公开(公告)号：US20110221300A1

公开(公告)日：2011-09-15

申请号：US13018696

申请日：2011-02-01

Applicant: Takeaki SHIMANOUCHI ,  Masahiko Imai ,  Takashi Katsuki ,  Osamu Toyoda ,  Satoshi Ueda

Inventor： Takeaki SHIMANOUCHI ,  Masahiko Imai ,  Takashi Katsuki ,  Osamu Toyoda ,  Satoshi Ueda

IPC: H02N1/08

CPC classification number: B81C1/00698 ,  B81B2201/0221 ,  H01G5/18

Abstract: A driving method for driving an electrostatic actuator including a fixed electrode and a movable electrode opposing each other with a dielectric layer interposed therebetween, includes applying a first voltage, between the fixed electrode and the movable electrode, to bring the movable electrode into contact with the dielectric layer, and applying a second voltage, between the fixed electrode and the movable electrode, after application of the first voltage is stopped and before the movable electrode moves away from the dielectric layer. Here, the second voltage has a polarity opposite to a polarity of the first voltage and an absolute value smaller than an absolute value of the first voltage.

Abstract translation: 一种用于驱动静电致动器的驱动方法，所述静电致动器包括固定电极和可动电极，所述固定电极和可动电极之间具有介电层彼此相对，包括在所述固定电极和所述可动电极之间施加第一电压以使所述可动电极与所述可动电极接触 并且在施加第一电压之后并且在可移动电极远离电介质层之前，在固定电极和可动电极之间施加第二电压。 这里，第二电压具有与第一电压的极性相反的极性和小于第一电压的绝对值的绝对值。

公开(公告)号：US20110096462A1

公开(公告)日：2011-04-28

申请号：US12910267

申请日：2010-10-22

Applicant: Takeaki SHIMANOUCHI ,  Masahiko Imai ,  Takashi Katsuki ,  Satoshi Ueda

Inventor： Takeaki SHIMANOUCHI ,  Masahiko Imai ,  Takashi Katsuki ,  Satoshi Ueda

IPC: H01G5/01

CPC classification number: H01G5/015 ,  H01G5/16

Abstract: A variable capacitive element includes a first fixed electrode and a second fixed electrode that are insulated from each other, a movable electrode arranged to face the first fixed electrode and the second fixed electrode, a dielectric layer provided between the movable electrode and the first fixed electrode as well as the second fixed electrode, a first wiring part for applying a first driving voltage to the first fixed electrode with reference to a potential of the movable electrode, and a second wiring part for applying a second driving voltage to the second fixed electrode with reference to the potential of the movable electrode, the second driving voltage having a polarity different from a polarity of the first driving voltage.

Abstract translation: 可变电容元件包括彼此绝缘的第一固定电极和第二固定电极，布置成面对第一固定电极和第二固定电极的可动电极，设置在可动电极和第一固定电极之间的电介质层 以及第二固定电极，相对于可动电极的电位向第一固定电极施加第一驱动电压的第一配线部，以及用于向第二固定电极施加第二驱动电压的第二配线部， 参考可动电极的电位，第二驱动电压具有与第一驱动电压的极性不同的极性。

公开(公告)号：US20090139328A1

公开(公告)日：2009-06-04

申请号：US12071862

申请日：2008-02-27

Applicant: Hiroaki Inoue ,  Fumihiko Nakazawa ,  Hiroshi Ishikawa ,  Takashi Katsuki ,  Takayuki Yamaji

Inventor： Hiroaki Inoue ,  Fumihiko Nakazawa ,  Hiroshi Ishikawa ,  Takashi Katsuki ,  Takayuki Yamaji

IPC: G01P15/00 ,  B32B38/00 ,  C23F1/00 ,  B23K37/00

CPC classification number: G01P15/125 ,  G01C19/5719 ,  G01P1/023 ,  G01P15/0802 ,  H01L23/041 ,  H01L2924/0002 ,  Y10T156/1052 ,  H01L2924/00

Abstract: A method is provided for making packaged micro-devices each including a micro movable element, a first packaging member formed with a recess, and a second packaging member formed with another recess. The micro movable element has a movable part. In accordance with the method, a device wafer is prepared for forming a plurality of micromovable elements. A first packaging wafer, formed with a plurality of recesses corresponding in position to the movable parts of the respective movable elements, is bonded to one surface of the device wafer. A second packaging wafer, formed with a plurality of recesses, is bonded to the other surface of the device wafer. The resulting laminate assembly is cut into separate products.

