(公告)号:US20170146407A1

    公开(公告)日:2017-05-25

    申请号:US15426364

    申请日:2017-02-07

    Abstract: A photon entanglement router comprises a modified birefringent spectral filter followed by a polarization beam splitter (PBS). Frequency degenerate or non-degenerate entangled photons, generated by a collinear laser source and incident on one input port of the photon entanglement router, are comprised of congruent photons and/or incongruent photons. The invention adds a plurality of additional filter stacks at each output port such that they invert the action of the first birefringent stack at the input port. Intermediate output photons from the invention is input to two ports of an additional PBS where they are spatially projected according to their frequencies and polarizations. Two congruent photons of an entangled photon pair exit as an entangled pair in one direction, while two incongruent photons exit as an entangled pair in the orthogonal direction. If one photon is congruent and the other photon incongruent, the photons remain entangled but are spectrally divided into orthogonal directions. The invention's birefringent spectral filter accepts specific input frequencies from the ITU optical C-band grid for proper operation.

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