Abstract:
A metrology device, such as an ellipsometer, includes a light source that produces a pulsed electromagnetic beam, such as a flash bulb or pulsed laser, and a spatially dependent polarizing element that introduces a spatially dependent retardation in the light beam. The use of a pulsed light source is advantageous over a continuous light source, as a pulsed light source generates less heat, is stronger, lasts longer, and does not need the use of a mechanical shutter. The use of a spatially dependent polarizing element advantageously eliminates the use of temporally dependent moving polarization modulation elements, thereby allowing the use of a pulsed light source. Downstream of the spatially dependent polarizing element are the analyzer and a multi-element detector that may be synchronized with the pulsed electromagnetic beam to detect after one or several pulses of light have been emitted from the pulsed light source.
Abstract:
Two phase modulators or polarizing elements are employed to modulate the polarization of an interrogating radiation beam before and after the beam has been modified by a sample to be measured. Radiation so modulated and modified by the sample is detected and up to 25 harmonics may be derived from the detected signal. The up to 25 harmonics may be used to derive ellipsometric and system parameters, such as parameters related to the angles of fixed polarizing elements, circular deattenuation, depolarization of the polarizing elements and retardances of phase modulators. A portion of the radiation may be diverted for detecting sample tilt or a change in sample height. A cylindrical objective may be used for focusing the beam onto the sample to illuminate a circular spot on the sample. The above-described self-calibrating ellipsometer may be combined with another optical measurement instrument such as a polarimeter, a spectroreflectometer or another ellipsometer to improve the accuracy of measurement and/or to provide calibration standards for the optical measurement instrument. The self-calibrating ellipsometer as well as the combined system may be used for measuring sample characteristics such as film thickness and depolarization of radiation caused by the sample.
Abstract:
Apparatus and methods for measuring mode spectra for ion-exchanged glass substrates having a steep index region are disclosed. An interfacing fluid is provided between the coupling prism and the glass substrate. The interfacing fluid thickness is selected so that the variation in modal birefringence with fluid thickness is reduced to an acceptable level. The coupling prism can include a prism coating on the coupling surface so that the substrate-prism interface includes the prism coating. The coupling prism can also include stand-off members that serve to define the thickness of the interfacing fluid.
Abstract:
A short wave infrared polarimeter comprising a pixelated polarizer array and an Indium-Gallium-Arsenide (“InGaAs”) focal plane array. The short wave infrared polarimeter optionally includes a micro-lens array and/or an aperture layer.
Abstract:
An intensity-independent optical computing device and method for performing multivariate optical computing based on changes in polarization of the reflected and/or transmitted electromagnetic radiation to thereby determine sample characteristics.
Abstract:
A polarimeter for measuring chirality of a material comprising an optical ring cavity comprising a plurality of reflective elements configured to promote bi-directional propagation of a laser beam within the cavity, a laser-emitting device configured to introduce a first input laser beam and a second input laser beam into the ring cavity, and a Faraday rotator and a phase compensator configured to suppress a birefringent background as the first and second laser beams pass through the ring cavity, wherein the plurality of mirrors, Faraday rotator, and phase compensator are configured such that light from the first and second laser beams passes through a chiral material located within the cavity a sufficient number of times for a measurement of optical rotary dispersion (ORD) and circular dichroism (CD) of light transmitted through the chiral material to be obtained. Particular implementations include monolithic ring cavities or microresonators or use of intra-cavity gain media.
Abstract:
A photon entanglement router comprises a modified birefringent spectral filter followed by a polarization beam splitter (PBS). Frequency degenerate or non-degenerate entangled photons, generated by a collinear laser source and incident on one input port of the photon entanglement router, are comprised of congruent photons and/or incongruent photons. The invention adds a plurality of additional filter stacks at each output port such that they invert the action of the first birefringent stack at the input port. Intermediate output photons from the invention is input to two ports of an additional PBS where they are spatially projected according to their frequencies and polarizations. Two congruent photons of an entangled photon pair exit as an entangled pair in one direction, while two incongruent photons exit as an entangled pair in the orthogonal direction. If one photon is congruent and the other photon incongruent, the photons remain entangled but are spectrally divided into orthogonal directions. The invention's birefringent spectral filter accepts specific input frequencies from the ITU optical C-band grid for proper operation.
Abstract:
A photon entanglement router comprises a modified birefringent spectral filter followed by a polarization beam splitter (PBS). Frequency degenerate or non-degenerate entangled photons, generated by a collinear laser source and incident on one input port of the photon entanglement router, are comprised of congruent photons and/or incongruent photons. The invention adds a plurality of additional filter stacks at each output port such that they invert the action of the first birefringent stack at the input port. Intermediate output photons from the invention is input to two ports of an additional PBS where they are spatially projected according to their frequencies and polarizations. Two congruent photons of an entangled photon pair exit as an entangled pair in one direction, while two incongruent photons exit as an entangled pair in the orthogonal direction. If one photon is congruent and the other photon incongruent, the photons remain entangled but are spectrally divided into orthogonal directions. The invention's birefringent spectral filter accepts specific input frequencies from the ITU optical C-band grid for proper operation.