Abstract translation: 提供一种用于制造包括微型可移动元件，形成有凹部的第一包装构件和形成有另一凹部的第二包装构件的包装微型装置的方法。 微动元件具有可动部。 根据该方法，制备用于形成多个微型可移动元件的器件晶片。 形成有与相应可移动元件的可移动部分相对应的多个凹部的第一封装晶片被结合到器件晶片的一个表面。 形成有多个凹部的第二封装晶片被接合到器件晶片的另一个表面。 将所得的层压组件切割成单独的产品。

公开(公告)号：US20070256497A1

公开(公告)日：2007-11-08

申请号：US11785458

申请日：2007-04-18

Applicant: Hiroshi Ishikawa ,  Takayuki Yamaji ,  Akira Imai ,  Shoji Ogasawara ,  Takashi Katsuki ,  Yuji Takahashi ,  Fumihiko Nakazawa ,  Hiroaki Takagi

Inventor： Hiroshi Ishikawa ,  Takayuki Yamaji ,  Akira Imai ,  Shoji Ogasawara ,  Takashi Katsuki ,  Yuji Takahashi ,  Fumihiko Nakazawa ,  Hiroaki Takagi

IPC: G01P15/08

CPC classification number: G01C19/5607 ,  G01C19/5628

Abstract: An angular velocity sensor includes multiple tuning-fork vibrators, each of which respectively includes a base portion and multiple arm portions extending from the base portion, and a difference in a resonance frequency between the multiple tuning-fork vibrators is at least 2 percent of an average of resonance frequencies of the multiple tuning-fork vibrators.

Abstract translation: 角速度传感器包括多个音叉振动器，每个音叉振动器分别包括基部和从基部延伸的多个臂部分，并且多个音叉振动器之间的谐振频率的差异为至少2％ 多音叉振动器的共振频率的平均值。

公开(公告)号：US07230612B2

公开(公告)日：2007-06-12

申请号：US10352857

申请日：2003-01-29

Applicant: Satoshi Sano ,  Takashi Katsuki ,  Yuji Takahashi ,  Fumihiko Nakazawa

Inventor： Satoshi Sano ,  Takashi Katsuki ,  Yuji Takahashi ,  Fumihiko Nakazawa

IPC: G09G5/00 ,  G06F3/043 ,  G06K11/06 ,  G08C21/00 ,  H01L41/04 ,  H01L41/18 ,  H02N2/00

CPC classification number: G06F3/0436

Abstract: Surface acoustic waves are propagated in a lower-left oblique direction and a lower-right oblique direction from an excitation element located on the upper side of a non-piezoelectric substrate and then received by receiving elements located on the left side and the right side, while surface acoustic waves are propagated in an upper-left oblique direction and an upper-right oblique direction from an excitation element located on the lower side of the non-piezoelectric substrate and then received by the receiving elements located on the left side and the right side. Based on the received results at the two receiving elements, a position of an object in contact with the non-piezoelectric substrate is detected. The sensitivity in a region near the diagonal, which is influenced largely by propagation loss of the surface acoustic waves, is improved by increasing the widths of the electrode fingers of the excitation elements and/or the receiving elements, the number of pairs of the electrode fingers, or the aperture width of comb-like electrodes, according to an increase in the propagation distances of the surface acoustic waves, i.e., toward the region near the diagonal.

Abstract translation: 表面声波从位于非压电基板的上侧的激励元件沿左下斜方向和右下斜方向传播，然后由位于左侧和右侧的接收元件接收， 同时表面声波从位于非压电基板的下侧的激励元件沿左上方倾斜方向和右上斜方向传播，然后由位于左侧和右侧的接收元件接收 侧。 基于两个接收元件的接收结果，检测与非压电基板接触的物体的位置。 通过增加激发元件和/或接收元件的电极指的宽度，电极对的数量来改善受到表面声波的传播损耗很大影响的对角线附近区域的灵敏度 手指或梳状电极的孔径宽度，根据表面声波的传播距离的增加，即朝向对角线附近的区域的增加。

公开(公告)号：US07184029B2

公开(公告)日：2007-02-27

申请号：US10704778

申请日：2003-11-12

Applicant: Takashi Katsuki ,  Fumihiko Nakazawa ,  Satoshi Sano ,  Yuji Takahashi

