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公开(公告)号：US20220406638A1
公开(公告)日：2022-12-22
申请号：US17586448
申请日：2022-01-27
Inventor： Guancyun Li , Ching-Jung Chang , Chi-Feng Tung , Hsiang Yin Shen
IPC: H01L21/677 , B66C19/00 , B61B3/00 , H01L21/67
Abstract: An automated material handling system (AMHS) and a method of operating the AMHS are disclosed. In one aspect, the AMHS includes a network of rails and a vehicle configured to hold a sample carrier that stores one or more samples, wherein the vehicle is configured to move within the FAB via the network of rails. The AMHS also includes a turn table connected to the network of rails and configured to rotate about an axis substantially perpendicular to a surface of the turn table. The AMHS further includes a hash rail connected to and overlapping the turn table. The hash rail is configured to rotate about the axis with the turn table.
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公开(公告)号：US20220336242A1
公开(公告)日：2022-10-20
申请号：US17379734
申请日：2021-07-19
Inventor： Chieh Hsu , Guancyun Li , Ching-Jung Chang , Chi-Feng Tung
IPC: H01L21/67 , H01L21/677
Abstract: An AMHS interface management system configured to facilitate the exchange of lot information between distinct AMHS systems. The AMHS interface management system receives lot information from a first AMHS system in a first format and translates the lot information into a format associated with a second AMHS system. The AMHS interface management system utilizes a handshake area located between the first and second AMHS systems. The handshake area includes one or more vehicles that facilitate the movement of a lot between the first AMHS system and the second AMHS system.
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公开(公告)号：US11183409B2
公开(公告)日：2021-11-23
申请号：US16114953
申请日：2018-08-28
Inventor： Fu-Hsien Li , Chi-Feng Tung , Hsiang Yin Shen
IPC: H01L21/677 , A47L9/28 , A47L7/00
Abstract: An automatic cleaning unit for AMHS includes a plurality of sensors disposed on OHT rails. The sensors are configured to define a cleaning zone and to detect a location of an OHT vehicle. The automatic cleaning unit further includes a vacuum generator and a top cleaning part installed over the OHT rails in the cleaning zone. The top cleaning part is coupled to the vacuum generator. The vacuum generator is turned on to perform a vacuum cleaning operation when the sensors detect the OHT vehicle entering the cleaning zone.
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公开(公告)号：US12174528B2
公开(公告)日：2024-12-24
申请号：US17214367
申请日：2021-03-26
Inventor： Chen-Wei Lu , Chuan Wei Lin , Chun-Hau Chen , Kuan Yu Lai , Fu-Hsien Li , Chi-Feng Tung , Hsiang Yin Shen
IPC: G05B19/418 , G03F1/66 , G03F1/84 , G03F7/00 , G06N20/00
Abstract: A storage environment monitoring device is capable of measuring and/or monitoring various parameters of an environment inside a storage area, such as airflow, temperature, and humidity, to increase the storage quality of semiconductor components stored in the storage area. The storage environment monitoring device is capable of measuring and/or monitoring the parameters of the environment inside the storage area without having to open an enclosure that is storing the semiconductor components in the storage area. This reduces exposure of the semiconductor components to contamination and other environmental factors. In addition, the storage environment monitoring device may perform automatic measurements inside the storage area based on usage schedules of the semiconductor components that are to be stored in the storage area, which decreases downtime of the storage area and/or the semiconductor components, and increases productivity in a semiconductor processing environment in which the semiconductor components are used.
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公开(公告)号：US12094745B2
公开(公告)日：2024-09-17
申请号：US17818370
申请日：2022-08-09
Inventor： Yong-Jyu Lin , Fu-Hsien Li , Chen-Wei Lu , Chi-Feng Tung , Hsiang Yin Shen
CPC classification number: H01L21/67733 , B65G1/0457 , B66C13/23 , B66C13/48 , B66C19/00 , B66F9/183 , H01L21/67259 , H01L21/67724 , H01L21/6773 , H01L21/67736 , B61B3/00 , B65G2201/0297
Abstract: A method for operating a conveying system is provided. An overhead hoist transport (OHT) vehicle is provided, wherein the OHT vehicle includes a gripping member configured to grip and hold a carrier, and a receiver configured to receive a signal. The signal is transmitted to the receiver of the OHT vehicle. The OHT vehicle is moved toward the carrier, and the carrier is gripped by the gripping member of the OHT vehicle. A lifting force is determined based on a weight of a carrier, a number of workpieces in the carrier, or a vertical distance between the OHT vehicle and the carrier, and the lifting force is applied to the carrier.
