Abstract:
A length-measuring device includes a scanning carriage for scanning a measuring graduation that is to be guided longitudinally in the measurement direction on a guide surface. A coupling couples the scanning carriage to a drive dog rigidly in the measurement direction and resiliently transversely to the measurement direction. A first spring is disposed between a connecting element of the coupling and the drive dog and exerts a pressure force on the scanning carriage at a first position so as to press the scanning carriage against the guide surface. A second spring is disposed between the connecting element and the scanning carriage. The second spring is spaced apart from the first spring in the measurement direction and exerts a pressure force on the scanning carriage at a second position spaced apart from the first position in the measurement direction so as to press the scanning carriage against the guide surface.
Abstract:
A position detection apparatus (100) includes a scale (20) including a reference position grating (22), a detector (10), a detection grating (19), and a signal processor (10), the signal processor acquires a relative reference position between the scale and the detector by using a light intensity distribution of a divergent light beam obtained via the reference position grating and the detection grating, the detection grating has a first spatial frequency that is offset by a predetermined frequency offset amount with respect to a local spatial frequency of an interference image from the reference position grating, the detection grating is provided in an optical path between the scale and a light receiver of the detector, and the light receiver detects a component of a second spatial frequency that is lower than the first spatial frequency in the light intensity distribution transmitting through the detection grating.
Abstract:
A scanning microscope includes a stage for holding a sample, a scan mechanism, a probing system for probing a region of the sample, a position sensor, and a controller. The scan mechanism is configured to translate the stage between at least two axial positions. The probing system includes an optical element and a photosensor having a readout region, where the readout region extends in a direction which is transverse to an ideal orientation of the stage. The position sensor is configured to measure a transverse position of the stage and/or of an orientation of the stage. The controller is configured to adapt the probing system as a function of the measured transverse position and/or the measured orientation.
Abstract:
A photoelectric encoder of the present invention includes: a scale which includes a grid scale; a light emitting portion which irradiates light toward the scale; a light receiving portion which detects an image of the grid scale of the scale; and a telecentric optical unit which is provided between the scale and the light receiving portion and forms the image of the grid scale on the light receiving portion, wherein the telecentric optical unit includes a first optical element which is disposed near the scale, a second optical element which is disposed near the light receiving portion in relation to the first optical element and is disposed so that a gap is formed between the second optical element and the first optical element, and an aperture which is provided in at least one of a face near the second optical element in the first optical element and a face near the first optical element in the second optical element.
Abstract:
An optical encoder according to the present invention includes a light source that emits light; a scale including scale gratings each having a predetermined pitch; a light source grating disposed between the light source and the scale and having a predetermined pitch; and an interference fringe detector that detects an interference fringe generated by the light source grating and the scale. The scale gratings are disposed side by side, and the adjacent scale gratings are displaced from each other by a ½ period.
Abstract:
An origin detector includes detecting element groups having a first to a fourth detector, is configured so that a first signal sensitivity of the detectors of a center is larger than a second signal sensitivity of the detectors of a periphery, reads an origin detecting pattern including an origin pattern having a length along a detecting direction of a part having a physical characteristic different from an origin peripheral part larger than a length along the detecting direction of each detecting element group, and outputs a first signal using the first and third detectors, and a second signal using the second and fourth detectors. A processor acquires a third signal from the first signal and a first threshold, and a fourth signal from the second signal and a second threshold, and outputs a fifth signal using the third and fourth signals as an origin signal.
Abstract:
A measurement tape is proposed for determining the position of a cab in an elevator shaft, wherein the measurement tape is situated vertically in the elevator shaft, and extends over at least two floors, and wherein the measurement tape includes a marking unit for marking at least two positions in the elevator shaft, wherein the marking unit runs along the length of the measurement tape. In order to improve servicing, the measurement tape includes a carrier tape and has a transmission device for transmitting information, wherein the transmission device includes at least one communication line for transmitting an information signal and/or at least one supply line for supplying power, and the at least one communication line/supply lines runs along the length of the measurement tape, wherein the communication line is designed as an electrical line for transmitting an electrical signal or as a fiberglass line for transmitting an optical signal.
Abstract:
The optical encoder includes a scale provided with a periodic pattern in which an optical portion is periodically formed with a first period in a first direction, and a light receiver movable relatively with the scale in the first direction and photoelectrically converts a detection light from a light source and then passing through the optical portions. The optical portion periodically has a pattern, which is formed by pattern portions mutually adjacent in a second direction orthogonal to the first direction and mutually shifted in the first direction, in the second direction with a second period of t. A width w of the light source in the second direction satisfies w=(a+b)/b·nt where n represents a natural number, and a:b represents a ratio of a distance from the light source to the periodic pattern and a distance from the periodic pattern to the light receiver.
Abstract:
There is provided an absolute encoder advantageous in accuracy of an output thereof against a defect in a scale thereof. In the absolute encoder, a detector detects a part of an array of marks of the scale, and outputs a data sequence corresponding to the part. A processor stores information indicating a correspondence between each of a plurality of code sequences and an absolute coordinate of motion of the scale, and outputs information of the absolute coordinate based on the data sequence and the information. The processor detects an error of the data sequence, and performs rewriting of the information based on the detected error.
Abstract:
A position detector, includes: a scale having first and second patterns having respective first and second period; a detector array including elements each detecting energy intensities based on the patterns; a generator configured to generate first and second signals having phases different from each other obtained based on the patterns respectively; and a deriver deriving a position of the array relative to the scale based on the signals, wherein the scale is movable relative to the array; the deriver derives a reference position as a detection element array position relative to the scale based on the signals, performs a first process to derive a array position relative to the scale by a array displacement relative to the reference position is derived based on the first signals, and performs a second process in which a relative array position is derived based on the position derived by the first process.