Inventor： Takashi Katsuki ,  Fumihiko Nakazawa ,  Satoshi Sano ,  Yuji Takahashi

IPC: G06F3/043 ,  H01L41/04 ,  H01L41/08 ,  H01L41/18 ,  H02N2/00 ,  G09G5/00

CPC classification number: G06F3/0436

Abstract: Each of an excitation element for exciting surface acoustic waves in two directions and a receiving element for receiving surface acoustic waves from two directions is constructed by forming a comb-like electrode on the front surface of a piezoelectric body in the form of a thin film and a plate electrode on the rear surface thereof. The comb-like electrode on the front surface has one line of bus electrode, and a plurality of electrode fingers which are extended from the bus electrode and bent in V-shape in the middle. The voltage in the excitation element and in the receiving element is controlled by providing a terminal resistance for preventing reflection of an applied AC voltage at the terminal end, between the terminal end portion of the comb-like electrode and the plate electrode, or adjusting the resistance value of the bus electrode and/or the plate electrode, or adjusting the capacitance value between the electrode finger and the plate electrode.

Abstract translation: 通过在薄膜的形式的压电体的前表面上形成梳状电极来构成用于激励两个方向上的表面声波的激发元件和用于从两个方向接收表面声波的接收元件， 在其后表面上的平板电极。 前表面上的梳状电极具有一条总线电极线，并且多个电极指从总线电极延伸并在中间弯曲成V形。 励磁元件和接收元件中的电压通过提供终端电阻来控制，用于防止在梳状电极的终端部分与平板电极之间的终端处的施加的AC电压的反射，或者调整 总线电极和/或平板电极的电阻值，或调整电极指和电极之间的电容值。

公开(公告)号：US20070022827A1

公开(公告)日：2007-02-01

申请号：US11492090

申请日：2006-07-25

Applicant: Hiroshi Ishikawa ,  Satoshi Sano ,  Takashi Katsuki ,  Yuji Takahashi ,  Fumihiko Nakazawa ,  Takayuki Yamaji

Inventor： Hiroshi Ishikawa ,  Satoshi Sano ,  Takashi Katsuki ,  Yuji Takahashi ,  Fumihiko Nakazawa ,  Takayuki Yamaji

IPC: G01L3/18

CPC classification number: G01C19/5719

Abstract: An angular velocity sensor includes a first gimbal portion, a second gimbal portion connected to the first gimbal portion by first torsion bars provided at opposing sides of the first gimbal portion, a frame portion connected to the second gimbal portion by second torsion bars provided at the opposing sides of the second gimbal portion, first electrostatic coupling portions provided at the opposing sides of the first gimbal portion to electrostatically couple the first gimbal portion and the second gimbal portion, and second electrostatic coupling portions provided at the opposing sides of the second gimbal portion to electrostatically couple the second gimbal portion and the frame portion. In the first gimbal portion, a maximum width of sides of a direction of the first torsion bars is greater than that of the sides where the first torsion bars are provided.

Abstract translation: 角速度传感器包括第一万向架部分，第一万向架部分，通过设置在第一万向架部分的相对侧的第一扭杆连接到第一万向节部分;框架部分，通过设置在第一万向节部件上的第二扭杆连接到第二万向节部分 第二万向节部分的相对侧，设置在第一万向架部分相对侧的第一静电耦合部分，以静电耦合第一万向节部分和第二万向节部分;以及设置在第二万向节部分的相对侧的第二静电耦合部分 以静电耦合第二万向节部分和框架部分。 在第一万向节部分中，第一扭杆的方向的最大宽度的宽度大于设置第一扭杆的侧面的最大宽度。

公开(公告)号：US20060214921A1

公开(公告)日：2006-09-28

申请号：US11204056

申请日：2005-08-16

Applicant: Yuji Takahashi ,  Fumihiko Nakazawa ,  Satoshi Sano ,  Takashi Katsuki

Inventor： Yuji Takahashi ,  Fumihiko Nakazawa ,  Satoshi Sano ,  Takashi Katsuki

IPC: G09G5/00

CPC classification number: G06F3/0436

Abstract: A touch panel device includes an excitation transducer for exciting a surface acoustic wave upon application of a burst wave and a reception transducer for receiving the surface acoustic wave and converting the same into a reception signal that are arranged at a peripheral portion of a detection area so that a position of an object touching the detection area is detected in accordance with a change in the reception signal. A control method for eliminating noises in the touch panel device includes the steps of detecting a differential between a reception signal due to a burst wave and another reception signal due to another burst wave, deciding that there is a noise if the detected differential exceeds a preset threshold value, and performing a control operation so that the detection of an object based on the reception signal is not performed in accordance with the decision.