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Patent Agency Ranking
公开(公告)号：US12094744B2
公开(公告)日：2024-09-17
申请号：US18310187
申请日：2023-05-01
Inventor： Chuan Wei Lin , Fu-Hsien Li , Chi-Feng Tung , Hsiang Yin Shen
IPC: H01L21/677
CPC classification number: H01L21/67724 , H01L21/67706 , H01L21/67733
Abstract: Some implementations described herein provide a method that includes loading, from a load port and into a first buffer of a multiple-buffer overhead hoist transport (OHT) vehicle, a first transport carrier storing one or more processed wafers. The method includes unloading to the load port, while the first buffer retains the first transport carrier, and from a second buffer of the multiple-buffer OHT vehicle, a second transport carrier storing one or more wafers for processing. In other implementations, the method includes loading, into a first buffer of the multiple-buffer OHT vehicle, a first transport carrier storing one or more wafers for processing, while a semiconductor processing tool, associated with a load port, is processing one or more wafers associated with a second transport carrier. The method includes positioning the multiple-buffer OHT vehicle above the load port while the multiple-buffer OHT vehicle retains the first transport carrier in the first buffer.
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公开(公告)号：US12085953B2
公开(公告)日：2024-09-10
申请号：US17304912
申请日：2021-06-28
Inventor： Rong Syuan Fan , Ching-Jung Chang , Chi-Feng Tung , Hsiang Yin Shen
IPC: G05D1/00 , G06Q10/087 , B65G1/137
CPC classification number: G05D1/0278 , G06Q10/087 , B65G1/1371
Abstract: A mobile stocker described herein is configured to be easily installed and relocated to various locations in a semiconductor fabrication facility. The mobile stocker is capable of being programmed with, and/or autonomously learning, the layout of a semiconductor fabrication facility, and automatically relocating to a new location based on the layout using a navigation system. Accordingly, the mobile stocker is capable of being flexibly relocated in the semiconductor fabrication facility to dynamically support changes in demand and production capacity. Moreover, the capability to quickly assign a location identifier to the mobile stocker and to automatically interface with transport systems in the semiconductor fabrication facility reduces downtime of the mobile stocker, which increases productivity in the semiconductor fabrication facility.
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公开(公告)号：US11848222B2
公开(公告)日：2023-12-19
申请号：US16925285
申请日：2020-07-09
Inventor： Chuan Wei Lin , Fu-Hsien Li , Yong-Jyu Lin , Rong-Shen Chen , Chi-Feng Tung , Hsiang Yin Shen
IPC: H01L21/677 , H01L21/68
CPC classification number: H01L21/68 , H01L21/67724 , H01L21/67733
Abstract: A system for a semiconductor fabrication facility (FAB) includes an orientation tool and a transporting tool configured to transport at least one customized part. The orientation tool includes a port configured to receive the workpiece, a sensor configured to detect an orientation of the workpiece received in the port and a rotation mechanism configured to turn the workpiece received in the port.
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公开(公告)号：US20230395415A1
公开(公告)日：2023-12-07
申请号：US17832605
申请日：2022-06-04
Inventor： Chieh Hsu , Guancyun Li , Ching-Jung Chang , Chi-Feng Tung
IPC: H01L21/677 , B65G17/12
CPC classification number: H01L21/67724 , H01L21/6773 , H01L21/67733 , B65G17/12
Abstract: System and method for cross-fab wafer transportation are provided. An exemplary system includes a first control unit coupled to an associated first automatic material handling system (AMHS), the first AMHS includes a first overhead transport (OHT) track comprising a first portion and a first vehicle movable along the first OHT track and carrying a container, the container is operable to carry semiconductor wafers therein. The system includes a second control unit coupled to an associated second AMHS, the second AMHS includes a second OHT track comprising a second portion adjacent to the first portion and a second vehicle movable along the second OHT track. When the first vehicle is within the first portion of the first OHT track and the second vehicle is within the second portion of the second OHT track, the first and second vehicles are operable to transfer the container directly from the first vehicle to the second vehicle.
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公开(公告)号：US11749548B2
公开(公告)日：2023-09-05
申请号：US17321184
申请日：2021-05-14
Inventor： Fu-Hsien Li , Chi-Feng Tung , Hsiang Yin Shen
IPC: G06F7/00 , H01L21/677
CPC classification number: H01L21/67724 , H01L21/6773 , H01L21/67709 , H01L21/67733
Abstract: A transport system, including: a sensor, a controller and a power panel. The sensor determines a zone and sends a quantity information in response to a quantity of vehicles in the zone. The controller is arranged to send an output signal in accordance with the quantity information. The power panel is arranged to output a current in accordance with the output signal for driving vehicles in the zone, wherein the current is outputted to a cable extending through the zone.
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