Abstract translation: 一种触摸面板装置包括用于在施加突发波时激发表面声波的激励换能器和用于接收表面声波并将其转换为布置在检测区域的周边部分的接收信号的接收换能器，因此 根据接收信号的变化来检测接触检测区域的物体的位置。 用于消除触摸面板装置中的噪声的控制方法包括以下步骤：检测由于突发波引起的接收信号与由于另一突发波引起的另一个接收信号之间的差分，如果检测到的差异超过预设值，则确定存在噪声 阈值，并且执行控制操作，使得根据该决定不执行基于接收信号的对象的检测。

公开(公告)号：US08816452B2

公开(公告)日：2014-08-26

申请号：US13613424

申请日：2012-09-13

Applicant: Tadashi Nakatani ,  Hisao Okuda ,  Takashi Katsuki

Inventor： Tadashi Nakatani ,  Hisao Okuda ,  Takashi Katsuki

IPC: H01L29/86

CPC classification number: B81B3/0067 ,  B81B3/0021 ,  B81B2203/0118 ,  B81B2203/04 ,  H01H59/0009 ,  H01H2057/006 ,  H01L41/0805 ,  H01L41/0933

Abstract: There is provided an electric device including a base member, a beam elastically deformable to bend upward and having an outline partially defined by a slit formed in the base member, a conductive pattern provided on a top surface of the beam, a contact electrode provided above the conductive pattern, the contact electrode coming into contact with the conductive pattern, and a bridge electrode elastically deformable, the bridge electrode connecting the conductive pattern and a portion of the base member outside the outline.

Abstract translation: 提供了一种电气装置，其包括基部构件，弹性变形以向上弯曲并具有由形成在基底构件中的狭缝部分限定的轮廓的梁，设置在梁的顶表面上的导电图案，设置在上述 所述导电图案，所述接触电极与所述导电图案接触;以及桥接电​​极，其可弹性变形，所述桥接电极将所述导电图案与所述基部构件的一部分连接在所述轮廓外部。

公开(公告)号：US08289723B2

公开(公告)日：2012-10-16

申请号：US12458604

申请日：2009-07-16

Applicant: Hiroaki Inoue ,  Takashi Katsuki ,  Fumihiko Nakazawa

Inventor： Hiroaki Inoue ,  Takashi Katsuki ,  Fumihiko Nakazawa

IPC: H05K7/02 ,  H05K7/06 ,  H05K7/08 ,  H05K7/10

CPC classification number: G01P15/125 ,  B81C1/00301 ,  G01C19/5719 ,  G01P1/023 ,  G01P15/0802 ,  H01L21/76898 ,  H01L23/481 ,  H01L2924/0002 ,  Y10T29/49128 ,  H01L2924/00

Abstract: A method includes forming grooves in first regions included in a first wafer to form wiring regions defined by the grooves; forming insulating portions in the grooves; joining a surface of the first wafer on which the wiring regions are formed to a first surface of a device wafer including device forming regions after forming the insulating portions; forming through holes in the wiring regions of the first wafer after joining the first wafer to the device wafer, the holes extending through the first wafer; filling the holes with a conductive material; joining a second wafer to a second surface of the device wafer opposite the first surface, the second wafer including second regions; exposing the wiring regions by thinning the first wafer after joining the first wafer to the device wafer; and cutting the device wafer, the first wafer, and the second wafer after thinning the first wafer.

Abstract translation: 一种方法包括在包括在第一晶片中的第一区域中形成凹槽以形成由凹槽限定的布线区域; 在槽中形成绝缘部分; 在形成有所述布线区域的所述第一晶片的表面之后，在形成所述绝缘部分之后，将包括器件形成区域的器件晶片的第一表面接合; 在将所述第一晶片连接到所述器件晶片之后，在所述第一晶片的布线区域中形成通孔，所述孔延伸穿过所述第一晶片; 用导电材料填充孔; 将第二晶片连接到与所述第一表面相对的所述器件晶片的第二表面，所述第二晶片包括第二区域; 在将第一晶片连接到器件晶片之后，通过使第一晶片变薄来暴露布线区域; 以及在使所述第一晶片变薄之后切割所述器件晶片，所述第一晶片和所述第二晶片。